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公开(公告)号：US20100269787A1
公开(公告)日：2010-10-28
申请号：US12763777
申请日：2010-04-20
IPC分类号： F02D41/00
CPC分类号： F02D41/068 , F02D41/0205 , F02D41/061
摘要： In an apparatus for controlling a general-purpose internal combustion engine having an electronic control unit (ECU) mounted on an electronic circuit board installed near a body of the engine and being connectable to a load such as an operating machine that consumes power generated by the engine, there are equipped with a first temperature sensor installed on the board at a position remote from the body and a second temperature sensor installed on the board at a position closer to the body than the first temperature sensor. A warm-up time period is determined based on an output of the first temperature sensor and a difference between outputs of the first and second temperature sensors, and an engine speed is controlled to a predetermined operating speed when the determined warm-up time period has elapsed (S18, S22), thereby improving the fuel efficiency and preventing engine stall.
摘要翻译： 在一种用于控制通用内燃机的装置中，具有安装在发动机主体附近的电子电路板上的电子控制单元（ECU），并且可连接到诸如操作机器的负载，该负载消耗由 发动机，在远离机体的位置上安装有板上的第一温度传感器和安装在板上比第一温度传感器更靠近机体的位置的第二温度传感器。 基于第一温度传感器的输出和第一和第二温度传感器的输出之间的差异来确定预热时间段，并且当确定的预热时间段具有时，发动机速度被控制到预定的运行速度 （S18，S22），从而提高燃油效率，防止发动机停转。
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2.发明授权公开(公告)号：US06171641B2
公开(公告)日：2001-01-09
申请号：US08260321
申请日：1994-06-15
申请人： Akira Okamoto , Shigeru Kobayashi , Hideaki Shimamura , Susumu Tsuzuku , Eisuke Nishitani , Satosi Kisimoto , Yuji Yoneoka
发明人： Akira Okamoto , Shigeru Kobayashi , Hideaki Shimamura , Susumu Tsuzuku , Eisuke Nishitani , Satosi Kisimoto , Yuji Yoneoka
IPC分类号： C23C1646
CPC分类号： C23C16/463 , H01L21/67109 , H01L21/67248
摘要： A vacuum processing apparatus for performing various processes on a wafer in a vacuum chamber, and a film deposition method and a film deposition apparatus using this vacuum processing apparatus. The vacuum processing apparatus, the film deposition method and the film deposition apparatus using the vacuum processing apparatus according to this invention are characterized in that temperature control of the wafer is performed in a film deposition process, and particularly characterized in that after the emissivity calibration using a combination of a temperature calibration stage and a shutter is performed, the substrate is transferred to stages in a vacuum film deposition process chamber, and a film is deposited on the substrate by controlling the substrate temperature to a specified temperature.
摘要翻译： 一种用于在真空室中的晶片上进行各种处理的真空处理设备，以及使用该真空处理设备的成膜方法和成膜设备。 使用本发明的真空处理装置的真空处理装置，成膜方法和成膜装置的特征在于，在薄膜沉积工艺中进行晶片的温度控制，其特征在于，在使用 执行温度校准阶段和快门的组合，将衬底转移到真空膜沉积处理室中的阶段，并且通过将衬底温度控制到指定温度将膜沉积在衬底上。
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3.发明授权
公开(公告)号：US5707500A
公开(公告)日：1998-01-13
申请号：US467964
申请日：1995-06-06
申请人： Hideaki Shimamura , Yuji Yoneoka , Shigeru Kobayashi , Satosi Kisimoto , Sunao Matsubara , Hiroyuki Shida , Yukio Tanigaki , Masashi Yamamoto , Susumu Tsuzuku , Eisuke Nishitani , Tokio Kato , Akira Okamoto
发明人： Hideaki Shimamura , Yuji Yoneoka , Shigeru Kobayashi , Satosi Kisimoto , Sunao Matsubara , Hiroyuki Shida , Yukio Tanigaki , Masashi Yamamoto , Susumu Tsuzuku , Eisuke Nishitani , Tokio Kato , Akira Okamoto
CPC分类号： H01L21/67109 , C23C14/541 , H01L21/67098
摘要： The present invention relates to vacuum processing equipment for processing a wafer in a vacuum, and film coating or forming equipment and method for forming a film on a wafer wherein radiation measurement and temperature control of the wafer is carried out by using an infrared radiation thermometer. Based upon the radiation measurement, heating and/or cooling of the wafer during processing is carried out.
摘要翻译： 本发明涉及在真空中加工晶片的真空处理设备，以及在晶片上形成薄膜的薄膜涂布或成形设备及方法，其中通过使用红外辐射温度计进行晶片的辐射测量和温度控制。 基于辐射测量，进行处理期间晶片的加热和/或冷却。
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公开(公告)号：US4963239A
公开(公告)日：1990-10-16
申请号：US301468
申请日：1989-01-26
申请人： Hideaki Shimamura , Masao Sakata , Shigeru Kobayashi , Yuji Yoneoka , Tsuneaki Kamei , Tsuneyoshi Kawahito , Shoyo Fujita , Hiroshi Nakamura
发明人： Hideaki Shimamura , Masao Sakata , Shigeru Kobayashi , Yuji Yoneoka , Tsuneaki Kamei , Tsuneyoshi Kawahito , Shoyo Fujita , Hiroshi Nakamura
CPC分类号： C23C14/345 , C23C14/34 , H01J37/32706 , H01J37/34
摘要： A sputtering process of a substrate biasing system and an apparatus for carrying out the same, capable of forming a film in satisfactory surface coverage over stepped underlying layer. The present invention solves problems in the quality of films formed by the conventional sputtering process of a substrate biasing system by regulating the bias potential of a substrate on which a film is to be formed so that the kinetic energy of ions of a sputtering gas falling on the substrate is varied periodically. The bias potential is regulated by periodically varying the amplitude of the output of a radio frequency (or dc) bias power supply or by changing the duty factor of a voltage pulse stream of the output of the radio frequency (or dc) bias power supply.
摘要翻译： 衬底偏压系统的溅射工艺和用于执行衬底偏压系统的设备，能够在阶梯式底层上形成令人满意的表面覆盖的膜。 本发明解决了通过调整衬底偏压系统的常规溅射工艺形成的膜的质量的问题，通过调节其上将形成膜的衬底的偏置电位，使得溅射气体的离子的动能落在 基板周期性变化。 通过周期性地改变射频（或直流）偏置电源的输出的幅度或通过改变射频（或直流）偏压电源的输出的电压脉冲流的占空因数来调节偏置电位。
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公开(公告)号：US20090271097A1
公开(公告)日：2009-10-29
申请号：US12383151
申请日：2009-03-20
CPC分类号： F02D41/068 , F02D9/1065 , F02D9/109 , F02D2200/023 , F02D2200/0404 , F02D2200/0414
摘要： In a general-purpose engine having a throttle valve installed in an air intake passage connected to a combustion chamber, sucked air mixing with fuel to generate an air-fuel mixture to be ignited to drive a piston to rotate a crankshaft connected to a load, a first warm-up time period during which the engine is warmed up and a second warm-up time period which is longer than the first time period are determined based on detected engine temperature and a fuel quantity is increased during the first time period. The operation of the motor is controlled such that a change rate of throttle valve opening is limited within a range until the measured time exceeds the second warm-up time period after it exceeded the first time period. With this, it becomes possible to complete warm-up operation in a short period of time, while improving rate of fuel consumption and emission performance.
摘要翻译： 在具有安装在连接到燃烧室的进气通道中的节流阀的通用发动机中，与燃料混合的吸入空气以产生要点燃的空气 - 燃料混合物以驱动活塞来旋转连接到负载的曲轴， 基于检测到的发动机温度来确定发动机预热的第一预热时间段和比第一时间段长的第二预热时间段，并且在第一时间段期间燃料量增加。 控制电动机的操作，使得节气门开度的变化率在超过第一时间段之后被限制在测量时间超过第二预热时间段的范围内。 通过这样，可以在短时间内完成预热运行，同时提高燃油消耗率和排放性能。
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公开(公告)号：US20110036327A1
公开(公告)日：2011-02-17
申请号：US12840638
申请日：2010-07-21
CPC分类号： F02D31/003 , F02D2200/0404
摘要： In an apparatus for controlling a speed of an internal combustion engine installed in an outboard motor and having an actuator connected to a throttle valve of the engine to open and close the throttle valve, and up/down command signal outputting devices that output an up/down command signal to increase/decrease the engine speed when manipulated by an operator, the engine speed is controlled to change in response to the up or down command signal with an engine speed change amount per unit time made different depending on whether the detected engine speed exceeds a reference speed or not, thereby enabling to finely and precisely control the engine speed in the low speed range, while facilitating speed regulation.
摘要翻译： 在用于控制安装在舷外马达中的内燃机的速度的装置中，具有连接到发动机的节流阀的致动器以打开和关闭节气门的装置，以及输出上/下控制装置的上/下指令信号输出装置， 降低命令信号，以在操作者操作时增加/减少发动机转速，根据是否检测到的发动机转速，发动机速度被控制为响应于上升或下降命令信号而改变，其中每单位时间的发动机转速变化量是不同的， 超过参考速度，从而能够在促进速度调节的同时，精细而精确地控制低速范围内的发动机转速。
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公开(公告)号：US4724060A
公开(公告)日：1988-02-09
申请号：US797966
申请日：1985-11-14
申请人： Masao Sakata , Hideaki Shimamura , Shigeru Kobayashi , Tsuneyoshi Kawahito , Tsuneaki Kamei , Katsuo Abe
发明人： Masao Sakata , Hideaki Shimamura , Shigeru Kobayashi , Tsuneyoshi Kawahito , Tsuneaki Kamei , Katsuo Abe
CPC分类号： H01J37/3423 , H01J37/3408 , H01J2237/3327
摘要： A target for use in a sputtering technique usually has a flat structure. The present invention has succeeded in endowing sputtering film formation with a directivity in such a way that the surface of the target is provided with recesses thereby to limit the flight directions of sputtering particles.Alternatively, the directivity can be bestowed by disposing a frame between a substrate to be formed with a film and the flat sputtering target. This measure requires auxiliary means in which a wall is provided at the outer periphery of the sputtering target so as to effectively utilize a plasma.The present invention actually formed films by the use of the above technique, and has verified the effect thereof. Wide applications are expected in technical fields wherein after forming a microscopic pattern, one or more films need to be further formed.
摘要翻译： 用于溅射技术的靶通常具有平坦的结构。 本发明成功地赋予溅射成膜的方向性，使得靶的表面设置有凹部，从而限制溅射颗粒的飞行方向。 或者，可以通过在要形成的基板和薄膜之间设置框架来赋予方向性。 该措施需要辅助装置，其中在溅射靶的外周设置壁，以有效地利用等离子体。 本发明通过使用上述技术实际形成膜，并且已经验证了其效果。 预期在技术领域中有广泛的应用，其中在形成微观图案之后，需要进一步形成一个或多个膜。
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公开(公告)号：US08489310B2
公开(公告)日：2013-07-16
申请号：US12763777
申请日：2010-04-20
CPC分类号： F02D41/068 , F02D41/0205 , F02D41/061
摘要： In an apparatus for controlling a general-purpose internal combustion engine having an electronic control unit (ECU) mounted on an electronic circuit board installed near a body of the engine and being connectable to a load such as an operating machine that consumes power generated by the engine, there are equipped with a first temperature sensor installed on the board at a position remote from the body and a second temperature sensor installed on the board at a position closer to the body than the first temperature sensor. A warm-up time period is determined based on an output of the first temperature sensor and a difference between outputs of the first and second temperature sensors, and an engine speed is controlled to a predetermined operating speed when the determined warm-up time period has elapsed (S18, S22), thereby improving the fuel efficiency and preventing engine stall.
摘要翻译： 在一种用于控制通用内燃机的装置中，具有安装在发动机主体附近的电子电路板上的电子控制单元（ECU），并且可连接到诸如操作机器的负载，该负载消耗由 发动机，在远离机体的位置上安装有板上的第一温度传感器和安装在板上比第一温度传感器更靠近机体的位置的第二温度传感器。 基于第一温度传感器的输出和第一和第二温度传感器的输出之间的差异来确定预热时间段，并且当确定的预热时间段具有时，发动机速度被控制到预定的操作速度 （S18，S22），从而提高燃油效率，防止发动机停转。
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公开(公告)号：US20100269786A1
公开(公告)日：2010-10-28
申请号：US12763759
申请日：2010-04-20
IPC分类号： F02D41/00
CPC分类号： F02D41/0205 , F02D29/04 , F02D31/002 , F02D2200/0404 , F02D2200/1012
摘要： In an apparatus for detecting condition of load connected to a general-purpose internal combustion engine, a first threshold value is compared with a sum obtained by adding a predetermined value to a detected throttle opening and changes the threshold value to the sum if the first threshold value is less than the sum and the engine is determined to be under first load condition if the throttle opening exceeds the threshold value. Next a second threshold value is compared with a difference obtained by subtracting change amounts of the engine speed and throttle opening and the engine is determined to be under second load condition if the difference exceeds the second threshold value, thereby enabling to accurately detect a condition of a load connected to the engine. Then the desired engine speed is changed in response to results of the determinations.
摘要翻译： 在用于检测连接到通用内燃机的负载条件的装置中，将第一阈值与通过将预定值相加到检测到的节气门开度而获得的和进行比较，并将阈值改变为和，如果第一阈值 值小于总和，并且如果节气门开度超过阈值，则发动机被确定为处于第一负载状态。 接下来，将第二阈值与通过减去发动机转速和节气门开度的变化量而获得的差进行比较，并且如果差超过第二阈值，则将发动机确定为处于第二负载状态，从而能够精确地检测 连接到发动机的负载。 然后响应于确定的结果而改变期望的发动机速度。
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公开(公告)号：US20090264032A1
公开(公告)日：2009-10-22
申请号：US12424328
申请日：2009-04-15
IPC分类号： F02B61/04
CPC分类号： F02D11/105 , B63H20/007 , B63H21/21 , B63H21/22 , B63H2021/216 , F02B61/045 , F02D31/003
摘要： An operating handle of an outboard motor is provided with a rotatable grip and a low-speed mode switch unit. A controller performs control so that when the low-speed mode switch unit is “on,” the ratio at which the target speed varies with the manipulated variable of the grip is reduced in comparison with when the low-speed mode switch unit is “off.”
摘要翻译： 舷外马达的操作手柄设置有可旋转手柄和低速模式开关单元。 控制器执行控制，使得当低速模式切换单元“开”时，与低速模式切换单元“关闭”相比，目标速度随着把手的操纵变量而变化的比率减小 “。
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