Humidified imaging with an environmental scanning electron microscope
    3.
    发明授权
    Humidified imaging with an environmental scanning electron microscope 失效
    用环境扫描电子显微镜加湿成像

    公开(公告)号:US06674076B1

    公开(公告)日:2004-01-06

    申请号:US10319395

    申请日:2002-12-12

    IPC分类号: G01N2300

    摘要: A method and apparatus are described for imaging wet samples with an Environmental Scanning Electron Microscope (ESEM). In particular, a carrier gas is humidified such that the water vapor in the carrier gas in the sample chamber of the ESEM has a partial pressure equal to the saturated vapor pressure of water. Thus, the sample can be imaged without observing any evaporation or condensation thereon. Both the carrier gas and the water vapor may act as the imaging gas within the ESEM. The apparatus is an imaging gas delivery system for the ESEM wherein the carrier gas may be appropriately humidified.

    摘要翻译: 描述了用环境扫描电子显微镜(ESEM)对湿样品成像的方法和装置。 特别地,载气被加湿,使得ESEM的样品室中的载气中的水蒸气具有等于水的饱和蒸气压的分压。 因此,可以在不观察其上的任何蒸发或冷凝的情况下成像样品。 载气和水蒸气都可以作为ESEM内的成像气体。 该装置是用于ESEM的成像气体输送系统,其中载气可以被适当地加湿。