摘要:
The relative position of a test surface is sequentially changed from a reference position where a surface central axis is aligned with a measurement optical axis such that the measurement optical axis is sequentially moved to a plurality of annular regions obtained by dividing the test surface in a diametric direction. The test surface is rotated on a rotation axis whenever the relative position is changed. Measurement light composed of a plane wave is radiated to the rotating test surface, and a one-dimensional image sensor captures interference fringes at each of a plurality of rotational positions. The shape information of each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region.
摘要:
A liquid crystal sealing apparatus that radiates light to a sealing layer for sealing liquid crystal between a pair of substrates to cure the sealing layer includes: a laser beam source that emits laser beams as the light; and an optical system V that shapes the laser beams such that regions irradiated with the laser beams emitted from the laser beam source are substantially identical to the shape of the sealing layer. According to the liquid crystal sealing apparatus, since laser beams are used as light, it is possible to substantially restrict the irradiation regions to the sealing layer. Therefore, a mask for covering a liquid crystal region is not needed, and it is possible to radiate light with sufficiently high intensity to the sealing layer. As a result, it is possible to reliably seal the liquid crystal.
摘要:
Respective regional form information items obtained from regional interference fringe images corresponding to partial regions of a spherical surface to be inspected are transformed into regional synthesis form information items corresponding to a common coordinate system set for aperture synthesis by using a relationship among a polar coordinate system of the spherical surface, a plane coordinate system of an imaging plane, and the common coordinate system. Thus obtained regional synthesis form information items are subjected to aperture synthesis processing, so as to determine the overall form information of the spherical surface.
摘要:
An imaging optical system for an oblique incidence interferometer comprises first and second optical systems and an intermediate imaging surface therebetween. Each of the first and second imaging optical systems comprises two telecentric lenses, arranged afocal to each other, having respective focal lengths different from each other. A first image of a surface to be inspected having a deformed aspect ratio with respect to this surface is formed on the intermediate imaging surface by way of the first imaging optical system. The second imaging optical system is arranged such that the first image is focused onto the imaging surface of the interferometer as a second image corrected so as to have substantially the same aspect ratio as that of the surface to be inspected.
摘要:
In an optical system for an oblique incidence interferometer, first and second prisms are used for luminous flux dividing and for luminous flux combining, respectively. Reference light and measurement light are separated from each other at a surface where collimated coherent light enters or exits from the first prism, whereas the reference light and measurement light are combined together at a surface where the measurement light enters or exits from the second prism.
摘要:
A process of measuring a shape while changing the relative posture of an microscopic interferometer to a sample lens which is rotated about a rotation axis is divided into a process of measuring a top surface in a state where the sample lens is supported from a back surface and a process of measuring a back surface in a state where the sample lens is supported from the top surface. By combining first shape information of a flange side surface acquired by the process of measuring the top surface and second shape information of the flange side surface acquired by the process of measuring the back surface, the relative positional relation between the sample top surface and the sample back surface is calculated.
摘要:
The relative position of a test surface is sequentially changed from a reference position where a surface central axis is aligned with a measurement optical axis such that the measurement optical axis is sequentially moved to a plurality of annular regions obtained by dividing the test surface in a diametric direction. The test surface is rotated on a rotation axis whenever the relative position is changed. Measurement light that travels while being converged by a Mirau objective interference optical system is radiated to the rotating test surface, and a one-dimensional image sensor captures interference fringes at each of a plurality of rotational positions. The shape information of each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region.
摘要:
A reference lens for an interferometer is constructed so that light transmitted by a partially reflecting reference spherical surface may be converged, toward a focal point that coincides with the center of curvature of the reference spherical surface, and reflected from a subject spherical surface that also has its center of curvature at the focal point. Measurement of the shape of the subject spherical surface is possible based on the interference of two light beams, one reflected by the subject spherical surface and one reflected by the reference spherical surface. The reference lens, which may include five or six lens components or lens elements, includes a negative meniscus lens component, a positive lens group, and a positive lens component. Specified conditions are satisfied to provide a reference lens that has favorable correction of aberrations, is compact, and can measure the surface accuracy of a wide range of convex spherical surfaces.
摘要:
Through a first diffraction grating, two conical fluxes different in wavefront propagation angle relative to its optical axis are applied to a first surface. Through a second diffraction grating, two conical fluxes different in wavefront propagation angle relative to its optical axis are applied to a second surface. Two sets of interference fringes formed by the fluxes reflected from the first surface and a reference beam are analyzed to obtain surface misalignment and angular misalignment of the first surface relative to the optical axis. Similarly, two sets of interference fringes formed by the fluxes reflected from the second surface and the reference beam are analyzed to obtain surface misalignment and angular misalignment of the second surface relative to the optical axis. Surface misalignment and angular misalignment of a sample lens are obtained from the measurement results of the first and second surfaces.
摘要:
The relative position of a test surface is sequentially changed from a reference position where a surface central axis is aligned with a measurement optical axis such that the measurement optical axis is sequentially moved to a plurality of annular regions obtained by dividing the test surface in a diametric direction. The test surface is rotated on a rotation axis whenever the relative position is changed. Measurement light that travels while being converged by a Mirau objective interference optical system is radiated to the rotating test surface, and a one-dimensional image sensor captures interference fringes at each of a plurality of rotational positions. The shape information of each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region.