-
公开(公告)号:US20060246821A1
公开(公告)日:2006-11-02
申请号:US11456674
申请日:2006-07-11
申请人: Lidia Vereen , Peter Skarpelos , Brian Downum , Patrick Williams , Terry Ko , Christopher Lee , Kenneth Reynolds , John Hearne , Daniel Hachnochi
发明人: Lidia Vereen , Peter Skarpelos , Brian Downum , Patrick Williams , Terry Ko , Christopher Lee , Kenneth Reynolds , John Hearne , Daniel Hachnochi
摘要: A method for delivering a polishing fluid to a chemical mechanical polishing surface is provided. In one embodiment, a method for delivering a polishing fluid to a polishing surface of a chemical mechanical polisher includes flowing polishing fluid to a first portion of the polishing surface through a first outlet while a second portion of the polishing surface adjacent a second outlet receives no flow of polishing fluid, and flowing polishing fluid through the second outlet to the second portion of the polishing surface.
摘要翻译: 提供了一种将抛光液输送到化学机械抛光表面的方法。 在一个实施例中,用于将抛光流体输送到化学机械抛光机的抛光表面的方法包括将抛光流体通过第一出口流动到抛光表面的第一部分,而与第二出口相邻的抛光表面的第二部分不接收 抛光流体的流动,以及将抛光流体流过第二出口到抛光表面的第二部分。
-
公开(公告)号:US20050087212A1
公开(公告)日:2005-04-28
申请号:US10976012
申请日:2004-10-28
申请人: Joseph Yudovsky , Avi Tepman , Kenneth Reynolds , Younes Achkire , Dan Marohl , Steve Ghanayem , Alexander Polyak , Gary Ettinger , Haochuan Zhang , Hui Chen
发明人: Joseph Yudovsky , Avi Tepman , Kenneth Reynolds , Younes Achkire , Dan Marohl , Steve Ghanayem , Alexander Polyak , Gary Ettinger , Haochuan Zhang , Hui Chen
CPC分类号: H01L21/67046 , B08B1/04
摘要: A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.
摘要翻译: 提供了一种洗涤器箱,其包括适于接收用于清洁的基底的罐,支撑在罐外部并且适于耦合到设置在罐内的洗涤器刷的端部;马达,其安装到每个支撑件上并适于旋转洗涤器 电刷,支架通过适于允许洗涤器刷子进入的球面轴承可枢转地安装的基座,经由曲柄和摇臂机构适应的基本上同时地使支撑件朝向或远离彼此枢转的电刷间隙致动器 以便允许洗涤器刷子基本上同时实现或断开与基板的接触,以及适于将两个球形轴承朝向或远离彼此移动的脚趾致动器,以便调节洗涤器之间的束缚角度 刷子
-
公开(公告)号:US4384034A
公开(公告)日:1983-05-17
申请号:US239013
申请日:1981-02-27
申请人: Alan N. Ferguson , Kenneth Reynolds
发明人: Alan N. Ferguson , Kenneth Reynolds
IPC分类号: C07D335/02 , G03G5/06 , G03G5/09
CPC分类号: G03G5/0661 , C07D335/02 , G03G5/0637 , Y10S430/10
摘要: A photoconductive layer sensitized by a compound of the general formula: ##STR1## in which: R.sup.1 and R.sup.2 independently represent a hydrogen atom, an alkyl or substituted alkyl group, an aryl or substituted aryl group, an aralkyl or substituted aralkyl group, a cycloaliphatic or substituted cycloaliphatic group or a heterocyclic or substituted heterocyclic group providing R.sup.1 and R.sup.2 do not both represent cyclic groups of aromatic nature, or R.sup.1 and R.sup.2 together may represent the necessary atoms to complete a non-aromatic heterocyclic ring,R.sup.3, R.sup.4, R.sup.5 and R.sup.6 independently represent a hydrogen atom or any substituent providing the sum of their .sigma..sub.p constants has a value of less than +0.5, or R.sup.3 and R.sup.4 and/or R.sup.5 and R.sup.6 may represent the necessary atoms to complete an alicyclic or aromatic ring, R.sup.3 and R.sup.2 and/or R.sup.1 and R.sup.6 may represent the necessary atoms to complete a non-aromatic heterocyclic ring,R.sup.7 and R.sup.9 independently represent a hydrogen atom or any carbon linked substituent containing up to 16 carbon atoms,R.sup.8 and R.sup.10 independently represent a hydrogen atom, an alkyl group having 1 to 4 carbon atoms or any two adjacent substituents R.sup.7, R.sup.8, R.sup.9 and R.sup.10 together may complete an alicyclic or aromatic ring, andX.sub.- represents an anion.
摘要翻译: 由以下通式化合物敏化的光电导层:其中:R1和R2独立地表示氢原子,烷基或取代的烷基,芳基或取代的芳基,芳烷基或取代的芳烷基,脂环族 或取代的脂环族基团或提供R 1和R 2的杂环或取代的杂环基不都表示芳族性质的环状基团,或者R 1和R 2可以代表完成非芳族杂环的必要原子,R 3,R 4,R 5和 R6独立地表示氢原子或提供其σp常数之和的任何取代基具有小于+0.5的值,或者R 3和R 4和/或R 5和R 6可以表示完成脂环族或芳族环的必要原子,R 3 并且R 2和/或R 1和R 6可以表示完成非芳族杂环的必要原子,R 7和R 9独立地表示氢原子或含有u的任何含碳连接的取代基 p至16个碳原子,R 8和R 10独立地表示氢原子,具有1至4个碳原子的烷基或任何两个相邻的取代基R 7,R 8,R 9和R 10可以完成脂环族或芳族环,X代表 阴离子
-
公开(公告)号:US4368329A
公开(公告)日:1983-01-11
申请号:US310906
申请日:1981-09-14
IPC分类号: C07D335/02 , G03G5/06
CPC分类号: C07D335/02 , G03G5/0637 , G03G5/0661
摘要: A method of preparing a compound of the general formula: ##STR1## in which: R.sup.1 and R.sup.2 independently represent a hydrogen atom, an alkyl or substituted alkyl group, an aryl or substituted aryl group, an aralkyl or substituted aralkyl group, a cycloaliphatic or substituted cycloaliphatic group or a heterocyclic or substituted heterocyclic group providing R.sup.1 and R.sup.2 do not both represent cyclic groups of aromatic nature, or R.sup.1 and R.sup.2 together may represent the necessary atoms to complete a non-aromatic heterocyclic ring,R.sup.3, R.sup.4, R.sup.5 and R.sup.6 independently represent a hydrogen atom or any substituent providing the sum of their .sigma..sub.p constants has a value of less than +0.5, or R.sup.3 and R.sup.4 and/or R.sup.5 and R.sup.6 may represent the necessary atoms to complete an alicyclic or aromatic ring, R.sup.3 and R.sup.2 and/or R.sup.1 and R.sup.6 may represent the necessary atoms to complete a non-aromatic heterocyclic ring,R.sup.7 and R.sup.9 independently represent a hydrogen atom or any carbon linked substituent containing up to 16 carbon atoms,R.sup.8 and R.sup.10 independently represent a hydrogen atom, an alkyl group having 1 to 4 carbon atoms or any two adjacent substituents R.sup.7, R.sup.8, R.sup.9 and R.sup.10 together may complete an alicyclic or aromatic ring, andX.sup.- represents an anion,comprising reacting an amine of the general formula: ##STR2## in which R.sup.1 to R.sup.6 are as defined above, with a thiopyrylium salt of the general formula: ##STR3## in which X.sup.- and R.sup.7 to R.sup.10 are as defined above, to yield the desired compound.The compounds of formula (I), many of which are new, are useful as sensitizers or photoconductors.
摘要翻译: PCT No.PCT / US81 / 00266 Sec。 371日期1981年9月14日 102(e)1981年9月14日PCT日期1981年2月27日PCT。制备通式如下的化合物的方法:其中:R1和R2独立地表示氢原子,烷基或取代的烷基 芳基或取代的芳基,芳烷基或取代的芳烷基,脂环族或取代的脂环族基团或提供R 1和R 2的杂环或取代的杂环基不均表示芳族性质的环状基团,或者R 1和R 2可以代表 完成非芳族杂环的必要原子,R 3,R 4,R 5和R 6独立地表示氢原子或提供其σp常数之和的任何取代基具有小于+0.5的值,或者R3和R4和/或 R5和R6可以表示完成脂环族或芳族环的必要原子,R3和R2和/或R1和R6可以表示完成非芳族杂环的必要原子,R7和R9独立地表示氢原子或任何碳 在含有至多16个碳原子的连接取代基上,R 8和R 10独立地表示氢原子,具有1至4个碳原子的烷基或任何两个相邻的取代基R 7,R 8,R 9和R 10可以完成脂环族或芳族环, X-表示阴离子,包括使通式如下的其中R 1至R 6如上所定义的通式如下的胺:其中X 1,R 2, 并且R 7至R 10如上所定义,以产生所需化合物。 式(I)的化合物,其中许多是新的,可用作敏化剂或感光体。
-
公开(公告)号:US4820846A
公开(公告)日:1989-04-11
申请号:US531020
申请日:1983-09-12
申请人: D. E. Brown , Kenneth Reynolds
发明人: D. E. Brown , Kenneth Reynolds
CPC分类号: C09B11/26 , G03G5/0661
摘要: Compounds which are useful as sensitizers of photoconductors, having the general formula: ##STR1## in which: like symbols represent identical substituents,at least 4 of R.sup.1 to R.sup.9 represent hydrogen atoms and the remaining R.sup.1 to R.sup.9 pairs of groups independently represent:(i) hydrogen, an alkyl group having from 1 to 18 carbon atoms, a substituted alkyl group, or an aryl or substituted aryl group,(ii) a halogen atom, a cyano group, a carboxy or alkoxycarbonyl group, a hydroxy group, an alkoxy group, a nitro group or a sulfonic acid group, providing that not more than two such groups (ii) are present in each ring,(iii) an acylamino group, a secondary acylamino group or a tertiary amino group in which the pendant substituent groups on the nitrogen atom are alkyl, aryl or aralkyl, providing not more than two such groups (iii) may be present in each benzocarbazole ring, and(iv) any two groups R.sup.1 to R.sup.9 on adjacent carbon atoms in a ring may represent the necessary atoms to complete a fused alicyclic, aromatic or heterocyclic ring,R.sup.10 represents an alkyl or substituted alkyl group, an aralkyl group, or an aryl or substituted aryl group,Ar represents a heteroaromatic nucleus containing 5 or 6 members in the ring at least one of which is O, N or S, or an aromatic ring of the formula: ##STR2## in which: R.sup.11 to R.sup.15 independently represent a hydrogen or halogen atom, an alkyl, substituted alkyl, an aryl or substituted aryl, hydroxy, alkoxy or aryloxy group,one of R.sup.11 to R.sup.15 may additionally represent an aldehyde or acetyl group, or a dialkylamino group,up to two of R.sup.11 to R.sup.15 may additionally represent a cyano, carboxy, alkoxycarbonyl, sulfonic acid or nitro group, andany two adjacent R.sup.11 to R.sup.15 groups may represent the necessary atoms to complete a fused alicyclic, aromatic or heterocyclic ring, andX represents an anion.
-
-
-
-