公开(公告)号：US08143588B2

公开(公告)日：2012-03-27

申请号：US12815507

申请日：2010-06-15

申请人： Kenichi Nagae ,  Masatoshi Kanamaru

发明人： Kenichi Nagae ,  Masatoshi Kanamaru

IPC分类号： G21K1/087

CPC分类号： H01J37/1477 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/30 ,  H01J37/3174 ,  H01J2237/0437 ,  H01J2237/1518

摘要： A deflector array includes a plurality of deflectors, which deflect charged particle beams, arrayed on a substrate. Each of the plurality of deflectors includes a single opening formed in the substrate, and each of the plurality of deflectors includes a pair of electrodes that oppose each other through the opening and are configured to deflect a single charged particle beam. The plurality of deflectors are arrayed such that a length of the pair of electrodes in a longitudinal direction thereof is not less than a distance between centers of two of the plurality of deflectors that are located nearest to each other. The plurality of deflectors is arrayed to form a checkerboard lattice, and two openings of the two of the plurality of deflectors overlap in the longitudinal direction.

摘要翻译： 偏转器阵列包括多个偏转器，其偏转排列在基板上的带电粒子束。 多个偏转器中的每一个包括形成在基板中的单个开口，并且多个偏转器中的每一个包括通过开口彼此相对的一对电极，并且被配置为偏转单个带电粒子束。 多个偏转器被排列成使得一对电极在其纵向方向上的长度不小于彼此最靠近的多个偏转器中的两个偏转器的中心之间的距离。 排列多个偏转器以形成棋盘格格，并且多个偏转器中的两个的两个开口在纵向方向上重叠。

公开(公告)号：US20080017807A1

公开(公告)日：2008-01-24

申请号：US11779498

申请日：2007-07-18

申请人： Kenichi Nagae ,  Masatoshi Kanamaru

发明人： Kenichi Nagae ,  Masatoshi Kanamaru

IPC分类号： G21K1/087

CPC分类号： H01J37/1477 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/30 ,  H01J37/3174 ,  H01J2237/0437 ,  H01J2237/1518

摘要： This invention discloses a deflector array in which a plurality of deflectors which deflect charged particle beams are arrayed on a substrate. Each deflector includes an opening formed on the substrate, and a pair of electrodes opposing each other through the opening. The length of the pair of electrodes in the longitudinal direction is not less than the distance between the centers of two deflectors equivalent to the plurality of deflectors, which are located nearest to each other.

摘要翻译： 本发明公开了一种偏转器阵列，其中将带电粒子束偏转的多个偏转器排列在基板上。 每个偏转器包括形成在基板上的开口和通过该开口相对的一对电极。 一对电极在长度方向上的长度不小于彼此最靠近的多个偏转器等效的两个偏转器的中心之间的距离。

公开(公告)号：US20070194472A1

公开(公告)日：2007-08-23

申请号：US11624268

申请日：2007-01-18

申请人： Irizo Naniwa ,  Shigeo Nakamura ,  Masatoshi Kanamaru

发明人： Irizo Naniwa ,  Shigeo Nakamura ,  Masatoshi Kanamaru

IPC分类号： B29D11/00

CPC分类号： B29D11/00365 ,  B29C33/3842 ,  B29C33/56

摘要： A process for fabricating a mold for an aspherical microlens having a desired aspherical and smooth surface, the lens having an effective diameter of 1 mm or smaller and a thickness of 0.5 mm or greater. A double-layer mask layer is formed on a single crystal silicon substrate, and anisotropic etching and isotropic etching are carried out using a first mask layer so as to form a concave portion that is a little smaller than the size of a desired microlens mold. Isotropic etching is then carried out using a second mask layer so as to enlarge the concave portion, thereby obtaining a microlens mold having desired dimensions.

摘要翻译： 一种用于制造具有期望的非球面和光滑表面的非球面微透镜的模具的方法，所述透镜具有1mm或更小的有效直径和0.5mm或更大的厚度。 在单晶硅基板上形成双层掩模层，并使用第一掩模层进行各向异性蚀刻和各向同性蚀刻，以形成比所需的微透镜模具的尺寸稍小的凹部。 然后使用第二掩模层进行各向同性蚀刻，以扩大凹部，从而获得具有期望尺寸的微透镜模具。

公开(公告)号：US06507204B1

公开(公告)日：2003-01-14

申请号：US09522477

申请日：2000-03-09

申请人： Masatoshi Kanamaru ,  Yoshishige Endo ,  Atsushi Hosogane ,  Tatsuya Nagata ,  Ryuji Kohno ,  Hideyuki Aoki ,  Akihiko Ariga

发明人： Masatoshi Kanamaru ,  Yoshishige Endo ,  Atsushi Hosogane ,  Tatsuya Nagata ,  Ryuji Kohno ,  Hideyuki Aoki ,  Akihiko Ariga

IPC分类号： G01R3102

CPC分类号： G01R1/06733 ,  G01R1/06727 ,  G01R1/06738 ,  G01R1/06761 ,  G01R1/06772 ,  G01R1/07342 ,  G01R3/00

摘要： The conventional semiconductor element testing equipment is arranged to position each probe accurately and need a burdensome operation for fixing, and includes only a limited number of electrode pads and chips to be tested at a batch. An equipment for testing a semiconductor element is arranged to keep each of electrode pads formed on a semiconductor element to be tested in direct contact with each of probes formed on a first substrate composed of silicon, one of electric connecting substrates disposed in the equipment. On the first substrate, each probe is formed on a cantilever and a wire is routed from a tip of each probe along a tip of the cantilever to the electrode pad formed on an opposite surface to the probe forming surface through an insulating layer.

摘要翻译： 常规的半导体元件测试设备被布置成准确地定位每个探针，并且需要用于固定的繁重的操作，并且仅包括有限数量的待批测试的电极焊盘和芯片。 布置了用于测试半导体元件的设备，以使每个形成在要测试的半导体元件上的电极焊盘与形成在由设置在设备中的电连接基板之一的硅构成的第一基板上形成的每个探针直接接触。 在第一基板上，每个探针形成在悬臂上，并且从每个探针的尖端沿着悬臂的尖端布线到通过绝缘层与探针形成表面相对的表面上形成的电极焊盘。

公开(公告)号：US5276573A

公开(公告)日：1994-01-04

申请号：US801352

申请日：1991-12-02

申请人： Takeshi Harada ,  Masatoshi Kanamaru ,  Atsushi Hosogane ,  Akiomi Kohno ,  Kenji Mori

发明人： Takeshi Harada ,  Masatoshi Kanamaru ,  Atsushi Hosogane ,  Akiomi Kohno ,  Kenji Mori

IPC分类号： G11B5/60 ,  G11B21/21

CPC分类号： G11B5/6005 ,  G11B21/21 ,  G11B5/483

摘要： A slider unit having a reading or reproducing head, with the head being adapted to float over a surface of an information recording disc. The slider unit includes a slider body having a flying height sensor with float surfaces on an underside thereof to generate a lifting force. A piezoelectrically or electrostatically controlled valve layer may be positioned over a vent communicating between an upper surface of the slider, with the vent opening to a recess for generating a negative lift component at an underside of the slider unit. The slider body is made from a ceramic base portion and includes a semiconductive insert portion of, for example, silicon or a photosensitive glass with an adjustment device being formed by utilization of microfabrication techniques such as deposition and etching.

摘要翻译： 具有读取或再现头的滑块单元，其头部适于在信息记录盘的表面上浮动。 滑块单元包括具有飞行高度传感器的滑块体，浮体表面在其下侧以产生提升力。 压电或静电控制的阀层可以位于在滑块的上表面之间连通的通风口上，通气口通向凹槽，用于在滑块单元的下侧产生负提升部件。 滑块体由陶瓷基部制成，并且包括例如硅或感光玻璃的半导体插入部分，其中调整装置通过利用诸如沉积和蚀刻的微细加工技术形成。

公开(公告)号：US5032248A

公开(公告)日：1991-07-16

申请号：US362619

申请日：1989-06-07

申请人： Masatoshi Kanamaru ,  Takeshi Harada ,  Yoshiro Ibaraki ,  Sadayasu Ueno ,  Norio Ichikawa

发明人： Masatoshi Kanamaru ,  Takeshi Harada ,  Yoshiro Ibaraki ,  Sadayasu Ueno ,  Norio Ichikawa

IPC分类号： G01N27/407 ,  G01N27/416

CPC分类号： G01N27/4075 ,  G01N27/4077

摘要： The invention relates to a gas sensor for measuring an air-fuel ratio of an air-fuel mixture of an internal combustion engine and to a method of manufacturing the gas sensor. The sensor of the invention comprises: a solid state electrolyte layer made of an oxygen ion conductive metal oxide; a first electrode of a porous thin film having the catalyst function which was coated on one surface of the solid state electrolyte layer; a second electrode of a porous thin film having the catalyst function which was coated on the other surface of the solid state electrolyte layer; an electrode shielding layer made of a sintered material of ultra fine particulates whose average grain diameter is 1 .mu.m or less which covers the surface other than the region of a predetermined area of the second electrode; and a gas diffusion layer made of a porous electric insulative metal oxide which covers the region of the predetermined area of at least the second electrode.

公开(公告)号：US4732369A

公开(公告)日：1988-03-22

申请号：US898600

申请日：1986-08-21

申请人： Takeshi Araya ,  Yoshiro Ibaraki ,  Yoshishige Endo ,  Susumu Hioki ,  Masatoshi Kanamaru

发明人： Takeshi Araya ,  Yoshiro Ibaraki ,  Yoshishige Endo ,  Susumu Hioki ,  Masatoshi Kanamaru

IPC分类号： B22F9/14 ,  C04B35/626

CPC分类号： B22F9/14 ,  C04B35/626

摘要： An apparatus for producing ultrafine particles by arc energy characterized by disposing an electrode inclinedly as to a base material so as to generate a magnetic blow to arc, disposing a suction opening at the direction of the arc blown, and cooling vapors generated, followed by collection thereof can improve the production efficiency of ultrafine particles with a uniform particle size.

摘要翻译： 一种用于通过电弧能生产超细颗粒的装置，其特征在于，将电极倾斜放置在基材上，以便产生电弧的磁力冲击，在电弧吹制的方向设置吸入口，并产生冷却蒸汽，随后进行收集 可以提高均匀粒径的超微粒子的生产效率。

公开(公告)号：US09249011B2

公开(公告)日：2016-02-02

申请号：US14378102

申请日：2012-03-30

申请人： Masatoshi Kanamaru ,  Takanori Aono ,  Kengo Suzuki

发明人： Masatoshi Kanamaru ,  Takanori Aono ,  Kengo Suzuki

IPC分类号： H01L23/02 ,  H01L23/053 ,  B81B7/00 ,  B81C1/00

CPC分类号： B81B7/007 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/0353 ,  B81B2203/0384 ,  B81B2207/095 ,  B81C1/00103 ,  B81C1/00595

摘要： There are provided a process for fabricating MEMS device that includes a plurality of through-holes capable being arranged at a high density, the through-holes having a tapered end portion. Through-holes having vertical side surfaces and tapered bottoms are provided by a processing method including the steps of: disposing quadrilateral patterning having desired dimensions on a silicon substrate having a flat surface of a crystal plane, etching the substrate to a desired depth by dry etching that can realize a high aspect ratio etching, and anisotropic wet etching the dry etched substrate with a KOH aqueous solution containing isopropyl alcohol mixed thereinto.

摘要翻译： 提供了一种用于制造MEMS器件的方法，该器件包括能够以高密度布置的多个通孔，该通孔具有锥形端部。 通过一种处理方法提供具有垂直侧面和锥形底部的通孔，该方法包括以下步骤：将具有期望尺寸的四边形图案设置在具有平坦表面平面的硅衬底上，通过干蚀刻将衬底蚀刻到所需深度 可以实现高纵横比蚀刻，并且用含有异丙醇的KOH水溶液进行各向异性湿蚀刻干蚀刻基板。

公开(公告)号：US20100248166A1

公开(公告)日：2010-09-30

申请号：US12815507

申请日：2010-06-15

申请人： Kenichi Nagae ,  Masatoshi Kanamaru

发明人： Kenichi Nagae ,  Masatoshi Kanamaru

IPC分类号： H01J37/147 ,  H01J37/30 ,  G03F7/20

CPC分类号： H01J37/1477 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/30 ,  H01J37/3174 ,  H01J2237/0437 ,  H01J2237/1518

摘要： A deflector array includes a plurality of deflectors, which deflect charged particle beams, arrayed on a substrate. Each of the plurality of deflectors includes a single opening formed in the substrate, and each of the plurality of deflectors includes a pair of electrodes that oppose each other through the opening and are configured to deflect a single charged particle beam. The plurality of deflectors are arrayed such that a length of the pair of electrodes in a longitudinal direction thereof is not less than a distance between centers of two of the plurality of deflectors that are located nearest to each other. The plurality of deflectors is arrayed to form a checkerboard lattice, and two openings of the two of the plurality of deflectors overlap in the longitudinal direction.

摘要翻译： 偏转器阵列包括多个偏转器，其偏转排列在基板上的带电粒子束。 多个偏转器中的每一个包括形成在基板中的单个开口，并且多个偏转器中的每一个包括通过开口彼此相对的一对电极，并且被配置为偏转单个带电粒子束。 多个偏转器被排列成使得一对电极在其纵向方向上的长度不小于彼此最靠近的多个偏转器中的两个偏转器的中心之间的距离。 排列多个偏转器以形成棋盘格格，并且多个偏转器中的两个的两个开口在纵向方向上重叠。

公开(公告)号：US20080043481A1

公开(公告)日：2008-02-21

申请号：US10589983

申请日：2004-02-25

申请人： Shingo Yokoyama ,  Masatoshi Kanamaru ,  Masaya Horino ,  Tatsuhiko Monji ,  Ken Ohsumi

发明人： Shingo Yokoyama ,  Masatoshi Kanamaru ,  Masaya Horino ,  Tatsuhiko Monji ,  Ken Ohsumi

IPC分类号： B60Q1/04 ,  F21V7/00

CPC分类号： G02B26/085 ,  F21S41/675

摘要： A vehicle headlight having a light source to emit light and a reflector for illuminating forward the light emitted from the light source, wherein the reflector is comprising a plurality of movable mirrors to be operated independently and optionally and a fixed mirror disposed outside these movable mirrors, whereby the light emitted from the light source to the movable mirrors are not blocked mutually so that a distribution of light illuminated from the vehicle headlight is minutely and quickly controlled.

摘要翻译： 具有用于发光的光源的车辆头灯和用于向前照射从所述光源发出的光的反射器，其中所述反射器包括独立地操作的多个可移动镜和可选地以及设置在所述可动镜外部的固定镜， 从而从光源发射到可动反射镜的光不被相互阻挡，使得从车辆前灯照射的光的分布被微小和快速地控制。