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    METHOD OF MANUFACTURING A LIGHT EMITTING DEVICE AND THIN FILM FORMING APPARATUS
    4.
    发明申请
    METHOD OF MANUFACTURING A LIGHT EMITTING DEVICE AND THIN FILM FORMING APPARATUS 有权
    制造发光装置和薄膜成型装置的方法

    公开(公告)号：US20110136266A1

    公开(公告)日：2011-06-09

    申请号：US13020826

    申请日：2011-02-04

    申请人： Hirokazu YAMAGATA ,  Yoshimi ADACHI ,  Noriko SHIBATA

    发明人： Hirokazu YAMAGATA ,  Yoshimi ADACHI ,  Noriko SHIBATA

    IPC分类号： H01L21/66

    CPC分类号： H01L51/0031 ,  H01L51/0032 ,  H01L51/52 ,  H01L51/5253 ,  H01L51/56 ,  H01L2251/568 ,  Y10T428/31504

    摘要： A method of manufacturing a light emitting device is provided in which satisfactory image display can be performed by the investigation and repair of short circuits in defect portions of light emitting elements. A backward direction electric current flows in the defect portions if a reverse bias voltage is applied to the light emitting elements having the defect portions. Emission of light which occurred from the backward direction electric current flow is measured by using an emission microscope, specifying the position of the defect portions, and short circuit locations can be repaired by irradiating a laser to the defect portions, turning them into insulators.

    摘要翻译： 提供了一种制造发光器件的方法，其中可以通过调查和修复发光元件的缺陷部分中的短路来执行令人满意的图像显示。 如果对具有缺陷部分的发光元件施加反向偏置电压，则向缺陷部分流过反向电流。 通过使用规定缺陷部位的位置的发射型显微镜来测量从逆向电流流出的光的发射，并且可以通过向缺陷部照射激光，将其转换成绝缘体来修复短路位置。

    Film formation apparatus and film formation method
    7.
    发明授权
    Film formation apparatus and film formation method 有权
    成膜装置及成膜方法

    公开(公告)号：US07629025B2

    公开(公告)日：2009-12-08

    申请号：US10769907

    申请日：2004-02-03

    申请人： Shunpei Yamazaki ,  Satoshi Seo ,  Noriko Shibata

    发明人： Shunpei Yamazaki ,  Satoshi Seo ,  Noriko Shibata

    IPC分类号： C23C16/00

    CPC分类号： C23C14/042 ,  C23C14/12 ,  C23C14/564 ,  C23C14/568 ,  H01L51/001 ,  H01L51/5012 ,  H01L51/56

    摘要： There is provided a film formation apparatus for forming an organic compound film including a plurality of functional regions. A plurality of evaporation sources (203a to 203c) are included in a film formation chamber (210), functional regions made of respective organic compounds are successively formed, and a mixed region can be further formed in an interface between the functional regions. Also, when means for applying energy to an organic compound molecule to be formed into a film in a molecular activation region (213) is provided in such a film formation chamber, a dense film can be formed.

    摘要翻译： 提供一种用于形成包括多个功能区域的有机化合物膜的成膜装置。 多个蒸发源（203a〜203c）被包含在成膜室（210）中，连续地形成由各有机化合物构成的功能区域，并且可以在功能区域之间的界面中进一步形成混合区域。 此外，在这样的成膜室中设置用于在分子活化区域（213）中向形成膜的有机化合物分子施加能量的装置时，可以形成致密膜。

    Method and apparatus for film deposition
    8.
    发明授权
    Method and apparatus for film deposition 有权
    薄膜沉积的方法和装置

    公开(公告)号：US07432116B2

    公开(公告)日：2008-10-07

    申请号：US10081971

    申请日：2002-02-20

    申请人： Shunpei Yamazaki ,  Satoshi Seo ,  Noriko Shibata

    发明人： Shunpei Yamazaki ,  Satoshi Seo ,  Noriko Shibata

    IPC分类号： H01L21/20

    CPC分类号： H01L51/5012 ,  C23C14/021 ,  C23C14/12 ,  C23C14/24 ,  C23C14/568 ,  H01L51/001 ,  H01L51/0059 ,  H01L51/0078 ,  H01L51/0084 ,  H01L51/5008

    摘要： Provided is a method and apparatus for depositing an organic compound layer having a plurality of function regions. A plurality of evaporation sources are provided within a deposition chamber. Function regions of respective organic compounds can be continuously formed and a mixed region be formed in an interface between the function regions. Meanwhile, a light source is provided in a deposition chamber to perform deposition while irradiating light to an anode surface, thereby forming a compact organic compound layer.

    摘要翻译： 提供一种用于沉积具有多个功能区域的有机化合物层的方法和装置。 在沉积室内设置多个蒸发源。 可以连续形成各有机化合物的功能区域，并且在功能区域之间的界面形成混合区域。 同时，在沉积室中提供光源以在向阳极表面照射光的同时进行沉积，由此形成致密的有机化合物层。

    Light emitting device and method of manufacturing the same
    9.
    发明授权
    Light emitting device and method of manufacturing the same 有权
    发光元件及其制造方法

    公开(公告)号：US07208869B2

    公开(公告)日：2007-04-24

    申请号：US10940011

    申请日：2004-09-14

    申请人： Kiyofumi Ogino ,  Noriko Shibata

    发明人： Kiyofumi Ogino ,  Noriko Shibata

    IPC分类号： H05B33/00 ,  H05B33/14

    CPC分类号： H01L27/3211 ,  H01L51/0036 ,  H01L51/0037 ,  H01L51/0038 ,  H01L51/0039 ,  H01L51/0059 ,  H01L51/0077 ,  H01L51/0081 ,  H01L51/0084 ,  H01L51/5225 ,  H01L51/5228 ,  H01L51/56

    摘要： An easier method is provided to manufacture a light emitting device that can display a full-color image using a polymeric organic compound. In the present invention, some of polymeric organic compounds are dissolved in a protic solvent while the others are dissolved in an aprotic solvent and the obtained solutions are applied to form organic compound films having laminate structures. A conductive film to serve as an etching stopper is formed on the organic compound films, so that portions of the organic compound films that do not overlap the conductive film are etched away. By using wet etching and dry etching in combination, different organic compound films each composed of a plurality of polymeric organic compounds can be formed in different light emitting elements on the same substrate.

    摘要翻译： 提供了一种更容易的方法来制造可以使用聚合有机化合物显示全色图像的发光装置。 在本发明中，将一些聚合有机化合物溶解在质子溶剂中，而将其它溶解在非质子溶剂中，并将所得溶液施用以形成具有层压结构的有机化合物膜。 在有机化合物膜上形成用作蚀刻阻挡层的导电膜，使得不与导电膜重叠的部分有机化合物膜被蚀刻掉。 通过组合使用湿蚀刻和干蚀刻，可以在同一基板上的不同发光元件中形成各自由多种聚合物有机化合物构成的不同有机化合物膜。

    Conductive film as the connector for thin film display device
    10.
    发明授权
    Conductive film as the connector for thin film display device 有权
    导电膜作为薄膜显示装置的连接器

    公开(公告)号：US07115956B2

    公开(公告)日：2006-10-03

    申请号：US10430443

    申请日：2003-05-07

    申请人： Osamu Nakamura ,  Hideaki Kuwabara ,  Noriko Shibata

    发明人： Osamu Nakamura ,  Hideaki Kuwabara ,  Noriko Shibata

    IPC分类号： H01L29/76

    CPC分类号： G02F1/136286 ,  H01L21/76838 ,  H01L21/76895 ,  H01L27/124 ,  H01L29/78621

    摘要： In the manufacture of a semiconductor device, there are provided a method that enables reduction in the number of manufacturing steps thereof and a structure for realizing the method, to thereby realize improvement in yield and reduction in manufacturing cost. Wirings (source wiring, drain wiring, and the like), which are respectively formed in a row direction and a column direction on an element substrate, are formed of the same conductive film. In this case, one of the respective wirings in the row direction and the column direction is discontinuously formed at a portion where the wirings intersect with each other, and an insulating film is formed on the wirings. Thereafter, a connection wiring for connecting discontinuous wirings is formed of the same film as that for forming an electrode provided on the insulating film. As a result, a continuous wiring is formed.

    摘要翻译： 在半导体装置的制造中，提供了能够减少其制造步骤数量的方法和实现该方法的结构，从而实现产量的提高和制造成本的降低。 在元件基板上分别沿行方向和列方向形成的布线（源极配线，漏极配线等）由相同的导电膜形成。 在这种情况下，在布线方向和列方向上的各个布线中的一个在布线彼此交叉的部分处不连续地形成，并且在布线上形成绝缘膜。 此后，用于连接不连续布线的连接布线由与形成在绝缘膜上的电极形成相同的膜形成。 结果，形成连续布线。