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公开(公告)号：US09013673B2
公开(公告)日：2015-04-21
申请号：US12953113
申请日：2010-11-23
申请人： Jeroen Gerard Gosen , Koen Cuypers
发明人： Jeroen Gerard Gosen , Koen Cuypers
IPC分类号： G03F7/20
CPC分类号： G03F7/7085 , G03F7/70341
摘要： An immersion lithographic apparatus is provided having a table configured to support a substrate; a sensor or target for a sensor is provided on a surface of the table and a cover is provided extending from an edge of the table; in addition, a liquid displacement device is provided including a gas outlet configured to direct a localized gas flow towards the sensor or target so as to displace liquid from the sensor or target over the cover and off the table.
摘要翻译： 提供一种浸没式光刻设备，其具有构造成支撑衬底的工作台; 用于传感器的传感器或目标设置在工作台的表面上，并且设置从工作台的边缘延伸的盖; 此外，提供了一种液体置换装置，其包括气体出口，该气体出口构造成将局部气体流引向传感器或靶，以便将来自传感器或靶的液体置于盖上并离开工作台。
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公开(公告)号：US08755026B2
公开(公告)日：2014-06-17
申请号：US12969656
申请日：2010-12-16
申请人： Jeroen Gerard Gosen , Albert Johannes Maria Jansen , Nicolaas Ten Kate , Marco Koert Stavenga , Koen Steffens , Laurentius Johannes Adrianus Van Bokhoven , Henricus Jozef Castelijns , Koen Cuypers
发明人： Jeroen Gerard Gosen , Albert Johannes Maria Jansen , Nicolaas Ten Kate , Marco Koert Stavenga , Koen Steffens , Laurentius Johannes Adrianus Van Bokhoven , Henricus Jozef Castelijns , Koen Cuypers
CPC分类号： G03F7/70341 , G03F7/7085
摘要： An immersion lithographic apparatus is disclosed that includes a table having a surface and a sensor, or a target for a sensor, or both, the sensor and/or target having a first area which is lyophobic to immersion liquid and a second area which is lyophilic to immersion liquid, and a liquid displacement device configured to displace liquid on the sensor and/or target, the liquid displacement device comprising a gas outlet opening configured to direct a gas flow toward the first and second areas, wherein a property of a part of the gas flow directed to the first area is different to a property of a part of the gas flow directed to the second area.
摘要翻译： 公开了一种浸没式光刻设备，其包括具有表面和传感器的表，或用于传感器的目标或两者，所述传感器和/或目标具有与浸没液体疏液的第一区域和亲液的第二区域 液体置换装置，其构造成将传感器和/或目标物上的液体置换，所述液体置换装置包括气体出口开口，所述气体出口开口构造成将气流引向所述第一和第二区域，其中， 被引导到第一区域的气流不同于指向第二区域的一部分气流的特性。
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公开(公告)号：US20110149258A1
公开(公告)日：2011-06-23
申请号：US12969656
申请日：2010-12-16
申请人： Jeroen Gerard Gosen , Albert Johannes Maria Jansen , Nicolaas Ten Kate , Marco Koert Stavenga , Koen Steffens , Laurentius Johannes Adrianus Van Bokhoven , Henricus Jozef Castelijns , Koen Cuypers
发明人： Jeroen Gerard Gosen , Albert Johannes Maria Jansen , Nicolaas Ten Kate , Marco Koert Stavenga , Koen Steffens , Laurentius Johannes Adrianus Van Bokhoven , Henricus Jozef Castelijns , Koen Cuypers
IPC分类号： G03B27/52
CPC分类号： G03F7/70341 , G03F7/7085
摘要： An immersion lithographic apparatus is disclosed that includes a table having a surface and a sensor, or a target for a sensor, or both, the sensor and/or target having a first area which is lyophobic to immersion liquid and a second area which is lyophilic to immersion liquid, and a liquid displacement device configured to displace liquid on the sensor and/or target, the liquid displacement device comprising a gas outlet opening configured to direct a gas flow toward the first and second areas, wherein a property of a part of the gas flow directed to the first area is different to a property of a part of the gas flow directed to the second area.
摘要翻译： 公开了一种浸没式光刻设备，其包括具有表面和传感器的表，或用于传感器的目标或两者，所述传感器和/或目标具有与浸没液体疏液的第一区域和亲液的第二区域 液体置换装置，其构造成将传感器和/或目标物上的液体置换，所述液体置换装置包括气体出口开口，所述气体出口开口构造成将气流引向所述第一和第二区域，其中， 被引导到第一区域的气流不同于指向第二区域的一部分气流的特性。
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公开(公告)号：US20110129782A1
公开(公告)日：2011-06-02
申请号：US12953113
申请日：2010-11-23
申请人： Jeroen Gerard GOSEN , Koen Cuypers
发明人： Jeroen Gerard GOSEN , Koen Cuypers
CPC分类号： G03F7/7085 , G03F7/70341
摘要： An immersion lithographic apparatus is provided having a table configured to support a substrate; a sensor or target for a sensor is provided on a surface of the table and a cover is provided extending from an edge of the table; in addition, a liquid displacement device is provided including a gas outlet configured to direct a localized gas flow towards the sensor or target so as to displace liquid from the sensor or target over the cover and off the table.
摘要翻译： 提供一种浸没式光刻设备，其具有构造成支撑衬底的工作台; 用于传感器的传感器或目标设置在工作台的表面上，并且设置从工作台的边缘延伸的盖; 此外，提供了一种液体置换装置，其包括气体出口，该气体出口构造成将局部气体流引向传感器或靶，以便将来自传感器或靶的液体置于盖上并离开工作台。
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