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公开(公告)号：US11512990B2
公开(公告)日：2022-11-29
申请号：US16918237
申请日：2020-07-01
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： An electronic utility gas meter using MEMS thermal time-of-flight flow sensor to meter gas custody transfer mass flowrate and an additional MEMS gas sensor to measure the combustion gas composition for the correlations to the acquisition of gas high heat value simultaneously is disclosed in the present invention. The meter is designed for the applications in the city utility gas consumption in compliance with the current tariff while metering the true thermal value of the delivered gases for future upgrades. Data safety, remote data communication, and other features with state-of-the-art electronics are also included in the design.
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公开(公告)号：US11428596B2
公开(公告)日：2022-08-30
申请号：US17022988
申请日：2020-09-16
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01L21/12
摘要： The design of a vacuum gauge utilizing a micromachined silicon vacuum sensor to measure the extended vacuum range from ambient to ultrahigh vacuum by registering the gas thermal properties at each vacuum range is disclosed in the present invention. This single device is capable of measuring the pressure range from ambient and above to ultrahigh vacuum. This device applies to all types of vacuum measurement where no medium attack silicon is present. The disclosed vacuum gauge operates with thermistors and thermopile on a membrane of the thermal isolation diaphragm structure with a heat isolation cavity underneath.
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公开(公告)号：US11353336B2
公开(公告)日：2022-06-07
申请号：US16903825
申请日：2020-06-17
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： An electronic utility gas meter using MEMS thermal mass flow sensor to meter gas custody transfer and MEMS gas thermal property sensor to compensate the metering values due to gas composition variations is disclosed in the present invention. The meter is designed to have a MEMS mass flow sensor to meter the city utility gas consumption independent of environmental temperature and pressure while a MEMS gas thermal property or dual gas thermal property sensors to compensate the tariff due to the gas composition variations for compliance with the current regulation requirements of tariff and remove the major concerns for the wide deployment of the thermal mass MEMS utility gas meters.
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公开(公告)号：US20220003584A1
公开(公告)日：2022-01-06
申请号：US16918237
申请日：2020-07-01
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： An electronic utility gas meter using MEMS thermal time-of-flight flow sensor to meter gas custody transfer mass flowrate and an additional MEMS gas sensor to measure the combustion gas composition for the correlations to the acquisition of gas high heat value simultaneously is disclosed in the present invention. The meter is designed for the applications in the city utility gas consumption in compliance with the current tariff while metering the true thermal value of the delivered gases for future upgrades. Data safety, remote data communication, and other features with state-of-the-art electronics are also included in the design.
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公开(公告)号：US20210379323A1
公开(公告)日：2021-12-09
申请号：US16896643
申请日：2020-06-09
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： The design and structure of a fully automatic oxygen therapy apparatus is exhibited in this disclosure. The apparatus integrates a MEMS mass flow meter, an oximeter, a proportional valve and a smart liquid bottle. The control unit of the apparatus is embedded with a wireless communication device and powered by a battery pack. This apparatus is designed to replace the mechanical oxygen rotameter used in today's hospital or homecare oxygen therapy applications. With a set recipe or parameters locally or remotely, the disclosed apparatus can perform a fully automatic oxygen therapy for recovering the blood oxygen level of patient, without the frequent attention of the therapy administrator, and especially it significantly reduces the possibility of cross infection to the administrator during the attendance of the oxygen therapy process. The therapy process data are relayed to local users as well as a designated cloud or data center. This disclosure will be beneficial for both medical staffs and patient.
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公开(公告)号：US10480974B2
公开(公告)日：2019-11-19
申请号：US16017917
申请日：2018-06-25
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： The present invention disclosed a micromachined composite silicon flow sensor that is comprised of calorimetric flow sensing elements, time-of-flight sensing elements as well as independent temperature sensing element on a silicon-on-insulator device where the device layer is used for the thermal isolation membrane. The disclosed composite silicon flow sensor can measure mass flowrate, volumetric flowrate and flow medium temperature simultaneously, from which a full spectrum of flow parameters including flow pressure can be obtained. The sensor can be further used to alert any changes in physical properties of flow medium during operation. The disclosed manufacture process details the micromachining process of making such a sensor.
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公开(公告)号：US09752783B2
公开(公告)日：2017-09-05
申请号：US14621043
申请日：2015-02-12
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
CPC分类号： F24C3/126 , F23N5/242 , F23N2025/06 , F23N2031/00 , F23N2041/08 , F23N2900/01001
摘要： The design and assembly of a smart device constituent of a micro-machined (a.k.a. MEMS, Micro Electro Mechanical Systems) mass flow sensor and an electrically controllable valve for applications in safety enhancement and intermit connectivity for residential or commercial gas range is disclosed in the present invention. The said smart device detects the gas flow at the unattended situations and sends information to the destined mobile devices of the users via the network such that it enables the users to remotely execute actions of either shutting off the gas supply or call for relevant party's immediate attention. The said smart device shall also automatically shut off the gas supply should the transmitted signal to users failed to send feedback signal such that it can prevent the safety incidents due to leakage or overheating or even fires. The capability of the MEMS mass flow sensor shall also provide the thermal value measurement of the supplied gases and enable the user to program the gas range for making complete tasks of cooking substances in the unattended situation.
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公开(公告)号：US20160255878A1
公开(公告)日：2016-09-08
申请号：US14639824
申请日：2015-03-05
申请人： LIJI HUANG , CHIH-CHANG CHEN
发明人： Liji Huang , Chih-Chang Chen
CPC分类号： A24F47/008 , A61B5/0833 , A61B5/0836 , A61B5/087 , A61B5/0878 , A61B2562/028 , H04L67/10 , H04W4/80
摘要： The design and structure as well as the control scheme of a smart electronic vaporizer device having a micro-machined (a.k.a. MEMS, Micro Electro Mechanical Systems) mass flow sensor and control electronics that provide the vaporizing process in proportional to the user inhalation flowrate or strength for the best simulation of the experience for traditional cigarette. The device further incorporates a MEMS gas composition sensor that is coupled with the mass flow sensor to measure the user's respiratory health data, including but not limited to asthma status and metabolism related respiratory exchange rate. The device is further capable to relay the data to the designated mobile device and further to the designated cloud for big data process and sharing.
摘要翻译： 智能电子蒸发器装置的设计和结构以及控制方案具有微加工（即MEMS，微机电系统）质量流量传感器和控制电子装置，其提供与用户吸入流量或强度成比例的蒸发过程 为传统香烟体验的最佳模拟。 该装置还包括与质量流量传感器耦合的MEMS气体组成传感器，以测量用户的呼吸健康数据，包括但不限于哮喘状态和新陈代谢相关呼吸交换率。 该设备还能够将数据中继到指定的移动设备，并进一步传送到指定的云以进行大数据处理和共享。
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公开(公告)号：US09354197B2
公开(公告)日：2016-05-31
申请号：US13870914
申请日：2013-04-25
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01N27/409 , G01N27/407
CPC分类号： G01N27/4073 , G01N27/4071 , G01N27/409
摘要： The design and manufacture method of an oxygen concentration sensor made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of oxygen measurement with fast response time and low power consumption is disclosed in the present invention. The said silicon oxygen concentration sensor operates with an yttrium stabilized zirconia oxide amperometric cell supported on a membrane made of silicon nitride with a heat isolation cavity underneath or a silicon nitride membrane with silicon plug for mechanical strength enforcement.
摘要翻译： 在本发明中公开了用硅微加工（a.k.a.MicroSystem，Micro Electro Mechanical Systems）制造的氧浓度传感器的设计和制造方法，该方法用于具有快速响应时间和低功耗的氧测量应用。 所述硅氧浓度传感器用支撑在由氮化硅制成的膜上的钇稳定的氧化锆氧化物电流计单元进行操作，或者具有用于机械强度实施的硅插头的氮化硅膜。
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公开(公告)号：US20120216629A1
公开(公告)日：2012-08-30
申请号：US13035639
申请日：2011-02-25
申请人： Liji Huang , Chih-Chang Chen , Yahong Yao , Xiaozhong Wu
发明人： Liji Huang , Chih-Chang Chen , Yahong Yao , Xiaozhong Wu
IPC分类号： G01F1/708
CPC分类号： G01F1/7084 , G01F1/72
摘要： An apparatus comprising a micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon flow sensor, a flow channel package, and a driving circuitry, which operates in a working principle of thermal time-of-flight (TOF) to measure gas or liquid flow speed, is disclosed in the present invention. The micromachining technique for fabricating this MEMS time-of-flight silicon thermal flow sensor can greatly reduce the sensor fabrication cost by batch production. This microfabrication process for silicon time-of-flight thermal flow sensors provides merits of small feature size, low power consumption, and high accuracy compared to conventional manufacturing methods. Thermal time-of-flight technology in principle can provide accurate flow speed measurements for gases regardless of its gas compositions. In addition, the present invention further discloses the package design and driving circuitry which is utilized by the correlated working principle.
摘要翻译： 一种包括微加工（也称为MEMS，微机电系统）硅流量传感器，流动通道封装和驱动电路的装置，其以热时间飞行（TOF）的工作原理工作以测量气体或液体流量 速度，在本发明中公开。 用于制造这种MEMS飞行时间硅热流量传感器的微加工技术可以通过批量生产大大降低传感器制造成本。 与传统的制造方法相比，这种用于硅时间飞行热流传感器的微加工工艺具有小特征尺寸，低功耗和高精度的优点。 原理上，热时间飞行技术可以为气体提供准确的流速测量，无论其气体成分如何。 此外，本发明还公开了通过相关工作原理利用的封装设计和驱动电路。
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