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公开(公告)号：US08850980B2
公开(公告)日：2014-10-07
申请号：US11694612
申请日：2007-03-30
CPC分类号： G03B27/62 , B82Y10/00 , B82Y40/00 , G03B27/42 , G03F7/0002 , G03F9/00 , G03F9/7042 , G03F9/7076 , G03F9/7084
摘要： The present invention is directed towards a choice of the shape of the patterned fields for Level 0 (patterned by imprint or photolithography or e-beam, etc.) and Level 1 (patterned by imprint) such that these shapes when tessellated together eliminate the open areas causes by the moats.
摘要翻译： 本发明涉及用于0级（通过压印或光刻或电子束等图案化）和1级（通过印记图案化）的图案化场的形状的选择，使得这些形状在细分时一起消除开路 地区由护城河引起。
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公开(公告)号：US07939131B2
公开(公告)日：2011-05-10
申请号：US10919224
申请日：2004-08-16
申请人： Frank Y. Xu , Christopher J. Mackay , Pankaj B. Lad , Ian M. McMackin , Van N. Truskett , Wesley D. Martin , Edward B. Fletcher , David C. Wang , Nicholas A. Stacey , Michael P. C. Watts
发明人： Frank Y. Xu , Christopher J. Mackay , Pankaj B. Lad , Ian M. McMackin , Van N. Truskett , Wesley D. Martin , Edward B. Fletcher , David C. Wang , Nicholas A. Stacey , Michael P. C. Watts
IPC分类号： B05D3/12
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , Y10T428/1386
摘要： The present invention includes a method and a composition to form a layer on a substrate having uniform etch characteristics. To that end, the method includes controlling variations in the characteristics of a solid layer, such etch characteristics over the area of the solid layer as a function of the relative rates of evaporation of the liquid components that comprise the composition from which the solid layer is formed.
摘要翻译： 本发明包括在具有均匀蚀刻特性的基底上形成层的方法和组合物。 为此，该方法包括控制固体层的特性的变化，这种固体层面积上的这种蚀刻特性是构成组合物的液体组分的相对蒸发速率的函数的函数，其中固体层是固体层 形成。
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3.发明申请Method of Concurrently Patterning a Substrate Having a Plurality of Fields and a Plurality of Alignment Marks 审中-公开同时形成具有多个场和多个对准标记的基板的方法公开(公告)号：US20100278954A1
公开(公告)日：2010-11-04
申请号：US12835018
申请日：2010-07-13
IPC分类号： B28B11/08
CPC分类号： B29C43/021 , B29C43/003 , B29C43/58 , B29C2043/025 , B29C2043/142 , B29C2043/5825 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/703 , G03F9/7042 , G03F9/7076 , G03F9/708 , G03F9/7084 , Y10S977/887
摘要： Imprint lithography templates for patterning substrates are described. The templates include a section having a mold a first pattern of alignment forming areas and template alignment marks. The additional sections are generally devoid of a mold. One or more of the additional section may include the first pattern of a second pattern of alignment forming areas and template alignment marks. The second pattern may correspond to the first pattern.
摘要翻译： 描述用于图案化基板的印刷光刻模板。 模板包括具有模具的部分，其具有对准形成区域的第一图案和模板对准标记。 附加部分通常没有模具。 附加部分中的一个或多个可以包括对准形成区域和模板对准标记的第二图案的第一图案。 第二图案可以对应于第一图案。
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公开(公告)号：US20090256289A1
公开(公告)日：2009-10-15
申请号：US12488642
申请日：2009-06-22
IPC分类号： B29C35/08
CPC分类号： G03F7/0002 , B29C43/003 , B29C43/021 , B29C43/34 , B29C2043/025 , B29C2043/142 , B29C2043/3438 , B29K2105/0002 , B82Y10/00 , B82Y40/00
摘要： A method/process for curing imprint on a template prior to contact with a substrate. A curing process is used to adhere the imprint to a wafer or substrate. Monomer is deposited on a template and then partially cured using a UV exposure. The exposure is controlled so that the imprint is cured past the gel point, but still retains a thin liquid layer of uncured monomer at the surface that will bond with the wafer. Further, this partially cured layer enables the alignment adjustments between the template and the substrate to be performed after contact between the two without pulling any monomer out of the features.
摘要翻译： 在与基底接触之前在模板上固化印模的方法/方法。 使用固化过程将印记粘附到晶片或基板上。 将单体沉积在模板上，然后使用UV曝光部分固化。 控制曝光使得印迹经过凝胶点固化，但仍然保留在将与晶片结合的表面上的未固化单体的薄液体层。 此外，这种部分固化的层使得能够在两者之间接触之后进行模板和基板之间的对准调整，而不将任何单体拉出特征。
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公开(公告)号：US07491637B2
公开(公告)日：2009-02-17
申请号：US11470829
申请日：2006-09-07
IPC分类号： H01L21/4763
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , C03C17/3417 , C03C2217/77 , C03C2218/31 , C03C2218/328
摘要： The present invention is directed to a method forming conductive templates that includes providing a substrate; forming a mesa on the substrate; and forming a plurality of recessions and projections on the mesa with a nadir of the recessions comprising electrically conductive material and the projections comprising electrically insulative material. It is desired that the mesa be substantially transparent to a predetermined wavelength of radiation, for example ultraviolet radiation. As a result, it is desired to form the electrically conductive material from a material that allows ultraviolet radiation to propagate therethrough. In the present invention indium tin oxide is a suitable material from which to form the electrical conductive material.
摘要翻译： 本发明涉及一种形成导电模板的方法，其包括提供衬底; 在基板上形成台面; 以及在所述台面上形成多个凹陷和突出部，其中所述凹陷的最低点包括导电材料，并且所述突起包括电绝缘材料。 期望台面对于预定波长的辐射例如紫外线辐射基本上是透明的。 结果，期望由允许紫外线辐射传播的材料形成导电材料。 在本发明中，氧化铟锡是形成导电材料的合适材料。
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6.发明授权公开(公告)号：US07270533B2
公开(公告)日：2007-09-18
申请号：US10898037
申请日：2004-07-23
申请人： Ian M. McMackin , Nicholas A. Stacey , Daniel A. Babbs , Duane J. Voth , Mathew P. C. Watts , Van N. Truskett , Frank Y. Xu , Ronald D. Voisin , Pankaj B. Lad
发明人： Ian M. McMackin , Nicholas A. Stacey , Daniel A. Babbs , Duane J. Voth , Mathew P. C. Watts , Van N. Truskett , Frank Y. Xu , Ronald D. Voisin , Pankaj B. Lad
IPC分类号： B29C59/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , Y10S425/06 , Y10S425/815 , Y10S438/909
摘要： The present invention is directed toward a system for introducing a flow of a fluid between a mold, disposed on a template, and a substrate, the system including, a fluid supply system; and a chuck body having a baffle and first and second apertures, the first and second apertures disposed between the baffle and the template, with the first and second apertures in fluid communication with the fluid supply system to produce a turbulent flow of the fluid between the mold and said substrate.
摘要翻译： 本发明涉及一种用于在设置在模板上的模具和基板之间引入流体流的系统，该系统包括：流体供应系统; 以及具有挡板和第一和第二孔的卡盘体，所述第一和第二孔设置在挡板和模板之间，其中第一和第二孔与流体供应系统流体连通，以在流体供应系统之间产生紊流 模具和所述基板。
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公开(公告)号：US07309225B2
公开(公告)日：2007-12-18
申请号：US10917761
申请日：2004-08-13
申请人： Ian M. McMackin , Pankaj B. Lad
发明人： Ian M. McMackin , Pankaj B. Lad
CPC分类号： G03F9/7084 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/7076 , Y10S425/81
摘要： The present invention is directed to a body having a first area and a second area separated by a recess. The recess is dimensioned to reduce, if not prevent, a liquid moving along a surface of the body from traveling between the first and second areas. One or more alignment marks may be positioned within one of the first and second areas. In this manner, the recess functions as a moat by reducing, if not preventing, a quantity of the liquid from being in superimposition with the alignment marks.
摘要翻译： 本发明涉及具有由凹部分开的第一区域和第二区域的主体。 凹部的尺寸被设计成减小（如果不是防止）沿着身体的表面移动的液体在第一和第二区域之间行进。 一个或多个对准标记可以位于第一和第二区域之一内。 以这种方式，通过减少（如果不防止）一定量的液体与对准标记重叠，凹槽用作护城河。
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公开(公告)号：US07281919B2
公开(公告)日：2007-10-16
申请号：US11101139
申请日：2005-04-07
IPC分类号： B29C31/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , Y10S977/887
摘要： A system for controlling a volume of liquid on a mold that features a body defining a volume with an aperture formed into the body and positioned proximate to the mold. A pump system is in fluid communication with the body, and the aperture and the pump system are established to create a stream of fluid moving between the mold and the volume. In this manner a quantity of fluid is removed while retained upon the mold is a desired portion of the fluid to undertake imprint lithographic processes.
摘要翻译： 一种用于控制模具上的液体体积的系统，其特征在于，具有限定体积的主体，所述体积具有形成在所述主体中并且定位成靠近所述模具的孔。 泵系统与主体流体连通，并且孔和泵系统被建立以产生在模具和体积之间移动的流体流。 以这种方式，除去一定量的流体，同时保留在模具上是流体的期望部分以进行压印光刻工艺。
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9.发明授权Method of providing desirable wetting and release characteristics between a mold and a polymerizable composition 有权在模具和可聚合组合物之间提供所需的润湿和释放特性的方法公开(公告)号：US07837921B2
公开(公告)日：2010-11-23
申请号：US11244428
申请日：2005-10-05
CPC分类号： G03F7/0002 , B41C1/10 , B41M7/0072 , B41M7/0081 , B82Y10/00 , B82Y30/00 , B82Y40/00 , Y10S977/887
摘要： The present invention provides a method that features improved wetting characteristics while allowing preferential adhesion and release characteristics with respect to a substrate and a mold having imprinting material disposed therebetween. The method includes coating a surface of the mold with a volume of surfactant containing solution. The surfactant in the solution includes a hydrophobic component consisting essentially of a plurality of fluorine-containing molecules. The distribution of the plurality of the fluorine atoms in the fluorine-containing molecules, as well as the fluorine-containing molecules throughout the volume provides a desired contact angle with respect to a polymerizable composition disposed on the substrate. The contact angle is in a range of 50° or less.
摘要翻译： 本发明提供了一种具有改进的润湿特性的方法，同时允许相对于基材和在其之间设置有压印材料的模具的优先粘合和释放特性。 该方法包括用一定体积的含表面活性剂的溶液涂覆模具的表面。 溶液中的表面活性剂包括基本上由多个含氟分子组成的疏水组分。 含氟分子中的多个氟原子的分布以及整个体积中的含氟分子相对于设置在基材上的可聚合组合物提供期望的接触角。 接触角在50°以下的范围内。
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10.发明授权公开(公告)号：US07635445B2
公开(公告)日：2009-12-22
申请号：US11108208
申请日：2005-04-18
申请人： Byung-Jin Choi , Anshuman Cherala , Yeong-jun Choi , Mario J. Meissl , Sidlgata V. Sreenivasan , Norman E. Schumaker , Xiaoming Lu , Ian M. McMackin , Daniel A. Babbs
发明人： Byung-Jin Choi , Anshuman Cherala , Yeong-jun Choi , Mario J. Meissl , Sidlgata V. Sreenivasan , Norman E. Schumaker , Xiaoming Lu , Ian M. McMackin , Daniel A. Babbs
IPC分类号： H01L21/31 , H01L21/469
CPC分类号： H01L21/6875 , B82Y10/00 , B82Y40/00 , G03F7/0002 , H01L21/6838 , Y10S977/887
摘要： The present invention is directed towards a method of separating a mold, included in a template, from a layer disposed on a substrate, the method including, inter alia, applying a separation force to the template to separate the template from the layer; and facilitating localized deformation in the substrate to reduce the separation force required to achieve separation.
摘要翻译： 本发明涉及一种将包含在模板中的模具与设置在基板上的层分离的方法，该方法尤其包括向模板施加分离力以将模板与层分离; 并且促进基板中的局部变形以减小实现分离所需的分离力。
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