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公开(公告)号:US08035798B2
公开(公告)日:2011-10-11
申请号:US11482119
申请日:2006-07-07
CPC分类号: G03F7/70775 , G03F7/70058 , G03F7/70191 , G03F7/70341 , G03F7/7055 , G03F7/707 , G03F7/7085 , G03F9/7088
摘要: A lithographic apparatus is provided that has a sensor at substrate level, the sensor including a radiation receiver, a transmissive plate supporting the radiation receiver, and a radiation detector, wherein the sensor is arranged to avoid loss of radiation between the radiation receiver and a final element of the radiation detector.
摘要翻译: 提供了一种光刻设备,其具有在基底水平的传感器,所述传感器包括辐射接收器,支撑辐射接收器的透射板和辐射探测器,其中所述传感器布置成避免辐射接收器与最终的辐射之间的辐射损失 辐射探测器的元件。
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公开(公告)号:US08947637B2
公开(公告)日:2015-02-03
申请号:US13226103
申请日:2011-09-06
CPC分类号: G03F7/70775 , G03F7/70058 , G03F7/70191 , G03F7/70341 , G03F7/7055 , G03F7/707 , G03F7/7085 , G03F9/7088
摘要: A lithographic apparatus is provided that has a sensor at substrate level, the sensor including a radiation receiver, a transmissive plate supporting the radiation receiver, and a radiation detector, wherein the sensor is arranged to avoid loss of radiation between the radiation receiver and a final element of the radiation detector.
摘要翻译: 提供了一种光刻设备,其具有在基底水平的传感器,所述传感器包括辐射接收器,支撑辐射接收器的透射板和辐射探测器,其中所述传感器布置成避免辐射接收器与最终的辐射之间的辐射损失 辐射探测器的元件。
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公开(公告)号:US07907255B2
公开(公告)日:2011-03-15
申请号:US10924202
申请日:2004-08-24
CPC分类号: G03F7/70775 , G03F7/70058 , G03F7/70191 , G03F7/70341 , G03F7/7055 , G03F7/707 , G03F7/7085 , G03F9/7088
摘要: A lithographic apparatus is provided that has a sensor at substrate level, the sensor including a radiation receiver, a transmissive plate supporting the radiation receiver, and a radiation detector, wherein the sensor is arranged to avoid loss of radiation between the radiation receiver and a final element of the radiation detector.
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公开(公告)号:US20110317143A1
公开(公告)日:2011-12-29
申请号:US13226103
申请日:2011-09-06
IPC分类号: G03B27/54
CPC分类号: G03F7/70775 , G03F7/70058 , G03F7/70191 , G03F7/70341 , G03F7/7055 , G03F7/707 , G03F7/7085 , G03F9/7088
摘要: A lithographic apparatus is provided that has a sensor at substrate level, the sensor including a radiation receiver, a transmissive plate supporting the radiation receiver, and a radiation detector, wherein the sensor is arranged to avoid loss of radiation between the radiation receiver and a final element of the radiation detector.
摘要翻译: 提供了一种光刻设备,其具有在基底水平的传感器,所述传感器包括辐射接收器,支撑辐射接收器的透射板和辐射探测器,其中所述传感器布置成避免辐射接收器与最终的辐射之间的辐射损失 辐射探测器的元件。
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公开(公告)号:US20050078287A1
公开(公告)日:2005-04-14
申请号:US10924202
申请日:2004-08-24
IPC分类号: G01B15/00 , G03F7/20 , G03F9/00 , H01L21/027 , G03B27/52
CPC分类号: G03F7/70775 , G03F7/70058 , G03F7/70191 , G03F7/70341 , G03F7/7055 , G03F7/707 , G03F7/7085 , G03F9/7088
摘要: A lithographic apparatus is provided that has a sensor at substrate level, the sensor including a radiation receiver, a transmissive plate supporting the radiation receiver, and a radiation detector, wherein the sensor is arranged to avoid loss of radiation between the radiation receiver and a final element of the radiation detector.
摘要翻译: 提供了一种光刻设备,其具有在基底水平的传感器,所述传感器包括辐射接收器,支撑辐射接收器的透射板和辐射探测器,其中所述传感器布置成避免辐射接收器与最终的辐射之间的辐射损失 辐射探测器的元件。
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