公开(公告)号：US07279269B2

公开(公告)日：2007-10-09

申请号：US10734422

申请日：2003-12-12

申请人： Jeiwei Chang ,  Stuart Kao ,  Chao Peng Chen ,  Chunping Luo ,  Kochan Ju ,  Min Li

发明人： Jeiwei Chang ,  Stuart Kao ,  Chao Peng Chen ,  Chunping Luo ,  Kochan Ju ,  Min Li

IPC分类号： G11B5/39

CPC分类号： G11B5/3163 ,  G11B5/398 ,  Y10T428/1171

摘要： The series resistance of a CPP GMR stack can be reduced by shaping it into a small upper, on a somewhat larger, lower part. Because of the sub-micron dimensions involved, good alignment between these is normally difficult to achieve. The present invention discloses a self-alignment process based on first laying down a mask that will determine the shape of the top part. Ion beam etching is then initiated, the ion beam being initially applied from one side only at an angle to the surface normal. During etching, all material on the near side of the mask gets etched but, on the far side, only material that is outside the mask's shadow gets removed so, depending on the beam's angle, the size of the lower part is controlled and the upper part is precisely centrally aligned above it.

摘要翻译： CPP GMR堆叠的串联电阻可以通过将其成形为较小的上部，在较小的较低部分上来减小。 由于涉及亚微米尺寸，这些之间的良好对准通常难以实现。 本发明公开了一种基于第一次铺设掩模的自对准过程，该掩模将确定顶部的形状。 然后开始离子束蚀刻，离子束最初仅从一侧以与表面法线成一定角度施加。 在蚀刻期间，掩模近侧的所有材料都被蚀刻，但在远侧，只有在掩模阴影之外的材料被去除，因此根据光束的角度，下部的尺寸被控制，并且上部 部分精确地集中在其上。

公开(公告)号：US07262941B2

公开(公告)日：2007-08-28

申请号：US10856180

申请日：2004-05-28

申请人： Min Li ,  Simon H. Liao ,  Masashi Sano ,  Kiyoshi Noguchi ,  Kochan Ju ,  Cheng T. Horng

发明人： Min Li ,  Simon H. Liao ,  Masashi Sano ,  Kiyoshi Noguchi ,  Kochan Ju ,  Cheng T. Horng

IPC分类号： G11B5/39

CPC分类号： C22C38/10 ,  B32B15/01 ,  B82Y10/00 ,  B82Y25/00 ,  B82Y40/00 ,  C22C38/12 ,  G01R33/093 ,  G11B5/3163 ,  G11B5/3903 ,  H01F10/3259 ,  H01F10/3272 ,  H01F41/302 ,  H01L43/08 ,  H01L43/12 ,  Y10T29/49034 ,  Y10T29/49044 ,  Y10T29/49046

摘要： An NiCr seed layer based bottom spin valve sensor element having a synthetic antiferromagnet pinned (SyAP) layer and a capping layer comprising either a single specularly reflecting nano-oxide layer (NOL) or a bi-layer comprising a non-metallic layer and a specularly reflecting nano-oxide layer. As a result of their structure and the method of their fabrication, these elements have higher GMR ratios and lower resistances than elements of the prior art.

摘要翻译： 一种具有合成反铁磁性钉扎（SyAP）层的NiCr种子层底部自旋阀传感器元件和包括单个镜面反射纳米氧化物层（NOL）或包含非金属层的双层和镜面反射纳米氧化物层 反射纳米氧化层。 由于它们的结构及其制造方法的结果，这些元件具有比现有技术的元件更高的GMR比和更低的电阻。

公开(公告)号：US20070041124A1

公开(公告)日：2007-02-22

申请号：US11588564

申请日：2006-10-27

申请人： Jei-Wei Chang ,  Koichi Terunuma ,  Youfeng Zheng ,  Kochan Ju

发明人： Jei-Wei Chang ,  Koichi Terunuma ,  Youfeng Zheng ,  Kochan Ju

IPC分类号： G11B5/09

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/3932 ,  G11B2005/3996 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： The problem of increased edge sensitivity associated with the reduction of the spacing between bias magnets in a CPP head has been solved by limiting the width of the bias cancellation layer and by adding an extra layer of insulation to ensure that current through the device flows only through its central area, thereby minimizing its edge reading sensitivity.

摘要翻译： 通过限制偏置消除层的宽度并添加额外的绝缘层来解决与CPP头中的偏置磁体之间的间隔减小相关联的增加的边缘灵敏度的问题，以确保通过器件的电流仅流过 其中心区域，从而最小化其边缘读取灵敏度。

公开(公告)号：US07180712B1

公开(公告)日：2007-02-20

申请号：US09513873

申请日：2000-02-28

申请人： Min Li ,  Simon H. Liao ,  Cheng T. Horng ,  Kochan Ju

发明人： Min Li ,  Simon H. Liao ,  Cheng T. Horng ,  Kochan Ju

IPC分类号： G11B5/127 ,  G11B5/33

CPC分类号： G11B5/112 ,  G11B5/3912 ,  H01L43/08

摘要： A method for forming a laminated shield to improve the stability and performance of an MR read head and the MR read head formed using that shield. The shield consists of two layers of ferromagnetic material separated by a layer of ruthenium, allowing the ferromagnetic layers to form an antiferromagnetic configuration by means of a quantum mechanical exchange interaction. The antiferromagnetic configuration has a stable domain structure and a magnetization that forms closed loops around the shield edges thereby reducing noise in the readback signal and reducing disturbances to the magnetic state of the sensor element.

摘要翻译： 一种用于形成层叠屏蔽以提高使用该屏蔽形成的MR读取头和MR读取头的稳定性和性能的方法。 屏蔽由两层铁磁材料组成，由一层钌分离，允许铁磁层通过量子力学交换相互作用形成反铁磁性结构。 反铁磁构造具有稳定的畴结构和磁化，其在屏蔽边缘周围形成闭环，从而降低回读信号中的噪声并减少对传感器元件的磁状态的干扰。

公开(公告)号：US07173848B2

公开(公告)日：2007-02-06

申请号：US11048377

申请日：2005-02-01

申请人： Kochan Ju

发明人： Kochan Ju

IPC分类号： G11C11/15

CPC分类号： G11C11/16 ,  G11C11/5607

摘要： A magnetic random access memory (MRAM) has memory units or stacks of multiple memory cells arranged in the X-Y plane on the MRAM substrate with each memory unit having four possible magnetic states. Each memory unit is located at an intersection region between two orthogonal write lines and has two stacked memory cells. The two cells are magnetically separated from each other by a separation layer and have the easy axes of magnetization of their free ferromagnetic layers aligned substantially orthogonal to one another. The application of write-current pulses of equal magnitude and the appropriate direction through the orthogonal write lines above and below the memory units can generate each of the four magnetic states which can be detected as four independent logical states.

摘要翻译： 磁性随机存取存储器（MRAM）具有布置在MRAM衬底上的X-Y平面中的多个存储单元的存储器单元或堆叠，每个存储器单元具有四个可能的磁状态。 每个存储器单元位于两个正交写入线之间的交叉区域，并且具有两个堆叠的存储器单元。 两个电池通过分离层彼此磁性分离，并且其自由铁磁层的易磁化轴基本上彼此正交排列。 通过在存储器单元上方和下方的正交写入线，施加相等幅度的写入电流脉冲和适当的方向，可以产生可以被检测为四个独立逻辑状态的四个磁状态中的每一个。

公开(公告)号：US07118680B2

公开(公告)日：2006-10-10

申请号：US10718372

申请日：2003-11-20

申请人： Jei-Wei Chang ,  Chao-Peng Chen ,  Min Li ,  Kochan Ju

发明人： Jei-Wei Chang ,  Chao-Peng Chen ,  Min Li ,  Kochan Ju

IPC分类号： G11B5/39

CPC分类号： G11B5/1278 ,  Y10T29/49052

摘要： A method for fabricating a current-perpendicular-to-plane (CPP) giant magnetoresistive (GMR) sensor of the synthetic spin valve type is provided, the method including an electron-beam lithographic process employing both primary and secondary electron absorption and first and second self-aligned lift-off processes for patterning the capped ferromagnetic free layer and the conducting, non-magnetic spacer layer. The sensor so fabricated has reduced resistance and increased sensitivity.

摘要翻译： 提供了一种用于制造合成自旋阀类型的电流垂直平面（CPP）巨磁阻（GMR）传感器的方法，该方法包括采用初级和次级电子吸收的电子束光刻工艺，第一和第二 用于对封装的铁磁自由层和导电的非磁性间隔层进行图案化的自对准剥离工艺。 所制造的传感器具有降低的电阻和增加的灵敏度。

公开(公告)号：US07111386B2

公开(公告)日：2006-09-26

申请号：US11266418

申请日：2005-11-03

申请人： Chao-Peng Chen ,  Kevin Lin ,  Jei-Wei Chang ,  Kochan Ju ,  Hui-Chuan Wang

发明人： Chao-Peng Chen ,  Kevin Lin ,  Jei-Wei Chang ,  Kochan Ju ,  Hui-Chuan Wang

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： B82Y10/00 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3903 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T29/49128

摘要： A major problem in Lead Overlay design for GMR structures is that the magnetic read track width is wider than the physical read track width. This is due to high interfacial resistance between the leads and the GMR layer which is an unavoidable side effect of prior art methods. The present invention uses electroplating preceded by a wet etch to fabricate the leads. This approach requires only a thin protection layer over the GMR layer to ensure that interface resistance is minimal. Using wet surface cleaning avoids sputtering defects and plating is compatible with this so the cleaned surface is preserved Only a single lithography step is needed to define the track since there is no re-deposition involved.

公开(公告)号：US20060171199A1

公开(公告)日：2006-08-03

申请号：US11048377

申请日：2005-02-01

申请人： Kochan Ju

发明人： Kochan Ju

IPC分类号： G11C11/14

CPC分类号： G11C11/16 ,  G11C11/5607

摘要： A magnetic random access memory (MRAM) has memory units or stacks of multiple memory cells arranged in the X-Y plane on the MRAM substrate with each memory unit having four possible magnetic states. Each memory unit is located at an intersection region between two orthogonal write lines and has two stacked memory cells. The two cells are magnetically separated from each other by a separation layer and have the easy axes of magnetization of their free ferromagnetic layers aligned substantially orthogonal to one another. The application of write-current pulses of equal magnitude and the appropriate direction through the orthogonal write lines above and below the memory units can generate each of the four magnetic states which can be detected as four independent logical states.

摘要翻译： 磁性随机存取存储器（MRAM）具有布置在MRAM衬底上的X-Y平面中的多个存储单元的存储器单元或堆叠，每个存储器单元具有四个可能的磁状态。 每个存储器单元位于两个正交写入线之间的交叉区域，并且具有两个堆叠的存储器单元。 两个电池通过分离层彼此磁性分离，并且其自由铁磁层的易磁化轴基本上彼此正交排列。 通过在存储器单元上方和下方的正交写入线，施加相等幅度的写入电流脉冲和适当的方向，可以产生可以被检测为四个独立逻辑状态的四个磁状态中的每一个。

公开(公告)号：US07075818B2

公开(公告)日：2006-07-11

申请号：US10924360

申请日：2004-08-23

申请人： Kochan Ju

发明人： Kochan Ju

IPC分类号： G11C11/00

CPC分类号： G11C11/16 ,  G11C11/1655 ,  G11C11/1657 ,  G11C11/1659

摘要： A multiple-memory-layer magnetic random access memory (MRAM) has multiple memory layers arranged as pairs and stacked on a substrate. The first memory layer in the pair comprises a plurality of rows of memory cells located between electrically conductive access lines, and the second memory layer in the pair is substantially identical to the first memory layer, but is rotated about an axis perpendicular to the substrate so that the access lines and memory cell rows in one memory layer of the pair are orthogonal to their counterpart lines and rows in the other memory layer. The memory cells in each layer are aligned vertically (perpendicular to the substrate) with the memory cells in the other layer, with the vertically aligned memory cells forming memory cell columns that extend perpendicularly from the substrate. Each memory cell column has an electrical switch between the lowermost memory cell and the substrate.

摘要翻译： 多存储层磁随机存取存储器（MRAM）具有多个存储层，它们成对配置并堆叠在衬底上。 该对中的第一存储层包括位于导电接入线之间的多行存储单元，并且该对中的第二存储层基本上与第一存储层相同，而是围绕垂直于衬底的轴线旋转，因此 该对的一个存储器层中的访问线和存储单元行与其对应的行和另一个存储层中的行正交。 每个层中的存储单元垂直（垂直于衬底）与另一层中的存储器单元对准，垂直排列的存储单元形成从衬底垂直延伸的存储单元列。 每个存储单元列在最下面的存储单元和衬底之间具有电开关。

公开(公告)号：US07042682B2

公开(公告)日：2006-05-09

申请号：US10688046

申请日：2003-10-17

申请人： Hung Liang Hu ,  Yaw Shing Tang ,  Liji Guan ,  Kochan Ju

发明人： Hung Liang Hu ,  Yaw Shing Tang ,  Liji Guan ,  Kochan Ju

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/11 ,  G11B5/127 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315

摘要： Conventional perpendicular writers that utilize an extended return pole are subject to large flux leakage. This problem has been reduced in the prior art by adding a downstream shield. This still leaves significant upstream leakage. This has now been eliminated by adding an upstream shield and then connecting the up and downstream shields by using side shields. The latter need not extend all the way from the downstream to the upstream shield in which case their thickness is increased relative to the full side shields.

摘要翻译： 使用扩展返回极的常规垂直写入器会受到大的漏磁。 通过添加下游屏蔽，现有技术中已经减少了这个问题。 这仍然导致重大的上游泄漏。 现在已经通过添加上游屏蔽，然后通过使用侧屏蔽连接上下屏蔽来消除这一点。 后者不需要从下游延伸到上游屏蔽，在这种情况下，它们的厚度相对于全侧屏蔽增加。