THERMOELECTRIC DEVICES
    3.
    发明申请
    THERMOELECTRIC DEVICES 有权
    热电装置

    公开(公告)号:US20130139864A1

    公开(公告)日:2013-06-06

    申请号:US13611189

    申请日:2012-09-12

    CPC分类号: H01L35/32 B82Y30/00

    摘要: Provided is a thermoelectric device including two legs having a rough side surface and a smooth side surface facing each other. Phonons may be scattered by the rough side surface, thereby decreasing thermal conductivity of the device. Flowing paths for electrons and phonons may become different form each other, because of a magnetic field induced by an electric current passing through the legs. The smooth side surface may be used for the flowing path of electrons. As a result, in the thermoelectric device, thermal conductivity can be reduced and electric conductivity can be maintained.

    摘要翻译: 提供一种热电装置,其包括具有粗糙侧表面和彼此面对的平滑侧表面的两个腿。 声子可能被粗糙的侧面散射,从而降低了装置的热导率。 电子和声子的流动路径可能由于由通过腿部的电流引起的磁场而彼此不同。 光滑的侧面可以用于电子的流动路径。 结果,在热电装置中,可以降低导热性并且可以保持导电性。

    Semiconductor nanowire sensor device and method for manufacturing the same
    5.
    发明授权
    Semiconductor nanowire sensor device and method for manufacturing the same 有权
    半导体纳米线传感器装置及其制造方法

    公开(公告)号:US08241939B2

    公开(公告)日:2012-08-14

    申请号:US12682571

    申请日:2008-07-24

    IPC分类号: H01L21/00 H01L29/06

    摘要: A method for manufacturing a biosensor includes forming a silicon nanowire channel, etching a first conductivity-type single crystalline silicon layer which is a top layer of a Silicon-On-Insulator (SOI) substrate to form a first conductivity-type single crystalline silicon line pattern, doping both sidewalls of the first conductivity-type single crystalline silicon line pattern with impurities of a second conductivity-type opposite to the first conductivity-type to form a second conductivity-type channel, forming second conductivity-type pads for forming electrodes at both ends of the first conductivity-type single crystalline silicon line pattern, forming, in an undoped region of the first conductivity-type single crystalline silicon line pattern, a first electrode for applying a reverse-bias voltage to insulate the first conductivity-type single crystalline silicon line pattern and the second conductivity-type channel from each other, and forming second electrodes for applying a bias voltage across the second conductivity-type channel on the second conductivity-type pad.

    摘要翻译: 制造生物传感器的方法包括形成硅纳米线通道,蚀刻作为绝缘体上硅(SOI)衬底的顶层的第一导电型单晶硅层,以形成第一导电型单晶硅线 以与第一导电类型相反的第二导电类型的杂质掺杂第一导电型单晶硅线图案的两个侧壁以形成第二导电型沟道,形成第二导电型垫,用于在 第一导电型单晶硅线图案的两端,在第一导电型单晶硅线图案的未掺杂区域中形成用于施加反向偏置电压以使第一导电型单晶硅线型图案绝缘的第一电极 晶体硅线图案和第二导电型沟道,并且形成用于施加双面的第二电极 在第二导电型垫上的第二导电类型沟道上的电压。

    SEMICONDUCTOR NANOWIRE SENSOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
    8.
    发明申请
    SEMICONDUCTOR NANOWIRE SENSOR DEVICE AND METHOD FOR MANUFACTURING THE SAME 有权
    半导体纳米传感器器件及其制造方法

    公开(公告)号:US20100270530A1

    公开(公告)日:2010-10-28

    申请号:US12682571

    申请日:2008-07-24

    IPC分类号: H01L29/775 H01L21/336

    摘要: A method for manufacturing a biosensor device is provided. The method involves forming a silicon nanowire channel with a line width of several nanometers to several tens of nanometers using a typical photolithography process, and using the channel to manufacture a semiconductor nanowire sensor device. The method includes etching a first conductivity-type single crystalline silicon layer which is a top layer of a Silicon-On-Insulator (SOI) substrate to form a first conductivity-type single crystalline silicon line pattern, doping both sidewalls of the first conductivity-type single crystalline silicon line pattern with impurities of a second conductivity-type opposite to the first conductivity-type to form a second conductivity-type channel, forming second conductivity-type pads for forming electrodes at both ends of the first conductivity-type single crystalline silicon line pattern, forming, in an undoped region of the first conductivity-type single crystalline silicon line pattern, a first electrode for applying a reverse-bias voltage to insulate the first conductivity-type single crystalline silicon line pattern and the second conductivity-type channel from each other, and forming second electrodes for applying a bias voltage across the second conductivity-type channel on the second conductivity-type pad.

    摘要翻译: 提供一种制造生物传感器装置的方法。 该方法包括使用典型的光刻工艺形成线宽为几纳米至几十纳米的硅纳米线通道,并使用该通道制造半导体纳米线传感器装置。 该方法包括蚀刻作为绝缘体上硅(SOI)衬底的顶层的第一导电型单晶硅层,以形成第一导电型单晶硅线图案,掺杂第一导电型单晶硅线阵列的两个侧壁, 形成具有与第一导电类型相反的第二导电类型的杂质的单晶硅线图案,以形成第二导电型沟道,形成用于在第一导电型单晶的两端形成电极的第二导电型焊盘 硅线图案,在第一导电型单晶硅线图案的未掺杂区域中形成第一电极,用于施加反向偏置电压以使第一导电型单晶硅线图案和第二导电型 并且形成用于在第二导通型通道上施加偏置电压的第二电极 导电型垫。