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公开(公告)号：US20100066987A1
公开(公告)日：2010-03-18
申请号：US12559664
申请日：2009-09-15
申请人： Jeroen Peter Johannes BRUIJSTENS , Richard Joseph BRULS , Hans JANSEN , Siebe LANDHEER , Laurentius Catrinus JORRITSMA , Arnout Johannes MEESTER , Bauke JANSEN , Ivo Adam Johannes Thomas , Marcio Alexandre Cano MIRANDA , Maurice Martinus Johannes VAN DER LEE , Gheorghe TANASA , Lambertus Dominicus NOORDAM
发明人： Jeroen Peter Johannes BRUIJSTENS , Richard Joseph BRULS , Hans JANSEN , Siebe LANDHEER , Laurentius Catrinus JORRITSMA , Arnout Johannes MEESTER , Bauke JANSEN , Ivo Adam Johannes Thomas , Marcio Alexandre Cano MIRANDA , Maurice Martinus Johannes VAN DER LEE , Gheorghe TANASA , Lambertus Dominicus NOORDAM
IPC分类号： G03B27/52
CPC分类号： G03F7/70341 , G03B27/52
摘要： A lithographic apparatus is disclosed that includes a projection system, and a liquid confinement structure configured to at least partly confine immersion liquid to an immersion space defined by the projection system, the liquid confinement structure and a substrate and/or substrate table. Measures are taken in the lithographic apparatus, for example, to reduce the effect of droplets on the final element of the projection system or to substantially avoid such droplet formation.
摘要翻译： 公开了一种光刻设备，其包括投影系统和液体限制结构，其被配置为至少部分地将浸没液体限制在由投影系统，液体限制结构和基板和/或基板台所限定的浸没空间中。 例如，在光刻设备中采取措施来减少液滴对投影系统的最终元件的影响或基本避免这种液滴的形成。
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公开(公告)号：US6049079A
公开(公告)日：2000-04-11
申请号：US945080
申请日：1997-10-20
CPC分类号： G04F13/026 , H01J31/502 , H01J47/00
摘要： Streak camera whereof the pulse converter for converting a photon pulse for detecting into an electron stream comprises a gaseous medium. A streak camera for a photon pulse in the far-infrared region is provided with a laser source to bring particles in the medium into a Rydberg state, in a streak camera for an X-ray pulse the medium contains particles for bringing into an Auger state, and additional deflection plates are provided for separating a primary electron stream from a secondary electron stream.
摘要翻译： PCT No.PCT / NL96 / 00081 Sec。 371日期：1997年10月20日 102（e）1997年10月20日日期PCT 1996年4月21日PCT PCT。 WO96 / 33508 PCT出版物 日期1996年10月24日用于将用于检测的光子脉冲转换成电子流的脉冲转换器的条纹相机包括气体介质。 在远红外区域中用于光子脉冲的条纹相机设置有激光源，以将粒子在介质中带入Rydberg状态，在用于X射线脉冲的条纹相机中，该介质包含用于进入俄歇状态的粒子 并且提供了附加偏转板用于从一次电子流分离一次电子流。
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3.发明授权Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure 有权具有在投影系统和液体限制结构之间的屏障的浸没式光刻设备公开(公告)号：US09176371B2
公开(公告)日：2015-11-03
申请号：US12559664
申请日：2009-09-15
申请人： Jeroen Peter Johannes Bruijstens , Richard Joseph Bruls , Hans Jansen , Siebe Landheer , Laurentius Catrinus Jorritsma , Arnout Johannes Meester , Bauke Jansen , Ivo Adam Johannes Thomas , Marcio Alexandre Cano Miranda , Maurice Martinus Johannes Van Der Lee , Gheorghe Tanasa , Lambertus Dominicus Noordam
发明人： Jeroen Peter Johannes Bruijstens , Richard Joseph Bruls , Hans Jansen , Siebe Landheer , Laurentius Catrinus Jorritsma , Arnout Johannes Meester , Bauke Jansen , Ivo Adam Johannes Thomas , Marcio Alexandre Cano Miranda , Maurice Martinus Johannes Van Der Lee , Gheorghe Tanasa , Lambertus Dominicus Noordam
CPC分类号： G03F7/70341 , G03B27/52
摘要： A lithographic apparatus is disclosed that includes a projection system, and a liquid confinement structure configured to at least partly confine immersion liquid to an immersion space defined by the projection system, the liquid confinement structure and a substrate and/or substrate table. Measures are taken in the lithographic apparatus, for example, to reduce the effect of droplets on the final element of the projection system or to substantially avoid such droplet formation.
摘要翻译： 公开了一种光刻设备，其包括投影系统和液体限制结构，其被配置为至少部分地将浸没液体限制在由投影系统，液体限制结构和基板和/或基板台所限定的浸没空间中。 例如，在光刻设备中采取措施来减少液滴对投影系统的最终元件的影响或基本避免这种液滴的形成。
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