公开(公告)号：US5476137A

公开(公告)日：1995-12-19

申请号：US300845

申请日：1994-09-06

申请人： Akira Ochiai ,  Kouya Watanabe ,  Kyoichi Ebisawa ,  Koichi Urano

发明人： Akira Ochiai ,  Kouya Watanabe ,  Kyoichi Ebisawa ,  Koichi Urano

IPC分类号： B23Q11/14 ,  F25B29/00

CPC分类号： B23Q11/141 ,  B23Q11/143 ,  Y10S62/10

摘要： A control system for effecting ultra-precision temperature control for a controlled system having large load fluctuations or including a dead time component. A control unit (5) instructs a high-precision PID temperature controller (10) to renew and correct a control target value T.sub.0,NEW for the supply fluid temperature T.sub.0 only by a temperature difference .DELTA.T=T.sub.C -T.sub.2 between a set value T.sub.C for the return fluid temperature T.sub.2 of a heat transfer fluid and the actually controlled return fluid temperature T.sub.2. In response to the instruction, the high-precision PID temperature controller (10) controls the heating power of a heater (17) for heating control through a constant-power thyristor phase controller (16). The heater (17) heats the heat transfer fluid and sends it to a machining apparatus (1) through a closed damping tank (21). The heat transfer fluid exchanges heat with the machining apparatus (1) and is then returned to a precooling means.

摘要翻译： 一种用于对具有大负载波动或包括死区时间分量的受控系统进行超精密温度控制的控制系统。 控制单元（5）指示高精度PID温度控制器（10）更新和校正供给流体温度T0的控制目标值T0，NEW，仅通过设定值TC之间的温差DELTA T = TC-T2 对于传热流体的返回流体温度T2和实际控制的回流温度T2。 响应于该指令，高精度PID温度控制器（10）通过恒功率晶闸管相位控制器（16）控制用于加热控制的加热器（17）的加热功率。 加热器（17）加热传热流体并通过封闭的阻尼罐（21）将其送到加工设备（1）。 传热流体与加工装置（1）进行热交换，然后返回到预冷装置。