公开(公告)号：US5403989A

公开(公告)日：1995-04-04

申请号：US36399

申请日：1993-03-24

申请人： Hiroaki Tobuse ,  Tomoyuki Kanda ,  Yasusi Hisaoka ,  Shigeo Sasaki ,  Minoru Kobayashi ,  Takuji Oda ,  Ryuji Ueda ,  Akio Yoshida ,  Tadayoshi Owaki ,  Akihiko Yamasaki ,  Masaaki Kinoshita ,  Toshiaki Fukunishi

发明人： Hiroaki Tobuse ,  Tomoyuki Kanda ,  Yasusi Hisaoka ,  Shigeo Sasaki ,  Minoru Kobayashi ,  Takuji Oda ,  Ryuji Ueda ,  Akio Yoshida ,  Tadayoshi Owaki ,  Akihiko Yamasaki ,  Masaaki Kinoshita ,  Toshiaki Fukunishi

IPC分类号： H01J9/50 ,  H04N3/30 ,  B23K15/00

CPC分类号： H04N3/30 ,  H01J9/50 ,  H01J2209/3893 ,  Y02W30/828

摘要： In a color cathode-ray tube, only a foreign matter adhering to a shadow mask is removed effectively without thermal deformation of the shadow mask or thermal denaturation of phosphors.An electron beam produced by an electron gun incorporated in a cathode-ray tube itself is scanned or irradiated to all over a shadow mask of the color cathode-ray tube. The radiant state of a fluorescent screen at this stage is checked to detect a foreign matter adhering to the shadow mask. The electron beam is deflected to align with the position at which the foreign matter is detected, and then irradiated to the foreign matter in the form of pulses. Thus, the foreign matter is heated and removed.

摘要翻译： 在彩色阴极射线管中，只有在荫罩的热变形或荧光体的热变性的情况下才能有效地去除附着在荫罩上的异物。 通过并入阴极射线管本身的电子枪产生的电子束被扫描或照射到彩色阴极射线管的阴影掩模上。 检查在该阶段的荧光屏的辐射状态以检测附着在荫罩上的异物。 电子束被偏转以与检测异物的位置对准，然后以脉冲的形式照射到异物。 因此，异物被加热和去除。

公开(公告)号：US5005138A

公开(公告)日：1991-04-02

申请号：US511788

申请日：1990-04-20

申请人： Hiroaki Tobuse ,  Hidenobu Murakami ,  Masashi Kamio

发明人： Hiroaki Tobuse ,  Hidenobu Murakami ,  Masashi Kamio

IPC分类号： H01L21/027 ,  H01J37/302

CPC分类号： H01J37/3023 ,  Y10S347/90

摘要： Printing pattern information from a printing pattern CAD is converted and output as deflection scanning data for the X-axis and the Y-axis by a deflection scanning data generating means. An electron beam deflection scanning means executes deflection scanning by an electron beam on a circuit printing base on the basis of the output deflection scanning data. The printing pattern irradiated with the electron beam is input to a bit map memory by dots which correspond to the points which are irradiated with the electron beam. A radiation control means can ascertain whether or not the point which is to be irradiated with the electron beam has already been subjected to beam irradiation at real time by consecutively reading out the dot information in the bit map memory at the address corresponding to the deflection scanning data. If there is no dot, a dot is written in the bit map memory simultaneously with beam irradiation, while if there is a dot, a blanking means outputs a control signal for cutting off the electron beam. Thus, overlap in printing pattern is detected at real time, thereby ensuring the avoidance of multiple beam radiation, namely, multiple exposure.

摘要翻译： 来自印刷图案CAD的印刷图案信息被偏转扫描数据产生装置转换并输出为用于X轴和Y轴的偏转扫描数据。 电子束偏转扫描装置基于输出偏转扫描数据，在电路印刷基座上进行电子束的偏转扫描。 用电子束照射的印刷图案通过与电子束照射的点相对应的点被输入到位图存储器。 放射线控制装置可以通过在对应于偏转扫描的地址连续地读出位图存储器中的点信息来确定是否已经用电子束照射的点已经被实时地进行光束照射 数据。 如果没有点，则与光束照射同时地在位图存储器中写入点，而如果存在点，则消隐装置输出用于切断电子束的控制信号。 因此，实时地检测打印图案的重叠，从而确保避免多束辐射，即多次曝光。

公开(公告)号：US5393255A

公开(公告)日：1995-02-28

申请号：US202773

申请日：1994-02-28

申请人： Yasushi Hisaoka ,  Yoshio Yamane ,  Hidenobu Murakami ,  Yoshimi Kinoshita ,  Hiroaki Tobuse ,  Kazuo Yoshida ,  Takashi Ishii ,  Hiroshi Koizumi

发明人： Yasushi Hisaoka ,  Yoshio Yamane ,  Hidenobu Murakami ,  Yoshimi Kinoshita ,  Hiroaki Tobuse ,  Kazuo Yoshida ,  Takashi Ishii ,  Hiroshi Koizumi

IPC分类号： H01J9/42 ,  H01J9/20

CPC分类号： H01J9/42

摘要： An inspection method and an inspection apparatus for the component members of the cathode-ray tube are disclosed. An inspection apparatus composed of normal members other than an object of inspection is prepared at the time of inspecting the phosphor screen of the screen panel, the electron gun or the shadow-mask constituting the cathode-ray tube. In advanced to assembling the cathode-ray tube, the object of inspection is mounted on the inspection apparatus, so that the conformance or rejection of the object of inspection is decided from the illuminated condition of the phosphor screen by irradiating electron beams thereon.

摘要翻译： 公开了一种用于阴极射线管的部件的检查方法和检查装置。 在检查构成阴极射线管的屏幕面板，电子枪或阴罩的荧光屏时，准备由除了检查对象以外的普通部件构成的检查装置。 在组装阴极射线管的过程中，将检查对象安装在检查装置上，从而通过在其上照射电子束从荧光屏的照明状态来确定检查对象的一致性或拒绝。

公开(公告)号：US5071380A

公开(公告)日：1991-12-10

申请号：US549930

申请日：1990-07-09

申请人： Susumu Hoshinouchi ,  Akio Yoshida ,  Akinobu Kawazu ,  Tatsunori Hibara ,  Hiroaki Tobuse

发明人： Susumu Hoshinouchi ,  Akio Yoshida ,  Akinobu Kawazu ,  Tatsunori Hibara ,  Hiroaki Tobuse

IPC分类号： H01J9/227

CPC分类号： H01J9/2275 ,  H01J9/2272 ,  Y10S430/146

摘要： A fluorescence pattern forming method and apparatus includes electron beams being irradiated over a face panel, on which a fluorescence layer is formed, to form a fluorescence pattern on a color CRT. The fluorescence layer is formed by coating a slurry of fluorescence substance. According to predetermined pattern designing data, a control device causes the electron beams to be irradiated over the fluorescence layer on the face panel so that the fluorescence luminesces. This luminescence is detected by a light detector located on the convex side of the face panel. A correcting device gives a correcting signal to the control device to correct the irradiated position according to the detected light quantity.

摘要翻译： 荧光图案形成方法和装置包括在其上形成有荧光层的面板上照射电子束，以在彩色CRT上形成荧光图案。 通过涂布荧光物质的浆液形成荧光层。 根据预定图案设计数据，控制装置使电子束照射在面板上的荧光层上，使荧光发光。 该发光由位于面板的凸面侧的光检测器检测。 校正装置根据检测到的光量向控制装置给出校正信号以校正照射位置。

公开(公告)号：US4870286A

公开(公告)日：1989-09-26

申请号：US227009

申请日：1988-07-29

申请人： Hiroaki Tobuse

发明人： Hiroaki Tobuse

IPC分类号： H01J37/302 ,  H05K3/00

CPC分类号： H01J37/3023 ,  H05K3/0082 ,  H05K2203/092

摘要： An electron beam direct drawing device for use in manufacturing a printed circuit board having a photoresist thereon according to a drawing pattern information obtained by a computer aided printed circuit board pattern design, comprises means for dividing the drawing pattern information over a whole area of the printed circuit board into a plurality of fields each capable of being scanned by electron beam and for re-editing drawing patterns of the respective fields, means for storing the divided and then re-edited drawing pattern information, means for generating a first control signal for reading out the stored drawing pattern information sequentially and performing a main deflection of electron beam by means of a main deflector and means for generating a second control signal for deriving, from the stored drawing pattern information, information assigning an orientation of a pattern to be drawn and a scan width of a sub-deflection and for performing a predetermined sub-deflection scanning by means of a sub-deflector, whereby electron beam scans the printed circuit board under a control of a combination of the main deflection and the sub-deflection. A clock generator capable of producing a plurality of clock signals each corresponding to a specific line width of the pattern is provided to expose the line with electron beam of optimum dose.

摘要翻译： 根据通过计算机辅助印刷电路板图案设计获得的绘图图案信息，用于制造其上具有光致抗蚀剂的印刷电路板的电子束直接绘图装置包括用于在印刷的整个区域上划分绘图图案信息的装置 电路板分成多个场，每个场均能够被电子束扫描并用于重新编辑各个场的绘制图案;用于存储经划分的然后重新编辑的绘图模式信息的装置，用于产生用于读取的第一控制信号的装置 顺序排出存储的绘图图形信息，并通过主偏转器执行电子束的主偏转，以及用于产生第二控制信号的装置，用于从存储的绘制图形信息中导出分配要绘制的图案的取向的信息，以及 子偏转的扫描宽度和用于执行预定的子偏转sca 借助于副偏转器，由电子束在主偏转和副偏转的组合的控制下扫描印刷电路板。 提供能够产生各自对应于图案的特定线宽的多个时钟信号的时钟发生器，以最佳剂量的电子束曝光线。