-
公开(公告)号：US08554009B2
公开(公告)日：2013-10-08
申请号：US12228495
申请日：2008-08-13
申请人： Yuqin Zong , Steven W. Brown , Keith R. Lykke , Yoshihiro Ohno
发明人： Yuqin Zong , Steven W. Brown , Keith R. Lykke , Yoshihiro Ohno
IPC分类号： G06K9/40
CPC分类号： G02B27/0018 , G01J1/08 , G01J1/4228 , G01J3/28 , H04N5/217 , H04N5/23229 , H04N17/002
摘要： A simple matrix method and computer program product for stray-light correction in imaging instruments is provided. The stray-light correction method includes receiving raw signals from an imaging instrument and characterizing the imaging instrument for a set of point spread functions. For high resolution imaging instruments, the raw signals may be compressed to reduce the size of the correction matrix. Based on stray-light distribution functions derived from the point spread functions, a correction matrix is derived. This fast correction is performed by a matrix multiplication to the measured raw signals, and may reduce stray-light errors by more than one order of magnitude. Using the stray-light corrected instrument, significant reductions may be made in overall measurement uncertainties in radiometry, colorimetry, photometry and other applications. Because the PSFs may include other types of undesired responses, the stray-light correction also eliminates other types of errors, e.g., interreflection between a CCD and the detector window.
-
公开(公告)号：US20090059210A1
公开(公告)日：2009-03-05
申请号：US12228495
申请日：2008-08-13
申请人： Yuqin Zong , Steven W. Brown , Keith R. Lykke , Yoshihiro Ohno
发明人： Yuqin Zong , Steven W. Brown , Keith R. Lykke , Yoshihiro Ohno
CPC分类号： G02B27/0018 , G01J1/08 , G01J1/4228 , G01J3/28 , H04N5/217 , H04N5/23229 , H04N17/002
摘要： A simple matrix method and computer program product for stray-light correction in imaging instruments is provided. The stray-light correction method includes receiving raw signals from an imaging instrument and characterizing the imaging instrument for a set of point spread functions. For high resolution imaging instruments, the raw signals may be compressed to reduce the size of the correction matrix. Based on stray-light distribution functions derived from the point spread functions, a correction matrix is derived. This fast correction is performed by a matrix multiplication to the measured raw signals, and may reduce stray-light errors by more than one order of magnitude. Using the stray-light corrected instrument, significant reductions may be made in overall measurement uncertainties in radiometry, colorimetry, photometry and other applications. Because the PSFs may include other types of undesired responses, the stray-light correction also eliminates other types of errors, e.g., interreflection between a CCD and the detector window.
摘要翻译： 提供了一种用于成像仪器中的杂散光校正的简单矩阵方法和计算机程序产品。 杂散光校正方法包括从成像仪器接收原始信号并表征一组点扩散函数的成像仪器。 对于高分辨率成像仪器，可以压缩原始信号以减小校正矩阵的大小。 基于从点扩散函数导出的散射光分布函数，导出校正矩阵。 这种快速校正通过与所测量的原始信号的矩阵乘法来执行，并且可以将杂散光误差减少超过一个数量级。 使用杂散光校正仪器，可以在辐射测量，比色法，光度测定和其他应用中的总体测量不确定度方面显着降低。 因为PSF可能包括其他类型的不期望的响应，所以杂散光校正也消除了其它类型的错误，例如CCD和检测器窗口之间的相互反射。
-
公开(公告)号：US6137110A
公开(公告)日：2000-10-24
申请号：US134928
申请日：1998-08-17
CPC分类号： H01J37/08 , H01J27/24 , H01J2237/08 , H01J2237/0815 , H01J2237/31749
摘要： A focused ion beam having a cross section of submicron diameter, a high ion current, and a narrow energy range is generated from a target comprised of particle source material by laser ablation. The method involves directing a laser beam having a cross section of critical diameter onto the target, producing a cloud of laser ablated particles having unique characteristics, and extracting and focusing a charged particle beam from the laser ablated cloud. The method is especially suited for producing focused ion beams for semiconductor device analysis and modification.
摘要翻译： 通过激光烧蚀从由粒子源材料构成的靶产生具有亚微米直径，高离子电流和窄能量范围的横截面的聚焦离子束。 该方法包括将具有临界直径横截面的激光束引导到目标上，产生具有独特特征的激光烧蚀颗粒云，以及从激光烧蚀云提取和聚焦带电粒子束。 该方法特别适用于生产用于半导体器件分析和修改的聚焦离子束。
-
-
搜索结果
3 条记录 (耗时 0.011 秒)
