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公开(公告)号：US08851099B2
公开(公告)日：2014-10-07
申请号：US13489508
申请日：2012-06-06
申请人： Joseph P. DeGeorge , Joseph Casaregola , William Robert Copeland , Scott Matthew Hargash , Matthew F. Stanton , Bryant L. Hancock , Kevin R. Geysen
发明人： Joseph P. DeGeorge , Joseph Casaregola , William Robert Copeland , Scott Matthew Hargash , Matthew F. Stanton , Bryant L. Hancock , Kevin R. Geysen
IPC分类号： F17D5/02
CPC分类号： B23P11/00 , F16L23/003 , F16L2201/30 , G01M3/022 , G01M3/2815 , Y10T137/0402 , Y10T137/0452 , Y10T137/2496 , Y10T137/5762 , Y10T137/8326
摘要： A system and method for detecting leaks in pressurized or vacuum pipes is disclosed. A pipe clamp comprises a housing that surrounds a pipe fitting. A containment chamber within the pipe clamp prevents leaked gas from escaping into the environment. The pipe clamp is installed in series with an exhaust line to remove the leaked gas from the containment chamber. A sensor may be configured and disposed to detect a change in pressure in the containment chamber to indicate the occurrence of a leak.
摘要翻译： 公开了一种用于检测加压或真空管道泄漏的系统和方法。 管夹包括围绕管接头的壳体。 管夹内的安全壳可以防止泄漏的气体逃逸到环境中。 管夹与排气管串联安装，以从容纳室中除去泄漏的气体。 可以配置和布置传感器以检测容纳室中的压力变化，以指示泄漏的发生。
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公开(公告)号：US20120180663A1
公开(公告)日：2012-07-19
申请号：US13008088
申请日：2011-01-18
CPC分类号： B01D45/08 , C23C16/4412
摘要： Embodiments of the present invention provide a vacuum trap labyrinth with improved trapping characteristics. The vacuum trap labyrinth comprised of an inner part and an outer part that fit together while in use, and come apart for easy cleaning during maintenance. The vacuum trap labyrinth is installed in a catchpot. In one embodiment, an O-ring is used to seal off an area of the catchpot to facilitate a visual inspection.
摘要翻译： 本发明的实施例提供一种具有改进的捕集特性的真空阱迷宫。 真空陷阱迷宫由内部和外部构成，在使用时装配在一起，并在维护期间分开以便于清洁。 真空陷阱迷宫安装在收集罐中。 在一个实施例中，O形环用于密封收集罐的区域以便于目视检查。
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公开(公告)号：US5971454A
公开(公告)日：1999-10-26
申请号：US5136
申请日：1998-01-09
CPC分类号： B25B11/005 , B25B11/007
摘要： An article handler having a plurality of compartments in a frame with each compartment having a plurality of ribs extending across the compartments. The ribs in adjacent compartments extend perpendicularly to each other to provide resistance against warping of the frame in both directions, thereby maintaining the frame flat. The compartments are covered by filters. Suction is distributed throughout each compartment. When the filters are positioned in proximity to articles, the suction in the compartments is effective to lift the articles.
摘要翻译： 一种物品处理器，其具有在框架中的多个隔室，每个隔室具有跨越隔间延伸的多个肋。 相邻隔室中的肋条彼此垂直延伸，以提供抵抗框架在两个方向上翘曲的阻力，从而保持框架平坦。 隔间被过滤器覆盖。 抽吸遍布每个隔间。 当过滤器位于物品附近时，隔室中的吸力对提起物品是有效的。
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公开(公告)号：US5874162A
公开(公告)日：1999-02-23
申请号：US729083
申请日：1996-10-10
申请人： Kurt E. Bastian , James J. Burte , Michael A. Cohn , Christopher N. Collins , Joseph P. DeGeorge , Italo A. DiNunzio , Robert C. Greenlese , Alan Piciacchio , Teresa L Pinto , Robert J. Sullivan , Ryan W. Wuthrich
发明人： Kurt E. Bastian , James J. Burte , Michael A. Cohn , Christopher N. Collins , Joseph P. DeGeorge , Italo A. DiNunzio , Robert C. Greenlese , Alan Piciacchio , Teresa L Pinto , Robert J. Sullivan , Ryan W. Wuthrich
IPC分类号： C04B35/111 , H05K1/03 , H05K3/00 , B32B3/00
CPC分类号： C04B35/111 , H05K1/0306 , H05K3/0011 , Y10T428/24926
摘要： Camber of ceramic substrates is prevented by placing a conformable load tile over substrates during sintering. The conformable load tile has an initial curvature that facilitates escape of substrate binder gases during a burn out cycle. Subsequently, the conformable load tile conforms to the substrates under the higher heat of sintering temperature to maintain flatness of the substrates. To prevent sticking of the conformable load tile to the substrates, the conformable load tile is provided with a nonstick surface.
摘要翻译： 在烧结过程中，通过在衬底上放置适形负载瓷砖来防止陶瓷衬底的弯曲。 适形负载瓦具有初始曲率，其有助于在烧坏循环期间衬底粘合剂气体逸出。 随后，在较高的烧结温度下，适形载荷瓦与基底相一致，以保持基底的平整度。 为了防止将适形载荷瓦片粘附到基底上，适应载荷瓦片具有不粘表面。
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公开(公告)号：US20130327412A1
公开(公告)日：2013-12-12
申请号：US13489508
申请日：2012-06-06
申请人： Joseph P. DeGeorge , Joseph Casaregola , William Robert Copeland , Scott Matthew Hargash , Matthew F. Stanton , Bryant L. Hancock , Kevin R. Geysen
发明人： Joseph P. DeGeorge , Joseph Casaregola , William Robert Copeland , Scott Matthew Hargash , Matthew F. Stanton , Bryant L. Hancock , Kevin R. Geysen
CPC分类号： B23P11/00 , F16L23/003 , F16L2201/30 , G01M3/022 , G01M3/2815 , Y10T137/0402 , Y10T137/0452 , Y10T137/2496 , Y10T137/5762 , Y10T137/8326
摘要： A system and method for detecting leaks in pressurized or vacuum pipes is disclosed. A pipe clamp comprises a housing that surrounds a pipe fitting. A containment chamber within the pipe clamp prevents leaked gas from escaping into the environment. The pipe clamp is installed in series with an exhaust line to remove the leaked gas from the containment chamber. A sensor may be configured and disposed to detect a change in pressure in the containment chamber to indicate the occurrence of a leak.
摘要翻译： 公开了一种用于检测加压或真空管道泄漏的系统和方法。 管夹包括围绕管接头的壳体。 管夹内的安全壳可以防止泄漏的气体逃逸到环境中。 管夹与排气管串联安装，以从容纳室中除去泄漏的气体。 可以配置和布置传感器以检测容纳室中的压力变化，以指示泄漏的发生。
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公开(公告)号：US07847683B2
公开(公告)日：2010-12-07
申请号：US11854035
申请日：2007-09-12
申请人： Gregory S. Boettcher , William R. Copeland , Joseph P. DeGeorge , Scott M. Hargash , William T. Petry , Robert R. Young
发明人： Gregory S. Boettcher , William R. Copeland , Joseph P. DeGeorge , Scott M. Hargash , William T. Petry , Robert R. Young
CPC分类号： F16P3/003 , Y10T307/826 , Y10T307/937
摘要： An apparatus for implementing an emergency machine off circuit of a fabrication system, includes: at least one safety switch adapted for shunting an operation enable signal from a piece of equipment selected for removal from service, the switch also removing from service supplemental devices for the selected equipment. A semiconductor fabrication system and a method for removing equipment from service are provided.
摘要翻译： 一种用于实现制造系统的紧急切断电路的装置，包括：至少一个安全开关，其适于从被选择用于从服务中移除的设备的一个设备上分流运行使能信号，所述交换机还从所选择的服务补充设备 设备。 提供了半导体制造系统和用于从服务中去除设备的方法。
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公开(公告)号：US20090066502A1
公开(公告)日：2009-03-12
申请号：US11854035
申请日：2007-09-12
申请人： Gregory S. Boettcher , William R. Copeland , Joseph P. DeGeorge , Scott M. Hargash , William T. Petry , Robert R. Young, JR.
发明人： Gregory S. Boettcher , William R. Copeland , Joseph P. DeGeorge , Scott M. Hargash , William T. Petry , Robert R. Young, JR.
IPC分类号： G08B1/08
CPC分类号： F16P3/003 , Y10T307/826 , Y10T307/937
摘要： An apparatus for implementing an emergency machine off circuit of a fabrication system, includes: at least one safety switch adapted for shunting an operation enable signal from a piece of equipment selected for removal from service, the switch also removing from service supplemental devices for the selected equipment. A semiconductor fabrication system and a method for removing equipment from service are provided.
摘要翻译： 一种用于实现制造系统的紧急切断电路的装置，包括：至少一个安全开关，其适于从被选择用于从服务中移除的设备的一个设备上分流运行使能信号，所述交换机还从所选择的服务补充设备 设备。 提供了半导体制造系统和用于从服务中去除设备的方法。
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公开(公告)号：US08404028B2
公开(公告)日：2013-03-26
申请号：US13008088
申请日：2011-01-18
IPC分类号： B01D45/00
CPC分类号： B01D45/08 , C23C16/4412
摘要： Embodiments of the present invention provide a vacuum trap labyrinth with improved trapping characteristics. The vacuum trap labyrinth comprised of an inner part and an outer part that fit together while in use, and come apart for easy cleaning during maintenance. The vacuum trap labyrinth is installed in a catchpot. In one embodiment, an O-ring is used to seal off an area of the catchpot to facilitate a visual inspection.
摘要翻译： 本发明的实施例提供一种具有改进的捕集特性的真空阱迷宫。 真空陷阱迷宫由内部和外部组成，在使用时装配在一起，并在维护期间分开以便于清洁。 真空陷阱迷宫安装在收集罐中。 在一个实施例中，O形环用于密封捕获阱的区域以便于目视检查。
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公开(公告)号：US07099009B2
公开(公告)日：2006-08-29
申请号：US10754232
申请日：2004-01-08
IPC分类号： G01B11/00
CPC分类号： H01L21/67259 , H01L21/67763
摘要： An arrangement for aligning a semiconductor process tool to a track system, and a method which facilitates the calibration and alignment between a previously installed overhead transport system in a fabrication facility or plant for semiconductor wafers or integrated circuit components, and a plurality of load ports on a process tool for the semiconductor wafer or integrated circuit components, which is to be subsequently installed in the fabrication facility.
摘要翻译： 用于将半导体处理工具对准轨道系统的装置以及促进在用于半导体晶片或集成电路部件的制造设施或工厂中的先前安装的架空运输系统和多个负载端口之间的校准和对准的方法 用于半导体晶片或集成电路部件的处理工具，其将被安装在制造设备中。
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公开(公告)号：US06199747B1
公开(公告)日：2001-03-13
申请号：US09385932
申请日：1999-08-30
IPC分类号： B23K3112
CPC分类号： B23K35/32 , B23K20/023 , B23K20/16 , B23K35/025
摘要： A method of and novel composition for transient liquid phase bonding of refractory metal structures is described herein. Preferably, the composition comprises a first component substantially similar to the composition of the refractory metal structure, and a second component having a lower melting temperature than the first component comprising a metallic constituent selected from the group consisting of iron, nickel and cobalt. The second component acts as a melting point depressant to temporarily lower the melting point of the first component so that the join can be accomplished without melting the structure itself. Upon applying the composition to the surfaces of refractory metal structures in need of joining, the assembly is heated to a eutectic point defined as the lowest melting point of the composition. A localized liquid region is formed at the interface of the two structures which solidifies when the second component diffuses into the structures such that the region becomes increasingly refractory thereby solidifying into a substantially refractory joint.
摘要翻译： 本文描述了难熔金属结构的瞬态液相粘合的方法和新组合物。 优选地，组合物包含与难熔金属结构的组成基本相似的第一组分，以及具有比包含选自铁，镍和钴的金属成分的第一组分更低的熔融温度的第二组分。 第二组分起着降低熔点的作用，暂时降低第一组分的熔点，从而可以在不熔化结构本身的情况下实现接合。 当将组合物施加到需要接合的难熔金属结构的表面时，将组件加热到被定义为组合物的最低熔点的共晶点。 当两个结构的界面处形成局部液体区域，当第二组分扩散到结构中时，这些结构固化，使得该区域变得越来越难以固化，从而固化成基本上耐火的接头。
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