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公开(公告)号：US08525410B2
公开(公告)日：2013-09-03
申请号：US13173074
申请日：2011-06-30
IPC分类号： H01J61/06
CPC分类号： H01J61/0732 , H01J61/0737 , H01J61/86
摘要： A short arc type discharge lamp wherein a cathode and an anode are arranged opposite to each other in an interior of a light emitting tube and said cathode comprises a main part made from tungsten and a tip end part made from thoriated tungsten, wherein thorium oxide particles having been peripherally coated with thorium are contained in the tip end part of said cathode.
摘要翻译： 一种短弧型放电灯，其中阴极和阳极在发光管的内部彼此相对布置，并且所述阴极包括由钨制成的主要部分和由钍钨制成的尖端部分，其中氧化钍粒子 被外周涂覆有钍的物质包含在所述阴极的末端部分中。
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公开(公告)号：US08497632B2
公开(公告)日：2013-07-30
申请号：US13348301
申请日：2012-01-11
IPC分类号： H01J61/04
CPC分类号： H01J61/0732 , H01J61/0735 , H01J61/86
摘要： A short arc type discharge lamp includes a cathode and an anode arranged inside an arc tube to face each other. The cathode comprises a main body portion made of tungsten and an emitter portion made of thoriated tungsten that is joined at the tip of the main body portion, where a metal oxide other than thorium (Th) is contained in the main body portion of the cathode, and a tungsten carbide layer is formed on the metal oxide.
摘要翻译： 短弧型放电灯包括阴极和布置在电弧管内的阳极以彼此面对。 阴极包括由钨制成的主体部分和由钍钨制成的发射极部分，其连接在主体部分的尖端处，其中除了钍（Th）之外的金属氧化物被包含在阴极的主体部分中 并且在金属氧化物上形成碳化钨层。
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3.发明授权Discharge lamp with an improved cathode of the type having a thoriated tungsten part 有权具有改进的具有钍钨部分的类型的阴极的放电灯公开(公告)号：US08390198B2
公开(公告)日：2013-03-05
申请号：US13015136
申请日：2011-01-27
CPC分类号： H01J61/0732 , H01J61/0735 , H01J61/86
摘要： A discharge lamp with excellent arc stability and excellent durability in which the use level of thoriated tungsten is restrained has an anode and a cathode in the interior of a discharge vessel, wherein said cathode is made up from a thoriated tungsten part with a tungsten filling ratio of at least 90 vol.-% and a main body part connected to said thoriated tungsten part and consisting of pure tungsten, wherein a ratio ST/S of a side surface area ST of said thoriated tungsten part and a side surface area S of said cathode is in a range of from 0.005 to 0.15, with the proviso that, in case the cathode has a length in the direction of the cathode axis which exceeds twice the maximum diameter of the cathode, a side surface area S is used for calculating the ratio ST/S which corresponds to the side surface area where the distance along the cathode axis from a tip end adjacent to the anode is twice the maximum diameter of the cathode.
摘要翻译： 具有优异的电弧稳定性和优异耐久性的放电灯，其中钍钨的使用水平被限制在放电容器的内部具有阳极和阴极，其中所述阴极由具有钨填充比的钍钨部分 至少90体积％，以及连接到所述钍钨部分并由纯钨组成的主体部分，其中所述钍钨部分的侧表面积ST和所述钍钨部分的侧表面积S的比率ST / S 阴极在0.005至0.15的范围内，条件是在阴极的长度方向上阴极轴线的长度超过阴极最大直径的两倍的情况下，侧面积S用于计算 与沿着阴极轴线距离与阳极相邻的尖端的距离为两倍于阴极最大直径的侧表面积的比率ST / S。
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公开(公告)号：US20120081002A1
公开(公告)日：2012-04-05
申请号：US13245028
申请日：2011-09-26
IPC分类号： H01J17/04
CPC分类号： H01J61/0735 , H01J61/0732 , H01J61/86
摘要： A short arc type discharge lamp wherein a cathode and an anode are arranged opposite to each other in an interior of a light emitting tube and said cathode consists of a main body part with tungsten as the main constituent and an emitter part comprised of thoriated tungsten, wherein an oxygen content of the main body part of said cathode is lower than that of the emitter part, and band-shaped tungsten carbide is formed at the tip end face of the emitter part of said cathode.
摘要翻译： 一种短弧型放电灯，其中阴极和阳极在发光管的内部彼此相对布置，并且所述阴极由以钨为主要成分的主体部分和由钍钨组成的发射极部分组成， 其中所述阴极的主体部分的氧含量低于发射极部分的氧含量，并且在所述阴极的发射极部分的末端面上形成带状碳化钨。
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公开(公告)号：US20120001542A1
公开(公告)日：2012-01-05
申请号：US13173098
申请日：2011-06-30
IPC分类号： H01J61/04
CPC分类号： H01J61/073 , H01J61/86
摘要： A short arc type discharge lamp wherein a cathode and an anode are arranged opposite to each other in an interior of a light emitting tube and said cathode comprises a main part made from tungsten and an emitter part made from thoriated tungsten, and said emitter part having been diffusion bonded to the main part via a joint face, wherein gaps are formed locally at said joint face of said main part and the emitter part.
摘要翻译： 一种短弧型放电灯，其中阴极和阳极在发光管的内部彼此相对布置，并且所述阴极包括由钨制成的主要部分和由钍钨制成的发射极部分，并且所述发射极部分具有 通过接合面扩散粘合到主要部分，其中间隙在所述主要部分和发射体部分的所述接合面局部形成。
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公开(公告)号：US20110181181A1
公开(公告)日：2011-07-28
申请号：US13015136
申请日：2011-01-27
IPC分类号： H01J61/18
CPC分类号： H01J61/0732 , H01J61/0735 , H01J61/86
摘要： A discharge lamp with excellent arc stability and excellent durability in which the use level of thoriated tungsten is restrained has an anode and a cathode in the interior of a discharge vessel, wherein said cathode is made up from a thoriated tungsten part with a tungsten filling ratio of at least 90 vol.-% and a main body part connected to said thoriated tungsten part and consisting of pure tungsten, wherein a ratio ST/S of a side surface area ST of said thoriated tungsten part and a side surface area S of said cathode is in a range of from 0.005 to 0.15, with the proviso that, in case the cathode has a length in the direction of the cathode axis which exceeds twice the maximum diameter of the cathode, a side surface area S is used for calculating the ratio ST/S which corresponds to the side surface area where the distance along the cathode axis from a tip end adjacent to the anode is twice the maximum diameter of the cathode.
摘要翻译： 具有优异的电弧稳定性和优异耐久性的放电灯，其中钍钨的使用水平被限制在放电容器的内部具有阳极和阴极，其中所述阴极由具有钨填充比的钍钨部分 至少90体积％，以及连接到所述钍钨部分并由纯钨组成的主体部分，其中所述钍钨部分的侧表面积ST和所述钍钨部分的侧表面积S的比率ST / S 阴极在0.005至0.15的范围内，条件是在阴极的长度方向上阴极轴线的长度超过阴极最大直径的两倍的情况下，侧面积S用于计算 与沿着阴极轴线距离与阳极相邻的尖端的距离为两倍于阴极最大直径的侧表面积的比率ST / S。
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公开(公告)号：US06677600B2
公开(公告)日：2004-01-13
申请号：US10397526
申请日：2003-03-27
申请人： Mitsuru Ikeuchi
发明人： Mitsuru Ikeuchi
IPC分类号： G21G400
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033
摘要： An EUV radiation source comprises a first electrode having a first through hole, a second electrode having a second through hole, a movable insulator, having a plurality of third through holes, provided between the first and second electrodes, wherein actuating gas is introduced in the first, second through holes and one of the plurality of third through holes, and voltage is impressed between the first and second electrodes when the first, second and plural through holes are located on a common axis.
摘要翻译： EUV辐射源包括设置在第一和第二电极之间的具有第一通孔的第一电极，具有第二通孔的第二电极，具有多个第三通孔的可移动绝缘体，其中致动气体被导入 第一，第二通孔和多个第三通孔中的一个，并且当第一，第二和多个通孔位于公共轴上时，在第一和第二电极之间施加电压。
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公开(公告)号：US08400060B2
公开(公告)日：2013-03-19
申请号：US13245028
申请日：2011-09-26
IPC分类号： H01J17/04
CPC分类号： H01J61/0735 , H01J61/0732 , H01J61/86
摘要： A short arc type discharge lamp wherein a cathode and an anode are arranged opposite to each other in an interior of a light emitting tube and said cathode consists of a main body part with tungsten as the main constituent and an emitter part comprised of thoriated tungsten, wherein an oxygen content of the main body part of said cathode is lower than that of the emitter part, and band-shaped tungsten carbide is formed at the tip end face of the emitter part of said cathode.
摘要翻译： 一种短弧型放电灯，其中阴极和阳极在发光管的内部彼此相对布置，并且所述阴极由以钨为主要成分的主体部分和由钍钨组成的发射极部分组成， 其中所述阴极的主体部分的氧含量低于发射极部分的氧含量，并且在所述阴极的发射极部分的末端面上形成带状碳化钨。
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公开(公告)号：US20120181925A1
公开(公告)日：2012-07-19
申请号：US13348301
申请日：2012-01-11
IPC分类号： H01J61/04
CPC分类号： H01J61/0732 , H01J61/0735 , H01J61/86
摘要： A short arc type discharge lamp includes a cathode and an anode arranged inside an arc tube to face each other. The cathode comprises a main body portion made of tungsten and an emitter portion made of thoriated tungsten that is joined at the tip of the main body portion, where a metal oxide other than thorium (Th) is contained in the main body portion of the cathode, and a tungsten carbide layer is formed on the metal oxide.
摘要翻译： 短弧型放电灯包括阴极和布置在电弧管内的阳极以彼此面对。 阴极包括由钨制成的主体部分和由钍钨制成的发射极部分，其连接在主体部分的尖端处，其中除了钍（Th）之外的金属氧化物被包含在阴极的主体部分中 并且在金属氧化物上形成碳化钨层。
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公开(公告)号：US20060220559A1
公开(公告)日：2006-10-05
申请号：US11392812
申请日：2006-03-30
申请人： Mitsuru Ikeuchi
发明人： Mitsuru Ikeuchi
IPC分类号： H01J61/073
CPC分类号： H01J61/0735
摘要： The present high-load and high-intensity discharge lamp includes a cathode made of a material which does not (substantially) include thorium but can be used as a cathode material of high heat load, so that a long lifetime and high stability corresponding to those of thoriated-tungsten can be realized. Specifically, the cathode is made of a metal base having a high melting point which mainly consists of tungsten and includes a coexisting substance in which an oxide of at least one kind of metal selected from lanthanum, cerium, yttrium, scandium, and gadolinium and an oxide of at least one kind of metal selected from titanium, zirconium, hafnium, niobium, and tantalum are coexistent. The conversion grain size of the coexisting substance is 15 μm or greater, and the plurality of coexisting substances are present in the metal base with a high melting point.
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