公开(公告)号：US08865252B2

公开(公告)日：2014-10-21

申请号：US13031756

申请日：2011-02-22

申请人： Yong Sup Choi ,  Myeng-Woo Nam ,  Jong-Won Hong ,  Seok-Rak Chang ,  Eun-Sun Choi

发明人： Yong Sup Choi ,  Myeng-Woo Nam ,  Jong-Won Hong ,  Seok-Rak Chang ,  Eun-Sun Choi

IPC分类号： C23C16/00 ,  B05D5/06 ,  H01L21/677 ,  H01L51/56 ,  H01L21/67 ,  H01L21/673 ,  H01L21/687

CPC分类号： H01L21/6776 ,  H01L21/67173 ,  H01L21/6732 ,  H01L21/68764 ,  H01L51/56

摘要： A thin film deposition apparatus that can be easily used to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus. The thin film deposition apparatus includes: a loading unit to place a substrate, which is a deposition target, on an electrostatic chuck; a deposition unit including a chamber, and a thin film deposition assembly that is disposed in the chamber and forms a thin film on the substrate placed on the electrostatic chuck; an unloading unit to separate the substrate on which deposition is completed from the electrostatic chuck; a first conveyor unit to sequentially move the electrostatic chuck having the substrate thereon to the loading unit, to the deposition unit, and finally, to the unloading unit, wherein the first conveyor unit includes: one pair of first guide rails and one pair of second guide rails disposed in parallel; at least one first guide block engaged with the first guide rails, respectively; and at least one second guide block engaged with the second guide rails, respectively.

摘要翻译： 可以容易地用于大规模制造大尺寸显示装置并提高制造成品率的薄膜沉积装置，以及通过使用薄膜沉积装置制造有机发光显示装置的方法。 薄膜沉积装置包括：装载单元，将作为沉积靶的基板放置在静电卡盘上; 包括室的沉积单元和设置在室中并在放置在静电卡盘上的基板上形成薄膜的薄膜沉积组件; 卸载单元，用于将其上完成了沉积的基板从静电卡盘分离; 第一传送单元，其顺序地将其上具有基板的静电卡盘移动到装载单元，到沉积单元，最后到达卸载单元，其中第一传送单元包括：一对第一导轨和一对第二传送单元 平行布置的导轨; 分别与所述第一导轨接合的至少一个第一引导块; 以及分别与第二导轨接合的至少一个第二引导块。

公开(公告)号：US20110244120A1

公开(公告)日：2011-10-06

申请号：US13031756

申请日：2011-02-22

申请人： Yong Sup CHOI ,  Myeng-Woo Nam ,  Jong-Won Hong ,  Seok-Rak Chang ,  Eun-Sun Choi

发明人： Yong Sup CHOI ,  Myeng-Woo Nam ,  Jong-Won Hong ,  Seok-Rak Chang ,  Eun-Sun Choi

IPC分类号： B05D5/06 ,  B05C13/00 ,  B05B1/00 ,  B05B15/04

CPC分类号： H01L21/6776 ,  H01L21/67173 ,  H01L21/6732 ,  H01L21/68764 ,  H01L51/56

摘要： A thin film deposition apparatus that can be easily used to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus. The thin film deposition apparatus includes: a loading unit to place a substrate, which is a deposition target, on an electrostatic chuck; a deposition unit including a chamber, and a thin film deposition assembly that is disposed in the chamber and forms a thin film on the substrate placed on the electrostatic chuck; an unloading unit to separate the substrate on which deposition is completed from the electrostatic chuck; a first conveyor unit to sequentially move the electrostatic chuck having the substrate thereon to the loading unit, to the deposition unit, and finally, to the unloading unit, wherein the first conveyor unit includes: one pair of first guide rails and one pair of second guide rails disposed in parallel; at least one first guide block engaged with the first guide rails, respectively; and at least one second guide block engaged with the second guide rails, respectively.

摘要翻译： 可以容易地用于大规模制造大尺寸显示装置并提高制造成品率的薄膜沉积装置，以及通过使用薄膜沉积装置制造有机发光显示装置的方法。 薄膜沉积装置包括：装载单元，将作为沉积靶的基板放置在静电卡盘上; 包括室的沉积单元和设置在室中并在放置在静电卡盘上的基板上形成薄膜的薄膜沉积组件; 卸载单元，用于将其上完成了沉积的基板从静电卡盘分离; 第一传送单元，其顺序地将其上具有基板的静电卡盘移动到装载单元，到沉积单元，最后到达卸载单元，其中第一传送单元包括：一对第一导轨和一对第二传送单元 平行布置的导轨; 分别与所述第一导轨接合的至少一个第一引导块; 以及分别与第二导轨接合的至少一个第二引导块。

公开(公告)号：US09279177B2

公开(公告)日：2016-03-08

申请号：US13157220

申请日：2011-06-09

申请人： Yong-Sup Choi ,  Myeng-Woo Nam

发明人： Yong-Sup Choi ,  Myeng-Woo Nam

IPC分类号： H01L33/00 ,  B05C11/10 ,  C23C14/04 ,  C23C14/24 ,  C23C14/50 ,  C23C14/54 ,  C23C14/56

CPC分类号： C23C14/044 ,  C23C14/24 ,  C23C14/50 ,  C23C14/544 ,  C23C14/56

摘要： A thin film deposition apparatus includes: a deposition source for discharging a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and having a plurality of patterning slits arranged in the first direction; a barrier plate assembly including a plurality of barrier plates that are disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, the plurality of barrier plates partitioning a deposition space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces; and a capacitive vacuum gauge disposed at a side of the deposition source and configured to measure a pressure inside the deposition source.

摘要翻译： 薄膜沉积设备包括：用于排出沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 与沉积源喷嘴单元相对设置并且具有沿着第一方向布置的多个图案化狭缝的图案化缝隙片; 隔离板组件，其包括沿着第一方向设置在所述沉积源喷嘴单元和所述图案化缝隙片之间的多个阻挡板，所述多个阻挡板将所述沉积源喷嘴单元和所述图案化缝隙片之间的沉积空间分隔成为 多个次沉积空间; 以及电容式真空计，其设置在所述沉积源的一侧并且被配置为测量所述沉积源内的压力。

公开(公告)号：US20090020226A1

公开(公告)日：2009-01-22

申请号：US12153609

申请日：2008-05-21

申请人： Myeng-Woo Nam ,  Chang-Soo Kim ,  Jung-Hyun Kwon

发明人： Myeng-Woo Nam ,  Chang-Soo Kim ,  Jung-Hyun Kwon

IPC分类号： C23F1/02

CPC分类号： H01L21/6708

摘要： An etching apparatus includes: an etching chamber; a piping unit disposed in an upper portion of the etching chamber and including a plurality of nozzles via which an etchant is sprayed; a substrate mask disposed below the piping unit; and a transfer unit disposed below the substrate mask and used to transfer a substrate. The substrate mask interposed between the piping unit including the nozzles and the substrate has a mesh structure or a plurality of holes or slits. Thus, the generation of microbubbles can be prevented during a wet etching process so that a thin layer formed on the substrate can be etched at a uniform etch rate. Also, a lift unit having a fixing unit may be disposed on a lateral surface of the substrate mask. The lift unit moves the substrate mask up and down so as to obtain a uniform etch rate.

摘要翻译： 蚀刻装置包括：蚀刻室; 管道单元，设置在蚀刻室的上部，并且包括多个喷嘴，通过该喷嘴蚀刻蚀刻剂; 设置在所述管道单元下方的基板掩模; 以及设置在所述基板掩模下方并用于传送基板的转印单元。 插入在包括喷嘴的管道单元和基板之间的基板掩模具有网状结构或多个孔或狭缝。 因此，在湿蚀刻工艺期间可以防止产生微泡，使得可以以均匀的蚀刻速率蚀刻形成在基板上的薄层。 此外，具有固定单元的提升单元可以设置在基板掩模的侧表面上。 提升单元上下移动基板掩模，以获得均匀的蚀刻速率。

公开(公告)号：US09512515B2

公开(公告)日：2016-12-06

申请号：US13492144

申请日：2012-06-08

申请人： Seok-Rak Chang ,  Myeng-Woo Nam ,  Hee-Cheol Kang ,  Jong-Heon Kim ,  Jong-Won Hong ,  Uno Chang

发明人： Seok-Rak Chang ,  Myeng-Woo Nam ,  Hee-Cheol Kang ,  Jong-Heon Kim ,  Jong-Won Hong ,  Uno Chang

IPC分类号： B65G35/00 ,  C23C14/12 ,  C23C14/50 ,  H01L21/67 ,  H01L21/677 ,  H01L21/683

CPC分类号： C23C14/12 ,  B05B12/20 ,  B05B12/22 ,  B05B13/0221 ,  B05D1/60 ,  C23C14/042 ,  C23C14/24 ,  C23C14/50 ,  H01L21/67173 ,  H01L21/67709 ,  H01L21/6776 ,  H01L21/67784 ,  H01L21/6831 ,  H01L27/3244 ,  H01L27/3246 ,  H01L51/56

摘要： An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyer unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyer unit passes through inside the chamber, and the first conveyer unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.

摘要翻译： 有机层沉积装置以及使用有机层沉积装置的有机发光显示装置的制造方法。 有机层沉积装置包括：静电卡盘，其固定地支撑作为沉积靶的基板; 包括保持真空的室的沉积单元和用于在由静电卡盘固定地支撑的基板上沉积有机层的有机层沉积组件; 以及第一输送单元，用于将固定地支撑所述基板的所述静电卡盘移动到所述沉积单元中，其中所述第一输送单元穿过所述室内部，并且所述第一输送单元包括导向单元，所述引导单元具有用于支撑所述静电卡盘的接收构件 可沿方向移动

公开(公告)号：US20130009177A1

公开(公告)日：2013-01-10

申请号：US13492144

申请日：2012-06-08

申请人： Seok-Rak Chang ,  Myeng-Woo Nam ,  Hee-Cheol Kang ,  Jong-Heon Kim ,  Jong-Won Hong ,  Uno Chang

发明人： Seok-Rak Chang ,  Myeng-Woo Nam ,  Hee-Cheol Kang ,  Jong-Heon Kim ,  Jong-Won Hong ,  Uno Chang

IPC分类号： H01L51/56 ,  B05C11/00 ,  B05C13/00 ,  H01L51/52 ,  B05C15/00

CPC分类号： C23C14/12 ,  B05B12/20 ,  B05B12/22 ,  B05B13/0221 ,  B05D1/60 ,  C23C14/042 ,  C23C14/24 ,  C23C14/50 ,  H01L21/67173 ,  H01L21/67709 ,  H01L21/6776 ,  H01L21/67784 ,  H01L21/6831 ,  H01L27/3244 ,  H01L27/3246 ,  H01L51/56

摘要： An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyer unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyer unit passes through inside the chamber, and the first conveyer unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.

摘要翻译： 有机层沉积装置以及使用有机层沉积装置的有机发光显示装置的制造方法。 有机层沉积装置包括：静电卡盘，其固定地支撑作为沉积靶的基板; 包括保持真空的室的沉积单元和用于在由静电卡盘固定地支撑的基板上沉积有机层的有机层沉积组件; 以及第一输送单元，用于将固定地支撑所述基板的所述静电卡盘移动到所述沉积单元中，其中所述第一输送单元穿过所述室内部，并且所述第一输送单元包括导向单元，所述引导单元具有用于支撑所述静电卡盘的接收构件 可沿方向移动

公开(公告)号：US20110128550A1

公开(公告)日：2011-06-02

申请号：US12926622

申请日：2010-11-30

申请人： Eui-Shin Shin ,  Myeng Woo Nam ,  Jin-Han Park ,  Jae-Seok Park

发明人： Eui-Shin Shin ,  Myeng Woo Nam ,  Jin-Han Park ,  Jae-Seok Park

IPC分类号： G01B9/02 ,  G01N21/00

CPC分类号： G01N21/94 ,  G01N21/8901 ,  G01N21/9501

摘要： Provided are a surface inspection apparatus and method capable of detecting foreign materials on the surface of a substrate, and a slit coater having the surface inspection apparatus. In the surface inspection apparatus, a slit lighting unit irradiates slit-shaped light. An optical system splits the slit-shaped light into two beams traveling along two different paths, is incident upon a subject, and extracts an interference image caused by combination of the two beams reflected from the subject. An imaging device captures the interference image to output an image signal. An analysis unit acquires a luminance value of the image signal, analyzes the luminance value in real time, and determines whether or not foreign materials are present.

摘要翻译： 提供了能够检测基板表面的异物的表面检查装置和方法，以及具有表面检查装置的狭缝涂布机。 在表面检查装置中，狭缝照明部照射狭缝状的光。 光学系统将狭缝状光分成沿着两个不同路径行进的两束光束，入射到被摄体上，并提取由对象反射的两束光的组合引起的干涉图像。 成像装置捕获干涉图像以输出图像信号。 分析单元获取图像信号的亮度值，实时分析亮度值，并确定是否存在异物。

公开(公告)号：US08389323B2

公开(公告)日：2013-03-05

申请号：US12954310

申请日：2010-11-24

申请人： Eun-Sun Choi ,  Won-Yong Kim ,  Myeng-Woo Nam ,  Jin-Han Park ,  Sung-Gon Kim ,  Joon-Hyung Kim

发明人： Eun-Sun Choi ,  Won-Yong Kim ,  Myeng-Woo Nam ,  Jin-Han Park ,  Sung-Gon Kim ,  Joon-Hyung Kim

IPC分类号： H01L21/00

CPC分类号： H01L51/0012 ,  H01L21/268 ,  H01L27/3283 ,  H01L51/0004

摘要： Provided are a method of manufacturing an organic light emitting display apparatus, a surface treatment device for an organic light emitting display apparatus, and an organic light emitting display apparatus. To easily form organic emissive layers, the method includes: forming a first electrode on a substrate; forming on the first electrode a pixel defining layer having openings that expose predetermined portions of the first electrode; forming a charge carrying layer on the pixel defining layer and the first electrode exposed through the openings; hydrophobically treating portions of a surface of the charge carrying layer selectively, wherein the portions do not correspond to the openings, using a laser; forming organic emissive layers on the charge carrying layer; and forming a second electrode on the organic emissive layers so as to be electrically connected with the organic emissive layers.

摘要翻译： 提供一种制造有机发光显示装置的方法，有机发光显示装置的表面处理装置和有机发光显示装置。 为了容易地形成有机发光层，该方法包括：在基板上形成第一电极; 在所述第一电极上形成具有露出所述第一电极的预定部分的开口的像素限定层; 在所述像素限定层和通过所述开口暴露的所述第一电极上形成电荷承载层; 选择性地处理电荷载体层的表面的部分，其中使用激光将部分不对应于开口; 在电荷载体层上形成有机发光层; 以及在所述有机发光层上形成第二电极以与所述有机发光层电连接。

公开(公告)号：US20120009706A1

公开(公告)日：2012-01-12

申请号：US13157220

申请日：2011-06-09

申请人： Yong-Sup Choi ,  Myeng-Woo Nam

发明人： Yong-Sup Choi ,  Myeng-Woo Nam

IPC分类号： H01L33/00 ,  B05C11/10

CPC分类号： C23C14/044 ,  C23C14/24 ,  C23C14/50 ,  C23C14/544 ,  C23C14/56

摘要： A thin film deposition apparatus includes: a deposition source for discharging a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and having a plurality of patterning slits arranged in the first direction; a barrier plate assembly including a plurality of barrier plates that are disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, the plurality of barrier plates partitioning a deposition space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces; and a capacitive vacuum gauge disposed at a side of the deposition source and configured to measure a pressure inside the deposition source.

摘要翻译： 薄膜沉积设备包括：用于排出沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 与沉积源喷嘴单元相对设置并且具有沿着第一方向布置的多个图案化狭缝的图案化缝隙片; 隔离板组件，其包括沿着第一方向设置在所述沉积源喷嘴单元和所述图案化缝隙片之间的多个阻挡板，所述多个阻挡板将所述沉积源喷嘴单元和所述图案化缝隙片之间的沉积空间分隔成为 多个次沉积空间; 以及电容式真空计，其设置在所述沉积源的一侧并且被配置为测量所述沉积源内的压力。

公开(公告)号：US20110097499A1

公开(公告)日：2011-04-28

申请号：US12659060

申请日：2010-02-24

申请人： Jin-Han Park ,  Myeng-Woo Nam ,  Eui-Shin Shin ,  Sung-Gon Kim

发明人： Jin-Han Park ,  Myeng-Woo Nam ,  Eui-Shin Shin ,  Sung-Gon Kim

IPC分类号： B05D3/02 ,  B05C9/14

CPC分类号： H01L51/0026 ,  H01L21/67115 ,  H01L21/6715 ,  H01L51/0008 ,  H01L51/56

摘要： A coating apparatus includes a stage supporting a coating target, a coating part on the stage, the coating part being configured to apply a coating material onto the coating target, and a heating source opposite to and spaced apart from the stage, the heating source being configured to supply heat to the coating target after application of the coating material onto the coating target.

摘要翻译： 一种涂布装置，包括：支撑涂布目标的载物台;载物台上的涂布部;涂布部，被配置为在涂布目标上涂布涂料;以及加热源，与所述载物台相对且间隔开，所述加热源为 被配置为在将涂覆材料施加到涂覆靶上之后向涂覆目标提供热量。