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公开(公告)号：US20090278081A1
公开(公告)日：2009-11-12
申请号：US12411261
申请日：2009-03-25
申请人： Hichem M'Saad , Lakshmanan Karuppiah , Hung Chih Chen , Jeonghoon Oh , Robert Lum , Stan D. Tsai , Cassio Conceicao , Ashish Bhatnagar , Michael Perry , Kadthala Narendrnath , Yosi Shacham-Diamand
发明人： Hichem M'Saad , Lakshmanan Karuppiah , Hung Chih Chen , Jeonghoon Oh , Robert Lum , Stan D. Tsai , Cassio Conceicao , Ashish Bhatnagar , Michael Perry , Kadthala Narendrnath , Yosi Shacham-Diamand
IPC分类号： C09K13/00
CPC分类号： B24B37/24
摘要： A method for forming a polishing media and an article of manufacture is described. The article of manufacture may be formed into a polishing article. The polishing article includes a polymer base material and a plurality of nano-scale structures disposed in or on the polymer base material.
摘要翻译： 描述了用于形成抛光介质和制造物品的方法。 制品可以形成为抛光制品。 抛光制品包括聚合物基材和设置在聚合物基材中或其上的多个纳米级结构。
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公开(公告)号：US06370006B1
公开(公告)日：2002-04-09
申请号：US09506423
申请日：2000-02-17
IPC分类号： H02N1300
CPC分类号： H01L21/67109 , H01L21/6831 , H01L21/6833 , H02N13/00
摘要： An electrostatic chuck and a process of manufacturing an electrostatic chuck for supporting a semiconductor wafer during wafer processing and for providing a plurality of gas inlet channels extending through the chuck and through which thermal transfer gas can be supplied to the back side of the wafer to enhance the thermal transfer between the wafer and the chuck, embedding a plurality of inserts in a ceramic electrostatic chuck, each insert comprising a matrix of the ceramic of which the electrostatic chuck is made and a plurality of removable elongate members, and removing the elongate members to form a plurality of elongate holes providing the plurality of gas inlet channels.
摘要翻译： 一种静电卡盘和制造用于在晶片加工期间支撑半导体晶片的静电卡盘的工艺，以及用于提供延伸穿过卡盘的多个气体入口通道，并且热传递气体可以通过该导入通道提供到晶片的背面以增强 在晶片和卡盘之间的热传递，将多个插入件嵌入陶瓷静电卡盘中，每个插入件包括其上形成有静电卡盘的陶瓷基体和多个可移除的细长构件，并且将细长构件移除到 形成多个提供多个气体入口通道的细长孔。
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