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公开(公告)号：US07476412B2
公开(公告)日：2009-01-13
申请号：US09817963
申请日：2001-03-27
申请人： Klaus Lowack , Günter Schmid , Recai Sezi
发明人： Klaus Lowack , Günter Schmid , Recai Sezi
CPC分类号： C23C18/30 , C23C18/1608 , H05K3/184 , H05K3/465 , H05K3/4661
摘要： The invention relates to a process for the metallization of an insulator and/or a dielectric, wherein the insulator is firstly activated, it is subsequently coated with another insulator and the latter is patterned, then the first is seeded and lastly metallized.
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公开(公告)号：US07028399B2
公开(公告)日：2006-04-18
申请号：US10145393
申请日：2002-05-14
申请人： Klaus Lowack , Guenter Schmid , Recai Sezi , Ute Zschieschang
发明人： Klaus Lowack , Guenter Schmid , Recai Sezi , Ute Zschieschang
IPC分类号： H05K3/02
CPC分类号： B82Y30/00 , H01L21/4846 , H05K3/0052 , H05K3/182 , H05K3/242 , H05K2203/175 , Y10T29/49128 , Y10T29/49147 , Y10T29/49155 , Y10T29/49156
摘要： The present invention provides a process for wiring electrical contact sites, in particular on the surface of an electronic or microelectronic component, with the following steps: applying and patterning at least one dielectric on the component surface; currentlessly depositing a conductor starting layer for producing metal wiring interconnects and substitute contact sites with short-circuit contacts for interconnecting the individual metal wiring interconnects and the corresponding electrical contact sites; reinforcing the conductor starting layer by a common electrodepositing process; and separating the short-circuit contacts for separating the electrical contact sites or the contact sites of the wiring from one another.
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3.发明申请METHOD TO PREPARE A SCINTILLATOR LAYER FOR APPLICATION ONTO A PHOTOSENSOR LAYER TO PRODUCE AN X-RAY DETECTOR OR ELEMENT THEREOF 审中-公开制备用于照相机层以形成X射线探测器或其元件的扫描层的方法公开(公告)号：US20120132816A1
公开(公告)日：2012-05-31
申请号：US13301854
申请日：2011-11-22
申请人： Manfred FUCHS , Klaus LOWACK , Adelbert PREISSLER
发明人： Manfred FUCHS , Klaus LOWACK , Adelbert PREISSLER
CPC分类号： G01T1/2018 , Y10T428/1471
摘要： A scintillator layer is applied onto a photosensor layer to produce an x-ray detector or an x-ray detector element for imaging detection of ionizing radiation. The production process is improved by, in the production of the scintillator layer, an adhesive layer with a protective layer is applied onto the scintillator layer. This can occur layer by layer or a transfer adhesive tape that already includes the protective layer as a protective film can also be used.
摘要翻译： 将闪烁体层施加到光电传感器层上以产生用于成像电离辐射检测的X射线检测器或X射线检测器元件。 通过在闪烁体层的制造中，将具有保护层的粘合剂层施加到闪烁体层上来改善制造工艺。 也可以使用已经包含作为保护膜的保护层的层叠层或转印胶带。
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4.发明授权Poly-o-hydroxyamide, polybenzoxazole from the poly-o-hydroxyamide, electronic component including a polybenzoxazole, and processes for producing the same 有权聚邻羟基酰胺，聚邻羟基酰胺的聚苯并恶唑，包括聚苯并恶唑的电子部件及其制造方法公开(公告)号：US07244803B2
公开(公告)日：2007-07-17
申请号：US10609453
申请日：2003-06-27
申请人： Recai Sezi , Andreas Walter , Anna Maltenberger , Klaus Lowack , Marcus Halik
发明人： Recai Sezi , Andreas Walter , Anna Maltenberger , Klaus Lowack , Marcus Halik
CPC分类号： C08G69/265 , C08G69/26 , C08G69/32 , C08G73/22 , Y10T428/31504 , Y10T428/31678 , Y10T428/31681 , Y10T428/31721
摘要： A dielectric for aluminum and copper metalizations is stable at high temperatures. Surprisingly, in spite of the elimination of water during the cyclization, the polymeric dielectrics are very suitable for filling narrow trenches. The filled trenches exhibit no defects and bubbles or cracks. The polybenzoxazoles have dielectric constants of k≦2.7 and are suitable as an electrical insulator. Furthermore, these materials adhere very well on all surfaces relevant for micro-electronics.
摘要翻译： 用于铝和铜金属化的电介质在高温下是稳定的。 令人惊奇的是，尽管在环化过程中消除了水，但聚合物电介质非常适用于填充窄沟槽。 填充的沟槽没有表现出缺陷和气泡或裂缝。 聚苯并恶唑的介电常数k <= 2.7，适合作为电绝缘体。 此外，这些材料在与微电子相关的所有表面上都很好地粘附。
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5.发明授权POLY-O-HYDROXYAMIDES, POLYBENZOXAZOLES, PROCESSES FOR PRODUCING POLY-O-HYDROXYAMIDES, PROCESSES FOR PRODUCING POLYBENZOXAZOLES, DIELECTRICS INCLUDING A POLYBENZOXAZOLE, ELECTRONIC COMPONENTS INCLUDING THE DIELECTRICS, AND PROCESSES FOR MANUFACTURING THE ELECTRONIC COMPONENTS 失效聚-O-羟基酰胺，聚苯并恶唑，聚-O-羟基胺的制备方法，制备聚苯并噻唑的方法，包括聚苯并噻唑的电介质，包括电介质的电子组分，以及制造电子组件的方法公开(公告)号：US06900284B2
公开(公告)日：2005-05-31
申请号：US10261034
申请日：2002-09-30
申请人： Klaus Lowack , Anna Maltenberger , Recai Sezi , Andreas Walter
发明人： Klaus Lowack , Anna Maltenberger , Recai Sezi , Andreas Walter
IPC分类号： C08G73/00 , C08G73/10 , C09D5/25 , H01B3/30 , H01L21/312 , H01L23/532 , C08G73/22 , C08G69/00
CPC分类号： H01L21/02118 , C08G73/00 , C08G73/10 , H01B3/305 , H01L21/02282 , H01L21/312 , H01L23/5329 , H01L2924/0002 , H01L2924/3011 , H01L2924/00
摘要： Poly-o-hydroxyamides are cyclicized to obtain polybenzoxazoles. The poly-o-hydroxyamides provide effective filling of trenches. In particular, the poly-o-hydroxyamides can fill trenches having a width of less than 100 nm and an aspect ratio of more than 4. Further, the polybenzoxazoles of the invention are very suitable for the damascene process. A dielectric can be made from the polybenzoxazole. In turn, semiconductor devices can include the dieletric. Processes for making the poly-o-hydroxyamides, polybenzoxazoles, and semiconductor devices are included.
摘要翻译： 环氧化聚邻羟基酰胺得到聚苯并恶唑。 聚邻羟基酰胺提供有效填充沟槽。 特别地，聚邻羟基酰胺可以填充宽度小于100nm，纵横比大于4的沟槽。此外，本发明的聚苯并恶唑非常适用于镶嵌工艺。 电介质可以由聚苯并恶唑制成。 反过来，半导体器件可以包括消毒的。 包括制备聚邻羟基酰胺，聚苯并恶唑和半导体器件的方法。
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6.发明授权Method to produce a scintillator-photosensor sandwich, scintillator-photosensor sandwich, and radiation detector 有权产生闪烁体 - 光电传感器三明治，闪烁体 - 光电传感器夹层和辐射探测器的方法公开(公告)号：US08692207B2
公开(公告)日：2014-04-08
申请号：US13302341
申请日：2011-11-22
申请人： Manfred Fuchs , Klaus Lowack , Adelbert Preissler
发明人： Manfred Fuchs , Klaus Lowack , Adelbert Preissler
IPC分类号： H01L21/50
CPC分类号： H01L31/115 , G01T1/2018
摘要： A scintillator-photosensor sandwich is generated by gluing a first support frame onto an adhesive layer (covered with a protective film on the side facing the adhesive layer, the first frame having a size that (in terms of area) surrounds the scintillator-photosensor sandwich to be produced. The first support frame is placed onto a flat base that supports a first function layer (either a scintillator layer or a photosensor layer). The adhesive layer supported on the first support frame and the first function layer are laminarly assembled. The protective film is removed from the adhesive layer and a second function layer (the other of the scintillator layer or the photosensor layer not used as the first function layer) is assembled with the first function layer with the interposed adhesive layer.
摘要翻译： 通过将第一支撑框架胶合到粘合剂层上（在面向粘合剂层的一侧覆盖保护膜，第一框架具有围绕闪烁体 - 光电传感器夹层的尺寸（以面积计））的第一框架来产生闪烁体 - 光电传感器夹层物 将第一支撑框架放置在支撑第一功能层（闪烁体层或光电传感器层）的平坦基板上，支撑在第一支撑框架和第一功能层上的粘合层层叠组装 将保护膜从粘合剂层除去，并且第二功能层（闪烁体层或不用作第一功能层的光电传感器层中的另一个）与具有插入的粘合剂层的第一功能层组装。
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7.发明申请METHOD TO PRODUCE A SCINTILLATOR-PHOTOSENSOR SANDWICH, SCINTILLATOR-PHOTOSENSOR SANDWICH, AND RADIATION DETECTOR 有权生产光刻机 - 光电三极管，激光光电三极管和辐射检测器的方法公开(公告)号：US20120132812A1
公开(公告)日：2012-05-31
申请号：US13302341
申请日：2011-11-22
申请人： Manfred Fuchs , Klaus Lowack , Adelbert Preissler
发明人： Manfred Fuchs , Klaus Lowack , Adelbert Preissler
CPC分类号： H01L31/115 , G01T1/2018
摘要： In a method to produce a scintillator-photosensor sandwich, as well as a scintillator-photosensor sandwich and a radiation detector with such a scintillator-photosensor sandwich, the scintillator-photosensor sandwich is generated by gluing a first support frame onto an adhesive layer (covered on at least one side with a second protective film on the side facing the adhesive layer, the first frame having a size that (in terms of area) surrounds the scintillator-photosensor sandwich to be produced. The first support frame is placed onto a flat base that supports a first function layer (either a scintillator layer or a photosensor layer). The adhesive layer supported on the first support frame and the first function layer are laminarly assembled. The second protective film is removed from the adhesive layer and a second function layer (the other of the scintillator layer or the photosensor layer not used as the first function layer) is assembled with the first function layer with the interposed adhesive layer.
摘要翻译： 在制造闪烁体 - 光电传感器夹层的方法中，以及闪烁体 - 光电传感器夹层和具有这种闪烁体 - 光电传感器夹层的辐射检测器，通过将第一支撑框架胶合到粘合剂层（覆盖 在面向粘合剂层的一侧上具有第二保护膜的至少一个侧面上，第一框架具有围绕闪烁体 - 光电传感器三明治制造的尺寸（面积），第一框架被放置在平面 支撑第一功能层（闪烁体层或光电传感器层）的基底，支撑在第一支撑框架和第一功能层上的粘合剂层被层压组装，第二保护膜从粘合剂层移除，第二功能 层（闪烁体层中的另一个或不用作第一功能层的光电传感器层）与第一功能层组装在一起 粘合剂层。
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8.发明授权Methods for producing a dielectric, dielectric having self-generating pores, monomer for porous dielectrics, process for preparing poly-o-hydroxyamides, process for preparing polybenzoxazoles, and processes for producing an electronic component 有权用于生产电介质的电介质，具有自发孔的电介质，用于多孔电介质的单体，制备聚邻羟基酰胺的方法，制备聚苯并恶唑的方法，以及用于制备电子部件的方法公开(公告)号：US07108807B2
公开(公告)日：2006-09-19
申请号：US10424376
申请日：2003-04-28
申请人： Recai Sezi , Andreas Walter , Klaus Lowack , Anna Maltenberger , Robert Banfic
发明人： Recai Sezi , Andreas Walter , Klaus Lowack , Anna Maltenberger , Robert Banfic
CPC分类号： H01L21/02118 , C08G69/26 , C08G69/44 , C08G73/22 , H01L21/02203 , H01L21/02282 , H01L21/02304 , H01L21/312 , H01L21/31695 , H01L23/5329 , H01L2924/0002 , H01L2924/3011 , H05K1/0346 , H01L2924/00
摘要： Poly-o-hydroxyamides include binaphthyl substituents as repeating units. The poly-o-hydroxyamides can be cyclized to give the polybenzoxazole by heating. Pore formation occurs, so that a dielectric having a very low dielectric constant k of less than 2.5 is obtained.
摘要翻译： 聚邻羟基酰胺包括作为重复单元的联萘基取代基。 可以将聚邻羟基酰胺环化，通过加热得到聚苯并恶唑。 发生孔形成，从而获得具有小于2.5的非常低的介电常数k的电介质。
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9.发明申请Methods for producing a dielectric, dielectric having self-generating pores, monomer for porous dielectrics, process for preparing poly-o-hydroxyamides, process for preparing ploybenzoxazoles, and processes for producing an electronic component 审中-公开用于生产电介质的电介质，具有自发孔的电介质，用于多孔电介质的单体，用于制备聚邻羟基酰胺的方法，制备合成苯并恶唑的方法，以及用于制备电子部件的方法公开(公告)号：US20060214139A1
公开(公告)日：2006-09-28
申请号：US11439455
申请日：2006-05-23
申请人： Recai Sezi , Andreas Walter , Klaus Lowack , Anna Maltenberger , Robert Banfic
发明人： Recai Sezi , Andreas Walter , Klaus Lowack , Anna Maltenberger , Robert Banfic
CPC分类号： H01L21/02118 , C08G69/26 , C08G69/44 , C08G73/22 , H01L21/02203 , H01L21/02205 , H01L21/02282 , H01L21/02304 , H01L21/312 , H01L21/31695 , H01L23/5329 , H01L2924/0002 , H01L2924/3011 , H05K1/0346 , H01L2924/00
摘要： Poly-o-hydroxyamides include binaphthyl substituents as repeating units. The poly-o-hydroxyamides can be cyclized to give the polybenzoxazole by heating. Pore formation occurs, so that a dielectric having a very low dielectric constant k of less than 2.5 is obtained.
摘要翻译： 聚邻羟基酰胺包括作为重复单元的联萘基取代基。 可以将聚邻羟基酰胺环化，通过加热得到聚苯并恶唑。 发生孔形成，从而获得具有小于2.5的非常低的介电常数k的电介质。
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10.发明授权POLY-O-HYDROXAMIDE, POLYBENZOXAZOLE, AND ELECTRONIC COMPONENT INCLUDING A DIELECTRIC HAVING A BARRIER EFFECT AGAINST COPPER DIFFUSION, AND PROCESSES FOR PREPARING POLY-O-HYDROXYAMIDES, POLYBENZOXAZOLES, AND ELECTRONIC COMPONENTS 失效聚环氧乙烷，聚苯并噻唑和电子成分，其中包括具有对铜扩散的阻挡效应的电介质，以及制备聚-O-羟基酰胺，聚苯并恶唑和电子组分的方法公开(公告)号：US06806344B2
公开(公告)日：2004-10-19
申请号：US10609460
申请日：2003-06-27
申请人： Recai Sezi , Andreas Walter , Anna Maltenberger , Klaus Lowack
发明人： Recai Sezi , Andreas Walter , Anna Maltenberger , Klaus Lowack
IPC分类号： C08G7322
CPC分类号： C08G73/22 , C08G69/26 , C08G69/265 , C08G69/32 , H01B3/441 , H01L21/02118 , H01L21/02203 , H01L21/02282 , H01L21/76801
摘要： Novel poly-o-hydroxyamides can be cyclized to give polybenzoxazoles which have a good diffusion barrier effect with respect to metals. The poly-o-hydroxyamides can be applied to a semiconductor substrate by customary techniques and converted into the polybenzoxazole in a simple manner by heating. This results in a good barrier layer with respect to diffusion of metals. This allows the diffusion barrier between conductor track and dielectric to be substantially dispensed.
摘要翻译： 可以使新的聚邻羟基酰胺环化，得到相对于金属具有良好扩散阻挡作用的聚苯并恶唑。 聚邻羟基酰胺可以通过常规技术应用于半导体衬底，并通过加热以简单的方式转化成聚苯并恶唑。 这导致相对于金属扩散的良好的阻挡层。 这允许基本上分配导体轨道和电介质之间的扩散阻挡层。
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