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1.发明授权Electronic component provided with Cu—Al—Co-based alloy electrode or wiring 有权电子元件配有Cu-Al-Co基合金电极或布线公开(公告)号：US08790549B2
公开(公告)日：2014-07-29
申请号：US13263359
申请日：2010-04-08
申请人： Takahiko Kato , Takashi Naito , Hiroki Yamamoto , Takuya Aoyagi , Seiichi Watanabe , Seiji Miura , Norihito Sakaguchi , Kazuki Aoshima , Kenji Ohkubo
发明人： Takahiko Kato , Takashi Naito , Hiroki Yamamoto , Takuya Aoyagi , Seiichi Watanabe , Seiji Miura , Norihito Sakaguchi , Kazuki Aoshima , Kenji Ohkubo
CPC分类号： C22C9/01 , C22C9/06 , H01J1/02 , H01J2211/225 , H01L31/022425 , H05K1/092 , Y02E10/50
摘要： An object of the present invention is to provide an electronic component using a Cu-based conductive material that can suppress oxidization even in a heat treatment in an oxidizing atmosphere and that can suppress an increase in an electrical resistance. In an electronic component having an electrode or a wiring, a ternary alloy made from three elements consisting of Cu, Al, and Co is used as a Cu-based wiring material that can prevent oxidization of the electrode or the wiring. Specifically, part or the whole of the electrode or the wiring has a chemical composition in which an Al content is 10 at % to 25 at %, a Co content is 5 at % to 20 at %, and the balance is composed of Cu and unavoidable impurities, and the chemical composition represents a ternary alloy in which two phases of a Cu solid solution formed by Al and Co being dissolved into Cu and a CoAl intermetallic compound coexist together.
摘要翻译： 本发明的目的是提供一种使用Cu基导电材料的电子部件，即使在氧化气氛中的热处理中也能够抑制氧化，并且能够抑制电阻的增加。 在具有电极或布线的电子部件中，使用由Cu，Al和Co组成的三个元素制成的三元合金作为能够防止电极或布线的氧化的Cu系布线材料。 具体地说，电极或布线的一部分或全部具有Al含量为10原子％至25原子％的Co化学组成，Co含量为5原子％至20原子％，余量由Cu和 不可避免的杂质，化学组成表示三元合金，其中由Al和Co形成的Cu固溶体中的两相溶解于Cu和CoAl金属间化合物共存。
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2.发明申请公开(公告)号：US20120285733A1
公开(公告)日：2012-11-15
申请号：US13263359
申请日：2010-04-08
申请人： Takahiko Kato , Takashi Naito , Hiroki Yamamoto , Takuya Aoyagi , Seiichi Watanabe , Seiji Miura , Norihito Sakaguchi , Kazuki Aoshima , Kenji Ohkubo
发明人： Takahiko Kato , Takashi Naito , Hiroki Yamamoto , Takuya Aoyagi , Seiichi Watanabe , Seiji Miura , Norihito Sakaguchi , Kazuki Aoshima , Kenji Ohkubo
CPC分类号： C22C9/01 , C22C9/06 , H01J1/02 , H01J2211/225 , H01L31/022425 , H05K1/092 , Y02E10/50
摘要： An object of the present invention is to provide an electronic component using a Cu-based conductive material that can suppress oxidization even in a heat treatment in an oxidizing atmosphere and that can suppress an increase in an electrical resistance. In an electronic component having an electrode or a wiring, a ternary alloy made from three elements consisting of Cu, Al, and Co is used as a Cu-based wiring material that can prevent oxidization of the electrode or the wiring. Specifically, part or the whole of the electrode or the wiring has a chemical composition in which an Al content is 10 at % to 25 at %, a Co content is 5 at % to 20 at %, and the balance is composed of Cu and unavoidable impurities, and the chemical composition represents a ternary alloy in which two phases of a Cu solid solution formed by Al and Co being dissolved into Cu and a CoAl intermetallic compound coexist together.
摘要翻译： 本发明的目的是提供一种使用Cu基导电材料的电子部件，即使在氧化气氛中的热处理中也能够抑制氧化，并且能够抑制电阻的增加。 在具有电极或布线的电子部件中，使用由Cu，Al和Co组成的三个元素制成的三元合金作为能够防止电极或布线的氧化的Cu系布线材料。 具体地说，电极或布线的一部分或全部具有Al含量为10原子％至25原子％的Co化学组成，Co含量为5原子％至20原子％，余量由Cu和 不可避免的杂质，化学组成表示三元合金，其中由Al和Co形成的Cu固溶体中的两相溶解于Cu和CoAl金属间化合物共存。
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