MEMORY STRUCTURE AND METHOD OF FORMING THEREOF

    公开(公告)号:US20240365530A1

    公开(公告)日:2024-10-31

    申请号:US18764368

    申请日:2024-07-05

    摘要: A memory structure includes a substrate, a first word line and a first word line. The substrate has a plurality of active areas and an isolation structure surrounding the active areas. The first word line trench is formed across a first active area of the active areas and the isolation structure. The first word line trench includes a first slot and a first groove. The first slot is recessed from a top surface of the substrate. The first groove expands from a bottom of the first slot. A first sidewall is connected between the bottom of the first slot and a top of the first groove. A first word line is formed in the first word line trench. The first word line comprises a gate dielectric conformally formed on the first groove and the first slot.

    METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE SAME

    公开(公告)号:US20240363494A1

    公开(公告)日:2024-10-31

    申请号:US18765069

    申请日:2024-07-05

    发明人: LIANG-PIN CHOU

    摘要: The present disclosure provides a semiconductor device. The semiconductor device includes a die stack, an intervening bonding layer, and a carrier structure. The intervening bonding layer is positioned on the die stack. The carrier structure is disposed on the intervening bonding layer opposite to the die stack. The carrier structure includes a heat dissipation unit configured to transfer heat generated from the die stack. The heat dissipation unit includes composite vias and conductive plates. Each of the composite vias includes a first through semiconductor via and a second through semiconductor via. The conductive plates are couple to the composite vias.

    Semiconductor device structure including overlay mark structure

    公开(公告)号:US12125800B2

    公开(公告)日:2024-10-22

    申请号:US17683474

    申请日:2022-03-01

    发明人: Chun-Yen Wei

    摘要: A semiconductor device structure is provided. The semiconductor device structure includes a substrate, a first conductive feature, a first light-emitting feature, a first pattern and a second pattern. The first light-emitting feature is disposed on the substrate. The first pattern is disposed on the first light-emitting feature. The second pattern is disposed on the first pattern. The first conductive feature is disposed on the substrate and at least laterally overlaps the first pattern. The first light-emitting feature is configured to emit a light of a first wavelength. The first pattern has a first transmittance to the light of the first wavelength. The second pattern has a second transmittance to the light of the first wavelength. The first transmittance is different from the second transmittance.

    Method of manufacturing capacitor structure

    公开(公告)号:US12125642B2

    公开(公告)日:2024-10-22

    申请号:US18193653

    申请日:2023-03-31

    摘要: A method of manufacturing a capacitor structure includes the following. A first, second, third, fourth, fifth, sixth and seventh portions of a contact layer arrange from periphery to center. A first-conductive layer contacting the first portion forms in an opening. A first-dielectric layer contacting the second portion forms on the first-conductive layer. A second-conductive layer forms on the first-dielectric layer. A second-dielectric layer contacting the third portion forms on the second-conductive layer. A third-conductive layer contacting the fourth portion forms on the second-dielectric layer. A third-dielectric layer contacting the fifth portion forms on the third-conductive layer. A fourth-conductive layer contacting the second-conductive layer forms on the third-dielectric layer. A fourth-dielectric layer contacting the sixth portion forms on the fourth-conductive layer. A fifth-conductive layer contacting the seventh portion forms on the fourth-dielectric layer. A fifth-dielectric layer forms on the fourth-dielectric layer and the fifth-conductive layer.

    INTERCONNECTION STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

    公开(公告)号:US20240347451A1

    公开(公告)日:2024-10-17

    申请号:US18134529

    申请日:2023-04-13

    发明人: ZIH-HONG YANG

    摘要: An interconnection structure and a method of manufacturing an interconnection structure are provided. The interconnection structure includes a first dielectric layer, a second dielectric layer disposed on the first dielectric layer, and a first conductive layer disposed in the first dielectric layer. The interconnection structure also includes a conductive via electrically connected with the first conductive layer and extending through the first dielectric layer and the second dielectric layer. The conductive via has a first lateral surface surrounded by the first dielectric layer and a second lateral surface surrounded by the second dielectric layer. The first lateral surface and the second lateral surface have different slopes.

    METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE INCLUDING A PLANARIZATION AND SEMICONDUCTOR STRUCTURE THEREOF

    公开(公告)号:US20240347378A1

    公开(公告)日:2024-10-17

    申请号:US18133058

    申请日:2023-04-11

    发明人: YING-CHENG CHUANG

    IPC分类号: H01L21/768 H01L23/528

    摘要: The present application provides a semiconductor structure and a manufacturing method of the semiconductor structure. A substrate is provided, wherein the substrate includes a plurality of pillars, and a top surface of each of the plurality of pillars is a substantially planar surface. A first oxide layer is formed over the substrate conformal to the pillars, wherein the formation of the first oxide layer includes oxidizing top corners of the pillars, thereby causing the top surface of each of the plurality of pillars to become a convex surface. A first dielectric layer is formed among the pillars, wherein the first oxide layer above the plurality of pillars is partially exposed through the first dielectric layer. A planarization is performed on the pillars to partially or entirely remove the convex surface.

    MEMORY DEVICE HAVING MEMORY CELL WITH REDUCED PROTRUSION

    公开(公告)号:US20240341084A1

    公开(公告)日:2024-10-10

    申请号:US18744946

    申请日:2024-06-17

    发明人: CHING-KAI CHUANG

    IPC分类号: H10B12/00

    CPC分类号: H10B12/37 H10B12/038

    摘要: The present application provides a memory device having a memory cell with reduced protrusion protruding from the memory cell. The memory device includes a semiconductor substrate having a fin portion protruding from a surface of the semiconductor substrate; a semiconductive layer disposed conformal to the fin portion; a conductive layer disposed over the semiconductive layer; an insulating layer disposed over the conductive layer; and a protrusion including a first protruding portion laterally protruding from the semiconductive layer and along the surface, a second protruding portion laterally protruding from the conductive layer and over the first protruding portion, and a third protruding portion laterally protruding from the insulating layer and over the second protruding portion, wherein the protrusion has an undercut profile.

    Method for preparing memory array with contact enhancement sidewall spacers

    公开(公告)号:US12114476B2

    公开(公告)日:2024-10-08

    申请号:US18221534

    申请日:2023-07-13

    发明人: Yuan-Yuan Lin

    IPC分类号: H10B12/00

    摘要: A method for preparing the memory are provided. The method includes forming a trench at a front side of a semiconductor substrate, wherein the trench defines laterally separate active areas formed of surface regions of the semiconductor substrate; filling an isolation structure in the trench, wherein the isolation structure is filled to a height lower than top surfaces of the active areas; recessing a first group of the active areas from top surfaces of the first group of the active areas, while having top surfaces of a second group of the active areas covered; and forming contact enhancement sidewall spacers to laterally surround top portions of the active areas, respectively.