公开(公告)号：US20090140756A1

公开(公告)日：2009-06-04

申请号：US11718065

申请日：2005-10-27

申请人： Mutsuhiko Yoshioka ,  Hitoshi Fujiyama ,  Hisao Igarashi

发明人： Mutsuhiko Yoshioka ,  Hitoshi Fujiyama ,  Hisao Igarashi

IPC分类号： G01R31/02

CPC分类号： G01R1/0735

摘要： Disclosed herein are a probe member for wafer inspection, a probe card for wafer inspection and a wafer inspection apparatus, by which a good electrically connected state can be surely achieved, positional deviation by temperature change can be prevented, and the good electrically connected state can be stably retained even when a wafer has a diameter of 8 inches or greater, and the pitch of electrodes to be inspected is extremely small.The probe member of the invention has a sheet-like probe, which is composed of a frame plate made of a metal, in which a plurality of openings have been formed, and a plurality of contact films arranged on and supported by a front surface of the frame plate so as to close the respective openings, wherein each of the contact films is obtained by arranging, in a flexible insulating film, a plurality of electrode structures, and an anisotropically conductive connector, which is composed of a frame plate, in which a plurality of openings have been formed, and a plurality of elastic anisotropically conductive films arranged on and supported by the frame plate so as to close the respective openings, and is arranged on a back surface of the sheet-like probe, wherein each of the openings of the frame plate in the sheet-like probe has a size capable of receiving the external shape in a plane direction in the elastic anisotropically conductive film.

摘要翻译： 这里公开了用于晶片检查的探针构件，晶片检查用探针卡和晶片检查装置，能够可靠地实现良好的电连接状态，能够防止温度变化引起的位置偏差，良好的电连接状态 即使当晶片具有8英寸或更大的直径，并且待检查的电极的间距极小时也能够被稳定地保持。 本发明的探针构件具有片状探针，该片状探针由其中形成有多个开口的金属制框架板和形成有多个开口的多个接触膜构成，多个接触膜由前表面 框架板以闭合各个开口，其中每个接触膜通过在柔性绝缘膜中布置多个电极结构和由框架板组成的各向异性导电连接器来获得，其中 已经形成多个开口，并且多个弹性各向异性导电膜布置在框架板上并由框架板支撑以封闭各个开口，并且布置在片状探针的后表面上，其中每个 片状探针中的框架板的开口具有能够在弹性各向异性导电膜中在平面方向上接收外部形状的尺寸。

公开(公告)号：US08410808B2

公开(公告)日：2013-04-02

申请号：US12532320

申请日：2008-03-27

申请人： Masaya Naoi ,  Hitoshi Fujiyama ,  Ichihiro Miura

发明人： Masaya Naoi ,  Hitoshi Fujiyama ,  Ichihiro Miura

IPC分类号： G01R31/26

CPC分类号： G01R1/0491 ,  G01R1/0735 ,  H01R13/2414

摘要： Provided is an anisotropic conductive connector and a prove member, each of which ensures that all of the conductive parts exhibit uniform conductivity when a pressing force is applied, even when the inspection target wafer has a large area and total number of inspection target electrodes of integrated circuits is 10,000 or more, and a wafer inspection system including the probe member. The anisotropic conductive connector includes a frame plate in which a plurality of anisotropic conductive film placement holes are formed, and elastic anisotropic conductive films respectively disposed in the anisotropic conductive film placement holes in the frame plate and supported by a peripheral part of the frame plate around the corresponding anisotropic conductive film placement hole, each of the elastic anisotropic conductive films includes a plurality of connection conductive parts each extending in a thicknesswise direction of the elastic anisotropic conductive film, being disposed corresponding to a connection target electrode, and comprising an elastic polymer substance and magnetic conductive particles densely contained in the elastic polymer substance; and an insulating part that insulates the connection conductive parts to one another, and the connection conductive parts of the elastic anisotropic conductive films disposed in a peripheral area of the frame plate having a thickness smaller than that of the connection conductive parts of the elastic anisotropic conductive films disposed in a center area of the frame plate.

摘要翻译： 提供了一种各向异性导电连接器和证明部件，每个导电连接器和证明部件确保了当施加按压力时所有的导电部件具有均匀的导电性，即使当检查对象晶片具有大的面积并且整体的检查对象电极的总数 电路为10,000以上，以及包括探针部件的晶片检查系统。 各向异性导电连接器包括框架板，其中形成有多个各向异性导电膜放置孔，弹性各向异性导电膜分别设置在框架板中的各向异性导电膜放置孔中，并由框架板的周边部分支撑 相应的各向异性导电膜放置孔，每个弹性各向异性导电膜包括多个连接导电部件，每个连接导电部件沿弹性各向异性导电膜的厚度方向延伸，与连接目标电极对应设置，并且包括弹性聚合物物质 和密集地包含在弹性聚合物物质中的导电颗粒; 以及将连接导电部彼此绝缘的绝缘部，将所述弹性各向异性导电膜的连接导电部配置在所述框架板的周边区域中，所述连接导电部的厚度比所述弹性各向异性导电性的连接导电部的厚度小 薄膜设置在框架板的中心区域中。

公开(公告)号：US20100127724A1

公开(公告)日：2010-05-27

申请号：US12532320

申请日：2008-03-27

申请人： Masaya Naoi ,  Hitoshi Fujiyama ,  Ichihiro Miura

发明人： Masaya Naoi ,  Hitoshi Fujiyama ,  Ichihiro Miura

IPC分类号： G01R31/02 ,  H01R4/58

CPC分类号： G01R1/0491 ,  G01R1/0735 ,  H01R13/2414

摘要： Provided is an anisotropic conductive connector and a prove member, each of which ensures that all of the conductive parts exhibit uniform conductivity when a pressing force is applied, even when the inspection target wafer has a large area and total number of inspection target electrodes of integrated circuits is 10,000 or more, and a wafer inspection system including the probe member. The anisotropic conductive connector includes a frame plate in which a plurality of anisotropic conductive film placement holes are formed, and elastic anisotropic conductive films respectively disposed in the anisotropic conductive film placement holes in the frame plate and supported by a peripheral part of the frame plate around the corresponding anisotropic conductive film placement hole, each of the elastic anisotropic conductive films includes a plurality of connection conductive parts each extending in a thicknesswise direction of the elastic anisotropic conductive film, being disposed corresponding to a connection target electrode, and comprising an elastic polymer substance and magnetic conductive particles densely contained in the elastic polymer substance; and an insulating part that insulates the connection conductive parts to one another, and the connection conductive parts of the elastic anisotropic conductive films disposed in a peripheral area of the frame plate having a thickness smaller than that of the connection conductive parts of the elastic anisotropic conductive films disposed in a center area of the frame plate.

摘要翻译： 提供了一种各向异性导电连接器和证明部件，每个导电连接器和证明部件确保了当施加按压力时所有的导电部件具有均匀的导电性，即使当检查对象晶片具有大的面积并且整体的检查对象电极的总数 电路为10,000以上，以及包括探针部件的晶片检查系统。 各向异性导电连接器包括框架板，其中形成有多个各向异性导电膜放置孔，弹性各向异性导电膜分别设置在框架板中的各向异性导电膜放置孔中，并由框架板的周边部分支撑 相应的各向异性导电膜放置孔，每个弹性各向异性导电膜包括多个连接导电部件，每个连接导电部件沿弹性各向异性导电膜的厚度方向延伸，与连接目标电极对应设置，并且包括弹性聚合物物质 和密集地包含在弹性聚合物物质中的导电颗粒; 以及使连接导电部彼此绝缘的绝缘部，并且布置在框架板的周边区域中的弹性各向异性导电膜的连接导电部的厚度比弹性各向异性导电性的连接导电部的厚度小 薄膜设置在框架板的中心区域中。

公开(公告)号：US07671609B2

公开(公告)日：2010-03-02

申请号：US11587485

申请日：2005-04-26

申请人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

发明人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

IPC分类号： G01R31/02

CPC分类号： A63H29/22 ,  A63H30/04 ,  A63H31/00 ,  F16H48/08 ,  G01R1/06711 ,  G01R1/0735 ,  G01R3/00 ,  H01L51/5012 ,  H05B33/14 ,  Y10T29/49155

摘要： A sheet-like probe has a porous film. In the sheet-like probe, a contact film is penetratingly supported at each position of through-holes formed in the porous film, and a peripheral edge of the contact film and the porous film are integrated such that a flexible resin insulation layer is included in a fine hole of the porous film. Electrode structure bodies are supported in a penetrating manner in the insulation layer. Each electrode structure body includes a surface electrode section exposed to the front surface of the insulation layer and projecting from the front surface of the insulation layer, a back surface electrode section exposed to the back surface of the insulation layer, a short-circuit section continuously extending from the base end of the front surface electrode section, penetrating the insulation layer in its thickness direction, and connected to the back surface electrode section, a holding section extending outward, along the front surface of the insulation layer, from the base end section of the front surface electrode section, and a supporting body supporting the insulation layer.

摘要翻译： 片状探针具有多孔膜。 在片状探针中，在形成于多孔膜的贯通孔的各位置上，充分地将接触膜支撑在接触膜的周缘和多孔膜的一体，使得柔性树脂绝缘层包含在 多孔膜的细孔。 电极结构体以穿透方式被支撑在绝缘层中。 每个电极结构体包括暴露于绝缘层的前表面并从绝缘层的前表面突出的表面电极部分，暴露于绝缘层的背面的背面电极部分，连续的短路部分 从前表面电极部分的基端部延伸穿过绝缘层的厚度方向，并与背面电极部分连接，沿着绝缘层的前表面向外延伸的保持部分从基端部分 和支撑绝缘层的支撑体。

公开(公告)号：US07737707B2

公开(公告)日：2010-06-15

申请号：US11587401

申请日：2005-04-26

申请人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

发明人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

IPC分类号： G01R1/073 ,  H05K3/02

CPC分类号： A63H29/22 ,  A63H30/04 ,  A63H31/00 ,  F16H48/08 ,  G01R1/06711 ,  G01R1/0735 ,  G01R3/00 ,  H01L51/5012 ,  H05B33/14 ,  Y10T29/49155

摘要： A sheet-like probe and a method of producing the probe. In the probe electrode structure bodies do not come out from an insulation film and achieve high durability, and in a burn-in test for a wafer having a large area and for a circuit device having to-be-inspected electrodes with small intervals, positional displacement, caused by temperature variation, between the electrode structure bodies and the to-be-inspected electrode can be reliably prevented for stable connection conditions. The sheet-like probe includes an insulation layer and a contact film provided with electrode structure bodies arranged on the insulation layer to be apart from each other in the surface direction of the insulation layer and penetratingly extend in the thickness direction of the insulation layer. The electrode structure bodies each are composed of a surface electrode section exposed to the front surface of the insulation layer.

摘要翻译： 片状探针及其制造方法。 在探针电极结构体中，绝缘膜不会脱出并达到高耐久性，在具有大面积的晶片的老化试验以及具有小间隔的被检查电极的电路装置中，位置 为了稳定的连接条件，可以可靠地防止电极结构体和被检查电极之间的温度变化引起的位移。 片状探针包括绝缘层和接触膜，该接触膜具有设置在绝缘层上的电极结构体，以在绝缘层的表面方向上彼此分开，并且在绝缘层的厚度方向上贯通地延伸。 电极结构体各自由暴露于绝缘层的前表面的表面电极部分构成。

公开(公告)号：US20070205783A1

公开(公告)日：2007-09-06

申请号：US11587401

申请日：2005-04-26

申请人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

发明人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

IPC分类号： G01R31/02

CPC分类号： A63H29/22 ,  A63H30/04 ,  A63H31/00 ,  F16H48/08 ,  G01R1/06711 ,  G01R1/0735 ,  G01R3/00 ,  H01L51/5012 ,  H05B33/14 ,  Y10T29/49155

摘要： A sheet-like probe and a method of producing the probe. In the probe electrode structure bodies do not come out from an insulation film and achieve high durability, and in a burn-in test for a wafer having a large area and for a circuit device having to-be-inspected electrodes with small intervals, positional displacement, caused by temperature variation, between the electrode structure bodies and the to-be-inspected electrode can be reliably prevented for stable connection conditions. The sheet-like probe includes an insulation layer and a contact film provided with electrode structure bodies arranged on the insulation layer to be apart from each other in the surface direction of the insulation layer and penetratingly extend in the thickness direction of the insulation layer. The electrode structure bodies each are composed of a surface electrode section exposed to the front surface of the insulation layer.

摘要翻译： 片状探针及其制造方法。 在探针电极结构体中，绝缘膜不会脱出并达到高耐久性，在具有大面积的晶片的老化试验以及具有小间隔的被检查电极的电路装置中，位置 为了稳定的连接条件，可以可靠地防止电极结构体和被检查电极之间的温度变化引起的位移。 片状探针包括绝缘层和接触膜，该接触膜具有设置在绝缘层上的电极结构体，以在绝缘层的表面方向上彼此分开，并且在绝缘层的厚度方向上贯通地延伸。 电极结构体各自由暴露于绝缘层的前表面的表面电极部分构成。

公开(公告)号：US07656176B2

公开(公告)日：2010-02-02

申请号：US11718065

申请日：2005-10-27

申请人： Mutsuhiko Yoshioka ,  Hitoshi Fujiyama ,  Hisao Igarashi

发明人： Mutsuhiko Yoshioka ,  Hitoshi Fujiyama ,  Hisao Igarashi

IPC分类号： G01R31/02

CPC分类号： G01R1/0735

摘要： A probe member for wafer inspection having a sheet-like probe, the probe including a frame plate in which openings are formed, and contact films arranged on a front surface of the frame plate so as to close the openings, each of the contact films obtained by arranging, in an insulating film formed of a flexible resin, a plurality of electrode structures, and an anisotropically conductive connector, which is composed of a frame plate, in which a plurality of openings have been formed corresponding to the electrode regions, and a plurality of elastic anisotropically conductive films arranged on and supported by the frame plate so as to close the respective openings, wherein each of the openings of the frame plate in the sheet-like probe have a size for receiving the external shape in a plane direction in the elastic anisotropically conductive film of the anisotropically conductive connector.

摘要翻译： 一种用于晶片检查的探针构件，具有片状探针，该探针包括其中形成有开口的框架板和布置在框架板的前表面上的接触膜以闭合开口，每个接触膜获得 通过在由柔性树脂形成的绝缘膜中布置多个电极结构和各向异性导电连接器，所述多个电极结构和各向异性导电连接器由框架板组成，其中已经形成对应于电极区域的多个开口，以及 多个弹性各向异性导电膜，其布置在所述框架板上并由所述框架板支撑以封闭各个开口，其中所述片状探针中的所述框架板的每个开口具有用于在平面方向上接收外部形状的尺寸 各向异性导电连接器的弹性各向异性导电膜。

公开(公告)号：US20070268032A1

公开(公告)日：2007-11-22

申请号：US11718576

申请日：2005-11-10

申请人： Mutsuhiko Yoshioka ,  Hitoshi Fujiyama ,  Hisao Igarashi

发明人： Mutsuhiko Yoshioka ,  Hitoshi Fujiyama ,  Hisao Igarashi

IPC分类号： G01R31/00

CPC分类号： G01R1/07307

摘要： Provided are a probe member, a probe card and a wafer inspection apparatus, by which a good electrically connected state can be surely achieved, positional deviation by temperature change can be prevented, and the good electrically connected state can be stably retained even when a wafer has a diameter of 8 inches or greater, and the pitch of electrodes to be inspected is extremely small. The probe member of the invention has a sheet-like probe, which is composed of a frame plate made of a metal, in which an opening has been formed, and a plurality of contact films arranged on and supported by a front surface of the frame plate so as to close the opening, wherein the contact film is obtained by arranging, in a flexible insulating film, a plurality of electrode structures, and an anisotropically conductive connector, which is composed of a frame plate, in which a plurality of openings have been formed, and a plurality of elastic anisotropically conductive films arranged on and supported by the frame plate so as to close the respective openings, and is arranged on a back surface of the sheet-like probe. The opening of the frame plate in the sheet-like probe has a size capable of receiving the external shape in a plane direction in the frame plate of the anisotropically conductive connector.

摘要翻译： 提供了一种探针构件，探针卡和晶片检查装置，通过该探针构件，探针卡和晶片检查装置，可以可靠地实现良好的电连接状态，可以防止温度变化引起的位置偏差，并且即使当晶片 具有8英寸或更大的直径，并且待检查的电极的间距非常小。 本发明的探针构件具有片状探针，该片状探针由其上形成有开口的金属制框架板构成，并且多个接触膜布置在框架的前表面上并由框架的前表面支撑 板，以封闭开口，其中通过在柔性绝缘膜中布置多个电极结构和由框架板构成的各向异性导电连接器，其中多个开口具有多个开口而获得接触膜 以及多个弹性各向异性导电膜，其被布置在框架板上并由框架板支撑以封闭各个开口，并且布置在片状探针的后表面上。 片状探针中的框架板的开口具有能够在各向异性导电连接器的框架板中在平面方向上接收外部尺寸的尺寸。