公开(公告)号：US09587980B2

公开(公告)日：2017-03-07

申请号：US14349080

申请日：2012-09-10

Applicant: Katsumi Shibayama ,  Takashi Kasahara

Inventor： Katsumi Shibayama ,  Takashi Kasahara

IPC: G01B9/02 ,  G01J3/45 ,  G01J3/02 ,  G01J3/26 ,  G01J3/36 ,  G01J3/51 ,  G01J3/28 ,  G01J3/12

CPC classification number: G01J3/0229 ,  G01J3/26 ,  G01J3/2803 ,  G01J3/36 ,  G01J3/513 ,  G01J2003/1234 ,  G01J2003/2806

Abstract: A spectroscopic sensor 1 comprises an interference filter unit 20, having a cavity layer 21 and mirror layers 22, 23 opposing each other through the layer 21, for selectively transmitting therethrough light in a predetermined wavelength range according to an incident position thereof; a light-transmitting substrate 3, arranged on the layer 22 side, for transmitting therethrough light incident on the unit 20; and a light-detecting substrate 4, arranged on the layer 23 side, for detecting the light transmitted through the unit 20. The layer 21 has a filter region 24 held between the layers 22, 23; an annular surrounding region 25 surrounding the region 24 with a predetermined distance therefrom; and an annular connecting region 26 connecting an end part 24e on the substrate 4 side of the region 24 and an end part 25e on the substrate 4 side of the region 25 to each other.

Abstract translation: 光谱传感器1包括干涉滤光器单元20，其具有通过层21相对的空腔层21和反射镜层22,23，用于根据其入射位置选择性地透射预定波长范围的光; 布置在层22侧的用于透射入射在单元20上的光的透光基板3; 以及布置在层23侧的用于检测透过单元20的光的光检测基板4.层21具有保持在层22,23之间的过滤器区域24。 围绕区域24的环形周围区域25与预定距离; 以及将区域24的基板4侧的端部24e和区域25的基板4侧的端部25e彼此连接的环状连接区域26。

公开(公告)号：US09360599B2

公开(公告)日：2016-06-07

申请号：US13983850

申请日：2012-02-08

Applicant: Takafumi Yokino ,  Katsumi Shibayama

Inventor： Takafumi Yokino ,  Katsumi Shibayama

IPC: B29D11/00 ,  G02B5/18 ,  G02B5/08 ,  G02B5/00 ,  B29C43/02 ,  B29C43/36 ,  B29L11/00

CPC classification number: G02B5/0808 ,  B29C43/021 ,  B29C43/36 ,  B29D11/00769 ,  B29L2011/0016 ,  G01J3/0256 ,  G01J3/0291 ,  G01J2003/1852 ,  G02B5/00 ,  G02B5/10 ,  G02B5/18 ,  G02B5/1814 ,  G02B5/1852 ,  G02B5/1861 ,  Y10T428/24521

Abstract: An optical element 1 comprises a base 2 having a surface 2a formed with a depression 3 and a formed layer 4 disposed on the base 2. The formed layer 4 has a main part 5 located within the depression 3 when seen in the depth direction of the depression 3 and an overhang 6 located on the surface 2a of the base 2 while being connected to the main part 5. A curved surface 4b opposing a bottom face 3b of the depression 3 in the main part 5 is provided with an optical function part 10.

Abstract translation: 光学元件1包括具有形成有凹部3的表面2a和设置在基部2上的成形层4的基体2.成形层4具有位于凹部3内的主要部分5，当沿着该凹部3的深度方向观察时 凹部3和位于基座2的表面2a上的突出部6，同时连接到主体部分5.与主体部分5中的凹部3的底面3b相对的弯曲表面4b设置有光学功能部件10 。

公开(公告)号：US09075193B2

公开(公告)日：2015-07-07

申请号：US13390527

申请日：2010-08-11

Applicant: Katsumi Shibayama ,  Takafumi Yokino

Inventor： Katsumi Shibayama ,  Takafumi Yokino

IPC: G01J3/28 ,  G02B5/18 ,  G01J3/02 ,  G01J3/18

CPC classification number: G01J3/18 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/2803 ,  G02B5/1814 ,  G02B5/1852 ,  G02B5/1861

Abstract: In a spectroscopic module 1, a flange 7 is formed integrally with a diffraction layer 6 along a periphery thereof so as to become thicker than the diffraction layer 6. As a consequence, at the time of releasing a master mold used for forming the diffraction layer 6 and flange 7, the diffraction layer 6 formed along a convex curved surface 3a of a main unit 3 can be prevented from peeling off from the curved surface 3a together with the master mold. A diffraction grating pattern 9 is formed so as to be eccentric with respect to the center of the diffraction layer 6 toward a predetermined side. Therefore, releasing the mold earlier from the opposite side of the diffraction layer 6 than the predetermined side thereof can prevent the diffraction layer 6 from peeling off and the diffraction grating pattern 9 from being damaged.

Abstract translation: 在分光模块1中，凸缘7沿着其周边与衍射层6一体地形成为比衍射层6厚。因此，在释放用于形成衍射层的母模时， 如图6和法兰7所示，可以防止沿着主单元3的凸曲面3a形成的衍射层6与母模一起从弯曲表面3a剥离。 衍射光栅图案9形成为相对于衍射层6的中心偏向预定侧。 因此，从衍射层6的与其规定侧相反的一侧较早地剥离模具可以防止衍射层6剥离，衍射光栅图案9受损。

公开(公告)号：US20140253923A1

公开(公告)日：2014-09-11

申请号：US14349101

申请日：2012-09-10

Applicant: Katsumi Shibayama ,  Takashi Kasahara

Inventor： Katsumi Shibayama ,  Takashi Kasahara

IPC: G01J3/45

CPC classification number: G01J3/45 ,  G01J3/0259 ,  G01J3/26 ,  G01J3/2803 ,  G01J3/36 ,  G01J3/513 ,  G01J2003/1234 ,  G01J2003/2806 ,  G01J2003/2816

Abstract: A spectroscopic sensor 1 comprises an interference filter unit 20, having a cavity layer 21 and first and second mirror layers 22, 23 opposing each other through the cavity layer 21, for selectively transmitting therethrough light in a predetermined wavelength range according to an incident position thereof; a light-transmitting substrate 3, arranged on the first mirror layer 22 side, for transmitting therethrough light incident on the interference filter unit 20; a light-detecting substrate 4, arranged on the second mirror layer 23 side, for detecting the light transmitted through the interference filter unit 20; and a first coupling layer 11 arranged between the interference filter unit 20 and the light-transmitting substrate 3. The cavity layer 21 and the first coupling layer 11 are silicon oxide films.

Abstract translation: 光谱传感器1包括干涉滤光器单元20，其具有空腔层21和通过空腔层21彼此相对的第一和第二反射镜层22,23，用于根据其入射位置选择性地透过预定波长范围的光 ; 布置在第一镜层22侧的用于透射入射在干涉滤光器单元20上的光的透光基板3; 布置在第二镜面23侧的光检测基板4，用于检测透过干涉滤光器单元20的光; 以及布置在干涉滤光器单元20和透光衬底3之间的第一耦合层11.空腔层21和第一耦合层11是氧化硅膜。

公开(公告)号：US08715443B2

公开(公告)日：2014-05-06

申请号：US13817876

申请日：2011-09-21

Applicant: Katsumi Shibayama ,  Masaomi Takasaka

Inventor： Katsumi Shibayama ,  Masaomi Takasaka

IPC: G01J3/28

CPC classification number: G01J3/28 ,  G01J3/26 ,  G02B5/201 ,  G02B5/288 ,  Y10T156/1111 ,  Y10T156/1195

Abstract: A method of manufacturing a spectroscopic sensor 1 comprises a first step of forming a cavity layer 21 by nanoimprinting on a handle substrate; a second step of forming a first mirror layer 22 on the cavity layer 21 after the first step; a third step of joining a light-transmitting substrate 3 onto the first mirror layer 22 after the second step; a fourth step of removing the handle substrate from the cavity layer 21 after the third step; a fifth step of forming a second mirror layer 23 on the cavity layer 21 without the handle substrate after the fourth step; and a sixth step of joining the light detection substrate 4 onto the second mirror layer 23 after the fifth step.

Abstract translation: 制造分光传感器1的方法包括：通过在手柄基板上纳米压印形成空腔层21的第一步骤; 在第一步骤之后在空腔层21上形成第一镜面层22的第二步骤; 在第二步骤之后将透光性基板3接合到第一镜面层22上的第三工序; 在第三步骤之后从腔层21去除手柄基板的第四步骤; 第五步骤，在第四步骤之后，在没有手柄基板的空腔层21上形成第二镜面层23; 以及在第五步骤之后将光检测基板4接合到第二镜面层23上的第六步骤。

公开(公告)号：US08604412B2

公开(公告)日：2013-12-10

申请号：US12992473

申请日：2009-05-07

Applicant: Katsumi Shibayama ,  Takashi Kasahara ,  Anna Yoshida

Inventor： Katsumi Shibayama ,  Takashi Kasahara ,  Anna Yoshida

IPC: G01J3/50 ,  G01J3/12

CPC classification number: G01J3/0205 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/04 ,  G01J3/18 ,  G01J3/2803 ,  G02B7/027 ,  H01L31/18

Abstract: The present invention provides a highly reliable spectral module. When light L1 proceeding to a spectroscopic unit (4) passes through a light transmitting hole (50) in the spectral module (1) in accordance with the present invention, only the light having passed through a light entrance side unit (51) formed such as to become narrower toward a substrate (2) and entered a light exit side unit (52) formed such as to oppose a bottom face (51b) of the light entrance side unit (51) is emitted from a light exit opening (52a). Therefore, stray light M incident on a side face (51c) or bottom face (51b) of the light entrance side unit (51) is reflected to the side opposite to the light exit side unit (52) and thus is inhibited from entering the light exit side unit (52). Therefore, the reliability of the spectral module (1) can be improved.

Abstract translation: 本发明提供了一种高度可靠的光谱模块。 当进入分光单元（4）的光L1穿过根据本发明的光谱模块（1）中的透光孔（50）时，仅通过形成光入射侧单元（51）的光 朝向基板（2）变窄并且进入与光入射侧单元（51）的底面（51b）相对形成的光出射侧单元（52）从光出射开口（52a）射出， 。 因此，入射到光入射单元（51）的侧面（51c）或底面（51b）的杂散光M被反射到与光出射单元（52）相反的一侧，因此被禁止进入 光出射侧单元（52）。 因此，可以提高光谱模块（1）的可靠性。

公开(公告)号：US08564773B2

公开(公告)日：2013-10-22

申请号：US13208774

申请日：2011-08-12

Applicant: Katsumi Shibayama ,  Tomofumi Suzuki ,  Masaki Hirose

Inventor： Katsumi Shibayama ,  Tomofumi Suzuki ,  Masaki Hirose

IPC: G01J3/28

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/0286 ,  G01J3/18

Abstract: In a spectroscopy module 1, a light passing hole 50 through which a light L1 advancing to a spectroscopic portion 4 passes is formed in a light detecting element 5. Therefore, it is possible to prevent the relative positional relationship between the light passing hole 50 and a light detecting portion 5a of the light detecting element 5 from deviating. Moreover, the light detecting element 5 is bonded to a front plane 2a of a substrate 2 with an optical resin adhesive 63. Thus, it is possible to reduce a stress generated onto the light detecting element 5 due to a thermal expansion difference between the light detecting element 5 and the substrate 2. Additionally, on the light detecting element 5, a first convex portion 101 is formed so as to be located at least between the light detecting portion 5a and the light passing hole 50 when viewed from a direction substantially perpendicular to the front plane 2a. Thus, when the light detecting element 5 is attached to the substrate 2 via the optical resin adhesive 63, the optical resin adhesive 63 is dammed at the first convex portion 101. Thus, the optical resin adhesive 63 is prevented from penetrating into the light passing hole 50.

Abstract translation: 在光谱模块1中，在光检测元件5中形成有通过向分光部4前进的光L1通过的光通过孔50.因此，能够防止光通过孔50与 光检测元件5的光检测部分5a偏离。 此外，光检测元件5利用光学树脂粘合剂63接合到基板2的前面2a。因此，可以减少由于光的热膨胀差而在光检测元件5上产生的应力 检测元件5和基板2.此外，在光检测元件5上，当从基本上垂直的方向观察时，形成至少位于光检测部分5a和光通过孔50之间的第一凸部101 到前平面2a。 因此，当光检测元件5通过光学树脂粘合剂63附着到基板2上时，光学树脂粘合剂63被阻挡在第一凸部101处。因此，防止光学树脂粘合剂63渗透到光通过 孔50。

公开(公告)号：US20120276287A1

公开(公告)日：2012-11-01

申请号：US13545445

申请日：2012-07-10

Applicant: Katsumi SHIBAYAMA ,  Helmut Teichmann ,  Tomofumi Suzuki ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Katsumi SHIBAYAMA ,  Helmut Teichmann ,  Tomofumi Suzuki ,  Dietmar Hiller ,  Ulrich Starker

IPC: B05D5/06

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/2803

Abstract: In the spectroscopy module 1, a light detecting element 4 is provided with a light passing opening 4b through which light made incident into a body portion 2 passes. Therefore, it is possible to prevent deviation of the relative positional relationship between the light passing opening 4b and a light detection portion 4a of the light detecting element 4. Further, an optical element 7, which guides light made incident into the body portion 2, is arranged at the light passing opening 4b. Therefore, light, which is to be made incident into the body portion 2, is not partially blocked at a light incident edge portion of the light passing opening 4b, but light, which is to be made incident into the body portion 2, can be guided securely. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.

Abstract translation: 在光谱模块1中，光检测元件4设置有入射到主体部分2中的光通过的光通过开口4b。 因此，能够防止光通过口4b与光检测元件4的光检测部4a之间的相对位置关系的偏差。此外，引导入射到主体部2的光的光学元件7， 布置在光通过开口4b处。 因此，入射到主体部分2中的光在光通过开口4b的光入射边缘部分处不被部分地阻挡，而入射到主体部分2中的光可以是 引导安全。 因此，根据光谱模块1，可以提高可靠性。

公开(公告)号：US20120099104A1

公开(公告)日：2012-04-26

申请号：US13342379

申请日：2012-01-03

Applicant: Katsumi SHIBAYAMA ,  Tomofumi SUZUKI ,  Masashi ITO

Inventor： Katsumi SHIBAYAMA ,  Tomofumi SUZUKI ,  Masashi ITO

IPC: G01J3/30

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/0259 ,  G01J3/0291

Abstract: The spectrometer 1 is provided with a package 2 in which a light guiding portion 7 is provided, a spectroscopic module 3 accommodated inside the package 2, and a support member 29 arranged on an inner wall plane of the package 2 to support the spectroscopic module 3. The spectroscopic module 3 is provided with a body portion 11 for transmitting light made incident from the light guiding portion 7 and a spectroscopic portion 13 for dispersing light passed through the body portion 11 on a predetermined plane of the body portion 11, and the spectroscopic portion 13 is supported by the support member 29 on the predetermined plane in a state of being spaced away from the inner wall plane.

Abstract translation: 光谱仪1设置有其中设置有导光部7的封装2，容纳在封装2内部的分光模块3和布置在封装2的内壁面上以支撑光谱模块3的支撑构件29 分光模块3设置有用于透射从导光部7入射的光的主体部11和用于将通过主体部11的光分散在主体部11的预定平面上的分光部13， 部分13在与内壁平面间隔开的状态下由支撑构件29支撑在预定平面上。

公开(公告)号：US08125636B2

公开(公告)日：2012-02-28

申请号：US10580841

申请日：2004-11-24

Applicant: Mitsuaki Kageyama ,  Katsumi Shibayama ,  Seiichiro Mizuno ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Mitsuaki Kageyama ,  Katsumi Shibayama ,  Seiichiro Mizuno ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/28

CPC classification number: H01L27/1446 ,  G01J3/0243 ,  G01J3/0256 ,  G01J3/0291 ,  G01J3/2803

Abstract: A photodiode array, having a plurality of photodiodes 12 (n-type channel regions 121), and a light entrance portion 13, formed of an opening that is used to make light to be detected by photodiodes 12 enter, are provided in a substrate 10 of a photodetector 1A having an n-type substrate 101 and a p-type epitaxial layer 102. Furthermore, a carrier capturing portion 60, for capturing carriers generated at a substrate portion near the light entrance portion 13 and removes the captured carriers to the exterior via an electrode 61, is arranged from a layer portion of the epitaxial layer 102 that is positioned between the photodiode array 11 and the light entrance portion 13. A photodetector of a simple arrangement, which, when applied to a spectrometer, enables the positioning precision of components of the spectrometer to be improved, and a spectrometer using this photodetector are thus realized.

Abstract translation: 具有多个光电二极管12（n型沟道区域121）的光电二极管阵列以及由用于使由光电二极管12检测出的光的开口形成的光入射部分13设置在基板10中 具有n型衬底101和p型外延层102的光检测器1A。此外，载体捕获部分60用于捕获在光入口部分13附近的衬底部分处产生的载流子，并将捕获的载流子移除到外部 通过电极61从位于光电二极管阵列11和光入射部分13之间的外延层102的层部分布置。一种简单布置的光电检测器，当应用于光谱仪时，能够实现定位精度 要改进光谱仪的部件，从而实现使用该光检测器的光谱仪。