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公开(公告)号：US20120132291A1
公开(公告)日：2012-05-31
申请号：US13306940
申请日：2011-11-29
申请人： Joseph R. MONKOWSKI , Adam J. MONKOWSKI , Jialing CHEN , Tao DING
发明人： Joseph R. MONKOWSKI , Adam J. MONKOWSKI , Jialing CHEN , Tao DING
IPC分类号： F15D1/00
CPC分类号： F15D1/025 , G01F25/003 , G01F25/0053 , G05D7/0635 , G05D16/202 , Y10T137/0396 , Y10T137/8158
摘要： An apparatus to measure the transient response of a mass flow controller (MFC). The size of a variable orifice, upstream of the MFC, is controlled such that the pressure between the orifice and the MFC is held constant during the entire time that the MFC is going through its transient response. The known relationship between the size of the orifice and the flow through it allows a determination of the transient response of the MFC.
摘要翻译： 一种测量质量流量控制器（MFC）的瞬态响应的装置。 控制MFC上游的可变孔口的尺寸，使得孔口和MFC之间的压力在MFC经历其瞬态响应的整个时间内保持恒定。 孔口的尺寸和通过其的流动之间的已知关系允许确定MFC的瞬态响应。
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公开(公告)号：US20110011183A1
公开(公告)日：2011-01-20
申请号：US12891714
申请日：2010-09-27
IPC分类号： G01F1/708
CPC分类号： G01F25/0053 , G01F25/0038 , Y10T137/0324 , Y10T137/0379 , Y10T137/7759 , Y10T137/7761 , Y10T137/7762
摘要： Methods and apparatus utilize a rate of drop in pressure upstream of a gas flow controller (GFC) to accurately measure a rate of flow through the GFC. Measurement of the gas flow through the many gas flow controllers in production use today is enabled, without requiring any special or sophisticated pressure regulators or other special components. Various provisions ensure that none of the changes in pressure that occur during or after the measurement perturb the constant flow of gas through the GFC under test.
摘要翻译： 方法和设备利用气体流量控制器（GFC）上游压力的下降速率来精确测量通过GFC的流量。 通过今天生产使用中的许多气体流量控制器的气体流量的测量是可以实现的，而不需要任何特殊或复杂的压力调节器或其他特殊部件。 各种规定确保在测量期间或之后发生的压力变化不会影响通过被测GFC的气体的恒定流量。
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公开(公告)号：US07823436B2
公开(公告)日：2010-11-02
申请号：US12354723
申请日：2009-01-15
IPC分类号： G01P21/00
CPC分类号： G01F25/0053 , G01F25/0038 , Y10T137/0324 , Y10T137/0379 , Y10T137/7759 , Y10T137/7761 , Y10T137/7762
摘要： Methods and apparatus utilize a rate of drop in pressure upstream of a gas flow controller (GFC) to accurately measure a rate of flow through the GFC. Measurement of the gas flow through the many gas flow controllers in production use today is enabled, without requiring any special or sophisticated pressure regulators or other special components. Various provisions ensure that none of the changes in pressure that occur during or after the measurement perturb the constant flow of gas through the GFC under test.
摘要翻译： 方法和设备利用气体流量控制器（GFC）上游压力的下降速率来精确测量通过GFC的流量。 通过今天生产使用中的许多气体流量控制器的气体流量的测量是可以实现的，而不需要任何特殊或复杂的压力调节器或其他特殊部件。 各种规定确保在测量期间或之后发生的压力变化不会影响通过被测GFC的气体的恒定流量。
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公开(公告)号：US20120304781A1
公开(公告)日：2012-12-06
申请号：US13584736
申请日：2012-08-13
IPC分类号： G01F1/34
CPC分类号： G01F25/0053 , G01F25/0038 , Y10T137/0324 , Y10T137/0379 , Y10T137/7759 , Y10T137/7761 , Y10T137/7762
摘要： Methods and apparatus utilize a rate of drop in pressure upstream of a gas flow controller (GFC) to accurately measure a rate of flow through the GFC. Measurement of the gas flow through the many gas flow controllers in production use today is enabled, without requiring any special or sophisticated pressure regulators or other special components. Various provisions ensure that none of the changes in pressure that occur during or after the measurement perturb the constant flow of gas through the GFC under test. A pressure regulator is coupled to a gas source. The GFC is positioned downstream of the pressure regulator. A pressure transducer is measuring pressure in a volume between the pressure regulator and the GFC, wherein means are provided for increasing the pressure in the volume.
摘要翻译： 方法和设备利用气体流量控制器（GFC）上游压力的下降速率来精确测量通过GFC的流量。 通过今天生产使用中的许多气体流量控制器的气体流量的测量是可以实现的，而不需要任何特殊或复杂的压力调节器或其他特殊部件。 各种规定确保在测量期间或之后发生的压力变化不会扰乱通过被测GFC的气体的恒定流量。 压力调节器耦合到气源。 GFC位于压力调节器的下游。 压力传感器测量压力调节器和GFC之间的体积压力，其中提供用于增加体积中的压力的装置。
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公开(公告)号：US08265888B2
公开(公告)日：2012-09-11
申请号：US12634629
申请日：2009-12-09
申请人： Sherk Chung , James MacAllen Chalmers , Jialing Chen , Yi Wang , Paul Tran , Sophia Leonidovna Shtilman , Joseph R. Monkowski
发明人： Sherk Chung , James MacAllen Chalmers , Jialing Chen , Yi Wang , Paul Tran , Sophia Leonidovna Shtilman , Joseph R. Monkowski
IPC分类号： G01F1/34
CPC分类号： G01F1/34 , G01F15/046 , Y10T137/0324
摘要： An in-situ gas flow measurement controller measures the temperature and rate of pressure drop upstream from a flow control device (FCD). The controller samples the pressure and temperature data and applies the equivalent of a decimating filter to the data to produce filtered data at a slower sampling rate. The controller derives timestamps by counting ticks from the sampling clock of the A/D converter that is sampling the pressure at regular intervals to ensure the timestamps associated with the pressure samples are accurate and do not contain jitter that is associated with software clocks. The controller additionally normalizes the temperature reading to account for power supply fluctuations, filters out noise from the pressure and temperature readings, and excludes data during periods of instability. It calculates the gas flow rate accounting for possible non-linearities in the pressure measurements, and provides the computed gas flow measurement via one of many possible interfaces.
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6.发明申请公开(公告)号：US20110137581A1
公开(公告)日：2011-06-09
申请号：US12634568
申请日：2009-12-09
申请人： Sherk CHUNG , James MacAllen Chalmers , Jialing Chen , Yi Wang , Paul Tran , Sophia Leonidovna Shtilman , Joseph R. Monkowski
发明人： Sherk CHUNG , James MacAllen Chalmers , Jialing Chen , Yi Wang , Paul Tran , Sophia Leonidovna Shtilman , Joseph R. Monkowski
IPC分类号： G01F1/34
CPC分类号： G01F15/061 , G01F1/88 , G01F15/04 , G01F15/043 , Y10T137/0324
摘要： An in-situ gas flow measurement controller measures the temperature and rate of pressure drop upstream from a flow control device (FCD). The controller samples the pressure and temperature data and applies the equivalent of a decimating filter to the data to produce filtered data at a slower sampling rate. The controller derives timestamps by counting ticks from the sampling clock of the A/D converter that is sampling the pressure at regular intervals to ensure the timestamps associated with the pressure samples are accurate and do not contain jitter that is associated with software clocks. The controller additionally normalizes the temperature reading to account for power supply fluctuations, filters out noise from the pressure and temperature readings, and excludes data during periods of instability. It calculates the gas flow rate accounting for possible non-linearities in the pressure measurements, and provides the computed gas flow measurement via one of many possible interfaces.
摘要翻译： 原位气体流量测量控制器测量流量控制装置（FCD）上游的压降的温度和速率。 控制器对压力和温度数据进行采样，并将等效的抽取滤波器应用于数据，以较慢的采样速率产生滤波数据。 控制器通过对A / D转换器的采样时钟进行计数来计算时间戳，A / D转换器采样时间间隔采样压力，以确保与压力样本相关联的时间戳准确，并且不包含与软件时钟相关的抖动。 控制器另外对温度读数进行标准化以考虑电源波动，从压力和温度读数滤除噪声，并在不稳定期间排除数据。 它计算气体流量，考虑压力测量中可能的非线性，并通过许多可能的接口之一提供计算的气体流量测量。
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公开(公告)号：US08271210B2
公开(公告)日：2012-09-18
申请号：US12634568
申请日：2009-12-09
申请人： Sherk Chung , James MacAllen Chalmers , Jialing Chen , Yi Wang , Paul Tran , Sophia Leonidovna Shtilman , Joseph R. Monkowski
发明人： Sherk Chung , James MacAllen Chalmers , Jialing Chen , Yi Wang , Paul Tran , Sophia Leonidovna Shtilman , Joseph R. Monkowski
IPC分类号： G06F1/34
CPC分类号： G01F15/061 , G01F1/88 , G01F15/04 , G01F15/043 , Y10T137/0324
摘要： An in-situ gas flow measurement controller measures the temperature and rate of pressure drop upstream from a flow control device (FCD). The controller samples the pressure and temperature data and applies the equivalent of a decimating filter to the data to produce filtered data at a slower sampling rate. The controller derives timestamps by counting ticks from the sampling clock of the A/D converter that is sampling the pressure at regular intervals to ensure the timestamps associated with the pressure samples are accurate and do not contain jitter that is associated with software clocks. The controller additionally normalizes the temperature reading to account for power supply fluctuations, filters out noise from the pressure and temperature readings, and excludes data during periods of instability. It calculates the gas flow rate accounting for possible non-linearities in the pressure measurements, and provides the computed gas flow measurement via one of many possible interfaces.
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公开(公告)号：US08240324B2
公开(公告)日：2012-08-14
申请号：US12355654
申请日：2009-01-16
IPC分类号： G05D7/06
CPC分类号： G01F25/0053 , G01F25/0038 , Y10T137/0324 , Y10T137/0379 , Y10T137/7759 , Y10T137/7761 , Y10T137/7762
摘要： Methods and apparatus utilize a rate of drop in pressure upstream of a gas flow controller (GFC) to accurately measure a rate of flow through the GFC. Measurement of the gas flow through the many gas flow controllers in production use today is enabled, without requiring any special or sophisticated pressure regulators or other special components. Various provisions ensure that none of the changes in pressure that occur during or after the measurement perturb the constant flow of gas through the GFC under test. A pressure regulator is coupled to a gas source. The GFC is positioned downstream of the pressure regulator. A pressure transducer is measuring pressure in a volume between the pressure regulator and the GFC, wherein means are provided for increasing the pressure in the volume.
摘要翻译： 方法和设备利用气体流量控制器（GFC）上游压力的下降速率来精确测量通过GFC的流量。 通过今天生产使用中的许多气体流量控制器的气体流量的测量是可以实现的，而不需要任何特殊或复杂的压力调节器或其他特殊部件。 各种规定确保在测量期间或之后发生的压力变化不会扰乱通过被测GFC的气体的恒定流量。 压力调节器耦合到气源。 GFC位于压力调节器的下游。 压力传感器测量压力调节器和GFC之间的体积压力，其中提供用于增加体积中的压力的装置。
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公开(公告)号：US20090183549A1
公开(公告)日：2009-07-23
申请号：US12355654
申请日：2009-01-16
CPC分类号： G01F25/0053 , G01F25/0038 , Y10T137/0324 , Y10T137/0379 , Y10T137/7759 , Y10T137/7761 , Y10T137/7762
摘要： Methods and apparatus utilize a rate of drop in pressure upstream of a gas flow controller (GFC) to accurately measure a rate of flow through the GFC. Measurement of the gas flow through the many gas flow controllers in production use today is enabled, without requiring any special or sophisticated pressure regulators or other special components. Various provisions ensure that none of the changes in pressure that occur during or after the measurement perturb the constant flow of gas through the GFC under test.
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公开(公告)号：US20090183548A1
公开(公告)日：2009-07-23
申请号：US12354723
申请日：2009-01-15
CPC分类号： G01F25/0053 , G01F25/0038 , Y10T137/0324 , Y10T137/0379 , Y10T137/7759 , Y10T137/7761 , Y10T137/7762
摘要： Methods and apparatus utilize a rate of drop in pressure upstream of a gas flow controller (GFC) to accurately measure a rate of flow through the GFC. Measurement of the gas flow through the many gas flow controllers in production use today is enabled, without requiring any special or sophisticated pressure regulators or other special components. Various provisions ensure that none of the changes in pressure that occur during or after the measurement perturb the constant flow of gas through the GFC under test.
摘要翻译： 方法和设备利用气体流量控制器（GFC）上游压力的下降速率来精确测量通过GFC的流量。 通过今天生产使用中的许多气体流量控制器的气体流量的测量是可以实现的，而不需要任何特殊或复杂的压力调节器或其他特殊部件。 各种规定确保在测量期间或之后发生的压力变化不会影响通过被测GFC的气体的恒定流量。
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