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公开(公告)号:US20140355094A1
公开(公告)日:2014-12-04
申请号:US14247083
申请日:2014-04-07
申请人: Nicolas SCHORR , Friedjof HEUCK , Achim TRAUTMANN , Johannes BAADER , Franziska ROHLFING , Stefan PINTER , Rainer STRAUB
发明人: Nicolas SCHORR , Friedjof HEUCK , Achim TRAUTMANN , Johannes BAADER , Franziska ROHLFING , Stefan PINTER , Rainer STRAUB
IPC分类号: G02B26/08
CPC分类号: G02B26/0833 , B81B3/0083 , B81B2201/042 , B81B2203/0353 , G02B5/003
摘要: A micromechanical structure includes a substrate having an upper side and a lower side, the substrate having a first region and a second region adjacent thereto, the upper side being fashioned in the first region as a mirror region that reflects light. In the second region on the upper side of the substrate, a network-type structure and/or a web-type structure is fashioned, such that the second region is essentially non-light-reflective.
摘要翻译: 微机械结构包括具有上侧和下侧的基板,所述基板具有第一区域和与其相邻的第二区域,上侧在第一区域中形成为反射光的反射镜区域。 在基板的上侧的第二区域中,形成网状结构和/或网状结构,使得第二区域基本上是非光反射的。