公开(公告)号：US07452655B2

公开(公告)日：2008-11-18

申请号：US10533254

申请日：2003-11-04

申请人： Hiroyuki Ishii ,  Kouichi Fujiwara ,  Hiroshi Yamaguchi ,  Yukio Nishimura

发明人： Hiroyuki Ishii ,  Kouichi Fujiwara ,  Hiroshi Yamaguchi ,  Yukio Nishimura

IPC分类号： G03F7/00 ,  G03F7/004

CPC分类号： C08F220/26 ,  G03F7/0397

摘要： An acrylic copolymer having a specific structure and a radiation-sensitive resin composition comprising the acrylic copolymer having high transparency to radiation, excelling in basic properties as a resist such as sensitivity, resolution, dry etching resistance, and pattern shape, and, in particular, excelling in forming contact holes and lines-and-spaces.

摘要翻译： 具有特定结构的丙烯酸共聚物和辐射敏感性树脂组合物，其包含对辐射具有高透明度的丙烯酸共聚物，作为抗敏剂，例如灵敏度，分辨率，耐干蚀刻性和图案形状的基本性能优异， 优秀的形成接触孔和线和空格。

公开(公告)号：US20070269754A1

公开(公告)日：2007-11-22

申请号：US10567117

申请日：2004-08-04

申请人： Kouichi Fujiwara ,  Hiroshi Yamaguchi ,  Atsushi Nakamura

发明人： Kouichi Fujiwara ,  Hiroshi Yamaguchi ,  Atsushi Nakamura

IPC分类号： C08G61/02 ,  G03C5/00

CPC分类号： C08F220/30 ,  G03F7/0397 ,  Y10S430/108 ,  Y10S430/111

摘要： To provide a resist which is excellent in the solubility in a resist solvent and little dependent on baking temperature and can form developed patterns reduced in line edge roughness. An acrylic polymer characterized by comprising units of the general formula (1), units of general formula (2), and units of general formula (3) and/or units of general formula (4), wherein R, R′, R″ and R′″ are each hydrogen, methyl, or trifluoromethyl; R1 is hydrogen, C1-4 linear or branched alkyl, alkoxy, or C1-4 linear or branched fluoroalkyl; X is a C7-20 polycyclic aliphatic hydrocarbon group consisting of carbon atoms and hydrogen atoms; R2 and R3 are each independently C1-4 linear or branched alkyl; R4 is a C4-20 alicyclic hydrocarbon group; R5 is C1-4 linear or branched alkyl; and R6 and R7 are each hydrogen or C1-4 linear or branched alkyl.

摘要翻译： 提供一种在抗蚀剂溶剂中溶解性优异且几乎不依赖于烘烤温度的抗蚀剂，并且可以形成线边缘粗糙度减小的显影图案。 一种丙烯酸类聚合物，其特征在于包含通式（1）的单元，通式（2）的单元和通式（3）的单元和/或通式（4）的单元，其中R，R'，R' '和R“'分别是氢，甲基或三氟甲基; R 1是氢，C 1-4 - 直链或支链烷基，烷氧基或C 1-4 - 直链或支链氟代烷基; X是由碳原子和氢原子组成的C 7-20多环脂族烃基; R 2和R 3各自独立地为C 1-4 - 直链或支链烷基; R 4是C 4-20脂肪族烃基; R 5是C 1-4烷基直链或支链烷基; 和R 6和R 7各自为氢或C 1-4 - 直链或支链烷基。

公开(公告)号：US20060074139A1

公开(公告)日：2006-04-06

申请号：US10533254

申请日：2003-11-04

申请人： Hiroyuki Ishii ,  Kouichi Fujiwara ,  Hiroshi Yamaguchi ,  Yukio Nishimura

发明人： Hiroyuki Ishii ,  Kouichi Fujiwara ,  Hiroshi Yamaguchi ,  Yukio Nishimura

IPC分类号： C08J3/28

CPC分类号： C08F220/26 ,  G03F7/0397

摘要： An acrylic copolymer having a specific structure and a radiation-sensitive resin composition comprising the acrylic copolymer having high transparency to radiation, excelling in basic properties as a resist such as sensitivity, resolution, dry etching resistance, and pattern shape, and, in particular, excelling in forming contact holes and lines-and-spaces.

摘要翻译： 具有特定结构的丙烯酸共聚物和辐射敏感性树脂组合物，其包含对辐射具有高透明度的丙烯酸共聚物，作为抗敏剂，例如灵敏度，分辨率，耐干蚀刻性和图案形状的基本性能优异， 优秀的形成接触孔和线和空格。

公开(公告)号：US08877429B2

公开(公告)日：2014-11-04

申请号：US13004898

申请日：2011-01-12

申请人： Gouji Wakamatsu ,  Masafumi Hori ,  Kouichi Fujiwara ,  Makoto Sugiura

发明人： Gouji Wakamatsu ,  Masafumi Hori ,  Kouichi Fujiwara ,  Makoto Sugiura

IPC分类号： G03F7/095 ,  G03F7/26 ,  G03F7/004 ,  G03F7/00 ,  H01L21/027 ,  G03F7/039

CPC分类号： G03F7/40 ,  G03F7/0035 ,  G03F7/0046 ,  G03F7/0397 ,  G03F7/2024 ,  H01L21/0273

摘要： A resist pattern-insolubilizing resin composition is used in a resist pattern-forming method. The resist pattern-insolubilizing resin composition includes solvent and a resin. The resin includes a first repeating unit that includes a hydroxyl group in its side chain and at least one of a second repeating unit derived from a monomer shown by a following formula (1-1) and a third repeating unit derived from a monomer shown by a following formula (1-2), wherein for example, R1 represents a hydrogen atom, A represents a methylene group, R2 represents a group shown by a following formula (2-1) or a group shown by a following formula (2-2), R3 represents a methylene group, R4 represents a hydrogen atom, and n is 0 or 1, wherein each of R34 represents at least one of a hydrogen atom and a linear or branched alkyl group having 1 to 10 carbon atoms.

摘要翻译： 抗蚀剂图案不溶化树脂组合物用于抗蚀剂图案形成方法。 抗蚀剂图案不溶化树脂组合物包括溶剂和树脂。 树脂包括在其侧链中包含羟基的第一重复单元和由下式（1-1）所示的单体衍生的第二重复单元和由下式表示的单体衍生的第三重复单元中的至少一种： 下述式（1-2）表示的基团，其中，例如，R1表示氢原子，A表示亚甲基，R2表示下述式（2-1）所示的基团或下述式（2- 2）中，R3表示亚甲基，R4表示氢原子，n表示0或1，R34表示氢原子和碳原子数1〜10的直链或支链烷基中的至少一种。

公开(公告)号：US20130068945A1

公开(公告)日：2013-03-21

申请号：US13700795

申请日：2011-05-30

申请人： Noriaki Tanaka ,  Masahiro Kohno ,  Emiko Sato ,  Kouichi Fujiwara

发明人： Noriaki Tanaka ,  Masahiro Kohno ,  Emiko Sato ,  Kouichi Fujiwara

IPC分类号： A61B5/00

CPC分类号： H01J49/0431 ,  A61B5/0059 ,  G01N30/34 ,  G01N30/7233 ,  G01N33/6893 ,  G01N2030/045 ,  G01N2030/8813 ,  G01N2800/347

摘要： This invention provides a method or device for determining the stage of chronic kidney disease.The present invention relates to a method for determining a stage of chronic kidney disease in a subject suffering from kidney disease, the method comprising the steps of: (A-1) measuring the content of at least one marker selected from the group consisting of markers (1) to (16) in a specimen from the subject, (B-1) determining the stage indicated by each marker by comparing the content of the at least one marker in the specimen from the subject, which has been measured in step (A-1), with a reference content range determined in each stage, and (C-1) determining that when each marker indicates the same stage, which has been determined in step (A-1), the chronic kidney disease in the subject is in that stage.

摘要翻译： 本发明提供了一种用于确定慢性肾脏疾病阶段的方法或装置。 本发明涉及一种用于确定患有肾脏疾病的受试者的慢性肾脏疾病阶段的方法，所述方法包括以下步骤：（A-1）测量选自标记物中的至少一种标志物的含量 （B-1）通过比较在步骤（1）中测量的来自受试者的标本中的至少一个标记物的含量来确定每个标记物指示的阶段（B-1） A-1），每个阶段确定参考含量范围，和（C-1）确定当每个标记指示在步骤（A-1）中确定的相同阶段时，受试者中的慢性肾脏疾病 在那个阶段

公开(公告)号：US08240863B2

公开(公告)日：2012-08-14

申请号：US12664152

申请日：2008-05-29

申请人： Hideto Takeuchi ,  Kouichi Fujiwara ,  Akira Toyama

发明人： Hideto Takeuchi ,  Kouichi Fujiwara ,  Akira Toyama

IPC分类号： G09F13/04 ,  G09F13/08

CPC分类号： G02F1/133608 ,  G02F1/133308 ,  G02F2001/133311 ,  G02F2001/133314 ,  G02F2001/133328 ,  G02F2201/503

摘要： In a chassis which has a lid plate closing an opening portion of a frame part and in which a plurality of lamps are juxtaposed, the lid plate includes a plurality of plate bodies juxtaposed with their end parts superposed on each other and a connecting unit connects the superposed end parts of the plate bodies and the superposed end parts of the plate bodies, respectively.

摘要翻译： 在具有闭合框架部分的开口部分并且多个灯并置的盖板的底盘中，盖板包括与它们的彼此重叠的端部并置的多个板体，并且连接单元将 板体的叠置端部和板体的叠置端部分别。

公开(公告)号：US07704669B2

公开(公告)日：2010-04-27

申请号：US10567117

申请日：2004-08-04

申请人： Kouichi Fujiwara ,  Hiroshi Yamaguchi ,  Atsushi Nakamura

发明人： Kouichi Fujiwara ,  Hiroshi Yamaguchi ,  Atsushi Nakamura

IPC分类号： G03F7/004 ,  C08F220/18 ,  C08F224/00

CPC分类号： C08F220/30 ,  G03F7/0397 ,  Y10S430/108 ,  Y10S430/111

摘要： To provide a resist which is excellent in the solubility in a resist solvent and little dependent on baking temperature and can form developed patterns reduced in line edge roughness. An acrylic polymer characterized by comprising units of the general formula (1), units of general formula (2), and units of general formula (3) and/or units of general formula (4), wherein R, R′, R″ and R′″ are each hydrogen, methyl, or trifluoromethyl; R1 is hydrogen, C1-4 linear or branched alkyl, alkoxy, or C1-4 linear or branched fluoroalkyl; X is a C7-20 polycyclic aliphatic hydrocarbon group consisting of carbon atoms and hydrogen atoms; R2 and R3 are each independently C1-4 linear or branched alkyl; R4 is a C4-20 alicyclic hydrocarbon group; R5 is C1-4 linear or branched alkyl; and R6 and R7 are each hydrogen or C1-4 linear or branched alkyl.

摘要翻译： 提供一种在抗蚀剂溶剂中溶解性优异且几乎不依赖于烘烤温度的抗蚀剂，并且可以形成线边缘粗糙度减小的显影图案。 一种丙烯酸类聚合物，其特征在于包含通式（1）的单元，通式（2）的单元和通式（3）的单元和/或通式（4）的单元，其中R，R'，R“ 和R'“各自为氢，甲基或三氟甲基; R1是氢，C1-4直链或支链烷基，烷氧基或C1-4直链或支链氟代烷基; X是由碳原子和氢原子组成的C7-20多环脂族烃基; R2和R3各自独立地为C1-4直链或支链烷基; R4是C4-20脂环族烃基; R5是C1-4直链或支链烷基; 并且R 6和R 7各自为氢或C 1-4直链或支链烷基。

公开(公告)号：US09348226B2

公开(公告)日：2016-05-24

申请号：US10541032

申请日：2003-12-24

申请人： Isao Nishimura ,  Kouichi Fujiwara ,  Eiichi Kobayashi ,  Tsutomu Shimokawa ,  Atsushi Nakamura ,  Eiji Yoneda ,  Yong Wang

发明人： Isao Nishimura ,  Kouichi Fujiwara ,  Eiichi Kobayashi ,  Tsutomu Shimokawa ,  Atsushi Nakamura ,  Eiji Yoneda ,  Yong Wang

IPC分类号： G03F7/039 ,  G03F7/004 ,  G03F7/20

CPC分类号： G03F7/039 ,  G03F7/0046 ,  G03F7/0397 ,  G03F7/2006

摘要： A radiation-sensitive resin composition comprising an acid-labile group-containing resin obtained by living radical polymerization having a specific structure which is insoluble or scarcely soluble in alkali, but becomes alkali soluble by the action of an acid, and a photoacid generator, wherein the ratio of weight average molecular weight to number average molecular weight (weight average molecular weight/number average molecular weight) of the acid-labile group-containing resin is smaller than 1.5.

公开(公告)号：US08729464B2

公开(公告)日：2014-05-20

申请号：US13700795

申请日：2011-05-30

申请人： Noriaki Tanaka ,  Masahiro Kohno ,  Emiko Sato ,  Kouichi Fujiwara

发明人： Noriaki Tanaka ,  Masahiro Kohno ,  Emiko Sato ,  Kouichi Fujiwara

IPC分类号： H01J49/04

CPC分类号： H01J49/0431 ,  A61B5/0059 ,  G01N30/34 ,  G01N30/7233 ,  G01N33/6893 ,  G01N2030/045 ,  G01N2030/8813 ,  G01N2800/347

摘要： This invention provides a method or device for determining the stage of chronic kidney disease.The present invention relates to a method for determining a stage of chronic kidney disease in a subject suffering from kidney disease, the method comprising the steps of: (A-1) measuring the content of at least one marker selected from the group consisting of markers (1) to (16) in a specimen from the subject, (B-1) determining the stage indicated by each marker by comparing the content of the at least one marker in the specimen from the subject, which has been measured in step (A-1), with a reference content range determined in each stage, and (C-1) determining that when each marker indicates the same stage, which has been determined in step (A-1), the chronic kidney disease in the subject is in that stage.

摘要翻译： 本发明提供了一种用于确定慢性肾脏疾病阶段的方法或装置。 本发明涉及一种用于确定患有肾脏疾病的受试者的慢性肾脏疾病阶段的方法，所述方法包括以下步骤：（A-1）测量选自标记物中的至少一种标志物的含量 （B-1）通过比较在步骤（1）中测量的来自受试者的标本中的至少一个标记物的含量来确定每个标记物指示的阶段（B-1） A-1），每个阶段确定参考含量范围，和（C-1）确定当每个标记指示在步骤（A-1）中确定的相同阶段时，受试者中的慢性肾脏疾病 在那个阶段

公开(公告)号：US08501385B2

公开(公告)日：2013-08-06

申请号：US13005536

申请日：2011-01-13

申请人： Yusuke Anno ,  Kouichi Fujiwara ,  Makoto Sugiura ,  Gouji Wakamatsu

发明人： Yusuke Anno ,  Kouichi Fujiwara ,  Makoto Sugiura ,  Gouji Wakamatsu

IPC分类号： G03C1/00 ,  G03F1/00

CPC分类号： H01L21/0273 ,  C08F220/18 ,  C08F220/28 ,  C08F220/32 ,  C08F220/34 ,  C08F220/36 ,  G03F7/0035 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0397 ,  G03F7/40 ,  C08F220/22

摘要： A positive-tone radiation-sensitive composition is used in a resist pattern-forming method as a first positive-tone radiation-sensitive composition. A positive-tone radiation-sensitive composition includes a polymer, a photoacid generator, and a solvent. The polymer includes an acid-labile group and a crosslinkable group. The resist pattern-forming method includes providing the first positive-tone radiation-sensitive composition on a substrate to form a first resist pattern on the substrate. The first resist pattern is made to be inactive to light or heat so that the first resist pattern is insoluble in a second positive-tone radiation-sensitive composition. The second positive-tone radiation-sensitive composition is provided on the substrate to form a second resist pattern on the substrate on which the first resist pattern is formed.

摘要翻译： 作为第一正色调辐射敏感性组合物的抗蚀剂图案形成方法中使用正性辐射敏感性组合物。 正音辐射敏感组合物包括聚合物，光致酸产生剂和溶剂。 聚合物包括酸不稳定基团和可交联基团。 抗蚀剂图案形成方法包括在基板上提供第一正色散辐射敏感性组合物以在基板上形成第一抗蚀剂图案。 使第一抗蚀剂图案对光或热不起作用，使得第一抗蚀剂图案不溶于第二正色辐射敏感组合物。 第二正色辐射敏感组合物设置在基板上以在其上形成有第一抗蚀剂图案的基板上形成第二抗蚀剂图案。