公开(公告)号：US06351305B1

公开(公告)日：2002-02-26

申请号：US09173530

申请日：1998-10-15

申请人： Masahi Tanaka ,  Masato Kumazawa ,  Kinya Kato ,  Masaki Kato ,  Hiroshi Chiba ,  Hiroshi Shirasu

发明人： Masahi Tanaka ,  Masato Kumazawa ,  Kinya Kato ,  Masaki Kato ,  Hiroshi Chiba ,  Hiroshi Shirasu

IPC分类号： G03B2732

CPC分类号： G02B17/0892 ,  G02B13/22 ,  G02B17/002 ,  G02B17/008 ,  G02B17/045 ,  G02B17/0605 ,  G02B17/08 ,  G02B17/0812 ,  G02B17/082 ,  G02B17/0828 ,  G02B17/086 ,  G02B27/144 ,  G02B27/145 ,  G03B27/32 ,  G03F7/70066 ,  G03F7/70216 ,  G03F7/70225 ,  G03F7/70241 ,  G03F7/70275 ,  G03F7/70358 ,  G03F7/70791

摘要： An exposure method includes first through third steps. In the first step, respective first and second illumination regions of a mask having a predetermined pattern are illuminated with an illumination light having a predetermined wavelength. In the second step, an image of the mask is formed, respectively, in first and second exposure regions (formed on a substrate) based on the illumination that passes through the first and second illumination regions. The first and second exposure regions each have a substantially polygonal shape defined by two parallel sides and two sides other than the two parallel sides. In the third step, the first and second exposure regions and the substrate are moved relatively in a first direction such that the first and second exposure regions are formed in different positions in a second direction which crosses the first direction.

摘要翻译： 曝光方法包括第一至第三步骤。 在第一步骤中，用具有预定波长的照明光照射具有预定图案的掩模的相应的第一和第二照明区域。 在第二步骤中，基于通过第一和第二照明区域的照明，分别在第一和第二曝光区域（形成在基板上）形成掩模的图像。 第一曝光区域和第二曝光区域各自具有由两个平行侧和除了两个平行侧之外的两个侧面限定的大致多边形形状。 在第三步骤中，第一和第二曝光区域和衬底相对于第一方向移动，使得第一和第二曝光区域在与第一方向交叉的第二方向上形成在不同的位置。

公开(公告)号：US4834051A

公开(公告)日：1989-05-30

申请号：US166968

申请日：1988-03-11

申请人： Masahi Tanaka ,  Shigekazu Yamauchi ,  Masaru Mikita

发明人： Masahi Tanaka ,  Shigekazu Yamauchi ,  Masaru Mikita

IPC分类号： G01N27/409 ,  F02D35/00 ,  F02D41/14 ,  G01N1/40 ,  G01N27/12 ,  G01N33/00

CPC分类号： F02D41/1475 ,  G01N27/4077 ,  G01N1/405

摘要： An oxygen sensor having a detecting element for detecting the concentration of oxygen contained in a subject gas. The subject gas reaches the detecting element through a carrier carrying a substance which adsorbs or desorbs the oxygen in the subject gas in accordance with the partial pressure of the oxygen. Thus, the detecting element is prevented from being corrupted by O.sub.2 or CO. Even though the oxygen sensor is temporarily exposed to excessive O.sub.2 or CO, therefore, the responsiveness of oxygen concentration detection to be effected thereafter is improved. Cerium oxide or lanthanum oxide may be suitably used as the oxygen adsorbing or desorbing material. The carrier may be pellets surrounding the oxygen detecting element, or a protective layer or a buffer layer formed on the surface of the detecting element. Alternatively, the carrier may be formed independently of the oxygen sensor so as to be disposed in an exhaust passage on the upper-course side of the oxygen sensor. The oxygen sensor of the present invention is adapted for use in an air-fuel ratio control apparatus of an internal combustion engine.

摘要翻译： 具有用于检测被检体气体中所含的氧浓度的检测元件的氧传感器。 目标气体通过携带物质的载体到达检测元件，所述物质根据氧气的分压吸附或解吸当前气体中的氧气。 因此，可以防止检测元件被O2或CO破坏，即使氧气传感器暂时暴露于过量的O 2或CO，因此提高了其后进行的氧浓度检测的响应性。 氧化铈或氧化镧可以适当地用作氧吸附或解吸材料。 载体可以是围绕氧检测元件的颗粒，或形成在检测元件的表面上的保护层或缓冲层。 或者，载体可以独立于氧传感器形成，以便设置在氧传感器的上游侧的排气通道中。 本发明的氧传感器适用于内燃机的空燃比控制装置。