Measurement apparatus
    1.
    发明授权
    Measurement apparatus 失效
    测量装置

    公开(公告)号:US08744792B2

    公开(公告)日:2014-06-03

    申请号:US12886610

    申请日:2010-09-21

    IPC分类号: G06F19/00

    摘要: A measurement apparatus is disclosed in which a barrier separates a chamber into a first region and a second region. The barrier is of a known thickness, and it comprises holes having a known radius. Gas flow means provide a flow of a carbon dioxide in the first region and a flow of a nitrogen in the second region. A gas detector measures the concentration of carbon dioxide in the second region and a processor calculates the theoretical diffusive flux from one region to another based on the known properties of the through-holes. The processor is arranged to calculate a calibration parameter in order to relate the measured parameter to the theoretical diffusive flux, based on the known properties of the through-holes.

    摘要翻译: 公开了一种测量装置,其中屏障将腔室分隔成第一区域和第二区域。 阻挡层具有已知的厚度,并且其包括具有已知半径的孔。 气流意味着提供第一区域中的二氧化碳流和第二区域中的氮气流。 气体检测器测量第二区域中二氧化碳的浓度,并且处理器基于通孔的已知性质计算从一个区域到另一个区域的理论扩散通量。 处理器被布置为基于通孔的已知特性来计算校准参数以便将测量的参数与理论扩散通量相关联。

    MEASUREMENT APPARATUS
    2.
    发明申请
    MEASUREMENT APPARATUS 失效
    测量装置

    公开(公告)号:US20110231136A1

    公开(公告)日:2011-09-22

    申请号:US12886610

    申请日:2010-09-21

    IPC分类号: G06F19/00

    摘要: A measurement apparatus is disclosed in which a barrier (2) separates a chamber into a first region (10) and a second region (20). The barrier (50) is of a known thickness (T), and it comprises holes having a known radius (R). Gas flow means provide a flow of a carbon dioxide (12) in the first region (10) and a flow of a nitrogen (22) in the second region (20). A gas detector (28) measures the concentration of carbon dioxide in the second region (20) and a processor (32) calculates the theoretical diffusive flux from one region to another based on the known properties of the through-holes. The processor (32) is arranged to calculate a calibration parameter in order to relate the measured parameter to the theoretical diffusive flux, based on the known properties of the through-holes.

    摘要翻译: 公开了一种测量装置,其中屏障(2)将腔室分隔成第一区域(10)和第二区域(20)。 阻挡层(50)具有已知的厚度(T),并且其包括具有已知半径(R)的孔。 气流意味着在第一区域(10)中提供二氧化碳(12)的流动以及第二区域(20)中的氮气流(22)。 气体检测器(28)测量第二区域(20)中二氧化碳的浓度,并且处理器(32)基于通孔的已知性质计算从一个区域到另一个区域的理论扩散通量。 处理器(32)被布置成基于通孔的已知特性来计算校准参数以便将测量的参数与理论扩散通量相关联。