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公开(公告)号：US6001235A
公开(公告)日：1999-12-14
申请号：US881040
申请日：1997-06-23
申请人： David M. Arken , Andrew Chiu , Joseph John Fatula, Jr. , Robert William Hitzfield , Wen-Chien David Hsiao , Yiping Hsiao
发明人： David M. Arken , Andrew Chiu , Joseph John Fatula, Jr. , Robert William Hitzfield , Wen-Chien David Hsiao , Yiping Hsiao
CPC分类号： C25D7/123 , C25D17/001 , C25D21/00 , C25D21/18 , C25D5/08 , Y10S204/07
摘要： A rotary plater and method of plating are provided which improve the uniformity of plating across a plating surface of a workpiece. A plating solution distribution device is located in a plating cup between an anode and a cathode in a spaced relationship therebetween and is centered about a vertical axis of the plating cup. A motor is provided for relatively rotating the cathode and the plating solution distribution device with respect to one another. The plating solution distribution device distributes the plating solution over the plating surface at a distribution rate which increases radially outwardly from the vertical axis. With this arrangement the volume of plating solution at the outer periphery of the plating surface is enriched with ions to promote plating uniformity.
摘要翻译： 提供了一种旋转镀层和电镀方法，其提高了跨工件的镀层表面的电镀均匀性。 电镀溶液分配装置位于阳极和阴极之间的电镀杯中，间隔开的关系，并且以电镀杯的垂直轴为中心。 提供电动机用于相对于彼此相对旋转阴极和电镀液分配装置。 电镀溶液分配装置以从垂直轴径向向外增加的分布率将电镀液分布在电镀表面上。 通过这种布置，电镀表面外周的电镀溶液的体积富含离子以促进电镀均匀性。
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2.发明授权公开(公告)号：US08332483B2
公开(公告)日：2012-12-11
申请号：US10735938
申请日：2003-12-15
IPC分类号： G06F15/16
CPC分类号： G06F9/5072
摘要： An apparatus, system, and method are disclosed for autonomic management of data operations and performance resources on a grid computing system. An autonomic management apparatus includes a monitor module, a policy module, and a regulation module. The monitor module is configured to monitor the grid computing system for a trigger event. The policy module is configured to access one of a plurality of system policies. Each of the plurality of system policies corresponds to an operational control parameter of a system resource of the grid computing system. The regulation module is configured to autonomically regulate the system resource in response to a recognized trigger event according to one of the plurality of system policies. The trigger event may be a prediction trigger event, an initiation trigger event, a regulation trigger event, or a termination trigger event.
摘要翻译： 公开了一种用于网格计算系统上的数据操作和性能资源的自主管理的装置，系统和方法。 自主管理装置包括监视器模块，策略模块和调节模块。 监视器模块被配置为监视网格计算系统的触发事件。 策略模块被配置为访问多个系统策略中的一个。 多个系统策略中的每一个对应于网格计算系统的系统资源的操作控制参数。 所述调节模块被配置为根据所述多个系统策略之一响应于所识别的触发事件来自动调节所述系统资源。 触发事件可以是预测触发事件，启动触发事件，调节触发事件或终止触发事件。
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3.发明授权公开(公告)号：US07680933B2
公开(公告)日：2010-03-16
申请号：US10736473
申请日：2003-12-15
IPC分类号： G06F15/173 , G06F15/16 , G06F12/00 , G06F17/30
CPC分类号： G06F9/5072 , G06F2209/5014
摘要： An apparatus, system, and method are disclosed for on-demand control of a grid system resource on a grid computing system. An on-demand management apparatus includes a user input module, a parameter module, and a reservation module. The user input module is configured to allow a user to input a parameter control request. The parameter control request corresponds to a performance parameter of the grid computing system. The global parameter module is configured to dynamically change the performance parameter, which corresponds to a performance resource, according to the parameter control request. The global reservation module is configured to reserve the performance resource for a grid computing operation. The on-demand management apparatus is also configured to terminate a performance resource reservation when a client reclaims the performance resources from the grid computing system.
摘要翻译： 公开了一种用于网格计算系统上的网格系统资源的按需控制的装置，系统和方法。 按需管理装置包括用户输入模块，参数模块和预约模块。 用户输入模块被配置为允许用户输入参数控制请求。 参数控制请求对应于网格计算系统的性能参数。 全局参数模块被配置为根据参数控制请求动态地改变对应于性能资源的性能参数。 全局预留模块被配置为保留网格计算操作的性能资源。 按需管理装置还被配置为当客户端从网格计算系统回收性能资源时终止性能资源预留。
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公开(公告)号：US20100023151A1
公开(公告)日：2010-01-28
申请号：US12390395
申请日：2009-02-20
CPC分类号： G05B19/41885 , G05B2219/31334 , G05B2219/31466 , G05B2219/45031 , H01L21/67276 , Y02P90/16 , Y02P90/185 , Y02P90/26 , Y02P90/86
摘要： A semiconductor fabrication facility (fab) configuration module is defined to virtually model physical systems and attributes of a fab. A data acquisition module is defined to interface with the physical systems of the fab and gather operational data from the physical systems. A visualizer module is defined to collect and aggregate the operational data gathered from the physical systems. The visualizer module is further defined to process the operational data into a format suitable for visual rendering. The processed operational data is displayed within a visual context of the fab in a graphical user interface controlled by the visualizer module. An analyzer module is defined to analyze data collected by the visualizer module and to resolve queries regarding fab performance. An optimizer module is defined to control systems within the fab in response to data collected by the visualizer module, data generated by the analyzer module, or a combination thereof.
摘要翻译： 半导体制造设备（fab）配置模块被定义为虚拟模拟晶圆厂的物理系统和属性。 数据采集模块被定义为与物理系统的物理系统进行接口，并从物理系统收集操作数据。 定义了可视化模块，用于收集和汇总从物理系统收集的操作数据。 视觉化模块被进一步定义为将操作数据处理成适合于视觉呈现的格式。 经处理的操作数据显示在由可视化模块控制的图形用户界面中的晶圆厂的视觉上下文中。 分析器模块被定义为分析可视化模块收集的数据，并解析有关工厂性能的查询。 定义优化器模块以响应由可视化器模块收集的数据，由分析器模块生成的数据或其组合来控制晶圆厂内的系统。
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5.发明申请Segmented material conveyor system, threshold assembly and method for making and using the same 失效分段材料输送系统，阈值组装及其制造和使用方法公开(公告)号：US20100314224A1
公开(公告)日：2010-12-16
申请号：US12420053
申请日：2009-04-07
IPC分类号： B65G17/32
CPC分类号： B65G35/06 , B65G21/00 , B65G2201/0297 , B65G2207/30 , Y10T29/53261 , Y10T29/53265
摘要： A conveyor system is provided. The conveyor system includes a threshold assembly. The threshold assembly has a base plate that is secured to a floor, and the threshold assembly has a channel that is formed between two support beams that are secured to a base plate. A plurality of threshold center plates are provided, which span and enclose the channel formed by the support beams, such that each threshold assembly includes a modular printed circuit board that fits within the channel and is enclosed within the channel by threshold center plates. And, multiple conveyor segments are mountable to the threshold assembly. Other systems components and methods for making and operating the same are provided.
摘要翻译： 提供输送系统。 传送系统包括阈值组件。 阈值组件具有固定到地板上的基板，并且阈值组件具有形成在固定到基板的两个支撑梁之间的通道。 提供了多个阈值中心板，其跨越和包围由支撑梁形成的通道，使得每个阈值组件包括装配在通道内并且通过阈值中心板封装在通道内的模块化印刷电路板。 并且，多个输送机段可安装到阈值组件。 提供了用于制造和操作其的系统组件和方法。
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6.发明授权Semiconductor fabrication facility visualization system with performance optimization 有权半导体制造设备可视化系统，具有性能优化公开(公告)号：US08229587B2
公开(公告)日：2012-07-24
申请号：US12390395
申请日：2009-02-20
IPC分类号： G06F19/00
CPC分类号： G05B19/41885 , G05B2219/31334 , G05B2219/31466 , G05B2219/45031 , H01L21/67276 , Y02P90/16 , Y02P90/185 , Y02P90/26 , Y02P90/86
摘要： A semiconductor fabrication facility (fab) configuration module is defined to virtually model physical systems and attributes of a fab. A data acquisition module is defined to interface with the physical systems of the fab and gather operational data from the physical systems. A visualizer module is defined to collect and aggregate the operational data gathered from the physical systems. The visualizer module is further defined to process the operational data into a format suitable for visual rendering. The processed operational data is displayed within a visual context of the fab in a graphical user interface controlled by the visualizer module. An analyzer module is defined to analyze data collected by the visualizer module and to resolve queries regarding fab performance. An optimizer module is defined to control systems within the fab in response to data collected by the visualizer module, data generated by the analyzer module, or a combination thereof.
摘要翻译： 半导体制造设备（fab）配置模块被定义为虚拟模拟晶圆厂的物理系统和属性。 数据采集模块被定义为与物理系统的物理系统进行接口，并从物理系统收集操作数据。 定义了可视化模块，用于收集和汇总从物理系统收集的操作数据。 视觉化模块被进一步定义为将操作数据处理成适合于视觉呈现的格式。 经处理的操作数据显示在由可视化模块控制的图形用户界面中的晶圆厂的视觉上下文中。 分析器模块被定义为分析可视化模块收集的数据，并解析有关工厂性能的查询。 定义优化器模块以响应由可视化器模块收集的数据，由分析器模块生成的数据或其组合来控制晶圆厂内的系统。
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公开(公告)号：US08196732B2
公开(公告)日：2012-06-12
申请号：US12848442
申请日：2010-08-02
申请人： Joseph John Fatula, Jr. , Roumen Iliev Deyanov , Kevin Tzou , Pablo Gonzalez , Robert Carlson , John Brooks Greene
发明人： Joseph John Fatula, Jr. , Roumen Iliev Deyanov , Kevin Tzou , Pablo Gonzalez , Robert Carlson , John Brooks Greene
IPC分类号： B65G49/06 , B66B17/04 , H01L21/677
CPC分类号： H01L21/67733 , B66C1/663 , B66C11/06 , B66C17/04 , H01L21/67736 , H01L21/67769
摘要： A transport mechanism is configured to transport a work piece carrier within a buffer in fabrication facility, comprising: a transporter configured to travel on two rails, wherein the transporter comprises (i) a flat belt hoist mechanism configured to lift and to lower one or more work piece carriers, and (ii) a gripper mechanism configured to capture and to release the one or more work piece carriers.
摘要翻译： 输送机构构造成在制造设施中的缓冲器内输送工件载体，包括：构造成在两个轨道上行进的运输机，其中所述运输机包括（i）平带式起重机构，其构造成提升和降低一个或多个 工件承载件，和（ii）构造成捕获并释放所述一个或多个工件承载件的夹持机构。
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8.发明授权公开(公告)号：US06679762B2
公开(公告)日：2004-01-20
申请号：US09839099
申请日：2001-04-19
IPC分类号： B24B100
CPC分类号： G11B5/3163 , B24B37/048 , B24B49/14 , G11B5/102 , G11B5/1871 , G11B5/3106 , G11B5/3116 , G11B5/3173 , Y10T29/49034
摘要： A method is disclosed for precision control of pole tip recession of magnetic recording heads. This is achieved by first constructing the head so that the thermal expansion coefficient of the recording head is different from the thermal expansion coefficient of the overcoat. Then the recording head is heated during the lapping process of the slider and recording head. The average and distribution of the recession between the overcoat and the recording head pole tips are improved.
摘要翻译： 公开了一种用于精密控制磁记录头的极尖凹陷的方法。 这通过首先构造头来实现，使得记录头的热膨胀系数不同于外涂层的热膨胀系数。 然后在滑块和记录头的研磨过程中加热记录头。 大衣和记录头磁极尖之间的衰退的平均和分布得到改善。
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公开(公告)号：US06379570B1
公开(公告)日：2002-04-30
申请号：US09450092
申请日：1999-11-29
IPC分类号： B44C122
CPC分类号： G11B5/3903 , G11B5/00813 , G11B5/3163 , G11B5/3967 , G11B5/398 , G11B5/399 , G11B5/4893 , G11B5/5504 , G11B5/584 , Y10T29/49021 , Y10T29/49052
摘要： A method is provided for making a well-defined, highly-predictable chevron type MR sensor for a read head. A first material is selected for a first gap layer. A selected second material is deposited on the first gap layer followed by a resist frame that has elongated openings exposing elongated top portions of the first gap layer that extend at an acute angle to a head surface of the read head. A selected reactive ion etch (RIE) is employed to etch away the exposed portions of the second material layer down to the first material of the first gap layer. The material of the second material layer is chosen to be etched by the RIE while the material of the first gap layer is chosen not to be etched by the RIE. An example is Al2O3 for the first gap layer, SiO2 for the second material layer and a RIE that is fluorine based. The resist frame is removed leaving elongated strips of the second material layer extending at the aforementioned angle to the head surface. MR material is then sputtered on top of the first gap layer and on the second material strips building up a MR sensor which has a ribbed structure on each of its first and second surfaces. The resultant MR head has second material strips sandwiched between the first gap layer and the MR sensor.
摘要翻译： 提供了一种用于制造用于读取头的良好定义的，高度可预测的人字形MR传感器的方法。 为第一间隙层选择第一材料。 所选择的第二材料沉积在第一间隙层上，随后是抗蚀剂框架，该抗蚀剂框架具有细长的开口，其暴露第一间隙层的细长顶部，其与读取头的头表面成锐角地延伸。 使用选择的反应离子蚀刻（RIE）来将第二材料层的暴露部分向下蚀刻到第一间隙层的第一材料。 选择第二材料层的材料被RIE蚀刻，同时选择第一间隙层的材料不被RIE蚀刻。 例如，用于第一间隙层的Al 2 O 3，第二材料层的SiO 2和氟基的RIE。 除去抗蚀剂框架，留下第二材料层的长条，以与前表面成上述角度延伸。 然后将MR材料溅射在第一间隙层的顶部上，并且在第二材料条上形成MR传感器，该传感器在其第一和第二表面的每一个上具有肋状结构。 所得MR头具有夹在第一间隙层和MR传感器之间的第二材料条。
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公开(公告)号：US6118623A
公开(公告)日：2000-09-12
申请号：US926264
申请日：1997-09-05
CPC分类号： G11B5/3903 , G11B5/3967 , G11B5/399 , G11B5/4893 , G11B5/5504 , G11B5/584 , G11B5/00813 , G11B5/3163 , G11B5/398 , Y10T29/49021 , Y10T29/49052
摘要： A method is provided for making a well-defined, highly-predictable chevron type MR sensor for a read head. A first material is selected for a first gap layer. A selected second material is deposited on the first gap layer followed by a resist frame that has elongated openings exposing elongated top portions of the first gap layer that extend at an acute angle to a head surface of the read head. A selected reactive ion etch (RIE) is employed to etch away the exposed portions of the second material layer down to the first material of the first gap layer. The material of the second material layer is chosen to be etched by the RIE while the material of the first gap layer is chosen not to be etched by the RIE. An example is Al.sub.2 O.sub.3 for the first gap layer, SiO.sub.2 for the second material layer and a RIE that is fluorine based. The resist frame is removed leaving elongated strips of the second material layer extending at the aforementioned angle to the head surface. MR material is then sputtered on top of the first gap layer and on the second material strips building up a MR sensor which has a ribbed structure on each of its first and second surfaces. The resultant MR head has second material strips sandwiched between the first gap layer and the MR sensor.
摘要翻译： 提供了一种用于制造用于读取头的良好定义的，高度可预测的人字形MR传感器的方法。 为第一间隙层选择第一材料。 所选择的第二材料沉积在第一间隙层上，随后是抗蚀剂框架，该抗蚀剂框架具有细长的开口，其暴露第一间隙层的细长顶部，其与读取头的头表面成锐角地延伸。 使用选择的反应离子蚀刻（RIE）来将第二材料层的暴露部分向下蚀刻到第一间隙层的第一材料。 选择第二材料层的材料被RIE蚀刻，同时选择第一间隙层的材料不被RIE蚀刻。 例如，用于第一间隙层的Al 2 O 3，第二材料层的SiO 2和氟基的RIE。 除去抗蚀剂框架，留下第二材料层的长条，以与前表面成上述角度延伸。 然后将MR材料溅射在第一间隙层的顶部上，并且在第二材料条上形成MR传感器，该传感器在其第一和第二表面的每一个上具有肋状结构。 所得MR头具有夹在第一间隙层和MR传感器之间的第二材料条。
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