公开(公告)号：US07526859B2

公开(公告)日：2009-05-05

申请号：US11580162

申请日：2006-10-13

申请人： Kenji Sasaoka ,  Fumitoshi Ikegaya ,  Takahiro Mori ,  Tomohisa Motomura ,  Yoshizumi Sato ,  Koichiro Shibayama

发明人： Kenji Sasaoka ,  Fumitoshi Ikegaya ,  Takahiro Mori ,  Tomohisa Motomura ,  Yoshizumi Sato ,  Koichiro Shibayama

IPC分类号： B23P19/00

CPC分类号： B32B38/162 ,  B32B38/1858 ,  B32B2038/1891 ,  B32B2309/65 ,  B32B2457/08 ,  H05K3/1216 ,  H05K3/26 ,  H05K3/4069 ,  H05K3/4647 ,  H05K2201/0355 ,  H05K2203/066 ,  H05K2203/082 ,  H05K2203/1189 ,  Y10T29/49117 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49155 ,  Y10T29/4922 ,  Y10T29/49991 ,  Y10T29/5136 ,  Y10T29/5137 ,  Y10T29/53061 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53174 ,  Y10T29/53187 ,  Y10T29/532 ,  Y10T29/53243 ,  Y10T29/53261 ,  Y10T29/53539

摘要： The apparatus for manufacturing a wiring substitute comprises a transporter having a circuit where a sheet is circulated; a screen printer for printing a conductive paste on the sheet; a counter for counting the number of times to print the conductive paste on the sheet; and a distributor for ejecting the sheet from the circuit when the counted number reaches a preset number. Thus, the conductive pillars having uniform properties can be formed automatically on the conductive foil with high productivity.

摘要翻译： 用于制造布线替代品的装置包括具有片材循环的电路的运送器; 用于在片材上印刷导电膏的丝网印刷机; 用于计数在片材上印刷导电糊的次数的计数器; 以及当计数的数量达到预设数量时从电路中弹出纸张的分配器。 因此，可以以高生产率自动地在导电箔上形成具有均匀性质的导电柱。

公开(公告)号：US07134193B2

公开(公告)日：2006-11-14

申请号：US11023478

申请日：2004-12-29

申请人： Kenji Sasaoka ,  Fumitoshi Ikegaya ,  Takahiro Mori ,  Tomohisa Motomura ,  Yoshizumi Sato ,  Koichiro Shibayama

发明人： Kenji Sasaoka ,  Fumitoshi Ikegaya ,  Takahiro Mori ,  Tomohisa Motomura ,  Yoshizumi Sato ,  Koichiro Shibayama

IPC分类号： H01R43/00

CPC分类号： B32B38/162 ,  B32B38/1858 ,  B32B2038/1891 ,  B32B2309/65 ,  B32B2457/08 ,  H05K3/1216 ,  H05K3/26 ,  H05K3/4069 ,  H05K3/4647 ,  H05K2201/0355 ,  H05K2203/066 ,  H05K2203/082 ,  H05K2203/1189 ,  Y10T29/49117 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49155 ,  Y10T29/4922 ,  Y10T29/49991 ,  Y10T29/5136 ,  Y10T29/5137 ,  Y10T29/53061 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53174 ,  Y10T29/53187 ,  Y10T29/532 ,  Y10T29/53243 ,  Y10T29/53261 ,  Y10T29/53539

摘要： The apparatus for manufacturing a wiring substitute comprises a transporter having a circuit where a sheet is circulated; a screen printer for printing a conductive paste on the sheet; a counter for counting the number of times to print the conductive paste on the sheet; and a distributor for ejecting the sheet from the circuit when the counted number reaches a preset number. Thus, the conductive pillars having uniform properties can be formed automatically on the conductive foil with high productivity.

摘要翻译： 用于制造布线替代品的装置包括具有片材循环的电路的运送器; 用于在片材上印刷导电膏的丝网印刷机; 用于计数在片材上印刷导电糊的次数的计数器; 以及当计数的数量达到预设数量时从电路中弹出纸张的分配器。 因此，可以以高生产率自动地在导电箔上形成具有均匀性质的导电柱。

公开(公告)号：US06507995B1

公开(公告)日：2003-01-21

申请号：US09093605

申请日：1998-06-09

申请人： Kenji Sasaoka ,  Fumitoshi Ikegaya ,  Takahiro Mori ,  Tomohisa Motomura ,  Yoshizumi Sato ,  Koichiro Shibayama

发明人： Kenji Sasaoka ,  Fumitoshi Ikegaya ,  Takahiro Mori ,  Tomohisa Motomura ,  Yoshizumi Sato ,  Koichiro Shibayama

IPC分类号： B23P1900

CPC分类号： B32B38/162 ,  B32B38/1858 ,  B32B2038/1891 ,  B32B2309/65 ,  B32B2457/08 ,  H05K3/1216 ,  H05K3/26 ,  H05K3/4069 ,  H05K3/4647 ,  H05K2201/0355 ,  H05K2203/066 ,  H05K2203/082 ,  H05K2203/1189 ,  Y10T29/49117 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49155 ,  Y10T29/4922 ,  Y10T29/49991 ,  Y10T29/5136 ,  Y10T29/5137 ,  Y10T29/53061 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53174 ,  Y10T29/53187 ,  Y10T29/532 ,  Y10T29/53243 ,  Y10T29/53261 ,  Y10T29/53539

摘要： The apparatus for manufacturing a wiring substitute comprises a transporter having a circuit where a sheet is circulated; a screen printer for printing a conductive paste on the sheet; a counter for counting the number of times to print the conductive paste on the sheet; and a distributor for ejecting the sheet from the circuit when the counted number reaches a preset number. Thus, the conductive pillars having uniform properties can be formed automatically on the conductive foil with high productivity.

摘要翻译： 用于制造布线替代品的装置包括具有片材循环的电路的运送器; 用于在片材上印刷导电膏的丝网印刷机; 用于计数在片材上印刷导电糊的次数的计数器; 以及当计数的数量达到预设数量时从电路中弹出纸张的分配器。 因此，可以以高生产率自动地在导电箔上形成具有均匀性质的导电柱。

公开(公告)号：US20070044294A1

公开(公告)日：2007-03-01

申请号：US11580162

申请日：2006-10-13

申请人： Kenji Sasaoka ,  Fumitoshi Ikegaya ,  Takahiro Mori ,  Tomohisa Motomura ,  Yoshizumi Sato ,  Koichiro Shibayama

发明人： Kenji Sasaoka ,  Fumitoshi Ikegaya ,  Takahiro Mori ,  Tomohisa Motomura ,  Yoshizumi Sato ,  Koichiro Shibayama

IPC分类号： B23P23/00 ,  H05K3/36

CPC分类号： B32B38/162 ,  B32B38/1858 ,  B32B2038/1891 ,  B32B2309/65 ,  B32B2457/08 ,  H05K3/1216 ,  H05K3/26 ,  H05K3/4069 ,  H05K3/4647 ,  H05K2201/0355 ,  H05K2203/066 ,  H05K2203/082 ,  H05K2203/1189 ,  Y10T29/49117 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49155 ,  Y10T29/4922 ,  Y10T29/49991 ,  Y10T29/5136 ,  Y10T29/5137 ,  Y10T29/53061 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53174 ,  Y10T29/53187 ,  Y10T29/532 ,  Y10T29/53243 ,  Y10T29/53261 ,  Y10T29/53539

摘要： The apparatus for manufacturing a wiring substitute comprises a transporter having a circuit where a sheet is circulated; a screen printer for printing a conductive paste on the sheet; a counter for counting the number of times to print the conductive paste on the sheet; and a distributor for ejecting the sheet from the circuit when the counted number reaches a preset number. Thus, the conductive pillars having uniform properties can be formed automatically on the conductive foil with high productivity.

摘要翻译： 用于制造布线替代品的装置包括具有片材循环的电路的运送器; 用于在片材上印刷导电膏的丝网印刷机; 用于计数在片材上印刷导电糊的次数的计数器; 以及当计数的数量达到预设数量时从电路中弹出纸张的分配器。 因此，可以以高生产率自动地在导电箔上形成具有均匀性质的导电柱。

公开(公告)号：US20050115068A1

公开(公告)日：2005-06-02

申请号：US11023478

申请日：2004-12-29

申请人： Kenji Sasaoka ,  Fumitoshi Ikegaya ,  Takahiro Mori ,  Tomohisa Motomura ,  Yoshizumi Sato ,  Koichiro Shibayama

发明人： Kenji Sasaoka ,  Fumitoshi Ikegaya ,  Takahiro Mori ,  Tomohisa Motomura ,  Yoshizumi Sato ,  Koichiro Shibayama

IPC分类号： H05K3/46 ,  H05K3/12 ,  H05K3/40 ,  H05K3/20 ,  B23P19/00

CPC分类号： B32B38/162 ,  B32B38/1858 ,  B32B2038/1891 ,  B32B2309/65 ,  B32B2457/08 ,  H05K3/1216 ,  H05K3/26 ,  H05K3/4069 ,  H05K3/4647 ,  H05K2201/0355 ,  H05K2203/066 ,  H05K2203/082 ,  H05K2203/1189 ,  Y10T29/49117 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49155 ,  Y10T29/4922 ,  Y10T29/49991 ,  Y10T29/5136 ,  Y10T29/5137 ,  Y10T29/53061 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53174 ,  Y10T29/53187 ,  Y10T29/532 ,  Y10T29/53243 ,  Y10T29/53261 ,  Y10T29/53539

摘要： The apparatus for manufacturing a wiring substitute comprises a transporter having a circuit where a sheet is circulated; a screen printer for printing a conductive paste on the sheet; a counter for counting the number of times to print the conductive paste on the sheet; and a distributor for ejecting the sheet from the circuit when the counted number reaches a preset number. Thus, the conductive pillars having uniform properties can be formed automatically on the conductive foil with high productivity.

摘要翻译： 用于制造布线替代品的装置包括具有片材循环的电路的运送器; 用于在片材上印刷导电膏的丝网印刷机; 用于计数在片材上印刷导电糊的次数的计数器; 以及当计数的数量达到预设数量时从电路中弹出纸张的分配器。 因此，可以以高生产率自动地在导电箔上形成具有均匀性质的导电柱。

公开(公告)号：US06865801B2

公开(公告)日：2005-03-15

申请号：US09897998

申请日：2001-07-05

申请人： Kenji Sasaoka ,  Fumitoshi Ikegaya ,  Takahiro Mori ,  Tomohisa Motomura ,  Yoshizumi Sato ,  Koichiro Shibayama

发明人： Kenji Sasaoka ,  Fumitoshi Ikegaya ,  Takahiro Mori ,  Tomohisa Motomura ,  Yoshizumi Sato ,  Koichiro Shibayama

IPC分类号： H05K3/46 ,  H05K3/12 ,  H05K3/40 ,  H05K3/10

CPC分类号： B32B38/162 ,  B32B38/1858 ,  B32B2038/1891 ,  B32B2309/65 ,  B32B2457/08 ,  H05K3/1216 ,  H05K3/26 ,  H05K3/4069 ,  H05K3/4647 ,  H05K2201/0355 ,  H05K2203/066 ,  H05K2203/082 ,  H05K2203/1189 ,  Y10T29/49117 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49155 ,  Y10T29/4922 ,  Y10T29/49991 ,  Y10T29/5136 ,  Y10T29/5137 ,  Y10T29/53061 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53174 ,  Y10T29/53187 ,  Y10T29/532 ,  Y10T29/53243 ,  Y10T29/53261 ,  Y10T29/53539

摘要： The apparatus for manufacturing a wiring substitute comprises a transporter having a circuit where a sheet is circulated; a screen printer for printing a conductive paste on the sheet; a counter for counting the number of times to print the conductive paste on the sheet; and a distributor for ejecting the sheet from the circuit when the counted number reaches a preset number. Thus, the conductive pillars having uniform properties can be formed automatically on the conductive foil with high productivity.

摘要翻译： 用于制造布线替代品的装置包括具有片材循环的电路的运送器; 用于在片材上印刷导电膏的丝网印刷机; 用于计数在片材上印刷导电糊的次数的计数器; 以及当计数的数量达到预设数量时从电路中弹出纸张的分配器。 因此，可以以高生产率自动地在导电箔上形成具有均匀性质的导电柱。

公开(公告)号：US20120024317A1

公开(公告)日：2012-02-02

申请号：US13191739

申请日：2011-07-27

申请人： Yoshinori KITAMURA ,  Yasuhito Yoshimizu ,  Koichiro Shibayama

发明人： Yoshinori KITAMURA ,  Yasuhito Yoshimizu ,  Koichiro Shibayama

IPC分类号： B08B7/04 ,  H01L21/02 ,  B08B3/00

CPC分类号： H01L21/67046 ,  B24B53/017 ,  H01L21/02057 ,  H01L21/0209

摘要： According to one embodiment, a cleaning apparatus includes a removing unit whose tip portion is harder than a constituent material of a surface layer on a back surface side of a semiconductor wafer (wafer) and which is configured to clean a back surface of the wafer held by a holding unit and a moving mechanism that relatively moves the removing unit and the wafer in a direction parallel to the wafer back surface. The removing unit grinds and removes a protrusion that is formed of a material same as the surface layer of the wafer back surface, by the moving mechanism relatively moving the removing unit and the wafer and causing the tip portion of the removing unit to come into contact with the protrusion.

摘要翻译： 根据一个实施例，一种清洁装置包括一个去除单元，其顶端部分比半导体晶片（晶片）的背面侧的表面层的构成材料硬，并且被构造成清洁晶片保持的背面 通过保持单元和移动机构使得移动单元和晶片沿平行于晶片背面的方向相对移动。 移动单元通过使移除单元和晶片相对移动并使去除单元的末端部分接触的移动机构研磨并除去由与晶片背面的表面层相同的材料形成的突起 与突起。