Ring-type piezoelectric ultrasonic motor
    3.
    发明授权
    Ring-type piezoelectric ultrasonic motor 失效
    环型压电超声波电机

    公开(公告)号:US06628045B2

    公开(公告)日:2003-09-30

    申请号:US09956879

    申请日:2001-09-21

    IPC分类号: H01L4106

    CPC分类号: H02N2/163 H02N2/0065

    摘要: The present invention relates to a ring-type piezoelectric ultrasonic motor that is different from the electro-magnetically driven conventional motors and that has applications in robots and automation equipments. More specifically, the present invention relates to a ring-type piezoelectric ultrasonic motor that is driven by a frictional force between rotor and stator, and stator is produced a mechanical displacement by a piezoelectric ceramics applying an alternate electric field with an ultrasonic frequency (above 16 kHz).

    摘要翻译: 本发明涉及与电磁驱动的常规电动机不同的环型压电超声波电动机,并且在机器人和自动化设备中具有应用。 更具体地说,本发明涉及一种由转子和定子之间的摩擦力驱动的环型压电超声波马达,并且通过施加具有超声波频率的交替电场的压电陶瓷(16号以上)产生机械位移 千赫)。

    Method for making electrical and electronic devices with vertically integrated and interconnected thin-film type battery
    4.
    发明授权
    Method for making electrical and electronic devices with vertically integrated and interconnected thin-film type battery 失效
    制造具有垂直整合和互连的薄膜型电池的电气和电子设备的方法

    公开(公告)号:US06264709B1

    公开(公告)日:2001-07-24

    申请号:US09296198

    申请日:1999-04-21

    IPC分类号: H01M618

    摘要: An electrical or electronic device and a thin-film type battery are vertically integrated and interconnected for reducing the area occupied thereby, enabling a higher degree of device integration and simplifying their fabrication. An insulating layer is formed on the device, with vertical conductors extending respectively from a pair of terminals of the device through the insulating layer. Electrode conductors are formed on the insulating layer in contact with the respective vertical conductors and serve as the cathode and anode electrodes of a thin-film battery fabricated thereon.

    摘要翻译: 电气或电子设备和薄膜型电池被垂直整合和互连以减少由此占据的面积,从而能够实现更高程度的器件集成并简化其制造。 在器件上形成绝缘层,垂直导体分别从器件的一对端子延伸穿过绝缘层。 电极导体形成在与各个垂直导体接触的绝缘层上,并且用作在其上制造的薄膜电池的阴极和阳极电极。

    Bar-type NO.sub.x gas sensor having WO.sub.3 sensing film
    6.
    发明授权
    Bar-type NO.sub.x gas sensor having WO.sub.3 sensing film 失效
    具有WO3感测膜的棒式NOx气体传感器

    公开(公告)号:US6113859A

    公开(公告)日:2000-09-05

    申请号:US18802

    申请日:1998-02-04

    IPC分类号: G01N27/12 G01N33/00

    CPC分类号: G01N27/12 G01N33/0037

    摘要: A plate-type NO.sub.x gas sensor having a WO.sub.3 sensing film which are capable of preventing temperature variation of a sensing thin film depending on gas flow to decrease heat loss thereof, whereby extending the life span of batteries of a portable gas sensor. The plate-type NO.sub.x gas sensor includes a Pt thin film electrode formed on a front surface of an alumina substrate, a tungsten oxide thin film for sensing NO.sub.x gas deposited on the front surface of the substrate on which the Pt thin film electrode is formed, a heater formed on a back surface of the alumina substrate for holding a portion of the tungsten oxide thin film for sensing NO.sub.x gas within a predetermined temperature range, a conducting wire for connecting between the Pt thin film electrode and the heater and a sheet made of at least one material selected from a group composed of Al.sub.2 O.sub.3, mullite, codierite, magnesia and zirconia, coated on the back surface of the substrate on which the heater is formed, for burying completely the heater from an exterior atmosphere to protect the heat dissipation. The NO.sub.x gas sensor may be fabricated as a bar type and also have a catalytic layer on the sensing layer to enhance the sensing characteristics of the sensor.

    摘要翻译: 一种具有WO3感测膜的板式NOx气体传感器,其能够防止根据气体流动的感测薄膜的温度变化,从而减少其热损失,从而延长便携式气体传感器的电池的寿命。 板状NOx气体传感器包括形成在氧化铝基板的前表面上的Pt薄膜电极,用于感测沉积在其上形成有Pt薄膜电极的基板的前表面上的NOx气体的氧化钨薄膜, 形成在所述氧化铝基板的背面上的加热器,用于将用于感测在预定温度范围内的NOx气体的所述氧化钨薄膜的一部分保持,用于连接所述Pt薄膜电极和所述加热器之间的导线以及由 选自由形成有加热器的基板的背面上涂覆的由Al 2 O 3,莫来石,堇青石,氧化镁和氧化锆组成的组中的至少一种材料,用于从外部气氛完全埋入加热器以保护散热。 NOx气体传感器可以制造为棒式,并且在感测层上还具有催化层以增强传感器的感测特性。

    Adhesive strength increasing method for metal thin film
    7.
    发明授权
    Adhesive strength increasing method for metal thin film 失效
    金属薄膜的粘合强度增加方法

    公开(公告)号:US06051115A

    公开(公告)日:2000-04-18

    申请号:US893153

    申请日:1997-07-15

    摘要: An adhesive strength increasing method which does not need a bulky apparatus such as an ion implantation apparatus and prevent the characteristic of a material from being degraded by using a high level current ion of a low level energy, thus increasing an adhesive strength between a metal thin film and a glass substrate. In the present invention, a metal is deposited on a substrate an inert gas or a reactive gas having a predetermined energy is irradiatd to the deposited metal thin film, and then the metal thin film is sealed, thus increasing an adhesive strength between a metal thin film and a glass substrate.

    摘要翻译: 一种粘合强度增加方法,其不需要诸如离子注入装置的体积大的装置,并且通过使用低水平能量的高电流离子来防止材料的特性劣化,从而增加金属薄片 薄膜和玻璃基板。 在本发明中,将金属沉积在基板上,将惰性气体或具有预定能量的反应性气体照射到沉积的金属薄膜上,然后将金属薄膜密封,从而增加金属薄膜 薄膜和玻璃基板。

    Thin film deposition apparatus
    8.
    发明授权
    Thin film deposition apparatus 失效
    薄膜沉积装置

    公开(公告)号:US5855683A

    公开(公告)日:1999-01-05

    申请号:US797255

    申请日:1997-02-07

    CPC分类号: H01J37/32422 C23C14/32

    摘要: An improved thin film deposition apparatus which is capable of easily increasing the temperature of a crucible using low electric power, for thus reducing the maintenance cost of the system, and fabricating a thin film having a constant characteristic by using a lower current density variation based on a distance, for thus increasing the reliability of a thin film device, whereby it is possible to fabricate a more compact product and to more easily maintain the system, which includes a heat shielding cylindrical chamber, a cylindrical chamber located within the heat shielding cylindrical chamber, a crucible section including a crucible and a heat filament arranged at an inner and lower portion of the cylindrical chamber, an ionization section having an anode and an ionization filament arranged in an upper portion inside the cylindrical chamber, and a magnet for enhancing an ionization efficiency, an upper and lower filament support for supporting the heater filament and the ionization filament, an upper and lower flange, to which the upper and lower filaments are fixed, arranged in the cylindrical chamber in order for the upper and lower filaments to be detachable, and a grounding plate extended from the heat shielding plate and the electromagnetic field blocking cylindrical chamber located at the upper direction of the crucible section and forming of an acceleration electrode system together with the upper flange.

    摘要翻译: 一种改进的薄膜沉积装置,其能够使用低功率容易地增加坩埚的温度,从而降低系统的维护成本,并且通过使用基于以下的电流密度变化来制造具有恒定特性的薄膜 距离,从而提高薄膜器件的可靠性,由此可以制造更紧凑的产品并且更容易地保持包括隔热圆柱形室的系统,位于隔热圆柱形室内的圆柱形室 包括坩埚和布置在圆筒形室的内部和下部的热丝的坩埚部分,具有设置在圆筒形室内部上部的阳极和电离丝的离子化部分和用于增强电离的磁体 效率,用于支撑加热丝和电离的上,下丝支撑 灯丝,上,下灯丝固定在其上的上下法兰,布置在圆筒形室中,以便上下灯丝可拆卸,并且从隔热板延伸的接地板和电磁场阻塞 圆柱形室位于坩埚部分的上方,并与上凸缘一起形成加速电极系统。

    High density ceramic thick film fabrication method by screen printing
    10.
    发明授权
    High density ceramic thick film fabrication method by screen printing 失效
    高密度陶瓷厚膜制作方法通过丝网印刷

    公开(公告)号:US06749798B2

    公开(公告)日:2004-06-15

    申请号:US10030531

    申请日:2002-04-04

    IPC分类号: B28B100

    摘要: A high density ceramic thick film is fabricated by providing vehicle comprising an organic binder and solvent, dispersing ceramic powders into the vehicle to be paste, forming the paste to thick film by screen printing, removing the organic binder from the film, applying sol or sol-like solution to the surface of the film so that the sol or sol-like solution can infiltrate into the film, removing remaining sol or sol-like solution from the surface of the film, drying and preheating the film, and sintering the film.

    摘要翻译: 通过提供包含有机粘合剂和溶剂的载体制备高密度陶瓷厚膜,将陶瓷粉末分散在载体中进行糊化,通过丝网印刷将糊状物形成厚膜,从薄膜中除去有机粘合剂,将溶胶或溶胶 使溶胶或溶胶状溶液浸入薄膜中,从薄膜表面除去剩余的溶胶或溶胶状溶液,干燥并预热薄膜,并烧结薄膜。