公开(公告)号：US5673156A

公开(公告)日：1997-09-30

申请号：US390909

申请日：1995-02-17

申请人： Tu Chen ,  Tsutomu Tom Yamashita ,  Kyou H. Lee ,  Yasuo Sakane

发明人： Tu Chen ,  Tsutomu Tom Yamashita ,  Kyou H. Lee ,  Yasuo Sakane

IPC分类号： G11B5/012 ,  G11B5/10 ,  G11B5/60 ,  G11B17/00 ,  G11B21/21

CPC分类号： B82Y15/00 ,  G11B5/012 ,  G11B5/10 ,  G11B5/6005

摘要： A hard disk drive utilizing a combination of thin film recording heads and media allows high density recording through virtual contact recording, while still providing excellent contact start stop performance and low stiction. The air bearing surface of the head has a microscopically fine texture which provides reliable mechanical performance with a constant and very low flying height. A skew insensitive constant flying height over the disk surface can be provided with the use of transverse pressure contour or cross-cut slider designs. The slider air bearing surface is textured by selective mechanical removal of subsurface damaged regions left behind during the diamond lapping of the slider air bearing surface, thereby leaving the slider less abrasive to the disk. A slider with this fine texture on the air bearing surface permits the use of a much smoother texture and thinner overcoat on the disk than currently possible using conventional sliders. This combination of slider and the disk allows the head to fly very close to the magnetic layer of the media without suffering from head crash or high stiction. This combination offers a low cost and simplified method of achieving a high recording density.

摘要翻译： 使用薄膜记录头和介质的组合的硬盘驱动器允许通过虚拟接触记录进行高密度记录，同时仍然提供良好的接触开始停止性能和低粘度。 头部的空气轴承表面具有微观细微的纹理，其具有恒定且非常低的飞行高度的可靠的机械性能。 可以使用横向压力轮廓或横切滑块设计来提供盘表面上的偏斜不均匀的恒定飞行高度。 滑块空气轴承表面通过在滑块空气轴承表面的金刚石研磨期间通过选择性机械去除留下的次表面受损区域而被纹理化，从而使滑块对于盘具有较少的磨蚀。 在空气轴承表面上具有这种精细纹理的滑块允许使用比目前可能使用常规滑块的盘更光滑的纹理和更薄的外涂层。 滑块和盘的这种组合允许头部非常靠近介质的磁性层飞行，而不会受到头部碰撞或高粘滞现象的影响。 这种组合提供了实现高记录密度的低成本和简化的方法。

公开(公告)号：US5507930A

公开(公告)日：1996-04-16

申请号：US299852

申请日：1994-09-01

申请人： Tsutomu T. Yamashita ,  Kyou H. Lee ,  Rajiv Y. Ranjan ,  Yuri Trachuk

发明人： Tsutomu T. Yamashita ,  Kyou H. Lee ,  Rajiv Y. Ranjan ,  Yuri Trachuk

IPC分类号： C23C14/06 ,  C23C14/34 ,  C23C14/35 ,  G11B5/72 ,  G11B5/84 ,  H01F41/18

CPC分类号： C23C14/35 ,  C23C14/0605 ,  G11B5/722 ,  G11B5/8408

摘要： A carbon film for protecting a magnetic disk is sputtered by a DC magnetron sputtering method, with the addition of superimposed AC power on the DC power applied to the carbon target. When the carbon film is sputtered for extended period in a production sputtering machine, nodular growth occurs over the sputtering surface of the carbon target. Such nodules are variously called "warts" or "mushrooms" in the industry and they are detrimental to the productivity of the sputtering machine. The size and quantity of the nodules over the target surface increase as the target is sputtered longer, and because these region do not contribute to sputtering, the efficiency of the target decreases. As sputter efficiency decreases, power input must be increased to the target to make up for the loss in the effective sputtering area of the target. Eventually, the power input must be increased to a point where arcing occurs continuously and sputtering cannot be continued. By superimposing AC power onto the DC power applied to the target, virtually all arcing on the carbon target is eliminated, thereby significantly reducing the nodular growth and extending the use of the target.

摘要翻译： 通过直流磁控溅射法溅射用于保护磁盘的碳膜，对施加到碳靶的DC电力加上叠加的AC电力。 当碳膜在生产溅射机中长时间溅射时，在碳靶的溅射表面上发生结核生长。 这种结节在工业中被称为“疣”或“蘑菇”，并且它们不利于溅射机的生产率。 目标表面上的结节的大小和数量随着靶溅射时间的延长而增加，并且由于这些区域对溅射没有贡献，因此靶的效率降低。 随着溅射效率的降低，必须将功率输入增加到目标，以弥补目标有效溅射区域的损耗。 最终，电源输入必须增加到连续发生电弧的点，溅射不能继续。 通过将AC电力叠加到施加到目标的DC电力上，实际上消除了碳靶上的所有电弧，从而显着降低了结节生长并延长了靶的使用。