Methods of fabricating plasticized, antiplasticized and crystalline conducting polymers and precursors thereof
    3.
    发明授权
    Methods of fabricating plasticized, antiplasticized and crystalline conducting polymers and precursors thereof 有权
    制造增塑的,抗增塑的和结晶的导电聚合物及其前体的方法

    公开(公告)号:US07902323B1

    公开(公告)日:2011-03-08

    申请号:US09346353

    申请日:1999-07-02

    CPC分类号: H01B1/128 C08G61/12

    摘要: Methods of forming materials containing precursors to electrically conductive polymers and electrically conductive polymers are described which have a high degree of crystallinity. The high degree of crystallinity is achieved by preparing the materials under conditions which provide a high degree of mobility to the polymer molecules permitting them to associate with one another to form a crystalline state. High levels of electrical conductivity are achieved in in the electrically conductive materials without stretch orienting the material. The enhanced electrical conductivity is isotropic as compared to a stretch oriented film which has isotropic electrical conductivity. In the preferred embodiment, additives are added to a solution containing a solvent and the precursor or electrically conductive polymer. The additives are preferably plasticizer of diluents. As the solvent is removed the material dries and contains a higher degree of crystallinity than in the absence of the additive.

    摘要翻译: 描述了形成具有高结晶度的导电聚合物和导电聚合物前体的材料的方法。 通过在允许它们彼此结合以形成结晶状态的聚合物分子提供高度迁移率的条件下制备材料来实现高结晶度。 在导电材料中实现高水平的导电性而不使材料拉伸定向。 与具有各向同性电导率的拉伸取向膜相比,增强的导电性是各向同性的。 在优选的实施方案中,将添加剂加入到含有溶剂和前体或导电聚合物的溶液中。 添加剂优选稀释剂的增塑剂。 当除去溶剂时,与没有添加剂相比,材料干燥并含有更高的结晶度。

    Method of making a packaged radiation sensitive resist film-coated workpiece
    4.
    发明授权
    Method of making a packaged radiation sensitive resist film-coated workpiece 有权
    制造辐射敏感抗蚀剂膜涂层工件的方法

    公开(公告)号:US07168224B2

    公开(公告)日:2007-01-30

    申请号:US10295595

    申请日:2002-11-15

    IPC分类号: B65B29/00

    CPC分类号: G03F7/0012

    摘要: The present invention includes a packaged coated workpiece. The packaged coated workpiece has: (1) a workpiece coated with a resist film sensitive to optical radiation, particulates or chemical contaminants; (2) an inner barrier sealed to enclose the coated workpiece and optionally a first getter agent, to produce a sealed first enclosure; and (3) an outer barrier sealed to enclose the sealed first enclosure and optionally a second getter agent, provided that the packaged coated workpiece has at least one getter agent, to produce a packaged coated workpiece suitable for storage for a period of at least one week without substantial loss of sensitivity, resolution or performance. The present invention also includes a process for preparing a packaged coated workpiece and a method of increasing the storage time of a coated workpiece to at least one week without substantial loss of sensitivity, resolution or performance.

    摘要翻译: 本发明包括一个包装的涂层工件。 包装的涂层工件具有:(1)涂覆有对光辐射,微粒或化学污染物敏感的抗蚀剂膜的工件; (2)密封以封闭涂覆的工件和任选地第一吸气剂的内部阻隔件,以产生密封的第一外壳; 和(3)密封以封闭密封的第一外壳和任选的第二吸气剂的外屏障,只要所包封的涂覆的工件具有至少一个吸气剂,以产生适合于存储至少一个时间段的包装的涂覆的工件 周没有明显的灵敏度,分辨率或性能的损失。 本发明还包括用于制备包装的涂层工件的方法以及将涂覆的工件的存储时间增加至少一周而不会显着降低灵敏度,分辨率或性能的方法。

    High sensitivity resist compositions for electron-based lithography
    5.
    发明申请
    High sensitivity resist compositions for electron-based lithography 有权
    用于电子光刻的高灵敏度抗蚀剂组合物

    公开(公告)号:US20060127800A1

    公开(公告)日:2006-06-15

    申请号:US10537259

    申请日:2002-12-05

    IPC分类号: G03C1/76

    CPC分类号: G03F7/0045 G03F7/0392

    摘要: The resist compositions having an acid sensitive imaging polymer and a radiation sensitive acid generator component comprising: (i) a first radiation sensitive acid generator selected from the group consisting of dissolution-inhibiting acid generators, and (ii) a second radiation sensitive acid generator selected from the group consisting of unprotected acidic group-functionalized acid generators and acid labile group-protected acidic group-functionalized radiation sensitive acid generators; enables formation of high sensitivity resists suitable for use in EPL, EUV, soft x-ray, and other low energy intensity lithographic imaging applications. The resist compositions may be useful in other lithographic processes as well.

    摘要翻译: 具有酸敏感成像聚合物和辐射敏感性酸产生剂组分的抗蚀剂组合物包含:(i)选自溶解抑制酸产生剂的第一辐射敏感性酸产生剂,和(ii)选择的第二辐射敏感酸产生剂 由不受保护的酸性官能化酸产生剂和酸不稳定基团保护的酸性官能化辐射敏感酸发生剂组成的组; 能够形成适用于EPL,EUV,软X射线和其他低能量光刻成像应用的高灵敏度抗蚀剂。 抗蚀剂组合物也可用于其它平版印刷工艺。

    Polycrystalline conducting polymers and precursors thereof having adjustable morphology and properties
    10.
    发明授权
    Polycrystalline conducting polymers and precursors thereof having adjustable morphology and properties 有权
    具有可调节形态和性质的多晶导电聚合物及其前体

    公开(公告)号:US06210606B1

    公开(公告)日:2001-04-03

    申请号:US09268527

    申请日:1999-03-12

    IPC分类号: H01B112

    摘要: Polycrystalline materials containing crystallites of precursors to electrically conductive polymers and electrically conductive polymers are described which have an adjustable high degree of crystallinity. The intersticial regions between the crystallites contains amorphous material containing precursors to electrically conductive polymers and/or electrically conductive polymers. The degree of crystallinity is achieved by preparing the materials under conditions which provide a high degree of mobility to the polymer molecules permitting them to associate with one another to form a crystalline state. This is preferable achieved by including additives, such as plasticizers and diluents, to the solution from which the polycrystalline material is formed. The morphology of the polycrystalline material is adjustable to modify the properties of the material such as the degree of crystallinity, crystal grain size, glass transition temperature, thermal coefficient of expansion and degree of electrical conductivity. High levels of electrical conductivity are achieved in the electrically conductive polycrystalline materials without stretch orienting the material. The enhanced electrical conductivity is isotropic as compared to a stretch oriented film which has isotropic electrical conductivity.

    摘要翻译: 描述了具有可调高结晶度的导电聚合物和导电聚合物的前体微晶的多晶材料。 微晶之间的区域包含含有导电聚合物和/或导电聚合物的前体的无定形材料。 通过在允许它们彼此结合以形成结晶状态的聚合物分子提供高度迁移率的条件下制备材料来实现结晶度。 优选通过将诸如增塑剂和稀释剂的添加剂添加到形成多晶材料的溶液中来实现。 可以调节多晶材料的形态,以改变材料的性质,例如结晶度,晶粒尺寸,玻璃化转变温度,热膨胀系数和电导率。 在导电多晶材料中实现高水平的导电性而不使材料拉伸取向。 与具有各向同性电导率的拉伸取向膜相比,增强的导电性是各向同性的。