公开(公告)号：US08827621B2

公开(公告)日：2014-09-09

申请号：US13042742

申请日：2011-03-08

申请人： Yukihiko Inagaki ,  Kensaku Onishi ,  Jun Yamamoto

发明人： Yukihiko Inagaki ,  Kensaku Onishi ,  Jun Yamamoto

IPC分类号： B65G65/00

CPC分类号： H01L21/67769 ,  B65G1/0407 ,  H01L21/67733 ,  H01L21/67766

摘要： In a substrate processing apparatus, a storage device, an indexer block, a processing block and an interface block are arranged to line up in this order. The storage device includes a plurality of openers on which a carrier storing a plurality of substrates can be placed. The carrier is carried in the storage device. In the storage device, the carrier is transported among the plurality of openers by a transport device. The transport device includes first and second hands configured to be able to hold the carrier and move in a horizontal direction and a vertical direction. The second hand is provided below the first hand.

摘要翻译： 在基板处理装置中，按照该顺序排列存储装置，分度块，处理块和接口块。 存储装置包括多个开放器，可以放置存储多个基板的载体。 载体被携带在存储装置中。 在存储装置中，通过运送装置在多个开放装置之间运送载体。 输送装置包括构造成能够保持载体并沿水平方向和垂直方向移动的第一和第二手。 第二只手是第二只手。

公开(公告)号：US20110222994A1

公开(公告)日：2011-09-15

申请号：US13042742

申请日：2011-03-08

申请人： Yukihiko INAGAKI ,  Kensaku ONISHI ,  Jun YAMAMOTO

发明人： Yukihiko INAGAKI ,  Kensaku ONISHI ,  Jun YAMAMOTO

IPC分类号： H01L21/677

CPC分类号： H01L21/67769 ,  B65G1/0407 ,  H01L21/67733 ,  H01L21/67766

摘要： In a substrate processing apparatus, a storage device, an indexer block, a processing block and an interface block are arranged to line up in this order. The storage device includes a plurality of openers on which a carrier storing a plurality of substrates can be placed. The carrier is carried in the storage device. In the storage device, the carrier is transported among the plurality of openers by a transport device. The transport device includes first and second hands configured to be able to hold the carrier and move in a horizontal direction and a vertical direction. The second hand is provided below the first hand.

摘要翻译： 在基板处理装置中，按照该顺序排列存储装置，分度块，处理块和接口块。 存储装置包括多个开放器，可以放置存储多个基板的载体。 载体被携带在存储装置中。 在存储装置中，通过运送装置在多个开放装置之间运送载体。 输送装置包括构造成能够保持载体并沿水平方向和垂直方向移动的第一和第二手。 第二只手是第二只手。

公开(公告)号：US09728434B2

公开(公告)日：2017-08-08

申请号：US14452748

申请日：2014-08-06

申请人： Yukihiko Inagaki ,  Kensaku Onishi ,  Jun Yamamoto

发明人： Yukihiko Inagaki ,  Kensaku Onishi ,  Jun Yamamoto

IPC分类号： B65G1/04 ,  H01L21/677

CPC分类号： H01L21/67769 ,  B65G1/0407 ,  H01L21/67733 ,  H01L21/67766

摘要： In a substrate processing apparatus, a storage device, an indexer block, a processing block and an interface block are arranged to line up in this order. The storage device includes a plurality of openers on which a carrier storing a plurality of substrates can be placed. The carrier is carried in the storage device. In the storage device, the carrier is transported among the plurality of openers by a transport device. The transport device includes first and second hands configured to be able to hold the carrier and move in a horizontal direction and a vertical direction. The second hand is provided below the first hand.

公开(公告)号：US20140341681A1

公开(公告)日：2014-11-20

申请号：US14452748

申请日：2014-08-06

申请人： Yukihiko INAGAKI ,  Kensaku ONISHI ,  Jun YAMAMOTO

发明人： Yukihiko INAGAKI ,  Kensaku ONISHI ,  Jun YAMAMOTO

IPC分类号： H01L21/677

CPC分类号： H01L21/67769 ,  B65G1/0407 ,  H01L21/67733 ,  H01L21/67766

摘要： In a substrate processing apparatus, a storage device, an indexer block, a processing block and an interface block are arranged to line up in this order. The storage device includes a plurality of openers on which a carrier storing a plurality of substrates can be placed. The carrier is carried in the storage device. In the storage device, the carrier is transported among the plurality of openers by a transport device. The transport device includes first and second hands configured to be able to hold the carrier and move in a horizontal direction and a vertical direction. The second hand is provided below the first hand.

摘要翻译： 在基板处理装置中，按照该顺序排列存储装置，分度块，处理块和接口块。 存储装置包括多个开放器，可以放置存储多个基板的载体。 载体被携带在存储装置中。 在存储装置中，通过运送装置在多个开放装置之间运送载体。 输送装置包括构造成能够保持载体并沿水平方向和垂直方向移动的第一和第二手。 第二只手是第二只手。