Micromechanical alternating and direct voltage reference apparatus
    2.
    发明授权
    Micromechanical alternating and direct voltage reference apparatus 有权
    微机械交流和直接参考电压

    公开(公告)号:US06657442B1

    公开(公告)日:2003-12-02

    申请号:US09720459

    申请日:2000-12-22

    IPC分类号: G01R2726

    CPC分类号: G01R19/22

    摘要: An AC/DC voltage reference system has at least one micromechanically fabricated electrode pair having first and second electrodes facing each other so that the electrodes are disposed at a distance from each other, whereby at least one of the electrodes is movable against a spring force. An AC signal is applied over the electrodes to establish an electrostatic force at a frequency substantially higher than the effective mechanical resonant frequency of the movable electrode. The system further includes an apparatus for detecting the AC voltage applied between the electrodes, thus forming an AC voltage reference.

    摘要翻译: AC / DC电压参考系具有至少一个微机械制造的电极对,其具有彼此面对的第一和第二电极,使得电极彼此间隔一定距离,由此至少一个电极可抵抗弹簧力移动。 在电极上施加AC信号,以建立一个明显高于可动电极的有效机械共振频率的频率的静电力。 该系统还包括用于检测施加在电极之间的AC电压的装置,从而形成AC电压基准。