公开(公告)号：US08404431B1

公开(公告)日：2013-03-26

申请号：US13289369

申请日：2011-11-04

申请人： Hitoshi Hatate ,  Hisayoshi Watanabe ,  Masachika Hashino ,  Koichi Otani

发明人： Hitoshi Hatate ,  Hisayoshi Watanabe ,  Masachika Hashino ,  Koichi Otani

IPC分类号： G02B5/127

CPC分类号： G11B5/3169 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3166 ,  Y10T29/49048

摘要： A method for manufacturing a thin-film magnetic head includes processes of forming a polishing position sensor and a recording head portion alongside on one side of a wafer. The process of forming the recording head portion has a step of performing a photolithography process after applying an alkali soluble resin film and a photoresist film in the named order. The process of forming the polishing position sensor has a step of performing a photolithography process on the photoresist film while having only the photoresist film out of the alkali soluble resin film and the photoresist film.

摘要翻译： 一种制造薄膜磁头的方法包括在晶片的一侧旁边形成研磨位置传感器和记录头部的工序。 形成记录头部分的过程具有按照所述顺序施加碱溶性树脂膜和光致抗蚀剂膜之后进行光刻工艺的步骤。 形成抛光位置传感器的过程具有在光致抗蚀剂膜上进行光刻工艺的步骤，同时在碱溶性树脂膜和光致抗蚀剂膜中仅具有光致抗蚀剂膜。

公开(公告)号：US08247029B2

公开(公告)日：2012-08-21

申请号：US12140748

申请日：2008-06-17

申请人： Akifumi Kamijima ,  Hideyuki Yatsu ,  Hitoshi Hatate

发明人： Akifumi Kamijima ,  Hideyuki Yatsu ,  Hitoshi Hatate

IPC分类号： C23C16/00

CPC分类号： G03F7/40 ,  H01L21/0273

摘要： The micropattern formation of the invention comprises forming a resist pattern, and then forming a carbon-containing film on the surface of the resist pattern, followed by ashing of the carbon-containing film and a portion of the resist surface constituting the resist pattern. Thus, the discharge state of ashing just after the initiation of discharge is so stabilized that the ashing rate distribution can be improved, and sensitive pattern slimming can be implemented with ease and high precision.

摘要翻译： 本发明的微图案形成包括形成抗蚀剂图案，然后在抗蚀剂图案的表面上形成含碳膜，然后灰化含碳膜和构成抗蚀剂图案的抗蚀剂表面的一部分。 因此，放电开始之后的灰化的放电状态稳定，可以提高灰化率分布，并且可以容易且高精度地实现灵敏的图案减肥。

公开(公告)号：US07527917B2

公开(公告)日：2009-05-05

申请号：US11191059

申请日：2005-07-28

申请人： Akifumi Kamijima ,  Hitoshi Hatate

发明人： Akifumi Kamijima ,  Hitoshi Hatate

IPC分类号： G03F7/20 ,  G03F7/26

CPC分类号： G03F7/70425

摘要： For each of pattern projection regions, a mask and a substrate are moved in synchronization with each other in an X direction while projecting a portion of a mask pattern through an optical projection system onto a portion of the pattern projection region. An exposure region is thereby shifted from one of two ends of the pattern projection region toward the other end, the two ends being opposed to each other in the X direction. If the pattern projection region is a peripheral projection region that has a portion located outside the edge of the substrate, of the two ends of the region opposed to each other in the X direction, the exposure region is shifted from the one end that is greater in length of a portion laid over the substrate toward the other end.

摘要翻译： 对于每个图案投影区域，掩模和衬底在X方向上彼此同步地移动，同时通过光学投影系统将一部分掩模图案投影到图案投影区域的一部分上。 因此曝光区域从图案投影区域的两端之一朝向另一端偏移，两端在X方向上彼此相对。 如果图案投影区域是具有位于基板的边缘外侧的部分的周边突出区域，在X方向上彼此相对的区域的两端部中，曝光区域从较大的一端偏移 在衬底的一部分的长度上朝向另一端。

公开(公告)号：US20050018476A1

公开(公告)日：2005-01-27

申请号：US10893981

申请日：2004-07-20

申请人： Akifumi Kamijima ,  Hitoshi Hatate

发明人： Akifumi Kamijima ,  Hitoshi Hatate

IPC分类号： G11C11/15 ,  G11C11/00 ,  G11C11/16 ,  H01L21/8246 ,  H01L27/105 ,  H01L27/22 ,  H01L43/08 ,  H01L43/12

CPC分类号： H01L43/08 ,  G11C11/16 ,  H01L27/224 ,  H01L27/226 ,  H01L43/12

摘要： The present invention provides a magnetic memory device capable of performing stable operation efficiently using a magnetic field generated by write current and formed with high precision while realizing a compact configuration. Since a plating film is used for at least a part of a magnetic yoke, as compared with the case of formation by a dry film forming method, sufficient thickness and higher dimensional precision can be obtained. Consequently, a more stabilized return magnetic field can be generated and high reliability can be assured. Neighboring memory cells can be disposed at narrower intervals, so that the invention is suitable for realizing higher integration and higher packing density.

摘要翻译： 本发明提供一种磁盘存储装置，其能够在实现紧凑的结构的同时，使用由写入电流产生的磁场和高精度地高效地进行稳定的运行。 由于对于磁轭的至少一部分使用电镀膜，与通过干式成膜法形成的情况相比，可以获得足够的厚度和更高的尺寸精度。 因此，可以产生更稳定的返回磁场，并且可以确保高可靠性。 相邻的存储单元可以以更窄的间隔布置，使得本发明适于实现更高的集成度和更高的堆积密度。

公开(公告)号：US08760805B2

公开(公告)日：2014-06-24

申请号：US13176134

申请日：2011-07-05

申请人： Hisayoshi Watanabe ,  Hitoshi Hatate ,  Hideyuki Yatsu ,  Koichi Otani

发明人： Hisayoshi Watanabe ,  Hitoshi Hatate ,  Hideyuki Yatsu ,  Koichi Otani

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

摘要： A thin-film magnetic head includes a slider substrate and a write element. The slider substrate has an air bearing surface at one side thereof. The write element has a recording magnetic pole film. The recording magnetic pole film is disposed on a plane crossing the air bearing surface over the slider substrate and has a large-width portion and a small-width portion continuously arranged in the named order toward the air bearing surface. The small-width portion has a smaller width than the large-width portion. Of the large-width portion and the small-width portion, at least the small-width portion has a first portion and a second portion. The second portion is continuous with an upper end of the first portion and has both side faces inclined in such a direction as to increase the width. An external angle of the first portion formed by a plane parallel to a bottom face and the side face is larger than an external angle of the second portion formed by a plane parallel to the bottom face and the side face.

摘要翻译： 薄膜磁头包括滑块基板和写入元件。 滑块基板在其一侧具有空气轴承表面。 写元件具有记录磁极膜。 记录磁极膜设置在与滑动基板上的空气轴承表面相交的平面上，并且具有朝向空气轴承表面依次连续排列的大宽度部分和小宽度部分。 小宽度部分的宽度比宽度大的部分小。 在大宽度部分和小宽度部分中，至少小宽度部分具有第一部分和第二部分。 第二部分与第一部分的上端连续，并且具有在增加宽度的方向上倾斜的两个侧面。 由平行于底面和侧面的平面形成的第一部分的外角比由平行于底面和侧面的平面形成的第二部分的外角大。

公开(公告)号：US20140002921A1

公开(公告)日：2014-01-02

申请号：US13535858

申请日：2012-06-28

申请人： Masashi SANO ,  Hiromichi Umehara ,  Mutsumi Fujita ,  Isamu Toba ,  Tatsuhiro Nojima ,  Hitoshi Hatate ,  Hisayoshi Watanabe

发明人： Masashi SANO ,  Hiromichi Umehara ,  Mutsumi Fujita ,  Isamu Toba ,  Tatsuhiro Nojima ,  Hitoshi Hatate ,  Hisayoshi Watanabe

IPC分类号： G11B5/31

CPC分类号： G11B5/607

摘要： A thin film magnetic recording head having a multilayer structure in which plural thin films are laminated and being a perpendicular recording type that applies a magnetic field perpendicularly to a magnetic recording medium and performs recording, includes a main magnetic pole exposed on an air bearing surface facing the magnetic recording medium and guiding a magnetic flux toward the magnetic recording medium, a thin film positioned beneath the main magnetic pole from a perspective of a lamination direction and configuring a sensor or a heater configured to determine a distance from the magnetic recording medium of the thin film magnetic recording head, and a light-absorbing portion positioned between the main magnetic pole and the thin film.

摘要翻译： 一种薄膜磁记录头，其具有层叠多个薄膜的多层结构，并且是垂直记录方式，其垂直于磁记录介质施加磁场并进行记录，该磁记录头包括暴露在空气轴承表面 磁记录介质，并向磁记录介质引导磁通量，从层叠方向的角度定位在主磁极下方的薄膜，以及配置传感器或加热器，该传感器或加热器被配置为确定与磁记录介质的距离 薄膜磁记录头和位于主磁极和薄膜之间的光吸收部分。

公开(公告)号：US07755064B2

公开(公告)日：2010-07-13

申请号：US11714737

申请日：2007-03-07

申请人： Hitoshi Hatate ,  Akifumi Kamijima

发明人： Hitoshi Hatate ,  Akifumi Kamijima

IPC分类号： B08B7/00 ,  H01L21/302

CPC分类号： H01L21/67115 ,  G03F7/42 ,  H01L21/0273 ,  Y10S438/906

摘要： A resist pattern processing apparatus comprises a stage for mounting a substrate having a patterned photoresist arranged on a surface thereof, a UV-emitting part for emitting UV rays to the stage, and an annular member for surrounding the whole periphery of the substrate. This allows the annular member to restrain ozone supplied near a mounting surface for the substrate on the stage from diffusing to the periphery of the stage, whereby the ozone concentration becomes even in the surface of the substrate mounted on the stage.

摘要翻译： 抗蚀剂图案处理装置包括用于安装具有布置在其表面上的图案化光致抗蚀剂的基板的台，用于向该台发射紫外线的UV发射部分和用于围绕基板的整个周边的环形部件。 这允许环形构件抑制在台面上的基板的安装面附近供应的臭氧扩散到台的周边，由此在安装在台架上的基板的表面上臭氧浓度变得均匀。

公开(公告)号：US07026677B2

公开(公告)日：2006-04-11

申请号：US10893981

申请日：2004-07-20

申请人： Akifumi Kamijima ,  Hitoshi Hatate

发明人： Akifumi Kamijima ,  Hitoshi Hatate

IPC分类号： H01L29/76

CPC分类号： H01L43/08 ,  G11C11/16 ,  H01L27/224 ,  H01L27/226 ,  H01L43/12

摘要： The present invention provides a magnetic memory device capable of performing stable operation efficiently using a magnetic field generated by write current and formed with high precision while realizing a compact configuration. Since a plating film is used for at least a part of a magnetic yoke, as compared with the case of formation by a dry film forming method, sufficient thickness and higher dimensional precision can be obtained. Consequently, a more stabilized return magnetic field can be generated and high reliability can be assured. Neighboring memory cells can be disposed at narrower intervals, so that the invention is suitable for realizing higher integration and higher packing density.

摘要翻译： 本发明提供一种磁盘存储装置，其能够在实现紧凑的结构的同时，使用由写入电流产生的磁场和高精度地高效地进行稳定的运行。 由于对于磁轭的至少一部分使用电镀膜，与通过干式成膜法形成的情况相比，可以获得足够的厚度和更高的尺寸精度。 因此，可以产生更稳定的返回磁场，并且可以确保高可靠性。 相邻的存储单元可以以更窄的间隔布置，使得本发明适于实现更高的集成度和更高的堆积密度。

公开(公告)号：US20050052899A1

公开(公告)日：2005-03-10

申请号：US10934565

申请日：2004-09-07

申请人： Hitoshi Hatate

发明人： Hitoshi Hatate

IPC分类号： G11C11/15 ,  G11C11/16 ,  H01L21/8246 ,  H01L27/105 ,  H01L43/08 ,  G11C11/00

CPC分类号： G11C11/16

摘要： The present invention provides a magnetic memory device capable of performing stable information writing operation by efficiently using a magnetic field generated by current flowing in a conductor and stably holding written information. A magnetic memory device includes: magnetic yoke disposed in correspondence with a region in which a write bit line and a write word line cross each other and constructed so as to surround partially or entirely the periphery of the lines; and a stacked body including a second magnetic layer of which magnetization direction changes according to an external magnetic field, and magnetically coupled to the magnetic yoke. The second magnetic layer has coercive force larger than that of the magnetic yoke, and coercive force of the magnetic yoke increases toward the second magnetic layer. Thus, the influence by remanent magnetization of the magnetic yoke can be suppressed, and the magnetization direction of the second magnetic layer can be stably held.

摘要翻译： 本发明提供一种能够通过有效地利用在导体中流动的电流产生的磁场来进行稳定的信息写入动作的磁存储装置，并稳定地保持书写信息。 磁存储器件包括：与写位线和写字线交叉的区域相对应设置的磁轭，其构造为部分或全部包围线的周边; 以及包括其磁化方向根据外部磁场而变化的第二磁性层并磁耦合到磁轭的层叠体。 第二磁性层具有大于磁轭的矫顽力，并且磁轭的矫顽力朝向第二磁性层增加。 因此，可以抑制磁轭的残余磁化的影响，并且可以稳定地保持第二磁性层的磁化方向。

公开(公告)号：US08654479B2

公开(公告)日：2014-02-18

申请号：US13535858

申请日：2012-06-28

申请人： Masashi Sano ,  Hiromichi Umehara ,  Mutsumi Fujita ,  Isamu Toba ,  Tatsuhiro Nojima ,  Hitoshi Hatate ,  Hisayoshi Watanabe

发明人： Masashi Sano ,  Hiromichi Umehara ,  Mutsumi Fujita ,  Isamu Toba ,  Tatsuhiro Nojima ,  Hitoshi Hatate ,  Hisayoshi Watanabe

IPC分类号： G11B5/127

CPC分类号： G11B5/607

摘要： A thin film magnetic recording head having a multilayer structure in which plural thin films are laminated and being a perpendicular recording type that applies a magnetic field perpendicularly to a magnetic recording medium and performs recording, includes a main magnetic pole exposed on an air bearing surface facing the magnetic recording medium and guiding a magnetic flux toward the magnetic recording medium, a thin film positioned beneath the main magnetic pole from a perspective of a lamination direction and configuring a sensor or a heater configured to determine a distance from the magnetic recording medium of the thin film magnetic recording head, and a light-absorbing portion positioned between the main magnetic pole and the thin film.

摘要翻译： 一种薄膜磁记录头，其具有层叠多个薄膜的多层结构，并且是垂直记录方式，其垂直于磁记录介质施加磁场并进行记录，该磁记录头包括暴露在空气轴承表面 磁记录介质，并向磁记录介质引导磁通量，从层叠方向的角度定位在主磁极下方的薄膜，以及配置传感器或加热器，该传感器或加热器被配置为确定与磁记录介质的距离 薄膜磁记录头和位于主磁极和薄膜之间的光吸收部分。