公开(公告)号：US08245751B2

公开(公告)日：2012-08-21

申请号：US12260529

申请日：2008-10-29

申请人： Jae Seok Hwang

发明人： Jae Seok Hwang

IPC分类号： B32B37/10

CPC分类号： B32B37/1018 ,  B32B37/0046 ,  B32B2457/20 ,  G02F1/1303 ,  G02F1/1339 ,  Y10T156/1126 ,  Y10T156/15 ,  Y10T156/17 ,  Y10T156/1928

摘要： A substrate bonding apparatus and method are provided. The substrate bonding apparatus may include a board having a receiving surface opposite to a substrate fixed at one side thereof, a plurality of chucking members located between the receiving surface of the board and the substrate, and a substrate separation device to separate the substrate from the chucking members. The substrate separation device includes a pusher for pushing the substrate to separate the substrate from the chucking members, and a base plate installed at the receiving surface of the board, the base plate having an installation space to install the pusher formed therein. The pusher protrudes out of the base plate through an inlet and outlet port located at one end of the installation space to pressurize the substrate.

摘要翻译： 提供了一种基板接合装置和方法。 基板接合装置可以包括具有与固定在其一侧的基板相对的接收表面的板，位于板的接收表面和基板之间的多个夹紧构件，以及将基板与基板分离的基板分离装置 夹紧构件。 基板分离装置包括用于推动基板以将基板与夹紧构件分离的推动器以及安装在基板的接收表面上的基板，该基板具有安装在其中的推动器的安装空间。 推动器通过位于安装空间一端的入口和出口突出出基板，以对基板加压。

公开(公告)号：US20110067805A1

公开(公告)日：2011-03-24

申请号：US12957780

申请日：2010-12-01

申请人： Jae Seok HWANG ,  Kyung Mi Kim

发明人： Jae Seok HWANG ,  Kyung Mi Kim

IPC分类号： B32B37/10 ,  B32B37/18

CPC分类号： G02F1/1333 ,  G02F1/1303 ,  G02F2001/133354

摘要： An apparatus for attaching substrates includes an upper chamber for holding an upper substrate and a lower chamber for holding a lower substrate which is to be attached to the upper substrate. The lower chamber is moved up and down so as to come together with the upper chamber to form a sealed attaching space. A substrate receiving part is fixed to a frame of the apparatus so that it does not move as the lower chamber is raised and lowered. The substrate receiving part alternatively projects from the lower chamber is the lower chamber is moved down, or is recessed into the top of the lower chamber when the lower chamber is lifted up.

摘要翻译： 用于安装基板的装置包括用于保持上基板的上室和用于保持要附接到上基板的下基板的下室。 下腔上下移动，与上腔一起形成密封的安装空间。 衬底接收部分固定到设备的框架上，使得其在下室升高和降低时不移动。 当下室被提升时，基底接收部分从下腔室交替地突出，下腔室向下移动，或者凹入下腔室的顶部。

公开(公告)号：US07864289B2

公开(公告)日：2011-01-04

申请号：US11866877

申请日：2007-10-03

申请人： Jae Seok Hwang ,  Kyung Mi Kim

发明人： Jae Seok Hwang ,  Kyung Mi Kim

IPC分类号： G02F1/1339 ,  B23K37/00

CPC分类号： G02F1/1333 ,  G02F1/1303 ,  G02F2001/133354

摘要： An apparatus for attaching substrates includes an upper chamber for holding an upper substrate and a lower chamber for holding a lower substrate which is to be attached to the upper substrate. The lower chamber is moved up and down so as to come together with the upper chamber to form a sealed attaching space. A substrate receiving part is fixed to a frame of the apparatus so that it does not move as the lower chamber is raised and lowered. The substrate receiving part alternatively projects from the lower chamber is the lower chamber is moved down, or is recessed into the top of the lower chamber when the lower chamber is lifted up.

公开(公告)号：US20090114348A1

公开(公告)日：2009-05-07

申请号：US12260529

申请日：2008-10-29

申请人： Jae Seok Hwang

发明人： Jae Seok Hwang

IPC分类号： B32B37/10

CPC分类号： B32B37/1018 ,  B32B37/0046 ,  B32B2457/20 ,  G02F1/1303 ,  G02F1/1339 ,  Y10T156/1126 ,  Y10T156/15 ,  Y10T156/17 ,  Y10T156/1928

摘要： A substrate bonding apparatus and method are provided. The substrate bonding apparatus may include a board having a receiving surface opposite to a substrate fixed at one side thereof, a plurality of chucking members located between the receiving surface of the board and the substrate, and a substrate separation device to separate the substrate from the chucking members. The substrate separation device includes a pusher for pushing the substrate to separate the substrate from the chucking members, and a base plate installed at the receiving surface of the board, the base plate having an installation space to install the pusher formed therein. The pusher protrudes out of the base plate through an inlet and outlet port located at one end of the installation space to pressurize the substrate.

摘要翻译： 提供了一种基板接合装置和方法。 基板接合装置可以包括具有与固定在其一侧的基板相对的接收表面的板，位于板的接收表面和基板之间的多个夹紧构件，以及将基板与基板分离的基板分离装置 夹紧构件。 基板分离装置包括用于推动基板以将基板与夹紧构件分离的推动器，以及安装在基板的接收表面处的基板，该基板具有用于安装其中形成的推动器的安装空间。 推动器通过位于安装空间一端的入口和出口突出出基板，以对基板加压。

公开(公告)号：US20090056866A1

公开(公告)日：2009-03-05

申请号：US12132051

申请日：2008-06-03

申请人： Jae Seok HWANG ,  Sung Kwon HWANGBO

发明人： Jae Seok HWANG ,  Sung Kwon HWANGBO

IPC分类号： B32B38/10 ,  B32B37/00

CPC分类号： B32B37/0046 ,  B32B37/1018 ,  B32B37/12 ,  B32B38/1858 ,  B32B2038/1891 ,  B32B2310/0463 ,  B32B2310/0831 ,  B32B2457/202 ,  Y10T156/15

摘要： A substrate bonding apparatus including a first chamber including a first surface plate on which a first substrate is received, a surface plate lift for lifting the first surface plate, a second chamber including a second surface plate on which a second substrate to be bonded to the first substrate is received, at least one adhesive included with the first surface plate to adhere to the first substrate, and an adhesive lift for independently lifting the adhesive.

摘要翻译： 一种基板接合装置，包括：第一室，其包括容纳有第一基板的第一表面板，用于提升第一表面板的表面板升降板;第二室，包括第二表面板，待接合的第二基板 接收第一基板，包括在第一表面板中的至少一个粘合剂以粘附到第一基板，以及用于独立地提升粘合剂的粘合提升件。

公开(公告)号：US08072573B2

公开(公告)日：2011-12-06

申请号：US12957780

申请日：2010-12-01

申请人： Jae Seok Hwang ,  Kyung Mi Kim

发明人： Jae Seok Hwang ,  Kyung Mi Kim

IPC分类号： G02F1/1339 ,  B23K37/00

CPC分类号： G02F1/1333 ,  G02F1/1303 ,  G02F2001/133354

摘要： An apparatus for attaching substrates includes an upper chamber for holding an upper substrate and a lower chamber for holding a lower substrate which is to be attached to the upper substrate. The lower chamber is moved up and down so as to come together with the upper chamber to form a sealed attaching space. A substrate receiving part is fixed to a frame of the apparatus so that it does not move as the lower chamber is raised and lowered. The substrate receiving part alternatively projects from the lower chamber is the lower chamber is moved down, or is recessed into the top of the lower chamber when the lower chamber is lifted up.

摘要翻译： 用于安装基板的装置包括用于保持上基板的上室和用于保持要附接到上基板的下基板的下室。 下腔上下移动，与上腔一起形成密封的安装空间。 衬底接收部分固定到设备的框架上，使得其在下室升高和降低时不移动。 当下室被提升时，基底接收部分从下腔室交替地突出，下腔室向下移动，或者凹入下腔室的顶部。

公开(公告)号：US20080135127A1

公开(公告)日：2008-06-12

申请号：US11866877

申请日：2007-10-03

申请人： Jae Seok HWANG ,  Kyung Mi Kim

发明人： Jae Seok HWANG ,  Kyung Mi Kim

IPC分类号： B65B31/04

CPC分类号： G02F1/1333 ,  G02F1/1303 ,  G02F2001/133354

摘要： An apparatus for attaching substrates includes an upper chamber for holding an upper substrate and a lower chamber for holding a lower substrate which is to be attached to the upper substrate. The lower chamber is moved up and down so as to come together with the upper chamber to form a sealed attaching space. A substrate receiving part is fixed to a frame of the apparatus so that it does not move as the lower chamber is raised and lowered. The substrate receiving part alternatively projects from the lower chamber is the lower chamber is moved down, or is recessed into the top of the lower chamber when the lower chamber is lifted up.

摘要翻译： 用于安装基板的装置包括用于保持上基板的上室和用于保持要附接到上基板的下基板的下室。 下腔上下移动，与上腔一起形成密封的安装空间。 衬底接收部分固定到设备的框架上，使得其在下室升高和降低时不移动。 当下室被提升时，基底接收部分从下腔室交替地突出，下腔室向下移动，或者凹入下腔室的顶部。

公开(公告)号：US07765682B2

公开(公告)日：2010-08-03

申请号：US11866892

申请日：2007-10-03

申请人： Jae Seok Hwang ,  Dong Gun Kim

发明人： Jae Seok Hwang ,  Dong Gun Kim

IPC分类号： B23P19/00 ,  H01L21/10

CPC分类号： H01L21/67092 ,  G02F2001/133354 ,  Y10T29/5313 ,  Y10T29/53191

摘要： An apparatus for attaching substrates is provided with a buffering member between an upper chamber and a lower chamber. The buffering member reduces a load applied to a lifting device during vacuum exhaustion of a sealing space between the chambers. Therefore, it is possible to reduce a force applied to a lifting screw and a frame supporting a chamber, thereby extending the lifetime of the substrate attaching apparatus and component replacement. Also, it is possible to increase a lower chamber supporting force of a lifting part by coupling the lifting part to an external frame with a fixing device. As the result, the lower chamber is stably fixed and thus it is possible to reduce failures in a substrate attaching process.

摘要翻译： 用于安装基板的装置在上室和下室之间设置有缓冲构件。 缓冲构件减小了在室之间的密封空间的真空耗尽期间施加到提升装置的负载。 因此，可以减小施加在提升螺钉和支撑室的框架上的力，从而延长基板安装装置的寿命和部件更换。 此外，通过用提升部件将定位装置连接到外部框架，可以增加提升部件的下室支撑力。 结果，下室稳定地固定，因此可以减少基板附着过程中的故障。

公开(公告)号：US20090065152A1

公开(公告)日：2009-03-12

申请号：US12132100

申请日：2008-06-03

申请人： Jae Seok HWANG

发明人： Jae Seok HWANG

IPC分类号： B32B37/12

CPC分类号： B32B37/0046 ,  B32B37/12 ,  B32B38/18 ,  B32B38/1833 ,  B32B38/1858 ,  B32B2038/1891 ,  B32B2309/68 ,  B32B2457/202 ,  G02F1/1303 ,  G02F2001/133354 ,  G02F2202/28 ,  Y10T156/17 ,  Y10T156/1702 ,  Y10T156/1744 ,  Y10T156/19

摘要： A substrate bonding apparatus includes a first chamber including a first surface plate on which a first substrate is supported, a second chamber spaced from the first chamber and including a second surface plate on which a second substrate to be bonded to the first substrate is supported, an adhesive module provided on the first surface plate and including a plurality of adhesive rubber areas holding the first substrate, and a lift module for lifting at least one of the plurality of adhesive rubber areas.

摘要翻译： 基板接合装置包括：第一室，其包括第一表面板，第一基板被支撑在第一表面板上;第二室，与第一室间隔开，并且包括第二表面板，第二基板被接合到第一基板上， 设置在所述第一表面板上并且包括保持所述第一基板的多个粘合橡胶区域的粘合剂模块和用于提升所述多个粘合橡胶区域中的至少一个的提升模块。

公开(公告)号：US20080124199A1

公开(公告)日：2008-05-29

申请号：US11866892

申请日：2007-10-03

申请人： Jae Seok Hwang ,  Dong Gun Kim

发明人： Jae Seok Hwang ,  Dong Gun Kim

IPC分类号： H01L21/67

CPC分类号： H01L21/67092 ,  G02F2001/133354 ,  Y10T29/5313 ,  Y10T29/53191

摘要： An apparatus for attaching substrates is provided with a buffering member between an upper chamber and a lower chamber. The buffering member reduces a load applied to a lifting device during vacuum exhaustion of a sealing space between the chambers. Therefore, it is possible to reduce a force applied to a lifting screw and a frame supporting a chamber, thereby extending the lifetime of the substrate attaching apparatus and component replacement. Also, it is possible to increase a lower chamber supporting force of a lifting part by coupling the lifting part to an external frame with a fixing device. As the result, the lower chamber is stably fixed and thus it is possible to reduce failures in a substrate attaching process.

摘要翻译： 用于安装基板的装置在上室和下室之间设置有缓冲构件。 缓冲构件减小了在室之间的密封空间的真空耗尽期间施加到提升装置的负载。 因此，可以减小施加在提升螺钉和支撑室的框架上的力，从而延长基板安装装置的寿命和部件更换。 此外，通过用提升部件将定位装置连接到外部框架，可以增加提升部件的下室支撑力。 结果，下室稳定地固定，因此可以减少基板附着过程中的故障。