摘要:
There is provided a support method for a particle distribution analysis for a substrate. In the support method, histogram data of inter-particle distances are created for all particles on a target substrate subjected to the particle distribution analysis from particle coordinate data of the target substrate. Further, histogram data of inter-particle distances are created for multiple virtual substrates each having the same number of randomly distributed particles as the particles on the target substrate. Based on a difference between the histogram data of the target substrate and the histogram data of each of the virtual substrates, determination data are created by quantifying a distance between the histogram data of the target substrate and the histogram data of the multiple virtual substrates, and the determination data are displayed on a display unit.
摘要:
A particle monitoring method of monitoring particles included in an exhaust gas from a depressurized processing vessel 12 includes counting the particles included in the exhaust gas from the depressurized processing vessel 12 while cleaning an inside of the depressurized processing vessel 12 by a particle monitor 18; creating a histogram showing a time and the number of particles from a result of the counting of the particles; extracting, from the histogram, a first feature amount indicating a correlation between a mode of the number of the particles and a particle counting period; and extracting, from the histogram, a second feature amount indicating a correlation between the particle counting period and a distribution tendency of the particles during the particle counting period.
摘要:
A fuel tank is provided which suppresses wave motion on the liquid surface of fuel which occurs when a vehicle accelerates or decelerates. A front wall and/or a rear wall of the fuel tank includes a plurality of steps formed integrally therewith. The liquid surface of the fuel striking the steps is dispersed, and wave motion on the liquid surface is thereby suppressed. Since the steps are formed in the front wall and/or the rear wall of the fuel tank, the volume of the tank is not reduced.
摘要:
In press forming including ironing, an elastically deformable material is used for a part of ironing die contacting to the work material under a higher pressure than designed, for taking the formed product out from the die easily in a case that the ironing die and the formed product are very close in size to each other, and thereby improving the efficiency of production.
摘要:
In order to provide a tensile testing machine of variously cross-sectioned materials which has a very concise structure to make possible more accurate measurement of tensile force, the testing machine is equipped with two roll stands which have gripping rolls available gripping variously cross-sectioned specimens. One or both of the roll stands are hanging. The machine is also equipped with a device for giving a certain initial load to the load cells placed between the roll stands, if necessary.
摘要:
A particle monitoring method of monitoring particles included in an exhaust gas from a depressurized processing vessel 12 includes counting the particles included in the exhaust gas from the depressurized processing vessel 12 while cleaning an inside of the depressurized processing vessel 12 by a particle monitor 18; creating a histogram showing a time and the number of particles from a result of the counting of the particles; extracting, from the histogram, a first feature amount indicating a correlation between a mode of the number of the particles and a particle counting period; and extracting, from the histogram, a second feature amount indicating a correlation between the particle counting period and a distribution tendency of the particles during the particle counting period.
摘要:
There is provided a substrate cleaning method capable of cleaning a substrate on which a fine pattern is being formed in a short time with a simple configuration without having a harmful influence on the fine pattern. In the method, the substrate is transferred from a processing chamber for performing a process on the surface of the substrate therein to a cleaning chamber for cleaning the substrate therein. The substrate is cooled to a temperature in the cleaning chamber. A superfluid is supplied to the surface of the substrate, and contaminant components in the fine pattern are flowed out along with the superfluid as the superfluid flows over from the surface of the substrate.
摘要:
There is provided a piping installation structure for a vehicle which is installed under a floor of a vehicle body and configured to support and fix a long part including at least piping, the piping installation structure including: a clamp member for supporting and fixing the long part; a stud for fixing the clamp member under the floor of the vehicle body; a stud fixing member to which the stud is fixed; and an underfloor structural member installed under the floor of the vehicle body, in which the stud fixing member and the underfloor structural member are joined to form a closed cross section on a plane which is orthogonal to a front-rear direction of the vehicle body.
摘要:
A vehicle fuel tank made of a resin for storage of fuel by forming a substantially hexahedron by erecting left, right, front and rear wall surfaces from a bottom portion and connecting distal ends of the left, right, front and rear walls to an upper surface, wherein at least one of suppressor walls extending longitudinally and perpendicularly is formed on at least one of the bottom portion and the upper surface for suppressing the movement of the fuel by being.
摘要:
There is provided a substrate cleaning method capable of cleaning a substrate on which a fine pattern is being formed in a short time with a simple configuration without having a harmful influence on the fine pattern. In the method, the substrate is transferred from a processing chamber for performing a process on the surface of the substrate therein to a cleaning chamber for cleaning the substrate therein. The substrate is cooled to a temperature in the cleaning chamber. A superfluid is supplied to the surface of the substrate, and contaminant components in the fine pattern are flowed out along with the superfluid as the superfluid flows over from the surface of the substrate.