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1.发明授权Al alloy member, electronic device manufacturing apparatus, and method of manufacturing an anodic oxide film coated al alloy member 有权铝合金构件，电子器件制造装置以及阳极氧化膜被覆铝合金构件的制造方法公开(公告)号：US08679640B2
公开(公告)日：2014-03-25
申请号：US13055582
申请日：2009-07-28
申请人： Tadahiro Ohmi , Masafumi Kitano , Minoru Tahara , Hisakazu Ito , Kota Shirai , Masayuki Saeki
发明人： Tadahiro Ohmi , Masafumi Kitano , Minoru Tahara , Hisakazu Ito , Kota Shirai , Masayuki Saeki
CPC分类号： C25D11/04 , C22C21/00 , H05K1/053 , H05K2203/0315 , Y10T428/12
摘要： Provided is an Al alloy member with an excellent mechanical strength that is sufficient for use in large-scale manufacturing apparatuses. The Al alloy member is characterized in that, in mass %, Mg concentration is 5.0% or less, Ce concentration is 15% or less, Zr concentration is 0.15% or less, the balance comprises Al and unavoidable impurities, the elements of the unavoidable impurities are respectively 0.01% or less, and the Vickers hardness of the Al alloy member is greater than 30.
摘要翻译： 提供具有优异的机械强度的Al合金构件，其足以用于大规模制造装置。 Al合金构件的特征在于，以质量％计，Mg浓度为5.0％以下，Ce浓度为15％以下，Zr浓度为0.15％以下，余量由Al和不可避免的杂质构成，不可避免的元素 杂质分别为0.01％以下，Al合金构件的维氏硬度大于30。
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2.发明授权Structural member to be used in apparatus for manufacturing semiconductor or flat display, and method for producing the same 有权用于制造半导体或平板显示器的装置中的结构件及其制造方法公开(公告)号：US08642187B2
公开(公告)日：2014-02-04
申请号：US12521387
申请日：2007-12-21
申请人： Tadahiro Ohmi , Minoru Tahara , Yasuhiro Kawase
发明人： Tadahiro Ohmi , Minoru Tahara , Yasuhiro Kawase
CPC分类号： C23C8/02 , C23C14/165 , C23C14/5853 , C23C16/20 , C23C16/56 , C23C28/322 , C23C28/345 , C25D11/04 , C25D11/06 , C25D11/18 , H05K1/053 , H05K2203/0315
摘要： A structural member for a manufacturing apparatus has a metal base member mainly composed of aluminum, a high-purity aluminum film formed on the surface of the metal base member, and a nonporous amorphous aluminum oxide passivation film which is formed by anodizing the high-purity aluminum film. A method for producing a structural member for a manufacturing apparatus, includes forming a high-purity aluminum film on the surface of a metal base member mainly composed of aluminum, and anodizing the high-purity aluminum film in a chemical conversion liquid having a pH of 4-10 and containing a nonaqueous solvent, which has a dielectric constant lower than that of water and dissolves water, thereby converting at least a surface portion of the high-purity aluminum film into a nonporous amorphous aluminum oxide passivation film.
摘要翻译： 用于制造装置的结构件具有主要由铝构成的金属基底构件，在金属基底构件的表面上形成的高纯度铝膜和通过阳极氧化高纯度形成的无孔非晶态氧化铝钝化膜 铝膜。 一种制造装置用结构构件的制造方法，其特征在于，在主要由铝构成的金属基材的表面上形成高纯度的铝膜，并将该高纯度的铝膜阳极氧化为pH为 并且含有介电常数低于水的非水溶剂，并溶解水，从而将高纯度铝膜的至少一部分表面部分转变为无孔非晶态氧化铝钝化膜。
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3.发明申请STRUCTURAL MEMBER TO BE USED IN APPARATUS FOR MANUFACTURING SEMICONDUCTOR OR FLAT DISPLAY, AND METHOD FOR PRODUCING THE SAME 有权用于制造半导体或平面显示器的装置中使用的结构构件及其制造方法公开(公告)号：US20100330390A1
公开(公告)日：2010-12-30
申请号：US12521387
申请日：2007-12-21
申请人： Tadahiro Ohmi , Minoru Tahara , Yasuhiro Kawase
发明人： Tadahiro Ohmi , Minoru Tahara , Yasuhiro Kawase
CPC分类号： C23C8/02 , C23C14/165 , C23C14/5853 , C23C16/20 , C23C16/56 , C23C28/322 , C23C28/345 , C25D11/04 , C25D11/06 , C25D11/18 , H05K1/053 , H05K2203/0315
摘要： A structural member for a manufacturing apparatus has a metal base member mainly composed of aluminum, a high-purity aluminum film formed on the surface of the metal base member, and a nonporous amorphous aluminum oxide passivation film which is formed by anodizing the high-purity aluminum film. A method for producing a structural member for a manufacturing apparatus, includes forming a high-purity aluminum film on the surface of a metal base member mainly composed of aluminum, and anodizing the high-purity aluminum film in a chemical conversion liquid having a pH of 4-10 and containing a nonaqueous solvent, which has a dielectric constant lower than that of water and dissolves water, thereby converting at least a surface portion of the high-purity aluminum film into a nonporous amorphous aluminum oxide passivation film.
摘要翻译： 用于制造装置的结构件具有主要由铝构成的金属基底构件，在金属基底构件的表面上形成的高纯度铝膜和通过阳极氧化高纯度形成的无孔非晶态氧化铝钝化膜 铝膜。 一种制造装置用结构构件的制造方法，其特征在于，在主要由铝构成的金属基材的表面上形成高纯度的铝膜，并将该高纯度的铝膜阳极氧化为pH为 并且含有介电常数低于水的非水溶剂，并溶解水，从而将高纯度铝膜的至少一部分表面部分转变为无孔非晶态氧化铝钝化膜。
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4.发明申请公开(公告)号：US20080164151A1
公开(公告)日：2008-07-10
申请号：US11966417
申请日：2007-12-28
申请人： Tadahiro Ohmi , Minoru Tahara , Yasuhiro Kawase
发明人： Tadahiro Ohmi , Minoru Tahara , Yasuhiro Kawase
IPC分类号： C25D11/04
摘要： In a method of manufacturing a metal member, a metal material containing aluminum as a main component is anodized in an anodization solution having a pH of 4 to 10 and containing a nonaqueous solvent having a dielectric constant smaller than that of water and capable of dissolving water, thereby forming a nonporous amorphous aluminum oxide passivation film on a surface of the metal member. The method includes a step of controlling the viscosity of the anodization solution. In the step of controlling the viscosity, the viscosity of the anodization solution is lowered by elevating the temperature of the anodization solution above the room temperature or by adding to the anodization solution a substance having a dielectric constant smaller than that of water and a viscosity lower than that of the nonaqueous solvent.
摘要翻译： 在制造金属构件的方法中，以pH为4〜10的阳极氧化液阳极氧化含有铝作为主要成分的金属材料，并且含有比水的介电常数小的能够溶解水的非水溶剂 从而在金属构件的表面上形成无孔非晶态氧化铝钝化膜。 该方法包括控制阳极氧化溶液的粘度的步骤。 在控制粘度的步骤中，通过将阳极氧化溶液的温度升高到室温以上，阳极氧化溶液的粘度降低，或者通过向阳极氧化溶液中添加介电常数小于水的介电常数物质和较低的粘度的物质 比非水溶剂高。
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5.发明授权公开(公告)号：US08282807B2
公开(公告)日：2012-10-09
申请号：US11966417
申请日：2007-12-28
申请人： Tadahiro Ohmi , Minoru Tahara , Yasuhiro Kawase
发明人： Tadahiro Ohmi , Minoru Tahara , Yasuhiro Kawase
摘要： In a method of manufacturing a metal member, a metal material containing aluminum as a main component is anodized in an anodization solution having a pH of 4 to 10 and containing a nonaqueous solvent having a dielectric constant smaller than that of water and capable of dissolving water, thereby forming a nonporous amorphous aluminum oxide passivation film on a surface of the metal member. The method includes a step of controlling the viscosity of the anodization solution. In the step of controlling the viscosity, the viscosity of the anodization solution is lowered by elevating the temperature of the anodization solution above the room temperature or by adding to the anodization solution a substance having a dielectric constant smaller than that of water and a viscosity lower than that of the nonaqueous solvent.
摘要翻译： 在制造金属构件的方法中，以pH为4〜10的阳极氧化液阳极氧化含有铝作为主要成分的金属材料，并且含有比水的介电常数小的能够溶解水的非水溶剂 从而在金属构件的表面上形成无孔非晶态氧化铝钝化膜。 该方法包括控制阳极氧化溶液的粘度的步骤。 在控制粘度的步骤中，通过将阳极氧化溶液的温度升高到室温以上，阳极氧化溶液的粘度降低，或者通过向阳极氧化溶液中添加介电常数小于水的介电常数物质和较低的粘度的物质 比非水溶剂高。
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6.发明申请AL ALLOY MEMBER, ELECTRONIC DEVICE MANUFACTURING APPARATUS, AND METHOD OF MANUFACTURING AN ANODIC OXIDE FILM COATED AL ALLOY MEMBER 有权AL合金会员，电子设备制造设备及制造阳极氧化膜涂层合金成员的方法公开(公告)号：US20110177355A1
公开(公告)日：2011-07-21
申请号：US13055582
申请日：2009-07-28
申请人： Tadahiro Ohmi , Masafumi Kitano , Minoru Tahara , Hisakazu Ito , Kota Shirai , Masayuki Saeki
发明人： Tadahiro Ohmi , Masafumi Kitano , Minoru Tahara , Hisakazu Ito , Kota Shirai , Masayuki Saeki
CPC分类号： C25D11/04 , C22C21/00 , H05K1/053 , H05K2203/0315 , Y10T428/12
摘要： Provided is an Al alloy member with an excellent mechanical strength that is sufficient for use in large-scale manufacturing apparatuses. The Al alloy member is characterized in that, in mass %, Mg concentration is 5.0% or less, Ce concentration is 15% or less, Zr concentration is 0.15% or less, the balance comprises Al and unavoidable impurities, the elements of the unavoidable impurities are respectively 0.01% or less, and the Vickers hardness of the Al alloy member is greater than 30.
摘要翻译： 提供具有优异的机械强度的Al合金构件，其足以用于大规模制造装置。 Al合金构件的特征在于，以质量％计，Mg浓度为5.0％以下，Ce浓度为15％以下，Zr浓度为0.15％以下，余量由Al和不可避免的杂质构成，不可避免的元素 杂质分别为0.01％以下，Al合金构件的维氏硬度大于30。
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公开(公告)号：US09273772B2
公开(公告)日：2016-03-01
申请号：US13696078
申请日：2012-06-27
申请人： Tomoya Ichikawa , Minoru Tahara
发明人： Tomoya Ichikawa , Minoru Tahara
CPC分类号： F16H55/38 , F16C19/06 , F16C33/581 , F16C33/583 , F16C33/586 , F16C35/067 , F16C2240/42 , F16C2361/63 , F16H55/36 , F16H55/48 , F16H2200/0078
摘要： Construction is achieved by which it is possible definitely prevent the occurrence of creep between a pulley 2b and an outer ring 7f. Trapezoidal shaped concave sections are formed such that the angle of intersection θ between the inside surfaces 23 on both sides of each concave section 17a of knurling 19a of the outer ring 7f is within the range 45°≦θ≦120°. Moreover, the depth h in the radial direction of the concave sections 17a and the diameter D of the circumscribed circle of the tip end surfaces 22 of the convex sections 18a are regulated so as to satisfy the relationship 0.004 D≦h≦0.015 D, and the length L in the circumferential direction of the bottom surface 21 of the concave sections 17a is regulated within the range 0.01 D≦L≦0.03 D.
摘要翻译： 通过该结构可以确实地防止滑轮2b和外圈7f之间的蠕变发生。 形成梯形凹部，使得交叉角度和角度; 在外环7f的滚花19a的各凹部17a的两侧的内侧面23之间的距离为45°＆lt; l1;＆ls;＆nl; 120°。 此外，凹部17a的径向的深度h和凸部18a的前端面22的外接圆的直径D被调整为满足关系0.004 D＆nlE; h＆nlE; 0.015D，以及 凹部17a的底面21的圆周方向的长度L被调节在0.01D＆lt; NlE; L＆nlE; 0.03D的范围内。
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公开(公告)号：US20140155210A1
公开(公告)日：2014-06-05
申请号：US13696078
申请日：2012-06-27
申请人： Tomoya Ichikawa , Minoru Tahara
发明人： Tomoya Ichikawa , Minoru Tahara
IPC分类号： F16H55/36
CPC分类号： F16H55/38 , F16C19/06 , F16C33/581 , F16C33/583 , F16C33/586 , F16C35/067 , F16C2240/42 , F16C2361/63 , F16H55/36 , F16H55/48 , F16H2200/0078
摘要： Construction is achieved by which it is possible definitely prevent the occurrence of creep between a pulley 2b and an outer ring 7f. Trapezoidal shaped concave sections are formed such that the angle of intersection θ between the inside surfaces 23 on both sides of each concave section 17a of knurling 19a of the outer ring 7f is within the range 45°≦θ≦120°. Moreover, the depth h in the radial direction of the concave sections 17a and the diameter D of the circumscribed circle of the tip end surfaces 22 of the convex sections 18a are regulated so as to satisfy the relationship 0.004 D≦h≦0.015 D, and the length L in the circumferential direction of the bottom surface 21 of the concave sections 17a is regulated within the range 0.01 D≦L≦0.03 D.
摘要翻译： 通过该结构可以确实地防止滑轮2b和外圈7f之间的蠕变发生。 形成梯形凹部，使得交叉角度和角度; 在外环7f的滚花19a的各凹部17a的两侧的内侧面23之间的距离为45°＆lt; l1;＆ls;＆nl; 120°。 此外，凹部17a的径向的深度h和凸部18a的前端面22的外接圆的直径D被调整为满足关系0.004 D＆nlE; h＆nlE; 0.015D，以及 凹部17a的底面21的圆周方向的长度L被调节在0.01D＆lt; NlE; L＆nlE; 0.03D的范围内。
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