公开(公告)号：US07719198B2

公开(公告)日：2010-05-18

申请号：US10594980

申请日：2005-02-17

申请人： Hirofumi Takikawa ,  Yoshimi Nishimura ,  Akio Harada

发明人： Hirofumi Takikawa ,  Yoshimi Nishimura ,  Akio Harada

IPC分类号： H01J7/24

CPC分类号： H05H1/36 ,  H05H1/48

摘要： A power supply circuit for plasma generation by which a large quantity of generated plasma can be smoothly obtained without increasing the sizes of an apparatus. An electric discharge generating electrode is composed of two or more first electrodes and one or more second electrodes. An LC series circuit is provided by connecting a capacitor C and a coil L in series between one of outputs of an alternating high voltage generating circuit which generates an alternating high voltage to be applied between the electrodes of electric discharge generating electrode, and the first electrode. When electricity is discharged in one of the electrode pair, voltage drop is suppressed by the coil, and since electric discharge from the other electrode pair is induced without being disturbed, a large quantity of plasma can be smoothly generated by common use of the alternating high voltage generating circuit.

摘要翻译： 一种用于等离子体产生的电源电路，通过该电源电路可以平稳地获得大量的等离子体，而不增加装置的尺寸。 放电产生电极由两个或更多个第一电极和一个或多个第二电极组成。 通过将电容器C和线圈L串联连接在产生施加在放电产生电极的电极之间的交流高电压的交流高压发生电路的输出之一和第一电极之间来提供LC串联电路 。 当在一个电极对中放电时，由于线圈抑制了电压降，并且由于不会受到干扰而引起来自另一个电极对的放电，所以通常使用交替高电平可以平滑地产生大量的等离子体 电压发生电路。

公开(公告)号：US07823537B2

公开(公告)日：2010-11-02

申请号：US10592286

申请日：2005-02-17

申请人： Yuichi Shiina ,  Hirofumi Takikawa

发明人： Yuichi Shiina ,  Hirofumi Takikawa

IPC分类号： C23C16/00

CPC分类号： C23C14/325 ,  H01J37/32055 ,  H01J37/32614 ,  H05H1/50

摘要： A plasma generator for forming a thin film comprises a cathode (4) for supplying constituent particles of an arc plasma and a trigger-and-anode (6) for starting and sustaining the arc plasma. The cathode surface (4a) of the cathode (4) is flat or finely irregular, and the anode surface (6c) of the trigger-and-anode (6) brought into contact with the cathode surface (4a) is flat. The anode surface (6c) is so arranged as to be brought into contact with the whole cathode surface (4a) when plasma is started. The contact point between a fine projection end (4b) of the cathode surface (4a) and the anode surface (6c) is made a plasma emission point. When the projection is consumed by plasma emission, another projection end which can be brought into contact with the anode surface (6c) is used as another plasma emission point, thus enabling intermittent operation of persistently repeating the sequence operation.

摘要翻译： 用于形成薄膜的等离子体发生器包括用于供应电弧等离子体的构成颗粒的阴极（4）和用于启动和维持电弧等离子体的触发和阳极（6）。 阴极（4）的阴极表面（4a）是平坦的或细微的，并且与阴极表面（4a）接触的触发器和阳极（6）的阳极表面（6c）是平坦的。 阳极表面（6c）被布置成当开始等离子体时与整个阴极表面（4a）接触。 阴极表面（4a）的细突出端（4b）和阳极表面（6c）之间的接触点被制成等离子体发射点。 当通过等离子体发射消耗投影时，可以将与阳极表面（6c）接触的另一突出端用作另一等离子体发射点，从而能够间歇地操作持续重复序列操作。

公开(公告)号：US07754177B2

公开(公告)日：2010-07-13

申请号：US10594368

申请日：2005-03-25

申请人： Hirofumi Takikawa ,  Akira Kondo ,  Kazuo Yoshikawa ,  Shigeo Itoh

发明人： Hirofumi Takikawa ,  Akira Kondo ,  Kazuo Yoshikawa ,  Shigeo Itoh

IPC分类号： B01J19/08

CPC分类号： B82Y40/00 ,  B82Y10/00 ,  B82Y30/00 ,  C01B32/162 ,  H01J1/304 ,  H01J2201/30469

摘要： A hollow carbon nanoballoon structure having a relatively large closed space, and a method of producing a carbon nanoballoon structure capable of easily and stably producing such a structure. The carbon nanoballoon structure is obtained by heating soot prepared by an arc discharge using carbon electrodes, soot prepared by vaporizing carbon by laser irradiation, or carbon black having a specific surface area of 1000 m2/g or more and a primary particle diameter of 20 nm or more at a high temperature in an inert gas atmosphere, and includes graphite sheets linked to form a curved surface.

摘要翻译： 具有较大闭合空间的中空碳纳米球结构体，以及能够容易且稳定地制造这种结构的碳纳米球结构体的制造方法。 通过使用碳电极加热通过电弧放电制备的烟灰，通过激光照射使碳气气化而制成的烟灰，或比表面积为1000m 2 / g以上，初级粒径为20nm的炭黑，得到碳纳米球结构体 或更高的惰性气体气氛中，并且包括连接形成曲面的石墨片。

公开(公告)号：US20070193518A1

公开(公告)日：2007-08-23

申请号：US10592286

申请日：2005-02-17

申请人： Yuichi Shiina ,  Hirofumi Takikawa

发明人： Yuichi Shiina ,  Hirofumi Takikawa

IPC分类号： C23C16/00

CPC分类号： C23C14/325 ,  H01J37/32055 ,  H01J37/32614 ,  H05H1/50

摘要： A plasma generator for forming a thin film comprises a cathode (4) for supplying constituent particles of an arc plasma and a trigger-and-anode (6) for starting and sustaining the arc plasma. The cathode surface (4a) of the cathode (4) is flat or finely irregular, and the anode surface (6c) of the trigger-and-anode (6) brought into contact with the cathode surface (4a) is flat. The anode surface (6c) is so arranged as to be brought into contact with the whole cathode surface (4a) when plasma is started. The contact point between a fine projection end (4b) of the cathode surface (4a) and the anode surface (6c) is made a plasma emission point. When the projection is consumed by plasma emission, another projection end which can be brought into contact with the anode surface (6c) is used as another plasma emission point, thus enabling intermittent operation of persistently repeating the sequence operation.

摘要翻译： 用于形成薄膜的等离子体发生器包括用于供应电弧等离子体的构成颗粒的阴极（4）和用于启动和维持电弧等离子体的触发和阳极（6）。 阴极（4）的阴极表面（4a）是平坦的或细微的，并且与阴极表面（4a）接触的触发器和阳极（6）的阳极表面（6c）是平的 。 阳极表面（6c）被布置成当等离子体开始时与整个阴极表面（4a）接触。 阴极表面（4a）的微小突出端（4b）和阳极表面（6c）之间的接触点被制成等离子体发射点。 当通过等离子体发射消耗投影时，可以将与阳极表面（6c）接触的另一突出端用作另一等离子体发射点，从而能够间歇地操作持续重复序列操作。

公开(公告)号：US06986877B2

公开(公告)日：2006-01-17

申请号：US10334904

申请日：2003-01-02

申请人： Hirofumi Takikawa ,  Shigeo Itoh

发明人： Hirofumi Takikawa ,  Shigeo Itoh

IPC分类号： D01F9/12

CPC分类号： B82Y30/00 ,  D01F9/127 ,  Y10T428/2913

摘要： A carbon nano-fiber, particularly twisted carbon nano-fiber such as a carbon nano-coil, carbon nano-twist, carbon nano-rope is produced by means of a catalyst CVD method using carbon-containing gas as a raw material and a catalyst comprising one or plural components selected from the group consisting of Cr, Mn, Fe, Co, Ni and oxide thereof and one or plural components selected from the group consisting of Cu, Al, Si, Ti, V, Nb, Mo, Hf, Ta, W and oxide thereof is used.

公开(公告)号：US06759024B2

公开(公告)日：2004-07-06

申请号：US09989024

申请日：2001-11-21

申请人： Hirofumi Takikawa ,  Yoshihiko Hibi

发明人： Hirofumi Takikawa ,  Yoshihiko Hibi

IPC分类号： C10B3126

CPC分类号： B01J19/088 ,  B01J2219/0809 ,  B01J2219/082 ,  B01J2219/0822 ,  B01J2219/083 ,  B01J2219/0839 ,  B01J2219/0886 ,  B01J2219/0892 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  H01J9/025 ,  H01J2201/30469 ,  Y10S977/742 ,  Y10S977/844

摘要： A method of instantaneously forming a surface of an arc-treated material mainly including graphite into nano-tubes due to arc discharge carried out using a unit like a welding arc torch or the like without necessarily requiring a processing container, resulting in the nano-tube being applied to an electron emission source. A torch electrode acting as a first electrode and the arc-treated material made of graphite and acting as a second electrode are arranged opposite to each other. A potential is applied between both electrodes to generate arc discharge therebetween. A mask having an opening pattern is arranged on the arc-treated material, so that only graphite positioned on portions of a surface of the arc-treated material corresponding to openings of the mask are exposed to arc, to thereby be formed into nano-tubes.

摘要翻译： 一种电弧处理材料的表面的方法，该方法通过使用焊接电弧焊炬等单元进行的电弧放电而将纳米管中主要包括石墨的表面立即形成，而不需要加工容器，导致纳米管 被应用于电子发射源。 用作第一电极的焊炬电极和由石墨制成并用作第二电极的电弧处理材料彼此相对布置。 在两个电极之间施加电位以在其间产生电弧放电。 具有开口图案的掩模布置在电弧处理材料上，使得仅位于与掩模开口对应的电弧处理材料的表面的部分上的石墨暴露于电弧，从而形成纳米管 。

公开(公告)号：US20070176562A1

公开(公告)日：2007-08-02

申请号：US10594980

申请日：2005-02-17

申请人： Hirofumi Takikawa ,  Yoshimi Nishimura ,  Akio Harada

发明人： Hirofumi Takikawa ,  Yoshimi Nishimura ,  Akio Harada

IPC分类号： H01J7/24

CPC分类号： H05H1/36 ,  H05H1/48

摘要： A power supply circuit for plasma generation by which a large quantity of generated plasma can be smoothly obtained without increasing the sizes of an apparatus, a plasma generating apparatus, a plasma processing apparatus which can process a large quantity of objects to be processed at a low cost by using the plasma generating apparatus, and plasma processed objects having target quantities are realized. An electric discharge generating electrode is composed of two or more first electrodes and one or more second electrodes. An LC series circuit is provided by connecting a capacitor C and a coil L in series between one of outputs of an alternating high voltage generating circuit which generates an alternating high voltage to be applied between the electrodes of electric discharge generating electrode, and the first electrode. When electricity is discharged in one of the electrode pair, voltage drop is suppressed by the coil even when the electric discharge of capacitor progresses, and since electric discharge from the other electrode pair is induced without being disturbed, a large quantity of plasma can be smoothly generated by common use of the alternating high voltage generating circuit.

摘要翻译： 一种用于等离子体产生的电源电路，通过该电源电路可以平稳地获得大量的等离子体，而不增加装置的尺寸，等离子体产生装置，等离子体处理装置，其可以以低的速度处理大量待处理物体 实现了使用等离子体发生装置的成本以及具有目标量的等离子体处理物体。 放电产生电极由两个或更多个第一电极和一个或多个第二电极组成。 通过将电容器C和线圈L串联连接在产生施加在放电产生电极的电极之间的交流高电压的交流高压发生电路的输出之一和第一电极之间来提供LC串联电路 。 当在一对电极对中放电时，即使当电容器的放电进行时，电压也被电压抑制，并且由于从另一个电极对的放电被感应而不会受到干扰，因此能够平稳地产生大量的等离子体 由通常使用的交流高压发生电路产生。

公开(公告)号：US07239073B2

公开(公告)日：2007-07-03

申请号：US10780714

申请日：2004-02-19

申请人： Hirofumi Takikawa ,  Youhei Fujimura ,  Shigeo Itoh

发明人： Hirofumi Takikawa ,  Youhei Fujimura ,  Shigeo Itoh

IPC分类号： H01J1/62

CPC分类号： B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  C01P2002/85 ,  C01P2004/03 ,  C01P2004/04 ,  C01P2004/61 ,  C01P2004/62 ,  C01P2004/64 ,  H01J1/3044 ,  H01J9/025 ,  H01J2201/30446 ,  Y10S977/949

摘要： A carbon substance comprises a structure and line-shaped bodies, the structure having a size ranging from about 1 μm to about 100 μm and including carbon and a metal or a metallic oxide, and the line-shaped bodies having diameters smaller than about 200 nm and including carbon as a main component thereof and growing radially from a surface of the structure. A method for manufacturing the carbon substance uses a thermal decomposition of a source gas containing carbon in the vicinity of a catalyst, wherein the catalyst comprises a first and a second materials, the first material being Ni or a Ni oxide and the second material being In or an In oxide; and the thermal decomposition is performed at a temperature ranging from about 675° C. to about 750° C. An electron emission element uses the carbon substance as an electron emission material. A composite material includes the carbon substance in its matrix.

摘要翻译： 碳物质包括结构和线状体，该结构的尺寸范围为约1μm至约100μm，并且包括碳和金属或金属氧化物，并且直径小于约200nm的线状体 并且包括碳作为其主要成分并且从结构的表面径向生长。 制造碳物质的方法使用在催化剂附近含有碳原子气体的热分解，其中催化剂包含第一和第二材料，第一材料为Ni或Ni氧化物，第二材料为In 或In氧化物; 并且热分解在约675℃至约750℃的温度下进行。电子发射元件使用碳物质作为电子发射材料。 复合材料包括其基质中的碳物质。

公开(公告)号：US06989083B2

公开(公告)日：2006-01-24

申请号：US10407666

申请日：2003-04-04

申请人： Hirofumi Takikawa ,  Mitsukuni Ikeda ,  Shigeo Itoh ,  Tomonori Tahara

发明人： Hirofumi Takikawa ,  Mitsukuni Ikeda ,  Shigeo Itoh ,  Tomonori Tahara

IPC分类号： C01B31/00 ,  C23C14/34

CPC分类号： B82Y30/00 ,  B01J19/088 ,  B01J2219/00155 ,  B01J2219/0809 ,  B01J2219/0822 ,  B01J2219/0835 ,  B01J2219/0839 ,  B01J2219/0871 ,  B01J2219/0886 ,  B01J2219/0892 ,  B82Y40/00 ,  C01B32/162 ,  C01B2202/34 ,  C01B2202/36

摘要： A graphite cathode and a graphite anode are placed opposite each other through an insulating plate having a notch. A voltage is applied between both of the electrodes to generate arc discharge at the notch of the insulating plate. A given area of the graphite anode is evaporated from an electrode point of the arc discharge, and simultaneously an arc jet is generated from the notch. Thereby, a carbon nanoparticle comprising soot of carbon nanomaterial containing carbon nanohorn is generated. The soot is deposited on a recovering plate for recovery.

公开(公告)号：US20070207081A1

公开(公告)日：2007-09-06

申请号：US10594368

申请日：2005-03-25

申请人： Hirofumi Takikawa ,  Akira Kondo ,  Kazuo Yoshikawa ,  Shigeo Itoh

发明人： Hirofumi Takikawa ,  Akira Kondo ,  Kazuo Yoshikawa ,  Shigeo Itoh

IPC分类号： C01B31/00

CPC分类号： B82Y40/00 ,  B82Y10/00 ,  B82Y30/00 ,  C01B32/162 ,  H01J1/304 ,  H01J2201/30469

摘要： A hollow carbon nanoballoon structure having a relatively large closed space, and a method of producing a carbon nanoballoon structure capable of easily and stably producing such a structure. The carbon nanoballoon structure is obtained by heating soot prepared by arc discharge using carbon electrodes, soot prepared by vaporizing. carbon by laser irradiation, or carbon black having a specific surface area of 1000 m2/g or more and a primary particle diameter of 20 nm or more at a high temperature in an inert gas atmosphere, and includes graphite sheets linked to form a curved surface.

摘要翻译： 具有较大闭合空间的中空碳纳米球结构体，以及能够容易且稳定地制造这种结构的碳纳米球结构体的制造方法。 通过使用碳电极加热通过电弧放电制备的烟炱，通过汽化制备的烟炱来获得碳纳米球结构。 炭或比表面积为1000m 2 / g以上的炭黑，在惰性气体气氛中在高温下的一次粒径为20nm以上，并且包括 连接形成曲面的石墨片。