公开(公告)号：US08833163B2

公开(公告)日：2014-09-16

申请号：US13372053

申请日：2012-02-13

申请人： Junichi Honda

发明人： Junichi Honda

IPC分类号： G01C19/56 ,  G01C19/5747

CPC分类号： G01C19/5747

摘要： An angular velocity sensor includes: a frame including a pair of first beams extending in a first direction and opposed to each other in a second direction orthogonal to the first direction, a pair of second beams extending in the second direction and opposed to each other in the first direction, and connections between those pairs; a drive unit that vibrates the frame in a first plane, to which the first and second directions belong, in a vibration mode in which when one pair of those pairs move closer to each other, the other move away from each other, and vice versa; a first detector that detects, based on the amount of deformation of the frame in the first plane, an angular velocity around an axis of a third direction orthogonal to the first plane; and a support mechanism including a base portion and joint portions.

摘要翻译： 角速度传感器包括：框架，包括在与第一方向正交的第二方向上沿第一方向延伸并彼此相对的一对第一梁;一对第二梁，沿第二方向延伸并彼此相对; 第一个方向和这些对之间的连接; 驱动单元，其以第一和第二方向所属的第一平面中的框架振动，其中当一对这些对相互靠近时，另一个移动彼此移动的振动模式，反之亦然 ; 第一检测器，基于第一平面中的框架的变形量来检测围绕与第一平面正交的第三方向的轴线的角速度; 以及包括基部和接合部的支撑机构。

公开(公告)号：US08516888B2

公开(公告)日：2013-08-27

申请号：US12491915

申请日：2009-06-25

申请人： Junichi Honda ,  Teruo Inaguma ,  Tetsuya Shibayama

发明人： Junichi Honda ,  Teruo Inaguma ,  Tetsuya Shibayama

IPC分类号： G01C19/00

CPC分类号： G01C19/5628 ,  G01C19/5621

摘要： Disclosed is an angular velocity sensor. The angular velocity sensor includes a first layer, a piezoelectric layer, and a second layer. The first layer has a first main surface and a second main surface, and includes a vibrator portion and a base portion that supports the vibrator portion. The piezoelectric layer is formed on the first main surface of the first layer. The second layer is integrally bonded to the base portion on a side of the second main surface of the first layer.

摘要翻译： 公开了一种角速度传感器。 角速度传感器包括第一层，压电层和第二层。 第一层具有第一主表面和第二主表面，并且包括振动器部分和支撑振动器部分的基部。 压电层形成在第一层的第一主表面上。 第二层在第一层的第二主表面的一侧整体地结合到基部。

公开(公告)号：US07401516B2

公开(公告)日：2008-07-22

申请号：US11734459

申请日：2007-04-12

申请人： Teruo Inaguma ,  Junichi Honda ,  Takashi Tamura ,  Kazuo Takahashi

发明人： Teruo Inaguma ,  Junichi Honda ,  Takashi Tamura ,  Kazuo Takahashi

IPC分类号： G01P3/02 ,  G01P9/00 ,  H01L41/08

CPC分类号： G01C19/5656

摘要： A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.

摘要翻译： 施加用于允许振动器振动的电压的驱动电极，并且形成作为上电极的沿振动器的纵向方向彼此平行延伸的第一和第二检测电极，使得驱动电极插入在第一 和第二检测电极，并且不与检测电极接触。 当在下电极和驱动电极之间施加电压以允许振动器以垂直共振频率振动时，在第一和第二检测电极中检测到的检测信号之间存在差异的情况下，将激光照射到 所述振动器的期望部分基于在所述第一和第二检测电极中检测到的检测信号进行研磨操作，从而调节所述振动器的形状。

公开(公告)号：US4640001A

公开(公告)日：1987-02-03

申请号：US684271

申请日：1984-12-20

申请人： Sakae Koiwai ,  Keizo Asaoka ,  Katsuhiko Shirasawa ,  Hiroyuki Watanabe ,  Junichi Honda

发明人： Sakae Koiwai ,  Keizo Asaoka ,  Katsuhiko Shirasawa ,  Hiroyuki Watanabe ,  Junichi Honda

IPC分类号： H01L31/04 ,  H01L31/0216 ,  H01L31/068 ,  H01L31/18

CPC分类号： H01L31/02168 ,  H01L31/068 ,  Y02E10/547

摘要： Solar cell manufacturing method in which a silicon wafer is coated with an antireflection coating of silicon nitride by means of plasma CVD deposition with the silicon wafer kept at a temperature between 250.degree. C. and 600.degree. C. The coating of silicon nitride at such a high temperature results in a decrease in the recombination speed of the minority carriers produced in the silicon wafer during time of light incidence. The conversion efficiency is thus increased to a value ranging from 11.04% to 12.56%.

摘要翻译： 太阳能电池制造方法，其中硅晶片通过等离子体CVD沉积涂覆有氮化硅的抗反射涂层，硅晶片保持在250℃至600℃的温度。氮化硅涂层 高温导致光入射时在硅晶片中产生的少数载流子的复合速度降低。 因此转换效率提高到11.04％至12.56％。

公开(公告)号：US08910517B2

公开(公告)日：2014-12-16

申请号：US13202918

申请日：2010-12-02

申请人： Kazuo Takahashi ,  Junichi Honda

发明人： Kazuo Takahashi ,  Junichi Honda

IPC分类号： G01C19/56 ,  G01C19/5726 ,  G01C19/5747 ,  H01L41/08

CPC分类号： G01C19/5726 ,  G01C19/5747 ,  H01L41/08

摘要： An angular velocity sensor includes an annular frame, a drive part, and a detection part. The frame has first beams and second beams. The first beams extend in an a-axis direction and are opposed to each other in a b-axis direction orthogonal to the a-axis direction. The second beams extend in the b-axis direction and are opposed to each other in the a-axis direction. The drive part causes the frame to oscillate within an XY plane to which the a-axis and the b-axis belong, in an oscillation mode where, when one of the first and second beams come closer to each other, the other separates from each other. The detection part detects an angular velocity around an axis in the Z-axis direction orthogonal to the XY plane, based on an amount of deformation of the frame oscillating in the oscillation mode within the XY plane.

摘要翻译： 角速度传感器包括环形框架，驱动部件和检测部件。 框架具有第一梁和第二梁。 第一光束沿a轴方向延伸并且在与a轴方向正交的b轴方向上彼此相对。 第二光束在b轴方向上延伸并且在a轴方向上彼此相对。 驱动部分使得框架在a轴和b轴所属的XY平面内振荡，在振荡模式中，当第一和第二梁中的一个彼此靠近时，另一个从每个 其他。 检测部基于XY平面内以振荡模式振荡的框架的变形量，检测与XY平面正交的Z轴方向上的轴的角速度。

公开(公告)号：US20120216613A1

公开(公告)日：2012-08-30

申请号：US13372053

申请日：2012-02-13

申请人： Junichi Honda

发明人： Junichi Honda

IPC分类号： G01P3/44

CPC分类号： G01C19/5747

摘要： An angular velocity sensor includes: a frame including a pair of first beams extending in a first direction and opposed to each other in a second direction orthogonal to the first direction, a pair of second beams extending in the second direction and opposed to each other in the first direction, and connections between those pairs; a drive unit that vibrates the frame in a first plane, to which the first and second directions belong, in a vibration mode in which when one pair of those pairs move closer to each other, the other move away from each other, and vice versa; a first detector that detects, based on the amount of deformation of the frame in the first plane, an angular velocity around an axis of a third direction orthogonal to the first plane; and a support mechanism including a base portion and joint portions.

摘要翻译： 角速度传感器包括：框架，包括在与第一方向正交的第二方向上沿第一方向延伸并彼此相对的一对第一梁;一对第二梁，沿第二方向延伸并彼此相对; 第一个方向和这些对之间的连接; 驱动单元，其以第一和第二方向所属的第一平面中的框架振动，其中当一对这些对相互靠近时，另一个移动彼此移动的振动模式，反之亦然 ; 第一检测器，基于第一平面中的框架的变形量来检测围绕与第一平面正交的第三方向的轴线的角速度; 以及包括基部和接合部的支撑机构。

公开(公告)号：US20110111253A1

公开(公告)日：2011-05-12

申请号：US13002226

申请日：2009-06-18

申请人： Yasufumi Shibata ,  Takashi Nomura ,  Shigeru Konda ,  Mitsuru Sakano ,  Isamu Ichikawa ,  Katsuhito Azuma ,  Junichi Honda ,  Satoshi Mizutani

发明人： Yasufumi Shibata ,  Takashi Nomura ,  Shigeru Konda ,  Mitsuru Sakano ,  Isamu Ichikawa ,  Katsuhito Azuma ,  Junichi Honda ,  Satoshi Mizutani

IPC分类号： C25D3/30 ,  C25D5/50 ,  B32B15/01

CPC分类号： C25D3/32 ,  C25D5/50 ,  H01L23/49582 ,  H01L2924/0002 ,  H05K3/244 ,  Y10T428/12715 ,  H01L2924/00

摘要： In a plated member (3) that has a pure Sn plating layer (2) of a lead-free material on a surface of a base material 1, the orientation indices of a (101) plane and a (112) plane of the pure Sn plating layer are increased to values higher than the orientation indices of the other crystal orientation planes.

摘要翻译： 在基材1的表面具有无铅材料的纯Sn镀层（2）的电镀部件（3）中，纯（1）的（101）面和（112）面的取向指数 Sn镀层增加到高于其他晶体取向面的取向指数的值。

公开(公告)号：US07673512B2

公开(公告)日：2010-03-09

申请号：US11928931

申请日：2007-10-30

申请人： Kazuo Takahashi ,  Junichi Honda ,  Teruo Inaguma

发明人： Kazuo Takahashi ,  Junichi Honda ,  Teruo Inaguma

IPC分类号： G01P9/04 ,  H01L41/08

CPC分类号： G01C19/5607

摘要： An angular velocity sensor includes a base portion, three arm portions that extend as one piece from the base portion to an approximately same direction, a piezoelectric film formed on one surface of each of the arm portions, drive electrodes for excitation formed on the piezoelectric films of at least two outer arm portions, and detection electrodes for angular velocity detection formed on the piezoelectric film of at least a center arm portion. Among the three arm portions, the two outer arm portions are excited in phase, and the center arm portion is excited in opposite phase with the two outer arm portions. The drive electrodes excite the arm portions in a first direction vertical to surfaces on which the piezoelectric films are formed. The detection electrodes detect a vibration in a second direction parallel to the surfaces on which the piezoelectric films of the arm portions are formed.

摘要翻译： 角速度传感器包括基部，从基部向大致相同的方向延伸一体的三个臂部，形成在每个臂部的一个表面上的压电膜，形成在压电膜上的激励用驱动电极 至少两个外臂部分，以及形成在至少一个中心臂部分的压电膜上的用于角速度检测的检测电极。 在三个臂部中，两个外臂部分被相位激励，并且中心臂部分与两个外臂部分相反地相互激励。 驱动电极在垂直于其上形成有压电膜的表面的第一方向上激励臂部。 检测电极在平行于形成有臂部的压电膜的表面的第二方向上检测振动。

公开(公告)号：US07654139B2

公开(公告)日：2010-02-02

申请号：US10599833

申请日：2006-02-23

申请人： Shigeto Watanabe ,  Junichi Honda ,  Shin Sasaki ,  Kazuo Takahashi ,  Teruo Inaguma ,  Koji Suzuki ,  Manabu Aizawa

发明人： Shigeto Watanabe ,  Junichi Honda ,  Shin Sasaki ,  Kazuo Takahashi ,  Teruo Inaguma ,  Koji Suzuki ,  Manabu Aizawa

IPC分类号： G01P9/04 ,  G01C19/56

CPC分类号： G01C19/5663 ,  G01C19/5656

摘要： To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer. The vibration element 20 is mounted on the supporting substrate 2 by joining the terminals 25 to the lands 4 with metallic projections 26 disposed therebetween.

摘要翻译： 通过简单的结构实现尺寸缩小和高Q值提高特性。 根据本发明的振动陀螺传感器1包括其上安装有电路元件的支撑基板2和布置在其上的多个焊盘4的布线图案; 以及安装在支撑基板的表面2-1上的振动元件20。 振动元件20包括具有安装表面22-2的基部22，该安装表面22-2设置有连接到该焊盘的多个端子25; 以及从基部22的一侧以悬臂方式一体地延伸并具有与基部22的安装面齐平的面向基板的表面的振动部23，面向基板的表面设置有第一电极 堆叠在第一电极层上的压电层28和堆叠在压电层上的第二电极层29,30。 振动元件20通过将端子25与设置在它们之间的金属突起26接合到平台4而安装在支撑基板2上。

公开(公告)号：US20080222865A1

公开(公告)日：2008-09-18

申请号：US12123109

申请日：2008-05-19

申请人： Eiji Nakashio ,  Junichi Honda ,  Takashi Tamura ,  Koji Suzuki ,  Teruo Inaguma ,  Manabu Aizawa ,  Kazuo Takahashi ,  Tadashi Sakurai

发明人： Eiji Nakashio ,  Junichi Honda ,  Takashi Tamura ,  Koji Suzuki ,  Teruo Inaguma ,  Manabu Aizawa ,  Kazuo Takahashi ,  Tadashi Sakurai

IPC分类号： H01L41/22

CPC分类号： G01C19/5663 ,  H01L41/094 ,  H01L41/316 ,  Y10T29/42 ,  Y10T29/49155

摘要： A piezoelectric element with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film, and a method of forming same. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film has a predetermined thickness and is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization.

摘要翻译： 具有基板的压电元件，设置在基板上的第一电极膜，设置在第一电极膜上的压电膜和设置在压电膜上的第二电极膜及其形成方法。 压电薄膜具有由多个结晶化的压电薄膜构成的叠层结构。 压电膜具有预定的厚度，并且通过形成压电薄膜的成膜步骤和对压电薄膜进行热处理以进行结晶的结晶热处理步骤的重复循环形成。