公开(公告)号：US07707891B2

公开(公告)日：2010-05-04

申请号：US12163303

申请日：2008-06-27

申请人： Jarkko Antila ,  Dietmar Bertsch ,  Felix Mullis ,  Martin Wüest

发明人： Jarkko Antila ,  Dietmar Bertsch ,  Felix Mullis ,  Martin Wüest

IPC分类号： G01L9/12

CPC分类号： G01L9/0079 ,  C04B37/005 ,  C04B2237/064 ,  C04B2237/10 ,  C04B2237/343 ,  C04B2237/704 ,  C04B2237/74 ,  Y10T29/49002 ,  Y10T29/49776

摘要： A pressure measuring cell has a first housing body and a membrane arranged proximate the housing body, both of ceramic. The membrane has a peripheral edge joined to the first housing body to create a reference pressure chamber. A second housing body made of ceramic material is opposite the membrane and is joined to the peripheral edge of the membrane, the second housing body together with the membrane forming a measurement pressure chamber. The second housing body has a port for connecting the pressure measuring cell to a medium to be measured. The first housing body, the second housing body and the membrane are tightly connected along the peripheral edge of the membrane in a central area of the first housing body a hole is formed, reaching through the first housing body and at least in the central region of the membrane and opposite the hole a surface of the membrane is formed as a first optically reflective area. An optical fiber is arranged and tightly fixed within the hole for feeding light onto the surface of the membrane. The end of the fiber reaches at least the surface of the first housing body and is formed as a second reflective optical area linking the surface so that between the fiber end and the reflection area an optical cavity is present which forms a measuring section for determining the level of deflection of the membrane and which is part of a Fabry-Perot Interferometer.

摘要翻译： 压力测量单元具有第一壳体和布置在壳体主体附近的膜，两者均为陶瓷。 膜具有连接到第一壳体的外围边缘以产生参考压力室。 由陶瓷材料制成的第二壳体与膜相对并且连接到膜的周边边缘，第二壳体与膜一起形成测量压力室。 第二壳体具有用于将压力测量单元连接到待测介质的端口。 第一壳体，第二壳体和膜沿着膜的周边边缘在第一壳体的中心区域紧密连接，形成有孔，穿过第一壳体并且至少在中心区域 膜和面对面的膜的表面形成为第一光学反射区域。 光纤布置并紧密地固定在孔内，用于将光馈送到膜的表面上。 纤维的端部至少到达第一壳体的表面，并且形成为连接表面的第二反射光学区域，使得在光纤端和反射区域之间存在形成测量部分的光学腔，其形成用于确定 膜的偏转水平，是法布里 - 珀罗干涉仪的一部分。

公开(公告)号：US20110291005A1

公开(公告)日：2011-12-01

申请号：US13205925

申请日：2011-08-09

申请人： Martin Wüest ,  Wolfram Knapp

发明人： Martin Wüest ,  Wolfram Knapp

IPC分类号： H01J49/04

CPC分类号： H01J49/08 ,  H01J49/147 ,  H01J49/16

摘要： A cathode configuration for emission of electrons has a reaction zone connected to an entrance opening for the supply of neutral particles. The opening communicates with the cathode configuration for the ionization of the neutral particles and an ion extraction system communicates with the reaction zone. Ions from the extraction system are sent to a detection system and a mechanism for the evacuation of the mass spectrometer arrangement. The cathode configuration includes a field emission cathode with an emitter surface, wherein at a short distance from this emitter surface, an extraction grid is disposed for the extraction of electrons, which grid substantially covers the emitter surface. The emitter surface encompasses herein at least partially a hollow volume such that a tubular structure is formed.

摘要翻译： 用于发射电子的阴极配置具有连接到用于供应中性粒子的入口的反应区。 开口与阴极结构连通，用于中性粒子的电离，离子提取系统与反应区连通。 来自提取系统的离子被发送到检测系统和用于疏散质谱仪装置的机构。 阴极配置包括具有发射极表面的场致发射阴极，其中在离该发射体表面短的距离处，设置用于提取电子的提取栅格，栅格基本上覆盖发射器表面。 发射器表面在此包括至少部分为中空体积，从而形成管状结构。

公开(公告)号：US20100146771A1

公开(公告)日：2010-06-17

申请号：US12531424

申请日：2008-03-25

申请人： Dietmar Bertsch ,  Klaus Dietrich ,  Nico Onda ,  Martin Wüest

发明人： Dietmar Bertsch ,  Klaus Dietrich ,  Nico Onda ,  Martin Wüest

IPC分类号： G01R3/00

CPC分类号： G01L9/0075 ,  C04B35/10 ,  C04B37/006 ,  C04B2235/3217 ,  C04B2235/402 ,  C04B2235/6567 ,  C04B2237/121 ,  C04B2237/122 ,  C04B2237/343 ,  C04B2237/52 ,  C04B2237/708 ,  C04B2237/72 ,  G01L9/0044 ,  G01L9/0079 ,  G01L19/0627 ,  Y10T29/49007

摘要： Method for producing a vacuum measuring cell having a pressure transducer diaphragm with housing plates sealed on opposite sides to form reference and measuring vacuum chambers. An opening in one plate communicates with the measuring vacuum chamber and has a sealed connection for joining to medium to be measured. The diaphragm and plates are aluminum oxide ceramic and at least one of the seals is aluminum with a thickness of 0.5 μm to 30 μm. The ceramic parts are pressed together at increased temperature of 600° C. to 680° C. in a process gas atmosphere including a reducing gas, during a time of 30 to 90 minutes, and subsequently a tempering step is carried out in a second process gas atmosphere including oxygen, tempering taking place at a temperature of 450° C. to 575° C. such that the metallic aluminum is oxidized into aluminum oxide.

摘要翻译： 一种用于生产具有压力换能器膜片的真空测量池的方法，其具有密封在相对侧上的壳体板，以形成参考和测量真空室。 一个板中的开口与测量真空室连通，并且具有用于连接到待测介质的密封连接。 隔板和板是氧化铝陶瓷，并且至少一个密封件是厚度为0.5μm至30μm的铝。 在30〜90分钟的时间内，将陶瓷部件在包括还原气体的工艺气体气氛中在600℃〜680℃的升高温度下压在一起，随后在第二工序中进行回火工序 包括氧气的气体气氛，在450℃至575℃的温度下进行回火，使得金属铝被氧化成氧化铝。

公开(公告)号：US07500300B2

公开(公告)日：2009-03-10

申请号：US11873043

申请日：2007-10-16

申请人： Urs Wälchli ,  Per Björkman ,  Heikki Saari ,  Jarkko Antila ,  Hansjakob Hanselmann ,  Martin Wüest

发明人： Urs Wälchli ,  Per Björkman ,  Heikki Saari ,  Jarkko Antila ,  Hansjakob Hanselmann ,  Martin Wüest

IPC分类号： B23Q17/00 ,  G01L9/12

CPC分类号： G01L9/0079 ,  Y10T29/49769 ,  Y10T29/49776

摘要： A manufacturing method for a vacuum measuring cell provides first and second Al2O3 ceramic or sapphire housing bodies on opposite sides of an Al2O3 ceramic or sapphire membrane sealed to the bodies at its opposite peripheral edges. A reference vacuum chamber and a measuring vacuum chamber are on opposite sides of the membrane. An optical transparent window is provided in the first housing body and an optically reflective material is provided on a central region of the membrane. A lens is above the optical transparent window for optically linking to the optically reflective material on the membrane and an optical fiber outside the reference vacuum chamber and at a distance from the optical transparent window feeds light through the lens and window and in and out onto the optically reflective material on the membrane so that the level of membrane deflection is detected by a Fabry-Perot Interferometer.

摘要翻译： 用于真空测量池的制造方法在与其相对的外围边缘处密封到主体的Al 2 O 3陶瓷或蓝宝石膜的相对侧上提供第一和第二Al 2 O 3陶瓷或蓝宝石外壳主体。 参考真空室和测量真空室位于膜的相对侧。 光学透明窗设置在第一壳体中，并且光学反射材料设置在膜的中心区域上。 透镜在光学透明窗口上方，用于光学连接到膜上的光反射材料，并且在参考真空室外部并且在距离光学透明窗口一定距离处的光纤馈送光通过透镜和窗口并进出到 膜上的光学反射材料，使得法布里 - 珀罗干涉仪检测膜偏转的水平。

公开(公告)号：US08071941B2

公开(公告)日：2011-12-06

申请号：US12376542

申请日：2007-07-27

申请人： Martin Wüest ,  Wolfram Knapp

发明人： Martin Wüest ,  Wolfram Knapp

IPC分类号： H01J49/26

CPC分类号： H01J49/08 ,  H01J49/147 ,  H01J49/16

摘要： A cathode configuration for emission of electrons has a reaction zone connected to an entrance opening for the supply of neutral particles. The opening communicates with the cathode configuration for the ionization of the neutral particles and an ion extraction system communicates with the reaction zone. Ions from the extraction system are sent to a detection system and a mechanism for the evacuation of the mass spectrometer arrangement. The cathode configuration includes a field emission cathode with an emitter surface, wherein at a short distance from this emitter surface, an extraction grid is disposed for the extraction of electrons, which grid substantially covers the emitter surface. The emitter surface encompasses herein at least partially a hollow volume such that a tubular structure is formed.

摘要翻译： 用于发射电子的阴极配置具有连接到用于供应中性粒子的入口的反应区。 开口与阴极结构连通，用于中性粒子的电离，离子提取系统与反应区连通。 来自提取系统的离子被发送到检测系统和用于疏散质谱仪装置的机构。 阴极配置包括具有发射极表面的场致发射阴极，其中在离该发射体表面短的距离处，设置用于提取电子的提取栅格，栅格基本上覆盖发射器表面。 发射器表面在此包括至少部分为中空体积，从而形成管状结构。

公开(公告)号：US20100176293A1

公开(公告)日：2010-07-15

申请号：US12376542

申请日：2007-07-27

申请人： Martin Wüest ,  Wolfram Knapp

发明人： Martin Wüest ,  Wolfram Knapp

IPC分类号： H01J49/42 ,  H01J49/14

CPC分类号： H01J49/08 ,  H01J49/147 ,  H01J49/16

摘要： A cathode configuration for emission of electrons has a reaction zone connected to an entrance opening for the supply of neutral particles. The opening communicates with the cathode configuration for the ionization of the neutral particles and an ion extraction system communicates with the reaction zone. Ions from the extraction system are sent to a detection system and a mechanism for the evacuation of the mass spectrometer arrangement. The cathode configuration includes a field emission cathode with an emitter surface, wherein at a short distance from this emitter surface, an extraction grid is disposed for the extraction of electrons, which grid substantially covers the emitter surface. The emitter surface encompasses herein at least partially a hollow volume such that a tubular structure is formed.

摘要翻译： 用于发射电子的阴极配置具有连接到用于供应中性粒子的入口的反应区。 开口与阴极结构连通，用于中性粒子的电离，离子提取系统与反应区连通。 来自提取系统的离子被发送到检测系统和用于疏散质谱仪装置的机构。 阴极配置包括具有发射极表面的场致发射阴极，其中在离该发射体表面短的距离处，设置用于提取电子的提取栅格，栅格基本上覆盖发射器表面。 发射器表面在此包括至少部分为中空体积，从而形成管状结构。

公开(公告)号：US07305888B2

公开(公告)日：2007-12-11

申请号：US11497226

申请日：2006-08-01

申请人： Urs Wälchli ,  Per Björkman ,  Heikki Saari ,  Jarkko Antila ,  Hansjakob Hanselmann ,  Martin Wüest

发明人： Urs Wälchli ,  Per Björkman ,  Heikki Saari ,  Jarkko Antila ,  Hansjakob Hanselmann ,  Martin Wüest

IPC分类号： G01L9/12

CPC分类号： G01L9/0079 ,  Y10T29/49769 ,  Y10T29/49776

摘要： A vacuum measuring cell has a first housing body and a membrane, both of Al2O3 ceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing body to form a reference vacuum chamber. A second housing body of Al2O3 ceramic or sapphire opposite the membrane, is joined to the peripheral edge of the membrane by a second seal to form a measurement vacuum chamber. A port connects the vacuum measuring cell to a medium to be measured. At least in the central area of the first housing body, an optical transparent window is formed and at least the central region of the membrane has an optically reflective surface. Outside the reference vacuum chamber, in opposition to and at a distance from the window, an optical fibre is arranged for feeding in and out light onto the surface of the membrane.

摘要翻译： 真空测量单元具有第一壳体和膜，Al 2 N 3 O 3陶瓷或蓝宝石两者。 膜是平面的，具有通过第一密封件连接到第一壳体的外围边缘以形成参考真空室。 与膜相对的Al 2 O 3 O 3陶瓷或蓝宝石的第二壳体通过第二密封件连接到膜的周边边缘，以形成测量真空室。 端口将真空测量单元连接到要测量的介质。 至少在第一壳体的中心区域中，形成光学透明窗口，并且至少膜的中心区域具有光学反射表面。 在参考真空室之外，与窗口相对并且距离窗口一定距离，布置光纤以将光输入和输出到膜的表面上。

公开(公告)号：US08018234B2

公开(公告)日：2011-09-13

申请号：US12516375

申请日：2007-11-23

申请人： Wolfram Knapp ,  Martin Wüest

发明人： Wolfram Knapp ,  Martin Wüest

IPC分类号： G01L21/32 ,  H01J49/26

CPC分类号： G01L21/32

摘要： A vacuum pressure measuring device with an electron source has a reaction zone for forming ions by impact ionization, wherein the electron source communicates with the reaction zone via a passage for the electrons. The electron source is surrounded by an insulating housing with a vacuum chamber, and a partition part is designed as a membrane carrier, carrying a nanomembrane at least in one section, the membrane separating the vacuum chamber from the outer region in a gastight manner and being at least partially designed to be electron-permeable. The vacuum chamber has a cathode for the emission of electrons. In the region of and/or on the nanomembrane, an anode arrangement is provided such that electrons are conducted against the nanomembrane and at least partially through it. The nanomembrane abuts the vacuum chamber of the vacuum pressure measuring device.

摘要翻译： 具有电子源的真空压力测量装置具有用于通过冲击电离形成离子的反应区，其中电子源通过电子通道与反应区连通。 电子源由具有真空室的绝缘壳体包围，并且分隔部被设计为膜载体，至少在一个部分中承载纳米膜，所述膜以气密方式将真空室与外部区域分离，并且 至少部分设计为电子可透过的。 真空室具有用于发射电子的阴极。 在纳米膜的区域和/或在纳米膜上，提供阳极布置，使得电子对纳米膜进行并且至少部分地通过它。 纳米膜与真空压力测量装置的真空室相接。

公开(公告)号：US07845546B2

公开(公告)日：2010-12-07

申请号：US12531424

申请日：2008-03-25

申请人： Dietmar Bertsch ,  Klaus Dietrich ,  Nico Onda ,  Martin Wüest

发明人： Dietmar Bertsch ,  Klaus Dietrich ,  Nico Onda ,  Martin Wüest

IPC分类号： B23K31/02

CPC分类号： G01L9/0075 ,  C04B35/10 ,  C04B37/006 ,  C04B2235/3217 ,  C04B2235/402 ,  C04B2235/6567 ,  C04B2237/121 ,  C04B2237/122 ,  C04B2237/343 ,  C04B2237/52 ,  C04B2237/708 ,  C04B2237/72 ,  G01L9/0044 ,  G01L9/0079 ,  G01L19/0627 ,  Y10T29/49007

摘要： Method for producing a vacuum measuring cell having a pressure transducer diaphragm with housing plates sealed on opposite sides to form reference and measuring vacuum chambers. An opening in one plate communicates with the measuring vacuum chamber and has a sealed connection for joining to medium to be measured. The diaphragm and plates are aluminum oxide ceramic and at least one of the seals is aluminum with a thickness of 0.5 μm to 30 μm. The ceramic parts are pressed together at increased temperature of 600° C. to 680° C. in a process gas atmosphere including a reducing gas, during a time of 30 to 90 minutes, and subsequently a tempering step is carried out in a second process gas atmosphere including oxygen, tempering taking place at a temperature of 450° C. to 575° C. such that the metallic aluminum is oxidized into aluminum oxide.

摘要翻译： 一种用于生产具有压力换能器膜片的真空测量池的方法，其具有密封在相对侧上的壳体板，以形成参考和测量真空室。 一个板中的开口与测量真空室连通，并且具有用于连接到待测介质的密封连接。 隔板和板是氧化铝陶瓷，并且至少一个密封件是厚度为0.5μm至30μm的铝。 在30〜90分钟的时间内，将陶瓷部件在包括还原气体的工艺气体气氛中在600℃〜680℃的升高温度下压在一起，随后在第二工序中进行回火工序 包括氧气的气体气氛，在450℃至575℃的温度下进行回火，使得金属铝被氧化成氧化铝。

公开(公告)号：US07765874B2

公开(公告)日：2010-08-03

申请号：US12097830

申请日：2006-11-23

申请人： Martin Wüest

发明人： Martin Wüest

IPC分类号： G01L7/08

CPC分类号： G01L19/0636 ,  G01L9/0047 ,  G01L9/0075 ,  G01L21/00

摘要： A vacuum measuring cell with a membrane between two planar housing parts has a first housing part forming a reference vacuum volume and the second housing part forming a measuring vacuum volume with a connection for the medium to be measured and a mechanism for measuring the membrane deflection. The membrane surface exposed to the medium to be measured is a structured surface.

摘要翻译： 具有在两个平面壳体部件之间的膜的真空测量单元具有形成参考真空容积的第一壳体部分和形成具有用于待测量介质的连接的测量真空容积的第二壳体部分和用于测量膜偏转的机构。 暴露于要测量的介质的膜表面是结构化表面。