公开(公告)号：US06192749B1

公开(公告)日：2001-02-27

申请号：US09132863

申请日：1998-08-12

申请人： Jiri Marek ,  Wolfgang Mueller

发明人： Jiri Marek ,  Wolfgang Mueller

IPC分类号： G01F168

CPC分类号： G01F1/6845 ,  G01F25/0007

摘要： A mass flow sensor having a thin substrate and a resistor element arranged on the thin substrate. The thin substrate is stretched on a fixed substrate. In a stretched area, at which, in response to mechanical loading of the thin substrate, the mechanical stresses concentrate, a resistor element for detecting ruptures is arranged. As a result of a rupture in the stretched area, this rupture-detection resistor is interrupted, and the rupture can be confirmed due to the sudden increase in the resistance of the resistor, caused thereby.

摘要翻译： 一种质量流量传感器，其具有薄的衬底和布置在薄衬底上的电阻器元件。 将薄衬底在固定衬底上拉伸。 在拉伸区域中，响应于薄基板的机械负载，机械应力集中，设置用于检测断裂的电阻元件。 由于拉伸区域的断裂，该断裂检测电阻器被中断，由此引起的电阻器的电阻突然上升，可以确认断裂。

公开(公告)号：US5569852A

公开(公告)日：1996-10-29

申请号：US355760

申请日：1994-12-14

申请人： Jiri Marek ,  Frank Bantien ,  Horst Muenzel ,  Michael Offenberg

发明人： Jiri Marek ,  Frank Bantien ,  Horst Muenzel ,  Michael Offenberg

IPC分类号： G01P15/08 ,  G01P15/125 ,  H01L29/84

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P2015/0814

摘要： A contacting of a capacitive accelerometer sensor of monocrystalline material is achieved by a capacitive accelerometer sensor having a structure etched out of a monocrystalline layer arranged on a substrate, including a seismic mass that is only joined to the substrate by suspension segments and executing a movement in its longitudinal direction in response to the occurrence of an acceleration of parallel, plate-like first fingers extending out from this mass at right angles to their longitudinal direction and of plate-like second fingers running parallel to the first fingers and anchored to the substrate. The first and second fingers form a capacitor arrangement. The suspension segments, which are anchored with their end region that is distant from the seismic mass to the substrate, and second fingers are electrically isolated, by an isolation strip, from the other remaining layer of monocrystalline material. A passivation layer extends over the isolation strip, and at least partially over the remaining layer. Conductors arranged on the passivation layer and serving as connecting leads for the capacitor arrangement extend across the isolation strip up to the connections of the capacitor arrangement, and are contacted there.

摘要翻译： 单晶材料的电容式加速度计传感器的接触是通过电容式加速度计传感器实现的，该传感器具有从布置在基底上的单晶层中蚀刻出的结构，包括仅通过悬挂段连接到基底的地震质量块， 其纵向方向响应于从该质量块与其纵向方向成直角地延伸的平行的板状第一指状物的加速度以及平行于第一指状物并且锚固到基底的板状第二指状物的加速度。 第一和第二指形成电容器布置。 将其远离地震质体的端部区域锚定到基底的悬挂段和第二指状物通过隔离带与另一个剩余的单晶材料层电隔离。 钝化层在隔离带上延伸，并且至少部分地覆盖剩余层。 布置在钝化层上并且用作电容器布置的连接引线的导体跨过隔离带延伸直到电容器装置的连接，并且在那里接触。

公开(公告)号：US5151763A

公开(公告)日：1992-09-29

申请号：US631623

申请日：1990-12-21

申请人： Jiri Marek ,  Frank Bantien ,  Dietmar Haack ,  Martin Warth

发明人： Jiri Marek ,  Frank Bantien ,  Dietmar Haack ,  Martin Warth

IPC分类号： G01H11/06 ,  G01P15/08 ,  G01P15/125 ,  H01L21/822 ,  H01L27/04 ,  H01L29/84 ,  H04R19/00

CPC分类号： G01P15/125 ,  G01H11/06 ,  G01P15/0802 ,  G01P2015/0814 ,  H04R19/005

摘要： A semiconductor plate having an epitaxial layer of a conductivity type opposite to that of the substrate on which it is formed has a depression, including one or more elongate channels. The depression is etched into a depth passing entirely through the epitaxial layer to isolate at least one tongue extending from a tongue pedestal into the etched depression and having parallel major sides which are perpendicular to the principal planes of the semiconductor plate. The tongue is under-etched so that it will be free to vibrate by motion in directions parallel to the principal planes of the plate. One of the major sides of the tongue faces a stationary electrode across a gap and the electrode and the tongue are insulated from each other, at least in one embodiment, by the fact that the etched depression extends all the way through the epitaxial layer in its depth. Deflection or vibration of the tongue changes the capacitance between the electrode and the tongue and contacts are provided for measuring the capacitance. Various embodiments utilizing multiple tongues and one or more electrodes are shown.

摘要翻译： 具有与形成有外延层的基板的导电类型相反的外延层的半导体板具有包括一个或多个细长沟道的凹陷部。 将凹陷蚀刻到完全穿过外延层的深度中，以将至少一个从舌基座延伸的舌片隔离成蚀刻的凹陷部，并且具有垂直于半导体板的主平面的平行的主边。 舌头被低蚀刻，使得它可以通过平行于板的主平面的方向的运动而自由振动。 至少在一个实施例中，舌片的主要侧面之一跨越间隙固定电极，并且电极和舌片彼此绝缘，因为蚀刻的凹陷一直延伸穿过外延层的事实 深度。 舌头的偏转或振动会改变电极和舌头之间的电容，并提供触点用于测量电容。 示出了利用多个舌片和一个或多个电极的各种实施例。

公开(公告)号：US4887066A

公开(公告)日：1989-12-12

申请号：US61333

申请日：1987-06-11

申请人： Jiri Marek

发明人： Jiri Marek

IPC分类号： G01C3/00

CPC分类号： G01C3/00

摘要： The capacitive proximity sensor for motor vehicles comprises a capacitance-measuring device for measuring the capacitance between at least one capacitor plate (1) which is fixed to the motor vehicle, on the one hand, and the environment, on the other hand, and an indicator for receiving the output signal of the measuring device.To provide a proximity sensor in which the disturbing and parasitary capacitances occurring in practice are particularly taken into account, the output signal S.sub.c of the capacitance-measuring device (5) is delivered to an amplifier (6), which is provided with a degenerative feedback loop (9) comprising a storage device (11) and a switch (10) so that the output signal (s.sub.A) of the amplifier (6) is held constant during normal travel, and the switch (10) is opened to interrupt the degenerative feedback loop (9) for a measurement. The switch is closed when the measurement has been completed.

摘要翻译： 用于机动车辆的电容式接近传感器包括用于测量固定在机动车辆上的至少一个电容器板（1）与另一方面与环境之间的电容的电容测量装置，以及 用于接收测量装置的输出信号的指示器。 为了提供一种接近传感器，其中特别考虑到实际发生的干扰和寄生电容，电容测量装置（5）的输出信号Sc被传送到放大器（6），放大器（6）设置有退化反馈 环路（9）包括存储装置（11）和开关（10），使得放大器（6）的输出信号（sA）在正常行进期间保持恒定，并且开关（1​​0）打开以中断退化 用于测量的反馈回路（9）。 当测量完成时，开关闭合。

公开(公告)号：US5606117A

公开(公告)日：1997-02-25

申请号：US358147

申请日：1994-12-16

申请人： Manfred Vogel ,  Werner Herden ,  Jiri Marek ,  Kurt Weiblen

发明人： Manfred Vogel ,  Werner Herden ,  Jiri Marek ,  Kurt Weiblen

IPC分类号： G01L9/00 ,  G01L9/06 ,  G01L23/18 ,  G01M15/00

CPC分类号： G01L9/0052 ,  G01L23/18 ,  G01L9/065

摘要： The pressure sensor for a combustion chamber includes a housing; a membrane closing the housing on its combustion chamber side; a monocrystalline silicon chip inside the housing and including a sensor circuit device provided with a bridge circuit device including a piezoresistor producing an electrical signal in response to applied pressure and a plunger positioned between the membrane and the silicon chip to transmit a pressure in the combustion chamber to the piezoresistor. The bridge circuit device is connected to an amplifier circuit located on the silicon chip. The amplifier circuit includes amplifier resistors having resistance values determinative of the offset of the signal and sensor sensitivity. A network circuit for offset and sensitivity adjustments is provided on the silicon chip and includes four adjusting circuits for offset, sensor sensitivity, temperature compensation of offset and for temperature compensation of sensor sensitivity. Each adjusting circuit includes parallel-connected adjusting circuit branches each including an adjusting resistor and a semiconductor element in series. The adjusting circuit branches of respective adjusting circuits are connected in parallel with respective amplifier resistors. A logic circuit also provided on the silicon chip is used to make predetermined semiconductor elements electrically conductive so that predetermined adjusting circuit branches can be made conductive with a resistance determined by the adjusting resistors in the predetermined adjusting circuit branches to make the respective adjustments.

摘要翻译： 用于燃烧室的压力传感器包括壳体; 在其燃烧室侧封闭壳体的膜; 壳体内的单晶硅芯片，并且包括设置有桥接电路装置的传感器电路装置，所述桥式电路装置包括响应于施加的压力产生电信号的压电电感器和位于膜和硅芯片之间的柱塞，以在燃烧室中传递压力 到压敏电阻。 桥接电路器件连接到位于硅芯片上的放大器电路。 放大器电路包括具有确定信号偏移和传感器灵敏度的电阻值的放大器电阻。 在硅芯片上提供了一种用于偏移和灵敏度调整的网络电路，包括用于偏移，传感器灵敏度，偏移温度补偿和传感器灵敏度温度补偿的四个调节电路。 每个调节电路包括并联连接的调节电路分支，每个调节电路分别包括调节电阻器和串联的半导体元件。 各调节电路的调整电路分支与各放大电阻并联连接。 还使用在硅芯片上设置的逻辑电路来使预定的半导体元件导电，使得预定的调节电路分支可以由预定调整电路分支中的调节电阻器确定的电阻导通，以进行相应的调整。

公开(公告)号：US5461917A

公开(公告)日：1995-10-31

申请号：US131821

申请日：1993-10-05

申请人： Jiri Marek ,  Dietrich Schubert ,  Helmut Baumann ,  Horst Muenzel ,  Michael Offenberg ,  Martin Willmann

发明人： Jiri Marek ,  Dietrich Schubert ,  Helmut Baumann ,  Horst Muenzel ,  Michael Offenberg ,  Martin Willmann

IPC分类号： G01P15/02 ,  G01P15/08 ,  G01P15/125 ,  H01L29/84

CPC分类号： G01P15/0802 ,  G01P15/125 ,  G01P2015/0828

摘要： An acceleration sensor and a method of making an acceleration sensor is described in which a movable sensor element is located in a hollow space formed in the middle of three silicon plates. During production, air can be removed from the hollow space through a hole in one of the two outer plates. The hole is then closed by an additional plate, which allows for a defined pressure to be set in the hollow space.

摘要翻译： 描述了一种加速度传感器和制造加速度传感器的方法，其中可移动传感器元件位于形成在三个硅板中间的中空空间中。 在生产过程中，空气可以通过两个外板中的一个的孔从中空空间移除。 然后孔被附加的板封闭，这允许将限定的压力设定在中空空间中。

公开(公告)号：US5391951A

公开(公告)日：1995-02-21

申请号：US25492

申请日：1993-03-03

申请人： Uwe Guenther ,  Ulrich Fleischer ,  Michael Barth ,  Jiri Marek ,  Hans-Juergen Kress ,  Joerg Behnke

发明人： Uwe Guenther ,  Ulrich Fleischer ,  Michael Barth ,  Jiri Marek ,  Hans-Juergen Kress ,  Joerg Behnke

IPC分类号： H01L21/82 ,  H01L21/822 ,  H01L27/04 ,  H01L27/118 ,  H01L29/74 ,  H03K17/56 ,  H01L21/66 ,  H01L29/58

CPC分类号： H01L27/118 ,  H01L29/7436

摘要： An integrated circuit having an adjusting component and an adjustable thyristor allows an especially small chip surface to be used. The integrated circuit has a control unit, by means of which the adjusting component is irreversibly switched. The thyristor is designed as a planar component.

摘要翻译： 具有调节部件和可调晶闸管的集成电路允许使用特别小的芯片表面。 集成电路具有控制单元，通过该控制单元，调节部件不可逆地切换。 晶闸管设计为平面元件。

公开(公告)号：US5324410A

公开(公告)日：1994-06-28

申请号：US969235

申请日：1993-02-01

申请人： Nils Kummer ,  Jiri Marek ,  Martin Willmann ,  Guenther Findler

发明人： Nils Kummer ,  Jiri Marek ,  Martin Willmann ,  Guenther Findler

IPC分类号： H01L21/304 ,  H01L21/00 ,  H01L21/306 ,  H01L21/687 ,  C25D17/06 ,  C25F7/00

CPC分类号： H01L21/67126 ,  H01L21/67075 ,  H01L21/67086 ,  H01L21/68721 ,  H01L21/68735

摘要： A device for one-sided etching of a semiconductor wafer (silicon wafer) is proposed, which consists in the manner of an etching box of a trough-shaped basic body (3, 23) and a lid (2, 22) which matches the latter hermetically. The lid (2, 22) has on the topside an opening (5, 25) for the passage of the etching liquid. The etching box bears at least two O-rings (7, 8, 27, 28), of which one is arranged centrally in the basic body (3, 23) and the other centrally in the lid (2, 22). The wafer (1) is clamped between the O-rings (7, 8, 27, 28). A wire (10) connected to the wafer by means of a plate of a spring contact (11, 41) is guided out of the etching box through a bore (4) extending through the basic body (3, 23).

摘要翻译： PCT No.PCT / DE91 / 00545 Sec。 371日期：1993年2月1日 102（e）1993年2月1日PCT PCT 1991年7月2日PCT公布。 出版物WO92 / 02948 日本1992年2月20日提出了一种用于半导体晶片（硅晶片）的单面蚀刻的装置，其包括槽形基体（3,23）和盖（ 2，22）与后者密切相配。 盖（2,22）在顶部具有用于蚀刻液体通过的开口（5,25）的上侧。 蚀刻盒具有至少两个O形环（7,8,27,28），其中一个设置在基体（3,23）的中心，另一个位于盖（2,22）的中心。 晶片（1）夹在O形环（7,8,27,28）之间。 通过弹簧触头（11,41）的板连接到晶片的导线（10）通过穿过基体（3,23）的孔（4）从蚀刻箱引出。

公开(公告)号：US5233213A

公开(公告)日：1993-08-03

申请号：US893904

申请日：1992-06-04

申请人： Jiri Marek

发明人： Jiri Marek

IPC分类号： G01P15/08 ,  G01P15/12 ,  G01P15/125

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P15/0888 ,  G01P15/123 ,  G01P2015/084

摘要： From a silicon block or wafer a stationary frame is shaped and a seismic mass which is displaceable in rotation is mounted within the frame. The seismic mass is symmetrically suspended in the frame by two pairs of oppositely located flexible strips and either piezoresistive or capacitive detection of rotation is provided by the strips, the capacitive detection beeing provided with the help of parallel stationary electrodes connected to and insulated in the frame. In another embodiment an anchor stud in the center of the frame has two flexible interlaced spirals extending therefrom and their respective outer turns carry radial disposed masses with finger structures extending circumferentially in both directions. Stationary finger structures are provided to provide interfitting variable capacitors sensitive to rotary displacements.

摘要翻译： 从硅块或晶片，固定框架成形，并且可旋转移位的地震块安装在框架内。 地震质量通过两对相对位置的柔性条对称地悬挂在框架中，并且通过条带提供压阻或电容式旋转检测，电容式检测蜂窝借助于连接到框架并在框架中绝缘的平行固定电极 。 在另一个实施例中，框架中心的锚固螺柱具有从其延伸的两个柔性交织螺旋，并且它们各自的外圈具有沿两个方向周向延伸的手指结构的径向设置的质量。 提供固定的手指结构以提供对旋转位移敏感的相互配合的可变电容器。

公开(公告)号：US5216273A

公开(公告)日：1993-06-01

申请号：US762940

申请日：1991-09-19

申请人： Christian Doering ,  Thomas Grauer ,  Michael Mettner ,  Armin Schuelke ,  Jiri Marek ,  Hans-Peter Trah ,  Joerg Muchow ,  Martin Willmann

发明人： Christian Doering ,  Thomas Grauer ,  Michael Mettner ,  Armin Schuelke ,  Jiri Marek ,  Hans-Peter Trah ,  Joerg Muchow ,  Martin Willmann

IPC分类号： F16K31/02 ,  F15C5/00 ,  F16K99/00

CPC分类号： F16K99/0001 ,  F15C5/00 ,  F16K99/0015 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008

摘要： A microwave is made of a stack of layers. A sculptured silicon substrate is held between two covers each consisting of one or more layers. The inlet and the outlet of the microvalve are formed by perforations in the respective covers. A central valve plate is sculptured out of the silicon substrate with surfaces respectively facing the two covers in the region of the inlet and outlet in a symmetrical fashion. The valve plate is connected to the outer frame portion of the silicon substrate by one or more silicon strips. The valve plate is also shaped as a closure member near the inlet and/or the outlet. Electrodes are provided on the covers opposite the valve plate so that the valve can be electrostatically actuated with the valve plate serving as counterelectrode for these electrodes on the covers.

摘要翻译： 微波由一叠层组成。 雕刻的硅衬底保持在两个盖之间，每个盖由一层或多层组成。 微型阀的入口和出口由相应盖子中的穿孔形成。 中心阀板从硅衬底雕刻出来，其表面分别以对称的方式在入口和出口的区域中面对两个盖。 阀板通过一个或多个硅带连接到硅衬底的外框部分。 阀板也在入口和/或出口附近形成为封闭构件。 电极设置在与阀板相对的盖上，使得阀可以被静电驱动，阀板用作反射电极，用于盖上的这些电极。