公开(公告)号：US4670824A

公开(公告)日：1987-06-02

申请号：US875445

申请日：1986-06-17

申请人： Kouji Kuki ,  Tsutomu Kuniyasu

发明人： Kouji Kuki ,  Tsutomu Kuniyasu

IPC分类号： H01J9/227 ,  G03B41/00

CPC分类号： H01J9/2274

摘要： A light source unit for an exposure unit is provided. The unit comprises a cylindrical light-emitting tube and a screen sleeve which has a slit in the circumferential direction and with which the tube is covered through water filled therebetween. According to the invention, the light source unit has the two opposite edges of the slit in the screen sleeve that are in the axial direction partly extended downward to the outer periphery of the light-emitting tube so that a flat exposure pattern is obtained that is small in the radial direction at the periphery of the surface to be exposed to light. Further, a more favorable effect can be obtained by the provision of an attenuating filter on the outer periphery of the screen sleeve for the purpose of shielding a part of the light from the light source in the axial direction.

摘要翻译： 提供了一种用于曝光单元的光源单元。 该单元包括圆柱形发光管和屏幕套筒，其在圆周方向上具有狭缝，并且通过其中填充有水的管覆盖该管。 根据本发明，光源单元具有屏幕套筒中的狭缝的两个相对的边缘，其沿轴向方向部分地向下延伸到发光管的外周边，从而获得平坦的曝光图案，其为 在表面的周边处径向方向较小以暴露于光。 此外，为了屏蔽来自光源的光轴的一部分的目的，通过在屏幕套筒的外周设置衰减滤波器，可以获得更有利的效果。