Systems and Methods for the Production of Highly Tetrahedral Amorphous Carbon Coatings
    1.
    发明申请
    Systems and Methods for the Production of Highly Tetrahedral Amorphous Carbon Coatings 有权
    用于生产高四面体非晶碳涂层的系统和方法

    公开(公告)号:US20090162572A1

    公开(公告)日:2009-06-25

    申请号:US12333861

    申请日:2008-12-12

    Abstract: The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp3 carbon-carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or “quasi-static”) magnetic field, which promotes resonant ionization and ion beam homogenization.

    Abstract translation: 本发明提供用于沉积改进的类金刚石碳材料的系统和方法,特别是用于生产磁记录介质。 本发明的类金刚石碳材料是高度四面体的,即具有大量在金刚石晶格内发现的sp 3碳 - 碳键。 该材料也是无定形的,提供短距离顺序与远程障碍的组合,并且可以以基本上低于已知无定形碳涂层材料的厚度超薄且连续的膜沉积。 本发明的碳保护涂层通常将被氢化。 在用于沉积这些材料的优选方法中,电容耦合形成来自致密的感应电离等离子体的高度均匀的选择性激励的离子流。 这种感应电离通过相对较慢的移动(或“准静态”)磁场增强,这促进了共振电离和离子束均匀化。

    Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production
    2.
    发明授权
    Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production 失效
    具有高四面体无定形碳保护层的记录介质及其生产方法

    公开(公告)号:US07544397B2

    公开(公告)日:2009-06-09

    申请号:US10773796

    申请日:2004-02-06

    Abstract: The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp3 carbon-carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or “quasi-static”) magnetic field, which promotes resonant ionization and ion beam homogenization.

    Abstract translation: 本发明提供用于沉积改进的类金刚石碳材料的系统和方法,特别是用于生产磁记录介质。 本发明的类金刚石碳材料是高度四面体的,即具有大量在金刚石晶格内发现的sp 3碳 - 碳键。 该材料也是无定形的,提供短距离顺序与远程障碍的组合,并且可以以基本上低于已知无定形碳涂层材料的厚度超薄且连续的膜沉积。 本发明的碳保护涂层通常将被氢化。 在用于沉积这些材料的优选方法中,电容耦合形成来自致密的感应电离等离子体的高度均匀的选择性激励的离子流。 这种感应电离通过相对较慢的移动(或“准静态”)磁场增强,这促进了共振电离和离子束均匀化。

    Systems and methods for the production of highly tetrahedral amorphous carbon coatings
    3.
    发明授权
    Systems and methods for the production of highly tetrahedral amorphous carbon coatings 失效
    用于生产高四面体无定形碳涂层的系统和方法

    公开(公告)号:US07513215B2

    公开(公告)日:2009-04-07

    申请号:US11463577

    申请日:2006-08-09

    Abstract: The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp3 carbon-carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or “quasi-static”) magnetic field, which promotes resonant ionization and ion beam homogenization.

    Abstract translation: 本发明提供用于沉积改进的类金刚石碳材料的系统和方法,特别是用于生产磁记录介质。 本发明的类金刚石碳材料是高度四面体的,即具有大量在金刚石晶格内发现的sp 3碳 - 碳键。 该材料也是无定形的,提供短距离顺序与远程障碍的组合,并且可以以基本上低于已知无定形碳涂层材料的厚度超薄且连续的膜沉积。 本发明的碳保护涂层通常将被氢化。 在用于沉积这些材料的优选方法中,电容耦合形成来自致密的感应电离等离子体的高度均匀的选择性激励的离子流。 这种感应电离通过相对较慢的移动(或“准静态”)磁场增强,这促进了共振电离和离子束均匀化。

    High-frequency matching network
    5.
    发明授权
    High-frequency matching network 有权
    高频匹配网络

    公开(公告)号:US07276816B2

    公开(公告)日:2007-10-02

    申请号:US10204743

    申请日:2001-02-21

    Abstract: The invention relates to a high-frequency matching network comprised of a primary switching circuit (1) provided with any type of capacitor (7) and with a variable capacitor (8), and of a high-frequency air-core coil (9). The high frequency matching network is also comprised of a secondary switching circuit (2) provided with any type of capacitor (5, 17), of a high-frequency air-core coil (6) and of at least one excitation electrode (3), whereby the switching circuits (1, 2) are interconnected via the inductive flux of the high-frequency air-core coils (6, 9), and the primary circuit (1) and secondary circuit (2) are additionally coupled in a capacitive manner.

    Abstract translation: 本发明涉及一种高频匹配网络,由具有任何类型的电容器(7)和可变电容器(8)的初级开关电路(1)和高频空心线圈(9)组成, 。 高频匹配网络还包括设置有高频空心线圈(6)和至少一个激励电极(3)的任何类型的电容器(5,17)的二次开关电路(2) ,由此开关电路(1,2)经由高频空心线圈(6,9)的感应通量互连,并且主电路(1)和次级电路(2)另外耦合在电容 方式。

    Highly Tetrahedral Amorphous Carbon Coatings and Systems and Methods for Their Production
    6.
    发明申请
    Highly Tetrahedral Amorphous Carbon Coatings and Systems and Methods for Their Production 有权
    高度四面体非晶碳涂层及其制备方法及其生产方法

    公开(公告)号:US20070098979A1

    公开(公告)日:2007-05-03

    申请号:US11463575

    申请日:2006-08-09

    Abstract: The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp3 carbon-carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or “quasi-static”) magnetic field, which promotes resonant ionization and ion beam homogenization.

    Abstract translation: 本发明提供用于沉积改进的类金刚石碳材料的系统和方法,特别是用于生产磁记录介质。 本发明的类金刚石碳材料是高度四面体的,其特征在于在金刚石晶格内存在大量的碳 - 碳键。 该材料也是无定形的,提供短距离顺序与远程障碍的组合,并且可以以基本上低于已知无定形碳涂层材料的厚度超薄且连续的膜沉积。 本发明的碳保护涂层通常将被氢化。 在用于沉积这些材料的优选方法中,电容耦合形成来自致密的感应电离等离子体的高度均匀的选择性激励的离子流。 这种感应电离通过相对较慢的移动(或“准静态”)磁场增强,这促进了共振电离和离子束均匀化。

    Method for producing recording media having protective overcoats of
highly tetrahedral amorphous carbon
    8.
    发明授权
    Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon 失效
    具有高四面体非晶碳保护层的记录介质的制造方法

    公开(公告)号:US5858477A

    公开(公告)日:1999-01-12

    申请号:US761336

    申请日:1996-12-10

    Abstract: The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp.sup.3 carbon--carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or "quasi-static") magnetic field, which promotes resonant ionization and ion beam homogenization.

    Abstract translation: 本发明提供用于沉积改进的类金刚石碳材料的系统和方法,特别是用于生产磁记录介质。 本发明的类金刚石碳材料是高度四面体的,即具有大量在金刚石晶格内发现的sp 3碳 - 碳键。 该材料也是无定形的,提供短距离顺序与远程障碍的组合,并且可以以基本上低于已知无定形碳涂层材料的厚度超薄且连续的膜沉积。 本发明的碳保护涂层通常将被氢化。 在用于沉积这些材料的优选方法中,电容耦合形成来自致密的感应电离等离子体的高度均匀的选择性激励的离子流。 这种感应电离通过相对较慢的移动(或“准静态”)磁场增强,这促进了共振电离和离子束均匀化。

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