摘要:
A semiconductor device, such as a dynamic RAM, and method of making it. A number of stacked cell capacitors are placed at a prescribed spacing in an alignment direction on top of a p.sup.- -type silicon substrate (1). Each capacitor has a nearly perpendicular cylindrical lower electrode (cylindrical polysilicon layer (96)), a dielectric film (silicon nitride film (77)), and upper electrode (plate electrode (78) made of polysilicon). The spacing in the alignment direction is smaller than the inner diameter of the lower electrode.
摘要:
The etch-back amount of a silicon oxide film of a memory array which is a higher altitude portion is increased when etching back and flattening the silicon oxide film by arranging a first-layer wiring on a BPSG film covering an upper electrode of an information-storing capacitative element only in a peripheral circuit but not arranging it in the memory array. Thus, a DRAM having a stacked capacitor structure is obtained such that the level difference between the memory array and peripheral circuit is decreased, and the formation of wiring and connection holes are easy.
摘要:
The present invention discloses a stacked heat exchanger in which separate flow paths 54 and 55 which are formed by corrugated inner fins 52 and 53 are disposed in chambers 48 and 49 of a flat tube 41, and also separate U-shaped flow paths 56 are formed at the U-turn portion 50 to make the flow of refrigerant smooth, increase the area of flow paths, and eliminate the stagnation of refrigerant at the U-turn portion 50. The separation of refrigerant into two phases of gas and liquid due to centrifugal forces at the U-turn portion 50 is limited to the inside of each divided U-shaped flow path 56, thereby the distribution of the gas and liquid phases can be decreased. Also disclosed is a method of manufacturing a stacked heat exchanger, in which the reliability of flat tube 41 is improved, and the leakage of refrigerant is prevented.
摘要:
The stacked heat exchanger in accordance with the present invention comprises flat tubes and corrugated fins which are alternately put together, the flat tube having a tank portion and a core portion, the tank portion on one side at the outermost portion having an inlet header, the tank portion on the other side at the outermost portion having an outlet header, and the core portion having a side plate as an external plate at both ends, wherein the upper end of the side plate abuts against the lower end of the inlet header and the lower end of the outlet header. Therefore, when a pressure is applied, a force in the spreading direction applied to the inlet/outlet tank portion is received by the abutting of side plate against said inlet and outlet headers. Thus, the deformation of the whole stacked heat exchanger can be prevented.
摘要:
The stacked heat exchanger in accordance with the present invention comprises flat tubes and corrugated fins which are alternately put together, the flat tube having a tank portion and a core portion, the tank portion on one side at the outermost portion having an inlet header, the tank portion on the other side at the outermost portion having an outlet header, and the core portion having a side plate as an external plate at both ends, wherein the upper end of the side plate abuts against the lower end of the inlet header and the lower end of the outlet header. Therefore, when a pressure is applied, a force in the spreading direction applied to the inlet/outlet tank portion is received by the abutting of side plate against said inlet and outlet headers. Thus, the deformation of the whole stacked heat exchanger can be prevented.
摘要:
An optical head for use in an optical disk device holds individually an objective lens, an optical path converting prism and first and second relay lenses that are movably only in the direction of tracking. The objective lens and other members can be moved for the purpose of correcting any possible displacement of a track position of a light beam due to any eccentric arrangement involved and of a focusing position of the light beam due to a change in a relative distance between the lenses and due to surface deflection of a disk. The optical head thus allows easy assembly and adjustment thereof with simplified structure, higher resonance frequency, and high speed response.
摘要:
A method for fabricating DRAMs each having a COB structure, and the semiconductor device formed by this method, are provided. In one embodiment, the word line and/or bit line is covered with an insulating film having a comparatively small etching rate. Contact holes are formed while being defined by those insulating films in self-alignment.
摘要:
Method of making a semiconductor device, wherein an etchant gas is employed to etch a contact hole through an insulation layer overlying a conduction layer as disposed on a substrate of semiconductor material such that a surface portion of the conduction layer is selectively exposed by the formation of the contact hole through the overlying insulation layer. Normally, the etchant gas as so employed will have a tendency to react with the underlying conduction layer so as to form reaction products on the selectively exposed surface portion of the conduction layer increasing the contact resistance thereof. The method involves flooding the etched contact hole immediately following its formation with a gaseous medium covering the area of the selectively exposed surface portion of the conduction layer, wherein the gaseous medium is capable of inhibiting the formation of reaction products on the selectively exposed surface portion of the conduction layer from the original etchant gas. The formation of resistance-increasing reaction products on the selectively exposed surface portion of the conduction layer is thereby suppressed such that an undesirable increase in contact resistance is avoided. In a specific aspect, the etchant gas is a fluorine-based gaseous plasma, and the reaction product-inhibiting gaseous medium is a nitrogen-containing plasma.
摘要:
In an optical head apparatus for recording or reproducing information onto or from an optical disc, a carriage is movable along a guide shaft extending in a direction parallel with the radial direction of the optical disc, and an armature is mounted on the carriage so that it can rotate about a pivotal axis perpendicular to the surface of the optical disc. An objective lens is fixed to the armature and positioned to traverse the tracks on the optical disc when the armature rotates. Guide yokes extend in parallel with the guide shaft. Tracking and carriage-servo coils are fixed to the armature and have a hollow through which the guide yokes loosely extend. A magnetic field means creates magnetic lines of force perpendicular to the longitudinal direction of the guide yokes and parallel with the surface of the optical disc. A drive circuit supplies currents to the tracking and carriage-servo coils in such directions as to produce electromagnetic forces in parallel with each other thereby driving the armature along the guide yokes or in such directions as to produce electromagnetic forces in antiparallel with each other to rotate the armature about the pivotal axis.