公开(公告)号：US5220617A

公开(公告)日：1993-06-15

申请号：US754793

申请日：1991-09-04

申请人： Kenneth A. Bird ,  Douglas Y. Kim ,  Stephen J. Kish ,  Julius J. Lambright ,  Kurt R. Muller ,  Lawrence D. Thorp

发明人： Kenneth A. Bird ,  Douglas Y. Kim ,  Stephen J. Kish ,  Julius J. Lambright ,  Kurt R. Muller ,  Lawrence D. Thorp

IPC分类号： G01N21/88

CPC分类号： G01N21/88

摘要： A method and apparatus for the inspection and handling of surface level defects is taught. Briefly stated, the object to be inspected is positioned. A Laser light is polarized into at least one orientation and then reflected off of a rotated polygon mirror. This causes the light to "move" over the area of interest. A plurality of fiber optic bundles are used to receive and conduct the reflected light back to photomultipliers. The photomultipliers convert the light into electrical signals while associated electronics digitize the signals, keeping track of pixels which are produced. By keeping track of pixel edge boundaries and determining if certain thresholds are exceeded or not met as appropriate, the area of interest can be checked for a variety of defects. By comparison of the defects to a reference base, the defects and hence the items inspected can be categorized.

摘要翻译： 教导了用于检查和处理表面缺陷的方法和装置。 简要地说，要检查的物体被定位。 激光被偏振成至少一个方向，然后从旋转的多面镜反射。 这会使光线“移动”在感兴趣的区域上。 多个光纤束用于接收并将反射光传导回光电倍增管。 光电倍增管将光转换成电信号，而相关的电子数字化信号，跟踪产生的像素。 通过跟踪像素边缘边界并确定某些阈值是否被超过或不适当满足，可以检查感兴趣区域的各种缺陷。 通过将缺陷与参考基准进行比较，可以对缺陷和因此检查的项目进行分类。

公开(公告)号：US5416512A

公开(公告)日：1995-05-16

申请号：US173400

申请日：1993-12-23

申请人： Douglas Y. Kim ,  Kurt R. Muller

发明人： Douglas Y. Kim ,  Kurt R. Muller

IPC分类号： G01N21/956 ,  G01R31/311 ,  G01R31/3167 ,  H04N7/18

CPC分类号： H04N7/18 ,  G01N21/956 ,  G01R31/311 ,  G01R31/3167

摘要： A calibration system for circuit inspection tools in which analog threshold levels are automatically set by digital signals. The inspection too includes an optical detector system that provides video signals to channels each containing an analog processor. In the analog processor an analog reference signal, an analog video inspection signal which may contain a defect indication and a digital threshold signal are employed. The digital threshold signal is converted into an analog threshold signal which is summed with the analog reference signal that has been inverted. The inverted, thresholded reference signal is then summed with the analog video signal. The summed analog video signal and thresholded reference signal is compared with a zero level. If the sum is greater than zero a defect is indicated.

摘要翻译： 用于电路检测工具的校准系统，其中模拟阈值电平由数字信号自动设置。 该检查还包括向每个包含模拟处理器的通道提供视频信号的光学检测器系统。 在模拟处理器中，采用模拟参考信号，可以包含缺陷指示和数字阈值信号的模拟视频检查信号。 数字阈值信号被转换成与被反相的模拟参考信号相加的模拟阈值信号。 然后将反相阈值参考信号与模拟视频信号相加。 将相加的模拟视频信号和阈值参考信号与零电平进行比较。 如果总和大于零，则表示缺陷。

公开(公告)号：US5216485A

公开(公告)日：1993-06-01

申请号：US754794

申请日：1991-09-04

申请人： Kenneth A. Bird ,  Douglas Y. Kim ,  Stephen J. Kish ,  Julius J. Lambright ,  Kurt R. Muller ,  Lawrence D. Thorp

发明人： Kenneth A. Bird ,  Douglas Y. Kim ,  Stephen J. Kish ,  Julius J. Lambright ,  Kurt R. Muller ,  Lawrence D. Thorp

IPC分类号： G01N21/88 ,  G01N21/89 ,  G01N21/94 ,  G01N21/956 ,  H05K3/00

CPC分类号： G01N21/8901 ,  G01N2021/887 ,  G01N2021/8902 ,  G01N2021/95615

摘要： A method and apparatus for the inspection and handling of surface level defects is taught. Briefly stated, the object to be inspected is positioned. A Laser light is polarized into at least one orientation and then reflected off of a rotated polygon mirror. This causes the light to "move" over the area of interest. A plurality of fiber optic bundles are used to receive and conduct the reflected light back to photomultipliers. The photomultiplers convert the light into electrical signals while associated electronics digitize the signals, keeping track of pixels which are produced. By keeping track of pixel edge boundaries and determining if certain thresholds are exceeded or not met as appropriate, the area of interest can be checked for a variety of defects. By comparison of the defects to a reference base, the defects and hence the items inspected can be categorized.

公开(公告)号：US06310685B1

公开(公告)日：2001-10-30

申请号：US09357506

申请日：1999-07-20

申请人： Robert L. Baan ,  James O. Goring ,  David Scott Graboski ,  John R. Lankard, Jr. ,  Kurt R. Muller ,  Raymond H. Turcotte

发明人： Robert L. Baan ,  James O. Goring ,  David Scott Graboski ,  John R. Lankard, Jr. ,  Kurt R. Muller ,  Raymond H. Turcotte

IPC分类号： G01N2101

CPC分类号： H01L21/67028

摘要： A green sheet holding apparatus includes a first member secured to a first edge of the green sheet and a second member moveable relative to the first member, the second member being secured to a second edge of the green sheet. A forcing mechanism, connected to the second member and to the first member, forces the second member away from the first member such that the first edge and the second edge of the green sheet are forced away from each other and the green sheet is flattened. The holding apparatus may be included in a green sheet inspection system, wherein the inspection system further includes a light source directing a light onto the green sheet and a camera detecting light from the green sheet. The invention also includes a method of holding a green sheet, which includes securing the first edge of the green sheet to a first member, securing the second edge of the green sheet to a second member, and forcing the second member away from the first member. This method pulls the first edge and the second edge of the green sheet outwardly, thereby flattening the green sheet. The method may be part of a method of inspecting a screened pattern on a green sheet, which further includes directing a light onto a the green sheet and detecting the light as it emerges from the green sheet.

摘要翻译： 生片保持装置包括固定到生片的第一边缘的第一构件和可相对于第一构件移动的第二构件，第二构件固定到生片的第二边缘。 连接到第二构件和第一构件的强制机构迫使第二构件远离第一构件，使得生片的第一边缘和第二边缘彼此远离并且生片被压平。 保持装置可以包括在生片检查系统中，其中检查系统还包括将光引导到生片上的光源和检测来自生片的光的照相机。 本发明还包括一种保持生片的方法，包括将生片的第一边缘固定到第一构件上，将生片的第二边缘固定到第二构件，并迫使第二构件远离第一构件 。 该方法向外拉动生片的第一边缘和第二边缘，从而使生片平坦化。 该方法可以是检查生片上的筛选图案的方法的一部分，其还包括将光引导到生片上并在从生片出来时检测光。