公开(公告)号：US12062531B2

公开(公告)日：2024-08-13

申请号：US17311963

申请日：2020-04-07

Applicant: INTERPANE ENTWICKLUNGS—UND BERATUNGSGESELLSCHAFT MBH

Inventor： Dominik Wagner

IPC: C23C14/35 ,  H01J37/34

CPC classification number: H01J37/347 ,  C23C14/35 ,  H01J37/3405 ,  H01J37/3455 ,  H01J2237/332

Abstract: A method and a system for adjustable coating on a substrate using a magnetron sputtering apparatus are provided. The method comprises the steps of providing a magnetron assembly which comprises a plurality of magnets attached to a plurality of yokes and a plurality of actuating mechanisms (208), each operatively coupled to at least one of the plurality of yokes. The method further comprises automatically determining individual positions of each of the plurality of yokes of the magnetron assembly on the basis of at least one parameter, and adjusting individually positions of each of the plurality of yokes of the magnetron assembly in accordance with the automatically determined individual positions.